Axes Determination Patents (Class 356/31)
  • Patent number: 8854614
    Abstract: A method of thermally treating a wafer includes loading a wafer into a process chamber having one or more regions of uniform temperature gradient and one or more regions of non-uniform temperature gradient. A defect is detected in the wafer. The wafer is aligned to position the defect within one of the one or more regions of uniform temperature gradient. A rapid thermal process is performed on the wafer in the process chamber while the defect is positioned within one of the one or more regions of uniform temperature gradient.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: October 7, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Hoon Kang, Taegon Kim, Hanmei Choi, Eunyoung Jo, Gonsu Kang, Sungho Kang, Sungho Heo
  • Patent number: 8436986
    Abstract: An apparatus (10) for assessment, evaluation and grading of gemstones has a stage (11) upon which a gemstone may be supported, the stage being enclosed in a housing (15) that is impervious to light. At least one light source (14) located in the housing is adapted to project incident light onto the gemstone. There are means for rotating and tilting the stage so as to vary the orientation of the gemstone to the incident light. A digital camera (16) is located in the housing adjacent the or each light source and is adapted to take images of the gemstone based on reflection and/or refraction of the incident light. There are also information processing means for calibrating and analyzing the images, with the information processing means being programmed with an instruction set for color calibrating the images and then analyzing the color calibrated images by segmentation and histogram measurement.
    Type: Grant
    Filed: April 2, 2008
    Date of Patent: May 7, 2013
    Assignee: Opal Producers Australia Limited
    Inventors: Graham Alfred Hornabrook, Stuart Norman Marchant, Rodney Herbert Lummis, Kathryn Elizabeth Primmer, Peter Bruce Sutton, Angus Nelson Hornabrook, Leanne Bischof, Ryan Lagerstrom, Volker Hilsenstein, Robert George Imrie
  • Patent number: 8170277
    Abstract: An automatic tracking apparatus is provided, which is capable of solving a failure occurred in an automatic tracking operation in connection with a zooming operation, and capable of tracking an object in a stable manner, while a zooming-up operation, or a zooming-down operation is carried out in a high speed.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: May 1, 2012
    Assignee: Panasonic Corporation
    Inventors: Yasuyuki Michimoto, Satoru Ooyabu
  • Patent number: 8098368
    Abstract: A method of determining the position of inclusions in a gemstone, comprising: (a) placing the gemstone within a material having a refractive index within 0.5, optionally 0.2 or 0.1, of that of the gemstone; (b) illuminating the gemstone and imaging the illuminated gemstone; and (c) determining the position of inclusions based on images of the inclusions in the images.
    Type: Grant
    Filed: August 21, 2006
    Date of Patent: January 17, 2012
    Assignee: Galatea Ltd.
    Inventors: Haim Shlezinger, Ran Ziskind, Adam Devir, Dan Sheffer
  • Publication number: 20110299063
    Abstract: A device for measuring properties of scatterers which measures properties of a scatterer from a stereoscopic scattering distribution of the scatterer upon receiving an electromagnetic wave with a certain wavelength distribution is provided. In the device, a scatterer to be measured is placed on a specimen platform; the electromagnetic wave is irradiated onto the scatterer from at least either any one or more directions, or one or more continuous directions of a hypothetical spherical surface having the above-mentioned focal point as its center; scattering waves scattered by the scatterer and reflected off the paraboloidal mirror or projected onto the paraboloidal screen are imaged by the imaging means as planar imaging data; and from thus obtained imaging data, a stereoscopic distribution of the scattering waves generated by the scatterer is obtained so as to measure properties of the scatterer from the distribution result.
    Type: Application
    Filed: May 10, 2011
    Publication date: December 8, 2011
    Applicant: NINOMIYA JEWELRY CO., LTD.
    Inventors: Hirofumi Ninomiya, Akio Kawaguchi
  • Patent number: 7973914
    Abstract: A physical quantity measuring apparatus utilizing optical frequency domain reflectometry includes a tunable laser; a first polarization maintaining fiber; a polarization maintaining coupler; a second polarization maintaining fiber; a third polarization maintaining fiber; a sensor consists of a fiber Bragg grating formed in a core of the third polarization maintaining fiber; a fourth polarization maintaining fiber; a photodiode detects Bragg reflected light from the sensor and reference light from the referential reflecting end; a controller that detects modulation of an interference intensity between the Bragg reflected light and the reference light; and an incidence part that inputs the measuring light, wherein the incidence part being provided on the first polarization maintaining fiber or on both the second polarization maintaining fiber and the third polarization maintaining fiber.
