Sides Of Angle Or Axes Being Aligned Transverse To Optical Axis (e.g., Drift Meter) Patents (Class 356/150)
  • Patent number: 10199251
    Abstract: A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.
    Type: Grant
    Filed: April 10, 2018
    Date of Patent: February 5, 2019
    Inventors: Kippei Sugita, Kenji Nagai, Hidetoshi Kimura
  • Patent number: 9753049
    Abstract: A light beam or other electromagnetic medium is emitted, guided, and received, all within a unitary system frame. The beam retains its characteristics regardless of position or motion of the frame in which it propagates. The beam retains its position in space relative to the detection of motion of the frame. Because the frame and the beam emitted within it are in the same frame of reference, characteristics of their motion are compared to determine parameters including system velocity and planetary velocity which is useful in navigation. Position, orientation, displacement, velocity of an object in motion, and changes in these parameters relative to previous values thereof, are derived from information provided within and directly by the motion of the unitary system itself.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: September 5, 2017
    Inventor: Val Parker
  • Patent number: 9714824
    Abstract: A lens shape measurement device, includes: a rotation unit that rotates a lens supported by a stage; a laser displacement meter; a first moving unit that moves the laser displacement meter in a X-direction; a second moving unit that moves the lens in a Y-direction; and a drive controller that controls a drive of the rotation unit, the first moving unit, and the second moving unit in a mirror reflection state in which an incidence angle of the laser beams incident on a measurement target from the laser displacement meter, and a reflection angle of the laser beams reflected by the measurement target are equal to each other with a normal line of the lens passing through the measurement target set as a reference, for each of a plurality of measurement targets set on an edge of the lens in a rotating direction of the lens.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: July 25, 2017
    Inventors: Masahiko Samukawa, Takashi Daimaru, Nobuhiko Takeda
  • Patent number: 9302785
    Abstract: Installation of an engine to a support structure includes temporarily attaching first and second alignment structures to the support structure and the engine. One of the alignment structures has a target pattern on its surface. The installation further includes using a machine vision system from the other of the mounting structures to indicate the relative position of the target pattern with respect to a reference. The relative position of the target pattern with respect to the reference provides information about relative position of an engine mounting element (e.g., bolt hole) with respect to a corresponding mounting element (e.g., bolt hole) in the support structure. The relative position of the target pattern with respect to the reference can be used to maneuver the engine in order to align the mounting elements.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: April 5, 2016
    Assignee: The Boeing Company
    Inventors: Gary M. Buckus, Michael John Tanzini
  • Patent number: 9297656
    Abstract: Embodiments of the invention include a sensor arrangement for inclination determination with respect to at least one axis. The sensor arrangement may include a code element having a code pattern and a line sensor, which is sensitive at least with respect to one wavelength range, having a reception direction orthogonal to its extension direction. In some embodiments the code element and the line sensor are arranged such that the extension direction of the line sensor and an extension direction of the code element are oriented in the same direction. The code element and the line sensor may be rigidly connected at a spacing of at least 1 mm and at most 10 mm such that a location, which is angle-dependent with respect to the reception direction, of a projection of the code pattern onto the line sensor can be determined by means of the line sensor.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: March 29, 2016
    Inventors: Thomas Jensen, Knut Siercks, Peter Kipfer
  • Patent number: 8842269
    Abstract: A beam deflection device including an aluminum disc containing a plurality of lasers, each laser projecting a laser beam substantially along one of the ‘X’, ‘Y’, and ‘Z’ axes of a structural beam to which the device is attached. Wiring is attached to each of the plurality of lasers to provide power and transmit data. Passageways are provided in the solid disc to route the wiring to the exterior. A suction cup on a surface of the device allows it to be attached to the beam by pressing the device against a flat surface area of the beam.
    Type: Grant
    Filed: January 3, 2011
    Date of Patent: September 23, 2014
    Inventor: Nicolai Taylor Blankers
  • Patent number: 8760641
    Abstract: A method for determining the alignment of a pair of vehicle wheels includes the steps of positioning a beam projecting device consecutively on each wheel, in the same angular relationship to the wheel, and projecting a beam to a receptor, which is located in a predetermined angular relationship the other wheel. The projecting device, the receptor or both is utilized to determine the angle between the beams and the angle is related to the alignment of the pair of wheels; the receptor being maintained in the same position for each beam projection.
