Plural Color Responsive Patents (Class 356/45)
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Patent number: 11367510Abstract: A method and data processing device is described herein for computer-aided determination of a hair coloring agent for coloring of hair in a desired hair color. A device for production of an individually determined hair coloring agent is also described herein.Type: GrantFiled: December 16, 2016Date of Patent: June 21, 2022Assignee: HENKEL AG & CO. KGAAInventor: Georg Knuebel
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Patent number: 11359967Abstract: The present invention discloses a method for measuring an actual temperature of a flame by using all information of a radiation spectrum and a measurement system thereof. The method includes: conducting more theoretical data processing by using energy level structure correction, wherein all information of the radiation spectrum can be used; and by way of a keyboard input manner or a data transmission input manner, acquiring an energy level structure correction parameter, and finally acquiring a more accurate actual temperature value of a measured flame. The method effectively overcomes a defect that the true temperature of the flame can be obtained by only conducting radiance correction through data processing with great calculations when adpted multi-spectral temperature measurement method.Type: GrantFiled: March 23, 2015Date of Patent: June 14, 2022Assignee: TIANJIN YITONG TRANSMISSION & DISTRIBUTION ELECTRIC TECHNOLOGY CO. LTD.Inventors: Bolin Cao, Chengzhang Tan, Rui Cao, Chenggang Liu, Li Cao, Changfang Chen, Yao Li, Changjian Dai
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Patent number: 11280686Abstract: A method includes exposing a sample etalon-object to sample incident radiation, resulting in a sample transmitted radiation and sample reflected radiation; exposing a reference etalon-object to reference incident radiation, resulting in a reference transmitted radiation and reference reflected radiation; and analyzing resultant radiation for a heterodyned spectrum. The sample transmitted radiation may become the reference incident radiation, and the reference transmitted radiation may become the resultant radiation. The reference transmitted radiation may become the sample incident radiation, and the sample transmitted radiation may become the resultant radiation. The sample transmitted radiation may become the reference incident radiation, and the reference reflected radiation may become the resultant radiation. The reference transmitted radiation may become the sample incident radiation, and the sample reflected radiation may become the resultant radiation.Type: GrantFiled: July 17, 2019Date of Patent: March 22, 2022Assignee: Applied Materials, Inc.Inventors: Samuel C. Howells, Bruce E. Adams
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Patent number: 10893740Abstract: A method is provided for preparing a hair dye color mixture. The method includes: accessing a control system having at least a processor, a memory, and user input controls, the memory configured to store ingredients of a hair dye color mixture, each ingredient of the hair dye color mixture being from an initial product brand; receiving user input from the user input controls to change one or more ingredients of the hair dye color mixture from the initial product brand to one or more subsequent product brands; matching the color of the hair dye color mixture made from one or more ingredients of the initial product brand using one or more ingredients of the one or more subsequent product brands, in response to the user input; and displaying the ingredients of the hair dye color mixture in the one or more subsequent product brands on a display.Type: GrantFiled: December 20, 2018Date of Patent: January 19, 2021Assignee: SureTint Technologies, LLCInventors: Mitchell H. Saranow, Michael Wright
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Patent number: 10520427Abstract: A method for evaluating the quality of a component produced by means of an additive laser sintering and/or laser melting method, in particular a component for an aircraft engine comprises at least the steps of providing a first data set, which comprises spatially resolved color values, which each characterize the temperature of the component at an associated component location during the laser sintering and/or laser melting of the component, providing a second data set, which comprises spatially resolved color values corresponding to the first data set, which color values each characterize the temperature of a reference component at an associated reference component location during the laser sintering and/or laser melting of the reference component.Type: GrantFiled: February 27, 2014Date of Patent: December 31, 2019Assignee: MTU Aero Engines AGInventors: Thomas Hess, Gunter Zenzinger, Wilhelm Satzger
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Patent number: 10132688Abstract: In one embodiment, a system includes a multi-spectral pyrometry system configured to receive a broad wavelength band radiation signal from a turbine component, to split the broad wavelength band radiation signal into multiple narrow wavelength band radiation signals, to determine emissivity of the turbine component based on the narrow wavelength band radiation signals, and to detect spall on a surface of the turbine component based on the emissivity.Type: GrantFiled: December 17, 2010Date of Patent: November 20, 2018Assignee: General Electric CompanyInventors: Jordi Estevadeordal, Guanghua Wang, Lucy Joelle Summerville, Nirm Velumylum Nirmalan
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Patent number: 9756697Abstract: A lighting device includes a monolithic LED chip flip-chip mounted onto an interconnect structure. The monolithic chip includes LED junctions formed from a single LED junction. An active electronic component is also mounted onto the interconnect structure at a distance from the monolithic chip that is less than five times the maximum dimension of the monolithic chip. The active electronic component controls LED drive currents independently supplied to the LED junctions. Different types of phosphor are disposed laterally above the various LED junctions. A color sensor measures the light emitted from the lighting device when drive currents are supplied to first and second LED junctions. The active electronic component then supplies more drive current to the first LED junction than to the second LED junction in response to the color sensor measuring the light emitted when the prior LED drive currents are supplied to the first and second LED junctions.Type: GrantFiled: June 17, 2016Date of Patent: September 5, 2017Assignee: Bridgelux, Inc.Inventors: Vladimir Odnoblyudov, Jesus Del Castillo