    Type: Grant
    Filed: February 4, 2010
    Date of Patent: July 5, 2011
    Assignee: Fujikura Ltd.
    Inventors: Koji Omichi, Akira Sakamoto, Shunichirou Hirafune
  • Patent number: 7834987
    Abstract: Of the “four C's,” cut has historically been the most complex to understand and assess. This application presents a three-dimensional mathematical model o study the interaction of light with a fully faceted, colorless, symmetrical round-brilliant-cut diamond. With this model, one can analyze how various appearance factors (brilliance, fire, and scintillation) depend on proportions. The model generates images and a numerical measurement of the optical efficiency of the round brilliant-called DCLR—which approximates overall fire. DCLR values change with variations in cut proportions, in particular crown angle, pavilion angle, table size, star facet length, culet size, and lower girdle facet length. The invention describes many combinations of proportions with equal or higher DCLR than “Ideal” cuts, and these DCLR ratings may be balanced with other factors such as brilliance and scintillation to provide a cut grade for an existing diamond or a cut analysis for prospective cut of diamond rough.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: November 16, 2010
    Assignee: Gemological Institute of America, Inc.
    Inventors: Ilene M. Reinitz, Mary L. Johnson, James E. Shigley, Thomas S. Hemphill
  • Patent number: 7700381
    Abstract: A semiconductor wafer has a bevel contour formed along the periphery thereof, products formed on the wafer, and an ID mark formed on the bevel contour. The ID mark shows at least the properties, manufacturing conditions, and test results of the products.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: April 20, 2010
    Assignee: Kabushikia Kaisha Toshiba
    Inventors: Tsunetoshi Arikado, Masao Iwase, Soichi Nadahara, Yuso Udo, Yukihiro Ushiku, Shinichi Nitta, Moriya Miyashita, Junji Sugamoto, Hiroaki Yamada, Hajime Nagano, Katsujiro Tanzawa, Hiroshi Matsushita, Norihiko Tsuchiya, Katsuya Okumura
  • Publication number: 20080316612
    Abstract: An optical device includes an interface between two or more media. The refractive indices, orientations of media, and alignment relative to a propagating wave define a refractive boundary at which reflections may be reduced or eliminated, and at which, for certain incident angles, rays may be refracted on the same side of the normal as the incident ray.
    Type: Application
    Filed: August 13, 2008
    Publication date: December 25, 2008
    Applicant: Searette LLC
    Inventors: Roderick A. Hyde, Nathan P. Myhrvold, Clarence T. Tegreene
  • Patent number: 7382445
    Abstract: Methods for grading gemstones, apparatus for grading gemstones, and systems that utilize such methods and apparatus are disclosed.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: June 3, 2008
    Assignee: American Gem Society
    Inventors: Jose Sasian, James Caudill, Peter Yantzer
  • Publication number: 20070201023
    Abstract: A method of determining the crystalline orientation of a crystal surface of a workpiece using Raman spectroscopy. A beam of substantially monochromatic light is directed to be incident on the crystal surface at a predetermined angle of incidence. The beam of light is substantially polarized. The workpiece is rotated relative to the beam of light about a rotation axis substantially normal to the crystal surface. A Raman shift of scattered light is measured at each of a number of rotational positions during the rotation of the workpiece. The crystalline orientation of the crystal surface is determined based on the measured Raman shifts. Data indicating the determined crystalline orientation of the crystal surface is stored.
    Type: Application
    Filed: February 23, 2007
    Publication date: August 30, 2007
    Inventor: Ming Li
  • Patent number: 7260544
    Abstract: Of the “four C's,” cut has historically been the most complex to understand and assess. This application presents a three-dimensional mathematical model to study the interaction of light with a fully faceted, colorless, symmetrical round-brilliant-cut diamond. With this model, one can analyze how various appearance factors (brilliance, fire, and scintillation) depend on proportions. The model generates images and a numerical measurement of the optical efficiency of the round brilliant—called DCLR—which approximates overall fire. DCLR values change with variations in cut proportions, in particular crown angle, pavilion angle, table size, star facet length, culet size, and lower girdle facet length. The invention describes many combinations of proportions with equal or higher DCLR than “Ideal” cuts, and these DCLR ratings may be balanced with other factors such as brilliance and scintillation to provide a cut grade for an existing diamond or a cut analysis for prospective cut of diamond rough.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: August 21, 2007
    Assignee: Gemological Institute of America, Inc.