    Type: Grant
    Filed: January 25, 2010
    Date of Patent: June 24, 2014
    Inventor: Terence Peter Grogan
  • Patent number: 8654349
    Abstract: A method and a device for determining a topography under load of the surface of a material, wherein a test piece (40) of the material intended to be determined is subjected to a compression with a determined load between a first and a second clamping surface (7, 27), after which, in a compressed state, at least one representation is made of surface portions of the material that are in contact with at least one of said clamping surfaces (7, 27), and that the representation is evaluated. The compression is controlled in respect of its speed for obtaining said predetermined load, and said at least one representation is made at a chosen point in time or chosen points in time during this process.
    Type: Grant
    Filed: May 21, 2008
    Date of Patent: February 18, 2014
    Assignee: Fibro System AB
    Inventor: Bernt Bostrom
  • Patent number: 8537347
    Abstract: A vehicle tire changing system is configured with sensors to acquire measurements associated with the relative spatial positions of tire service tools and a vehicle wheel assembly, and dimensions of the vehicle wheel assembly to automate and monitor the movement of an associated tire service tool and optionally, to store or convey the acquired dimensional information for use by other vehicle service systems.
    Type: Grant
    Filed: April 30, 2012
    Date of Patent: September 17, 2013
    Assignee: Hunter Engineering Company
    Inventors: Joel Clasquin, Michael D. Gerdes, Doug Hanneken, Nicholas J. Colarelli, III
  • Publication number: 20120305697
    Abstract: The present invention relates to a method for measuring the angular position of a contrasting edge of an object having a luminance transition zone which is substantially rectilinear in a given direction and separates two regions of different luminances. This method comprises the functional steps of: —carrying out, in a transverse direction different from the given direction, an amplitude modulation of the signals delivered by a first and a second optical sensor; and —calculating an output signal (Yout(t)) starting from the signals delivered by the first and the second optical sensors (D1, D2) as a function of the angular position of the luminance transition zone. Device and set of devices for measuring the angular position of a contrasting edge and steering aid system for fixation and tracking a target comprising at least one such contrasting edge.
    Type: Application
    Filed: December 9, 2010
    Publication date: December 6, 2012
    Applicants: Centre National De La recherch Scientifique (C.N.R.S.), Universite D'Aix-Marseille
    Inventors: Lubin Kerhuel, Nicolas Franceschini, Stephane Viollet
  • Patent number: 8125630
    Abstract: A tracking system includes an emitter array configured to emit radiation around a subject to be tracked in at least one dimension wherein each emitter or group of emitters is modulated to permit identification of a source of the radiation. A receiver is configured to receive the radiation from the emitter array, wherein one of the emitter array and the receiver are located on the subject to be tracked. A processor is configured to interpret changes in radiation and correlate the changes to a device position to output a device position control signal.
    Type: Grant
    Filed: December 5, 2005
    Date of Patent: February 28, 2012
    Assignee: GVBB Holdings S.A.R.L.
    Inventors: Stephen Robert Wood, Robert D. Umberhant
  • Patent number: 7333191
    Abstract: A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
    Type: Grant
    Filed: July 19, 2004
    Date of Patent: February 19, 2008
    Assignee: Hitachi Kenki Finetech Co., Ltd.
    Inventors: Ken Murayama, Yukio Kenbou, Yuuichi Kunitomo, Takenori Hiroki, Yoshiyuki Nagano, Takafumi Morimoto, Tooru Kurenuma, Hiroaki Yanagimoto, Hiroshi Kuroda, Shigeru Miwa
  • Patent number: 7315360
    Abstract: A method for creating a reference for a first position on a substrate edge. A first reference point is selected relative to a circumference of the substrate edge, and a second reference point is selected relative to a bevel of the substrate edge. A first distance along the circumference of the substrate edge between the first reference point and the first position is identified as a first coordinate, and a second distance along the bevel of the substrate edge between the second reference point and the first position is identified as a second coordinate. The first coordinate and the second coordinate are used as the reference for the first position.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: January 1, 2008
    Assignee: LSI Logic Corporation
    Inventors: Bruce J. Whitefield, Jason W. McNichols
  • Publication number: 20070236686
    Abstract: A rubbing angle measuring equipment of the invention includes an light source unit, a measuring optical system, an imaging means, and an image evaluation means in which the measuring optical system is adapted such that a light from the light source unit passes by way of an illumination optical system and a polarizer to a rubbed measuring object and further passes by way of an analyzer and a focusing optical system to the imaging means, and the surface of the measuring object is focused to the imaging means, and in which image signals obtained by the imaging means are transmitted to the image evaluation means where signals having an intense periodicity in the image are detected, to measure the rubbing angle of the measuring object in a nondestructive manner, within a short period and at a high accuracy of 0.1° or more.