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Patent number: 9730284Abstract: A LAM/ICM assembly comprises an integrated control module (ICM) and an LED array member (LAM). The ICM includes interconnect through which power from outside the assembly is received. In a first novel aspect, active circuitry is embedded in the ICM. In one example, the circuitry monitors LED operation, controls and supplies power to the LEDs, and communicates information into and out of the assembly. In a second novel aspect, a lighting system comprises an AC-to-DC converter and a LAM/ICM assembly. The AC-to-DC converter outputs a substantially constant current or voltage. The magnitude of the current or voltage is adjusted by a signal output from the LAM/ICM. In a third novel aspect, the ICM includes a built-in switching DC-to-DC converter. An AC-to-DC power supply supplies a roughly regulated supply voltage. The switching converter within the LAM/ICM receives the roughly regulated voltage and supplies a regulated LED drive current to its LEDs.Type: GrantFiled: April 23, 2016Date of Patent: August 8, 2017Assignee: Xenio CorporationInventors: Michael Neal Gershowitz, Babak Imangholi
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Patent number: 9529162Abstract: An optical fiber connector includes a fiber alignment body including a continuous optical fiber guide channel extending therethrough. The continuous optical fiber guide channel has a lead-in channel portion, a lead-out channel portion and a turn portion that connects the lead-in channel portion and the lead-out channel portion. The fiber alignment body has a reflective surface formed of metal that receives light traveling from an optical fiber located within the lead-in channel portion of the continuous optical fiber channel and reflects the light into the lead-out channel portion of the continuous optical fiber channel.Type: GrantFiled: October 9, 2012Date of Patent: December 27, 2016Assignee: CORNING OPTICAL COMMUNICATIONS LLCInventors: Jeffrey D. Danley, Robert B. Elkins, II, Kevin B. Sparks
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Patent number: 9392666Abstract: A lighting device includes a monolithic LED chip flip-chip mounted onto an interconnect structure. The monolithic chip includes LED junctions formed from a single LED junction. An active electronic component is also mounted onto the interconnect structure at a distance from the monolithic chip that is less than five times the maximum dimension of the monolithic chip. The active electronic component controls LED drive currents independently supplied to the LED junctions. Different types of phosphor are disposed laterally above the various LED junctions. A color sensor measures the light emitted from the lighting device when drive currents are supplied to first and second LED junctions. The active electronic component then supplies more drive current to the first LED junction than to the second LED junction in response to the color sensor measuring the light emitted when the prior LED drive currents are supplied to the first and second LED junctions.Type: GrantFiled: January 27, 2016Date of Patent: July 12, 2016Assignee: Bridgelux, Inc.Inventors: Vladimir Odnoblyudov, Jesus Del Castillo
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Patent number: 9351358Abstract: A LAM/ICM assembly comprises an integrated control module (ICM) and an LED array member (LAM). The ICM includes interconnect through which power from outside the assembly is received. In a first novel aspect, active circuitry is embedded in the ICM. In one example, the circuitry monitors LED operation, controls and supplies power to the LEDs, and communicates information into and out of the assembly. In a second novel aspect, a lighting system comprises an AC-to-DC converter and a LAM/ICM assembly. The AC-to-DC converter outputs a substantially constant current or voltage. The magnitude of the current or voltage is adjusted by a signal output from the LAM/ICM. In a third novel aspect, the ICM includes a built-in switching DC-to-DC converter. An AC-to-DC power supply supplies a roughly regulated supply voltage. The switching converter within the LAM/ICM receives the roughly regulated voltage and supplies a regulated LED drive current to its LEDs.Type: GrantFiled: February 4, 2015Date of Patent: May 24, 2016Assignee: Bridgelux, Inc.Inventors: Michael Neal Gershowitz, Babak Imangholi
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Patent number: 9277618Abstract: A lighting device includes a monolithic LED chip flip-chip mounted onto an interconnect structure. The monolithic chip includes LED junctions formed from a single LED junction. An active electronic component is also mounted onto the interconnect structure at a distance from the monolithic chip that is less than five times the maximum dimension of the monolithic chip. The active electronic component controls LED drive currents independently supplied to the LED junctions. Different types of phosphor are disposed laterally above the various LED junctions. A color sensor measures the light emitted from the lighting device when drive currents are supplied to first and second LED junctions. The active electronic component then supplies more drive current to the first LED junction than to the second LED junction in response to the color sensor measuring the light emitted when the prior LED drive currents are supplied to the first and second LED junctions.Type: GrantFiled: June 27, 2014Date of Patent: March 1, 2016Assignee: Bridgelux, Inc.Inventors: Vladimir Odnoblyudov, Jesus Del Castillo