    Inventors: Ilene M. Reinitz, Mary L. Johnson, James E. Shigley, Thomas S. Hemphill
  • Patent number: 6496255
    Abstract: A sample is rotated about an axis perpendicular to a surface of the sample in predetermined angular steps. The surface of the sample is irradiated with linearly polarized light, and a reflected intensity of light reflected from the surface of the sample is detected in each angular step. Based on a rotational angle dependency of the reflected intensity, the crystal face orientation of the sample is determined. To improve signal-to-noise ratio, the crystal lattice of the sample is excited. Further, the surface of the sample is irradiated with a plurality of linearly polarized light beams to obtain a plurality of reflected intensities.
    Type: Grant
    Filed: August 6, 2001
    Date of Patent: December 17, 2002
    Assignee: NEC Corporation
    Inventors: Kazumi Sugai, Belgacem Haba, Yukio Morishige
  • Patent number: 6182729
    Abstract: An apparatus for manufacturing a plurality of wafers by slicing a cylindrical ingot with a wire saw. The apparatus includes a measuring device for measuring the crystal orientation of the ingot; an adhering device for adhering a support to the surface of the ingot based on the orientation where the support includes an intermediate plate and a support plate, where the support plate is adapted to fit the wire saw, and where the adhering device includes an auxiliary adhering element for adhering the intermediate plate to the surface of the ingot and an adhering element for adhering the support plate to the intermediate plate; a dryer for drying and solidifying an adhesive applied between the ingot and the intermediate plate and an adhesive applied between the intermediate plate and the support plate; and the wire saw for slicing the ingot into the plurality of wafers while the ingot is supported on the support.
    Type: Grant
    Filed: January 29, 1998
    Date of Patent: February 6, 2001
    Assignee: Nippei Toyama Corporation
    Inventors: Yoshiaki Banzawa, Nobuaki Hayashi, Kiyoakira Shimizu
  • Patent number: 6056031
    Abstract: An apparatus for connecting a cylindrical ingot to a support plate includes means for measuring a crystal orientation of the ingot based on a diffraction of x-rays, means for rotating the ingot about a center axis based on the crystal orientation so that a center axis of the ingot is held parallel to a first plane and an orientation axis based on the crystal orientation is placed in a plane parallel to the first plane, means for adhering an intermediate plate to the ingot, means for adjusting a position of one of the support plate and the ingot in a plane parallel to the first plane based on the crystal orientation so that a mounting axis of the support plate is in a specific relationship with the orientation axis, and means for attaching the support plate to the intermediate plate.
    Type: Grant
    Filed: November 6, 1998
    Date of Patent: May 2, 2000
    Assignee: Nippei Toyama Corporation
    Inventors: Yoshiaki Banzawa, Nobuaki Hayashi, Kiyoakira Shimizu
  • Patent number: 6031600
    Abstract: In a method for determining the position of an object with reference to a measurement device having an optical transmitter which emits a light beam at a varying transmission angle, and having an angularly resolving optical receiver spaced away from the transmitter, a conclusion being drawn, from the respective transmission angle and from the respective angle at which the receiver receives radiation reflected from the object (reception angle), as to the resolution cell, defined by the angular resolution of the transmitter and the receiver, in which the object is located, the light beam emitted from the transmitter is modulated. The phase difference between the modulation of the transmitted light beam and the modulation of the received radiation is measured. From the phase difference, the position of the object within the respective resolution cell is calculated.