    Type: Application
    Filed: March 30, 2007
    Publication date: October 11, 2007
  • Patent number: 7238935
    Abstract: A light detection device for detecting an optical path position of invisible light. The detection device includes a main body and a light guide. The light guide includes a distal end functioning as a light incident portion through which the detected light enters and a light radiation portion from which visible light is emitted. A drive mechanism reciprocates the light guide in an X-direction while vibrating the light guide in a perpendicular Y-direction. The distal end of the light guide rod moves within a light detection area in an XY plane. A visible light-emitting unit radiates visible light from the distal end when the detected light enters the distal end. The visible light-emitting unit includes a photo-detector for detecting the detected light and a light-emitting element for generating the visible light when the photo-detector detects the detected light.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: July 3, 2007
    Assignee: Nippon Sheet Glass Co., Ltd.
    Inventors: Kenichi Asada, Kenjiro Hamanaka, Masahiro Oikawa, Kenichi Nakama
  • Patent number: 7188348
    Abstract: An optical pickup unit (OPU) includes a moveable structure that is moved by a voice coil motor component in response to an input signal. The moveable structure includes a pattern that is moved corresponding to the input signal. An encoder reads the pattern to generate an output signal that corresponds to pattern movement as the input signal is applied over a period of time. A controller calculates a calibration factor relating the pattern movement to the input signal.
    Type: Grant
    Filed: April 14, 2004
    Date of Patent: March 6, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Andrew L. Van Brocklin, David Pettigrew
  • Patent number: 7001830
    Abstract: The present invention relates to inspection methods and systems utilized to provide a best means for inspection of a wafer. The methods and systems include wafer-to-reticle alignment, layer-to-layer alignment and wafer surface feature inspection. The wafer-to-reticle alignment is improved by the addition of diagonal lines to existing alignment marks to decrease the intersection size and corresponding area that a desired point can reside. Layer-to-layer alignment is improved in a similar manner by the addition of oblique and/or non-linear line segments to existing overlay targets. Also, providing for wafer surface inspection in a multitude of desired diagonal axes allows for more accurate feature measurement.
    Type: Grant
    Filed: September 2, 2003
    Date of Patent: February 21, 2006
    Assignee: Advanced Micro Devices, Inc
    Inventors: Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh
  • Patent number: 6922483
    Abstract: Methods for measuring the low spatial reflectivity uniformity of a DMD spatial light modulator. These methods are unique since they compensate for the non-uniformities introduced by the tilt angle of the DMD mirrors in addition to the normal system non-uniformities introduced by the illumination source and optics. These methods flatten the image and remove all but the low spatial non-uniformities from the DMD mirrors.
    Type: Grant
    Filed: December 21, 2000
    Date of Patent: July 26, 2005
    Assignee: Texas Instruments Incorporated
    Inventor: Dennis Lee Doane
  • Patent number: 6867854
    Abstract: A liquid to solid material surface contact angle measurement system operating by way of detecting a transition in the behavior of a liquid sample with the solid material in a changing angular confinement environment along with use of a mathematical algorithm to then determine contact angle. Measurement of the angle at which the tested liquid transitions between apparent wetting and apparent non-wetting behavior, regardless of whether the liquid and solid material are truly classified as wetting or non-wetting, provides a measurement from which disclosed mathematical algorithms can predict the surface wetting characteristics of the liquid on the solid material. Automated performance of the confinement environment measurement and examples are included.
    Type: Grant
    Filed: January 2, 2003
    Date of Patent: March 15, 2005
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: Phillip G. Wapner, Wesley P. Hoffman
  • Patent number: 6765662
    Abstract: A method and apparatus for estimating the adhesion properties of a surface of an article by holding the article so that the surface is facing downwards and placing a droplet of liquid against the surface. The volume of the droplet is incremented until the droplet reaches a critical weight at which some of the liquid drops for the action of the gravity force. The higher is the critical weight, the stronger the mutual adhesion forces between the liquid and the surface. If the characteristics of the liquid are kept constant, it is possible to obtain an immediate evaluation of the adhesiveness of a surface by comparing the measured critical weight with experimental results.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: July 20, 2004
    Assignee: International Business Machines Corporation
    Inventors: Donato Casati, Fabio Mauri
  • Publication number: 20040130708
    Abstract: A method of determining an angle between a first direction of movement of a print head and a second direction of movement of a print media, comprises: printing an array of markings on said print media, said array of markings extending along said first direction and along said second direction; traversing a sensor device along said first direction, and detecting a signal corresponding to said plurality of markings; identifying a plurality of peaks in said sensor signal as a plurality of data co-ordinates; and obtaining an angle data describing an angle between said plurality of data co-ordinates and a reference data.