    Type: Grant
    Filed: October 20, 1998
    Date of Patent: February 29, 2000
    Assignee: Robert Bosch GmbH
    Inventors: Hermann Winner, Alain Gaillard, Werner Uhler
  • Patent number: 6024814
    Abstract: A method for connecting a cylindrical ingot to a support plate includes measuring a crystal orientation of the ingot based on a diffraction of x-rays, rotating the ingot about a center axis based on the crystal orientation so that a center axis of the ingot is held parallel to a first plane and an orientation axis based on the crystal orientation is placed in a plane parallel to the first plane, adhering an intermediate plate to the ingot, adjusting a position of one of the support plate and the ingot in a plane parallel to the first plane based on the crystal orientation so that a mounting axis of the support plate is in a specific relationship with the orientation axis, and attaching the support plate to the intermediate plate.
    Type: Grant
    Filed: November 26, 1996
    Date of Patent: February 15, 2000
    Assignee: Nippei Toyama Corporation
    Inventors: Yoshiaki Banzawa, Nobuaki Hayashi, Kiyoakira Shimizu
  • Patent number: 5875408
    Abstract: An automated vehicle guidance system for guiding a movable vehicle along a predetermined desired path over a surface that is provided with at least one reference marking includes a laser radar for emitting laser pulses towards the reference marking and for receiving laser pulses reflected from the reference marking, a steering actuator for steering the vehicle, and a computer connected to the laser radar and the steering actuator. The laser radar is designed to determine the distance between the vehicle and the reference marking and that distance is used by the computer to determine the lateral position of the vehicle relative to the desired path of vehicle travel. The computer then controls the steering actuator in the manner necessary to effect guidance of the vehicle along the desired path.
    Type: Grant
    Filed: July 17, 1995
    Date of Patent: February 23, 1999
    Assignee: IMRA America, Inc.
    Inventors: Mark P. Bendett, Alan Y. Aral
  • Patent number: 5811827
    Abstract: A method and apparatus for optically determining the dimension of part surfaces. Particular embodiments describe optical triangulation based coordinate measurement machines capable of accurate measurement of complex surfaces, such as gear teeth and turbine blades. Other embodiments provide highly useful sensors for robot guidance and related purposes. Up to 5 axis sensing capability is provided on surfaces of widely varying form.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: September 22, 1998
    Assignee: Sensor Adaptive Machines, Inc.
    Inventors: Timothy R. Pryor, Bernard Hockley, Nick Liptay-Wagner, Omer L. Hageniers, W. J. Pastorius
  • Patent number: 5757498
    Abstract: An optical spray coating monitoring system uses a laser displacement sensor and a data acquisition system to monitor a spray gun operator's technique, and display information relating to coating conditions and/or technique. The system includes a laser displacement sensor having a sensor head that is removably attached to a hand held spray gun. The laser displacement sensor measures the distance from the spray nozzle to the surface being coated. The laser displacement sensor also preferably measures the angle of orientation of the spray gun with respect to the surface being coated. The sensor head can also include an infrared temperature sensor. Another embodiment of the invention also uses a second laser displacement sensor.
    Type: Grant
    Filed: May 30, 1996
    Date of Patent: May 26, 1998
    Inventors: Richard J. Klein, II, Douglas L. Sevey, Ricky Jay Bauer
  • Patent number: 5717484
    Abstract: A first light receiving portion and a second light receiving portion are provided on the upper surface of a moving body having driving wheels at an interval of a prescribed distance in a plane. The first light receiving portion and the second light receiving portion rotate around the axis in the vertical direction. On the other hand, a first light emitting portion and a second light emitting portion are provided on the side face of a station serving as a reference station at an interval of a prescribed distance in a plane. The first and second light receiving portions carry out sampling while rotating, so that the quantity of light reception is changed according to the directivities of the first and second light receiving portions. When the peaks of the directivities of the first and second light receiving portions match the direction of the first light emitting portion or the second light emitting portion, the quantity of light reception is maximized.
    Type: Grant
    Filed: March 17, 1995
    Date of Patent: February 10, 1998
    Assignee: Minolta Co., Ltd.
    Inventors: Takayuki Hamaguchi, Nobukazu Kawagoe
  • Patent number: 5598972
    Abstract: An optical spray paint optimization system can be removably mounted to a spray paint gun, thus enhancing the ability of the user to guide the direction of the spray and also locate the nozzle at an optimum spray distance from the surface being painted. The preferred apparatus uses a diode laser, a beam splitter and a reflecting mirror to generate a reference beam and a gauge beam. The reference beam propagates in a fixed forward direction, but the direction of the gauge beam is adjustable by adjusting the attitude of the reflecting mirror. The reference beam and the gauge beam intersect at a convergence point which can be repositioned to a selected distance from the nozzle of the spray painting system by adjusting the path of the gauge beam, thus allowing the user to spray at the optimum spray distance by locating the convergence point on the surface being painted. The beams also aid in aiming the spray.
    Type: Grant
    Filed: July 19, 1995
    Date of Patent: February 4, 1997
    Assignee: University of Northern Iowa Foundation
    Inventors: Richard J. Klein, II, Douglas L. Sevey, Alireza Badakhshan, Ricky J. Bauer
  • Patent number: 5485240
    Abstract: A focusing controller for photographic apparatuses includes: a distance meter which detects film-to-object distance to calculate and emit a distance signal; a lens shifting distance calculating device which calculates a lens shifting distance for effecting focusing in a focusing optical system on the basis of the distance signal by using one or two or more linear expressions; and a driving device for driving the focusing optical system in accordance with the lens shifting distance; the focusing controller allowing both the lens shifting amount for the focusing optical system and the reciprocal of film-to-object distance to be set at equal intervals.
    Type: Grant
    Filed: August 3, 1994
    Date of Patent: January 16, 1996
    Assignee: Nikon Corporation
    Inventors: Hiroyuki Tsuru, Shigemasa Sato, Hiroshi Terunuma
  • Patent number: 5422718
    Abstract: The elastic-port immersion cell (10) is an optical oil immersion vessel which has a flexible latex (or other) sheath (24) protruding from its sidewall. The sheath is affixed to an opening in the wall of the vessel using a collar, O-ring (26) or other connecting means. The base of the vessel is an optical glass window. A sample (20) mounted on to the end of spindle (14) is placed into the cell. The end of the spindle (14), without the sample, is inserted into the sheath and the latex together with the spindle is attached to a goniometer head of a spindle stage such that the spindle is horizontal. Immersion oil (22) that has a refractive index similar to the sample is added to the cell until the sample is totally submerged. Minute features within the sample (20) may then be observed under the microscope as the sample is rotated 360 degrees about a vertical or horizontal axis. The latex sheath prevents the oil from escaping from the cell and also provides the flexibility required to orient and rotate a sample.
    Type: Grant
    Filed: May 10, 1993
    Date of Patent: June 6, 1995
    Assignees: The Center for Innovative Technology, Virginia Polytechnic Institute & State University, Virginia Tech Intellectual Properties, Inc.
    Inventor: Alan J. Anderson
  • Patent number: 5345310
    Abstract: Techniques for identifying and determining the orientation, magnitude, and direction of slip plane dislocations transecting semiconductor dies are described, whereby a four point alignment pattern is examined for "squareness" and size integrity. Lack of squareness or significant change in apparent size of various aspects of the alignment pattern indicate slip-plane dislocations. The magnitude, orientation and direction of the dislocations are determined geometrically from measurement of the alignment pattern. Various other aspects of the invention are directed to optimal alignment of a photolithographic mask to a die which has experienced a slip-plane dislocation, and to discrimination between slip-plane dislocation and die-site rotation.
    Type: Grant
    Filed: June 15, 1993
    Date of Patent: September 6, 1994
    Assignee: LSI Logic Corporation
    Inventors: Michael D. Rostoker, Nicholas F. Pasch, Joe Zelayeta
  • Patent number: 5298963
    Abstract: An apparatus for inspecting the surface of a sheet-like object has a movable stage with an object mounted thereon; a source for lighting the object on the stage, particularly by making a plurality of illumination lights respectively having different wavelengths incident on the surface of the object from respective predetermined directions; image pickup device for fetching the image of the object under illumination of the light as image data or the images of parts of the object as image data obtained on the respective different wavelengths; image data processing device for inspecting the image data for defects; and a device for synchronizing control either for flashing the light at a predetermined time interval just after the stage commences its movement, synchronously with fetching the image data or for flashing the light and simultaneously fetching the image data obtained on the respective different wavelengths, synchronously with the object on the stage reaching respective predetermined positions while movi
    Type: Grant
    Filed: February 26, 1992
    Date of Patent: March 29, 1994
    Assignee: Mitsui Mining & Smelting Co., Ltd.