    Type: Application
    Filed: October 20, 2003
    Publication date: July 8, 2004
    Applicant: Hewlett-Packard Development Company, L.P.
    Inventors: Pascal Ruiz, David Toussaint, Marc Serra
  • Publication number: 20040056545
    Abstract: A gravitational wave generating device is positioned on one side of a material object and a gravitational wave detection device is positioned on the other side of the material object. The intervening material object's texture and internal structure will modify the gravitational wave's polarization, amplitude, speed, frequency, or other characteristics and serve to image the material object's texture and internal structure when the gravitational wave detector on the other side of the material object is connected to a display device. In a preferred embodiment an array of detectors and a gravitational wave lens or lenses can serve to accentuate and concentrate the image of the material object's texture and internal structure. The gravitational waves can also be generated by a celestial background source or sources.
    Type: Application
    Filed: May 2, 2003
    Publication date: March 25, 2004
    Inventor: Robert ML Baker
  • Patent number: 6674521
    Abstract: A reconfigurable optical method and system for rapidly measuring relative angular alignment of flat surfaces are provided. The method and system can be used to rapidly and simultaneously measure the relative angular alignment of machined flat surfaces of a manufactured part. The system can measure parallelism, perpendicularity or angular alignment of multiple flat surfaces. The system can also be used to set up a range of reference angles to which machined surfaces can be compared.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: January 6, 2004
    Assignee: The Regents of the University of Michigan
    Inventors: Stephen B. Segall, Juris Upatnieks
  • Patent number: 6628378
    Abstract: Apparatus and methods for aligning rolls, wherein a first structure, for being associated with a first roll, and a second structure, for being associated with a second roll are provided. A laser is associated with one of the two structures and a target is associated with the other of the two structures. The two structures, the laser and the target are adapted to indicate whether the two rolls exhibit an aligned condition with respect to one another. Also contemplated is a calibration unit for calibrating an alignment device, wherein the unit itself includes two model rolls.
    Type: Grant
    Filed: November 9, 1999
    Date of Patent: September 30, 2003
    Assignees: University of Pittsburgh, Weirton Steel Corporation
    Inventors: Roy D. Marangoni, Patrick Smolinski, Mark V. Loen
  • Patent number: 6612702
    Abstract: The invention accurately sets a polarization direction of a polarization element, and prevents deterioration of the usage efficiency of the light and a reduction in image contrast. Field lenses are provided on a projection display device. A polarizer is placed on a flat surface of a field lens. The flat surface of the field lens is provided with a reference shape to place the polarizer at the end thereof. The reference shape may be one or more planes provided on the end of the field lens. In addition, the reference shape may be a straight line drawn on the flat surface of the field lens.
    Type: Grant
    Filed: February 9, 1999
    Date of Patent: September 2, 2003
    Assignee: Seiko Corporation
    Inventors: Tomiyoshi Ushiyama, Akitaka Yajima
  • Patent number: 6559955
    Abstract: An apparatus for measuring rectilinear motion and rotation angle errors of a rectilinearly moving body having a horizontal, parallel two-surface mirror positioned in a horizontal plane and including two reflection mirrors whose reflection surfaces face each other and are spaced by a distance (2)d and a vertical, parallel two-surface mirror positioned in a vertical plane and including two reflection mirrors whose reflection surfaces face each other and are spaced by a distance (2)d, and also has a light source for generating a laser beam, semi-transparent mirrors for splitting the laser beam into two laser beams, optical path changing reflection mirrors for changing a direction of each laser beam, and position sensors for detecting positions of the laser beam reflected from the horizontal, parallel two-surface mirror and the vertical, parallel two-surface mirror, respectively fixed to positions outside of the rectilinearly moving body.