    Inventors: Kazuo Moriya, Takayuki Tsuzura
  • Patent number: 5239355
    Abstract: An optical microscope equipped with an optical device allowing a convergent beam to irradiate the surface of a specimen through a microscope tube and an objective lens. The device detects the deviation of the convergent beam reflected from the surface of the specimen to an optical axis of the microscope. A driving mechanism moves the specimen in a three-dimensional direction to automatically eliminate the deviation. With this microscope, it is possible to position the specimen automatically, thus reducing the time for examination and improving precision of the examination.
    Type: Grant
    Filed: January 10, 1992
    Date of Patent: August 24, 1993
    Assignee: NEC Corporation
    Inventor: Koji Hirose
  • Patent number: 5187729
    Abstract: A method and an apparatus for detecting a crystallographic axis of a single crystal ingot based on the X-ray diffractometry, wherein and whereby a crystal habit line of the single crystal ingot is optically detected first, and thereafter making use of the geographical relation of the crystallographic axis to the crystal habit line, the crystallographic axis is detected with improved economy of time and labor and with improved precision, so that the orientation flat (OF) is made in the right place and direction.
    Type: Grant
    Filed: February 19, 1992
    Date of Patent: February 16, 1993
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventors: Hiroyaki Ibe, Seiichi Terashima, Tsumoru Masui
  • Patent number: 5008542
    Abstract: A method and system for measuring whole-wafer etch pit density (.rho..sub.D) is disclosed in which an etch GaAs wafer is tested for fractional transmission at a plurality of points over its surface. The fractional transmission (T) of light through the wafer is detected, amplified and fed to a computer where at least two points of transmission measurement are selected for calibration. From these measurements, together with an estimate of the average etch pit size (area), the values for fractional transmission in regions of low etch pit density T.sub.O and high etch pit density T.sub.E may be calculated, and used to convert transmission data directly to etch pit density (.rho..sub.
    Type: Grant
    Filed: December 20, 1989
    Date of Patent: April 16, 1991
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: David C. Look, James S. Sewell, Millard G. Mier, John R. Sizelove, Dennis C. Walters, Scott C. Dudley
  • Patent number: 4884887
    Abstract: An apparatus is disclosed for use with a device for processing a crystal having crystallographic axes and crystallographic facets on its surface. A light beam is supplied towards the facets where the light beam has a selected spatial relationship to the device. The directions of reflections of the light beam from the facets are detected to determine the spatial relationship between one crystallographic axis and the processing device so that the body is processable using the device in reference to the crystallographic axis. A U-shaped member is placed with its open ends in contact with or adjacent to a reference surface of the processing device. The U-shaped member encloses and is urged against the body when the body is rotated about a reference direction of the device The U-shaped member is of such dimensions that the surface portions of the body at distances smaller than a predetermined distance will cause both ends of the member to contact the reference surface.
    Type: Grant
    Filed: January 23, 1987
    Date of Patent: December 5, 1989
    Assignee: Hewlett-Packard Company
    Inventor: David A. Vanderwater
  • Patent number: 4840487
    Abstract: An apparatus for measuring dry etching pits formed in a semiconductor device during the manufacture thereof by employing optical means. Wiring on semiconductor devices increasingly become fine or minute, i.e., the size of wiring of some devices is less than 1 .mu.m. A technical matter to be solved is to effect highly accurate dimensional measurement in such submicron region. The apparatus has a .theta. stage which is additionally provided on an XY stage, and a mechanism which provides excellent selectivity in detection of interference intensity of diffracted beam. In addition, a short wavelength laser, such as a He-Ne, He-Cd, N.sub.2 or Ar laser, is employed as a laser source. As a practical advantage, it is possible to monitor etching of a pit with a depth on the order of 10 .mu.m with respect to a pattern with a planar dimension of 0.3 .mu.m to 1.0 .mu.m.
    Type: Grant
    Filed: June 19, 1986
    Date of Patent: June 20, 1989
    Assignee: Hitachi, Ltd.
    Inventors: Minori Noguchi, Toru Otsubo, Susumu Aiuchi
  • Patent number: 4802760
    Abstract: A Raman microprobe apparatus for determining crystal orientation comprises a polarizer for polarizing not only incident light but also Raman light. The polarizer is provided between a half mirror for deflecting the incident light toward a specimen and an object lens system for focusing the incident light on the specimen.