    Type: Grant
    Filed: March 26, 2001
    Date of Patent: May 6, 2003
    Assignee: Director-General of National Institute of Advanced Industrial Science and Technology, Ministry of Economy, Trade and Industry
    Inventor: Koji Tenjimbayashi
  • Publication number: 20020171821
    Abstract: A system for visually pointing out locations on a three-dimensional structure such as an airframe of an aircraft includes a laser head that traverses an elongate track erected to pass through or adjacent to the structure. The laser head is traversed and stopped at various positions along the track, and from each position the laser head is calibrated by directing the laser beam onto three or more reference locations on the structure whose nominal coordinates are known in a reference coordinate system such as used in a CAD-CAM definition of the structure. The laser head is operable to determine in its own internal coordinate system the direction of the laser beam to each reference location and the distance to the reference location, and from this information a calibration is determined for relating measurements made by the laser head to the reference coordinate system.
    Type: Application
    Filed: January 8, 2001
    Publication date: November 21, 2002
    Applicant: The Boeing Company
    Inventors: David J. Cloud, Paul DiJoseph, Joe Tobin, Steve Temple
  • Patent number: 6476914
    Abstract: The effectiveness of a method for checking for exact alignment of two successive shafts, axles or the like is improved by the fact the no measures with respect to linearization or temperature compensation are necessary any longer by using a light-sensitive array as the light-sensitive sensor. The effects of outside light and reflections can be suppressed. The cross section and the quality of a detected laser beam can be checked especially by visual inspection. Production of the corresponding device for executing this process is facilitated. By using matched beam splitters and reflectors as well as light sources of different colors the number of optoelectronic sensors necessary can be significantly reduced.
    Type: Grant
    Filed: May 20, 1999
    Date of Patent: November 5, 2002
    Assignee: Pruftechnik Dieter Busch AG
    Inventors: Roland Hoelzl, Heinrich Lysen, Michael Hermann
  • Patent number: 6407806
    Abstract: An angle compensation method compensates for the angle of the light-receiving surface of a photodiode disposed in an inclination detection device. The light-receiving surface is divided into four parts by an a-axis and a b-axis disposed perpendicular to each other and receives light reflected from an object surface that is an X-Y plane. The inclination detection device seeks the inclination of the object surface from changes in the irradiation position of the light reflected onto the photodiode light-receiving surface.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: June 18, 2002
    Assignee: Agency of Industrial Science & Technology, Ministry of International Trade and Industry
    Inventors: Satoru Fujisawa, Hisato Ogiso
  • Patent number: 6404485
    Abstract: Disclosed is a rotation amount detecting system for detecting a rotation amount of a deflection mirror, which is rotatable about an rotation axis, employed in an optical disc drive. The rotation amount detecting system is provided with a light emitting system that emits a light beam to the deflection mirror. The light beam has a line-like cross section extending in a direction perpendicular to the rotation axis. Further, a detecting system is provided to receive the beam reflected by the deflection mirror and determines the rotation amount of the deflection mirror in accordance with the received beam.
    Type: Grant
    Filed: January 12, 2000
    Date of Patent: June 11, 2002
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventors: Wataru Kubo, Suguru Takishima, Hirotaka Fujii
  • Patent number: 6351313
    Abstract: A device for detecting six components of the relative motion of two bodies during a primarily two-dimensional translatory basic motion is described. The device has a plate which is provided with a two-dimensional, optical grating, and which is equipped with a plurality of vertically arranged devices for distance measuring. A second element which is composed of an arrangement of two or three optical gratings, and a plane surface which is parallel to the gratings is included. The optical gratings permit a detection of the relative displacements in X- and Y- directions parallel to the lower plate via an evaluation of the variations in intensity of the reflected light.
    Type: Grant
    Filed: October 5, 2000
    Date of Patent: February 26, 2002
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventors: Jan Braasch, Christian Callimici, Sascha Weikert
  • Publication number: 20020001077
    Abstract: A method and apparatus for estimating the adhesion properties of a surface of an article by holding the article so that the surface is facing downwards and placing a droplet of liquid against the surface. The volume of the droplet is incremented until the droplet reaches a critical weight at which some of the liquid drops for the action of the gravity force. The higher is the critical weight, the stronger the mutual adhesion forces between the liquid and the surface. If the characteristics of the liquid are kept constant, it is possible to obtain an immediate evaluation of the adhesiveness of a surface by comparing the measured critical weight with experimental results.
    Type: Application
    Filed: May 16, 2001
    Publication date: January 3, 2002
    Applicant: International Business Machines Corporation
    Inventors: Donato Casati, Fabio Mauri
  • Patent number: 5861946
    Abstract: A system is provided for positioning a substrate having a surface required to be characterized with a contact angle measurement. The system includes a stage which supports the substrate and a dispenser assembly having a dispensing tip through which a liquid droplet having a preselected volume is dispensed onto the surface of the substrate. A first actuating mechanism moves the stage in response to first actuation signals and a second actuating mechanism which changes the vertical spacing between the dispensing tip and the surface of the substrate and dispenses the liquid droplet from the dispenser assembly in response to second actuation signals. A controller is connected to the actuating mechanisms and delivers the first and second actuation signals to the first and second actuating mechanisms, respectively, so as to place the liquid droplet at a predetermined location on the surface of the substrate for performing the contact angle measurement.
    Type: Grant
    Filed: March 4, 1997
    Date of Patent: January 19, 1999
    Assignee: AST, Inc.
    Inventors: David M. Hudson, Richard A. Loder, Wen-Chu Tseng, Yueh-Ju Lee
  • Patent number: 5852300
    Abstract: A sensing device, for installation in a wafer probe tester for sorting wafers according to the quality thereof, includes a main body for mounting on the wafer probe tester, an upper member and a lower member extending from the main body to define an open area therebetween for insertion of any one of different sized wafers, a plurality of light emitting devices spaced apart at fixed intervals and installed on the upper member, a plurality of light receiving devices spaced apart at respective locations opposed to the light emitting devices across the open area and installed on the lower member, and a control circuit, connected to the light emitting devices and the light receiving devices, for detecting a flat zone of any one of the different sized wafers inserted into the open area. The different sized wafers include 4 inch, 5 inch and 6 inch wafers.
    Type: Grant
    Filed: March 19, 1997
    Date of Patent: December 22, 1998
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Sang-bae An
  • Patent number: 5838445
    Abstract: A method for monitoring surface roughness by applying a controlled amount of liquid onto a specimen surface to form a liquid protrusion. The diameter or area of the a liquid protrusion is measured and correlated to surface roughness. In an alternative embodiment, the contact angle between the specimen surface and the liquid protrusion is measured. Surface roughness is computed from the contact angle measurement and several known physical constants of the liquid and specimen surface.
    Type: Grant
    Filed: February 21, 1997
    Date of Patent: November 17, 1998
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Guy Hudson
  • Patent number: 5815256
    Abstract: In an apparatus and method for measuring in-plane distribution of surface free energy, a target substrate is immersed in a liquid, and a parameter representing a state of meniscus to be formed at an intersection area of a target surface with a surface of the liquid is measured along the surface of the liquid. This measurement is performed by descending or ascending the substrate, thereby measuring the parameter throughout the entire surface of the target surface, and then, the in-plane distribution of the surface free energy of the target surface is calculated.
    Type: Grant
    Filed: February 7, 1997
    Date of Patent: September 29, 1998
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yoko Fukunaga
  • Patent number: 5659389
    Abstract: A system for calibrating production throttle bodies in which a throttle body (18) is mounted in a fixture (16) and light is transmitted by a light source (12) through the throttle body main bore (20) onto a translucent screen (22). A camera (14) senses the light regions (34) and transmits the information to a controller (26), which calculates the angular position of the throttle valve (32).
    Type: Grant
    Filed: December 12, 1996
    Date of Patent: August 19, 1997
    Inventors: Bradley John Hieb, Rafael Espinosa Paredes, Jerry Dean Robichaux
  • Patent number: 5648847
    Abstract: In an etch monitor system, a method and apparatus for adjusting the angle of incidence to normal between a laser beam and a reflective surface, such as a silicon wafer, includes a rotatable mirror having a pinhole formed therethrough, the rotatable mirror moveably mounted to be positioned in a first location within a light path and a second location out of said light path. When the rotatable mirror is located in the light path, the pinhole allows a beam of the laser beam to pass from a laser source to the reflective surface. If the beam is normal to the reflective surface, the beam is directed back toward the laser source through the pinhole. If the beam is not normal to the reflective surface, the beam is reflected by the rotatable mirror to a target, allowing observation on a lit spot of the target to enable normalization by making appropriate adjustments.
    Type: Grant
    Filed: March 7, 1995
    Date of Patent: July 15, 1997
    Assignee: Applied Materials, Inc.
    Inventor: Peter Ebbing
  • Patent number: 5644400
    Abstract: A device and method for determining the center and orientation of a circular workpiece such as a semiconductor wafer. A beam of light from a light emitting diode is nearly collimated by a collimation lens before being reflected by a conical mirror. After reflecting from the conical mirror, the beam is reflected by a frustoconical mirror down to a flat annular mirror positioned below a semiconductor workpiece. That portion of the beam not intercepted by the workpiece is reflected back to the frustoconical mirror by the flat mirror. The return beam is then reflected by the conical mirror and passes through the collimating lens and forms a ring of light on a quadrature photodiode array. Light striking the quadrature photodiode array is converted into an electrical voltage or signal proportional to the amount of light striking each photodiode.