    Type: Grant
    Filed: January 13, 1988
    Date of Patent: February 7, 1989
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yasuo Inoue, Takeshi Ikeda
  • Patent number: 4787740
    Abstract: An apparatus for determining crystal orientation comprises: a polarizer for polarizing an incident light beam; a polarization analyzer for selecting light having a selected polarization direction in Raman scattered light; and a synchronizer for enabling synchronous rotations of the polarizer and the polarization analyzer.
    Type: Grant
    Filed: February 5, 1987
    Date of Patent: November 29, 1988
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yasuo Inoue, Tadashi Nishimura, Kazuyuki Sugahara, Shigeru Kusunoki
  • Patent number: 4778269
    Abstract: In a method for determining orientation of a crystal with polarization selective Raman microprobe spectroscopy, polarization angles of both light incident on the crystal and Raman scattered light emitted from the crystal are varied coincidently in ordinary circumstances and only either one of the polarization angles is varied in only case that intensity of the scattered beam does not change substantially in spite of the coincident variation of both the polarization angles.
    Type: Grant
    Filed: February 6, 1987
    Date of Patent: October 18, 1988
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Yasuo Inoue, Tadashi Nishimura, Kazuyuki Sugahara, Shigeru Kusunoki
  • Patent number: 4747684
    Abstract: A specific small area of a crystal sample is scanned by a laser beam which rotates about an axis substantially perpendicular to the sample surface such that the intersection of the beam with a plane above and parallel to the surface describes a true spiral or a stepwise spiral pattern. The laser beam is reflected different amounts for different beam positions to produce a reflectance pattern indicative of crystallographic orientation.
    Type: Grant
    Filed: August 27, 1987
    Date of Patent: May 31, 1988
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: Sidney Weiser
  • Patent number: 4412345
    Abstract: An apparatus and method for precisely measuring the angles of cut of single nd doubly rotated cuts of quartz crystal blanks on a high volume production basis.
    Type: Grant
    Filed: August 3, 1981
    Date of Patent: October 25, 1983
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: S. Thomas Workman, John L. Chambers, Myron A. Pugh, Roger W. Ward
  • Patent number: 4332474
    Abstract: A method and apparatus for checking the orientation of crystal plates in a stacked configuration. The plate stack (15) is placed between a polarizer (11) and analyzer (12). A cylindrical lens (13) placed between the stack and analyzer is utilized as a convergent element. Included with the stack are reference plates (17, 18) having known orientation angles representing the upper and lower limits of the desired orientation tolerance. Monochromatic light is made incident on one surface of the plates in the stack through the polarizer. Since the crystals are birefringent, an interference pattern will be produced by light emerging from the opposite surface. Due to the presence of the cylindrical lens, this pattern can be viewed as a series of essentially linear, parallel bands of light. Deviations within a particular band are compared with bands produced by the reference plates to determine if the angle of each plate falls within the desired limits.
    Type: Grant
    Filed: June 11, 1980
    Date of Patent: June 1, 1982
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventor: Anton J. Miller
  • Patent number: 4065211
    Abstract: An X-ray diffraction system for crystal analysis employing laser alignment o reduce errors inherent in the mechanical operation of the goniometer apparatus.
    Type: Grant
    Filed: March 1, 1976
    Date of Patent: December 27, 1977
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: John R. Vig
  • Patent number: 4002410
    Abstract: A small portable device quickly secured to and removed from a body of monocrystalline material to be sawed and useful for aligning the body with respect to a saw blade, permitting sawing with precisely predetermined crystallographic orientation. The device has a viewing screen, a light source, and first and second autocollimators. The first autocollimator directs a first collimated light beam toward a surface of the material. The resultant reverse reflection is directed back through the collimating lens and a beam splitter images the reflection on the screen, providing a pattern on the screen characteristic of a crystallographic plane of the material, the pattern position corresponding to the orientation of the device with respect to the crystallographic plane.
    Type: Grant
    Filed: March 17, 1975
    Date of Patent: January 11, 1977
    Assignee: Monsanto
    Inventors: Roger A. Frederick, Thomas E. Reichard