    Type: Grant
    Filed: March 29, 1996
    Date of Patent: July 1, 1997
    Assignee: Lam Research Corporation
    Inventor: Randall S. Mundt
  • Patent number: 5570189
    Abstract: A split-field pupil plane determination apparatus (10) having a wedge assembly (16) with a first glass wedge (18) and a second glass wedge (20) positioned to divide a laser beam (12) into a first laser beam half (22) and a second laser beam half (24) which diverge away from the wedge assembly (16). A wire mask (26) is positioned immediately after the wedge assembly (16) in the path of the laser beam halves (22, 24) such that a shadow thereof is cast as a first shadow half (30) and a second shadow half (32) at the input to a relay telescope (14). The relay telescope (14) causes the laser beam halves (22, 24) to converge such that the first shadow half (30) of the wire mask (26) is aligned with the second shadow half (32) at any subsequent pupil plane (34).
    Type: Grant
    Filed: May 30, 1995
    Date of Patent: October 29, 1996
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventor: Joseph T. Salmon
  • Patent number: 5473424
    Abstract: A table holding a substrate thereon is placed on a focusing and levelling stage through three fulcrums, and a calculator receives as inputs the coordinates values of the table measured by an interferometer, the amount of positional deviation between the surface of a wafer and a predetermined fiducial plane at each of a plurality of measuring points on the substrate which is measured by a multipoint AF sensor, and a weight coefficient given to be to the amount of positional deviation at each of the plurality of measuring points, thereby calculating the residual deviation at each of the three fulcrums. A controller adopts the PID control system and controls the amounts of displacement of the three fulcrums on the basis of the residual deviation calculated by the calculator, the integrated value of this residual deviation and the differentiated value of this residual deviation.
    Type: Grant
    Filed: December 23, 1994
    Date of Patent: December 5, 1995
    Assignee: Nikon Corporation
    Inventor: Masahiko Okumura
  • Patent number: 5467186
    Abstract: An apparatus for optically detecting the offset of the pick up of a component having an irregular shape relative to a pick-up device so as to calculate the amount of offset for accurately positioning the component. The system uses an optical measuring system that is capable of making the calculations from certain forms of regular shapes. The component has different sections with different shapes one of which is regular and the apparatus is constructed so as to insure that the proper area of the component will be measured.
    Type: Grant
    Filed: November 5, 1993
    Date of Patent: November 14, 1995
    Assignee: Yamaha Hatsudoki Kabushiki Kaisha
    Inventors: Kenichi Indo, Hitoshi Onodera
  • Patent number: 5452078
    Abstract: A method and apparatus for finding wafer index marks and centers. A wafer having a flat or notch along its edge is placed on a rotatable platform so that a portion of the wafer's edge is positioned within a sensor assembly. The wafer is rotated, and the sensor reads the distance from the center of rotation to the edge of the wafer. This distance is measured at several angles of the wafer and the data is stored in a digital computer as a series of datapoints including an angle and a distance. A computer-implemented process calculates various geometries concerning the wafer including the location of the index mark and the center of the wafer.
    Type: Grant
    Filed: June 17, 1993
    Date of Patent: September 19, 1995
    Assignee: Ann F. Koo
    Inventor: David Cheng
  • Patent number: 5383016
    Abstract: First and second plates (10 and 12), each having a reflective surface (14) opposite the reflective surface on the other plate, are aligned substantially parallel to each other by first separating the second plate (12) from the first one. A beam of collimated light (24) is then directed at the first plate (10) so the beam is reflected along a path lying in the field of view of a light detector (26). The second plate (12) is then positioned relative to the first plate (10) so that the beam (24) is reflected from the second plate onto the first plate for reflection therefrom onto the second plate so as to undergo at least one reverberation before being reflected from the second plate into the light detector so as to appear at substantially the same point before the plates were separated.
    Type: Grant
    Filed: July 15, 1993
    Date of Patent: January 17, 1995
    Assignee: AT&T Corp.
    Inventors: Israel Amir, Ralph A. Treder
  • Patent number: 5379112
    Abstract: This invention relates to a process for measurement of the relative positions of the center-lines of an aperture and of a cylindrical outline of a sample.The process includes the following steps:introducing a calibrated rod into said aperture;performing measurements to define at least a pair of segments representative of the mid-points of the cylindrical outline and of a calibrated rod respectively.The measurements are performed utilizing a light beam which is scanned parallel to the beam in a direction perpendicular to the center-line of the cylindrical outline. This enables measurement of the coaxiality and/or of the concentricity of the center-line of the outline and of the aperture.
    Type: Grant
    Filed: March 24, 1993
    Date of Patent: January 3, 1995
    Assignee: Framatome Connectors International
    Inventors: Jean-Francais Ollivier, Said Lalaouna, Manuel Penha
  • Patent number: 5371951
    Abstract: A two-axis inclinometer having an inclination-sensitive ray-deflecting device is described, via which a geometrical figure having at least one angle is projected onto a linear array. In addition to providing high resolution, a large measurement range is also opened up by the special arrangement and configuration of the geometrical figure. X-, Y- and overlapping inclinations can be determined simultaneously using the described inclinometer.
    Type: Grant
    Filed: April 6, 1992
    Date of Patent: December 13, 1994
    Assignee: Leica Heerbrugg AG
    Inventor: Wilfried Piske
  • Patent number: 5268733
    Abstract: A method and apparatus for determining the contact angle of a droplet of test liquid on a substrate surface. The apparatus includes a test article support plate, a pipette for depositing a droplet of test liquid onto a substrate surface of the test article, and a lamp for projecting an image of the deposited droplet onto a projection screen with a base line of the image positioned on a horizontal axis line of the screen. The screen further has a protractor scale calibrated to read twice the normal angular value, and a rotatable reference line which upon positioning through a contact point of the droplet with the substrate surface and an apex point of the droplet farthest removed from the substrate surface directly indicates the value of the contact angle of the on the protractor scale.
    Type: Grant
    Filed: October 21, 1992
    Date of Patent: December 7, 1993
    Assignee: Tantec, Inc.
    Inventors: Richard Wright, Mark Blitshteyn
  • Patent number: 5264918
    Abstract: A wafer center detecting method comprises steps of giving turn to a wafer held by a holder, optically detecting two points at which the true rim line of the wafer crosses the fictitious rim line thereof obtained when the center of the wafer is in accord with the rotation center of the holder, and measuring an angle formed by these two intersecting points relative to a reference point, obtaining from the angle formed by the two intersecting points a direction in which the center of the wafer is shifted from the rotation center of the holder, obtaining a central angle formed by the two intersecting points relative to the rotation center of the holder, and obtaining, on the basis of the central angle and a previously-measured wafer radius, the extent to which the center of the wafer is shifted from the rotation center of the holder.
    Type: Grant
    Filed: March 13, 1992
    Date of Patent: November 23, 1993
    Assignee: Tokyo Electron Yamanashi Limited
    Inventor: Fumito Kagami
  • Patent number: 5229834
    Abstract: The sensor for detecting and measuring the angle of rotation of the polarization plane of light delivered by a sensitive system (19) subjected to an external phenomenon such as a magnetic field, for example, with the sensor being connected via an optical fiber (18) to a source of incoherent light (10) and essentially comprising the sensitive system (19), a quarterwave plate (22), a birefringent crystal (24), and an analyzer (26). The light flux provided by the sensor is spectrally modulated as a function of the angle of rotation of the plane of polarization of the light delivered by the above-mentioned system (19).
    Type: Grant
    Filed: September 9, 1991
    Date of Patent: July 20, 1993
    Assignee: Bertin & Cie
    Inventor: Michel Lequime
  • Patent number: 5222033
    Abstract: When a microfiche is automatically retrieved by a microfiche retrieval device, and the data of a target frame is input from the keyboard, the microfiche is conveyed to automatically retrieve the frame at the position relevant to the input data, and the largest frame is projected on a reader screen. The positional data for retrieving frames corresponding to the frame addresses other than that of the target frame and the fiche-mode data necessary for retrieving and outputting the imaged frames is stored in memory prior to retrieval of a frame. The stored data is read out so that the correct frame can be retrieved. Even if frames are not positionally aligned with the feeding direction of a particular microfiche or even if the reference frame or the maximum address frame is not exposed on a microfiche, frames can automatically be positioned at a high speed simply by designating a plurality arbitrary frames which are actually exposed with images.
    Type: Grant
    Filed: April 17, 1992
    Date of Patent: June 22, 1993
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Masaru Ono