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Patent number: 9247594Abstract: A LAM/ICM assembly comprises an integrated control module (ICM) and an LED array member (LAM). In a first aspect, active circuitry is embedded in the ICM. The circuitry monitors LED operation, controls and supplies power to the LEDs, and communicates information into and out of the assembly. A thermal insulator is disposed between the ICM and a heat sink outside the lateral boundary of the LAM. In a second aspect, a lighting system comprises an AC-to-DC converter and a LAM/ICM assembly. The AC-to-DC converter outputs a substantially constant current or voltage. The magnitude of the current or voltage is adjusted by a signal output from the LAM/ICM. In a third aspect, the ICM includes a built-in switching DC-to-DC converter. An AC-to-DC power supply supplies a roughly regulated supply voltage. The switching converter within the LAM/ICM receives the roughly regulated voltage and supplies a regulated LED drive current to its LEDs.Type: GrantFiled: January 30, 2014Date of Patent: January 26, 2016Assignee: Bridgelux, Inc.Inventors: Michael Neal Gershowitz, R. Scott West, Babak Imangholi
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Patent number: 9164001Abstract: A light-emitting diode (LED) device includes first and second LED dies with the same structure and that are both encapsulated by the same silicone layer. The first LED is supplied with sufficient drive current to illuminate the LED. Control circuitry supplies the second LED with a constant current, determines the voltage across the second LED, and calculates the temperature of the second LED based on the voltage across the second LED. The constant current has a maximum magnitude that never exceeds the maximum magnitude of the drive current. The LED device is able to calculate the temperature of a diode with a gallium-nitride layer (GaN or GaInN) that is receiving a large drive current and emitting blue light by determining the voltage across an adjacent similar diode with a gallium-nitride layer through which a small constant current is flowing. Preferably, the band gap of the LEDs exceeds two electron volts.Type: GrantFiled: June 28, 2013Date of Patent: October 20, 2015Assignee: Bridgelux, Inc.Inventors: Babak Imangholi, Michael Neal Gershowitz, R. Scott West
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Patent number: 9075238Abstract: A fluorescence microscope includes: a light source that emits excitation light for exciting a sample; an optical detector that detects fluorescence emitted from the sample excited by the excitation light; a first wavelength selection filter arranged in an optical path leading from the light source to the sample to reflect at least an S-polarized component of the excitation light and transmit the fluorescence; and a second wavelength selection filter arranged in an optical path between the optical detector and the first wavelength selection filter to reflect at least the S-polarized component of the excitation light and transmit the fluorescence. In the fluorescence microscope, light entering and transmitted through the first wavelength selection filter as P-polarized light enters the second wavelength selection filter as S-polarized light.Type: GrantFiled: December 5, 2011Date of Patent: July 7, 2015Assignee: OLYMPUS CORPORATIONInventor: Daisuke Nishiwaki
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Patent number: 8917385Abstract: Volcanic ash is identified within a field of regard (FOR) by obtaining spectral radiance data comprising brightness temperature values over a specified spectral range for each field of view (FOV) within the FOR, determining a baseline brightness temperature value over the specified spectral range that is identified as representing no volcanic ash, and assigning one or more FOVs having brightness temperature values that deviate from the baseline brightness temperature value by a predetermined amount with an indication of containing volcanic ash.Type: GrantFiled: October 2, 2012Date of Patent: December 23, 2014Assignee: Excelis Inc.Inventors: Christopher E. Lietzke, Ronald J. Glumb
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Patent number: 8705050Abstract: A mechanism for providing thermal compensation when measuring surface topography at an elevated temperature using a non-contact vibration transducer, such as a laser Doppler vibrometer (LDV). Thermal compensation is provided to a detector output signal to correct for thermal diffraction of a reflected portion of a beam of radiant energy directed at a surface of a test object. The thermal compensation is based on a calculated deviation between the detector output signal r2 at an elevated temperature and the detector output signal r1 at approximately room temperature.Type: GrantFiled: October 6, 2010Date of Patent: April 22, 2014Assignee: International Business Machines CorporationInventor: Arvind K. Sinha
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Patent number: 8669722Abstract: A light-emitting diode (LED) lamp includes a number of different color LEDs that can be turned on and off in different combinations using an external switch operable by a user. A user or a controller can adjust the color temperature of light output by the lamp. The color temperature change may be a user preference and can compensate for decreased phosphor efficiency over time.Type: GrantFiled: August 12, 2011Date of Patent: March 11, 2014Assignee: TSMC Solid State Lighting Ltd.Inventors: Wei-Yu Yeh, Chih-Hsuan Sun
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Publication number: 20130118183Abstract: An optical sensor system includes a multi-color pyrometer in optical communication with a component. The pyrometer generates signals at least partially representative of radiation received from the component and from soot particles. The system includes at least one processing unit coupled to the pyrometer. The processing unit is programmed to receive the signals and distinguish portions of radiation received between at least two wavelength bands. The processing unit is also programmed to determine that a first portion of radiation within a first of the wavelength bands is representative of a temperature of soot particles and that a second portion of radiation within a second of the wavelength bands is representative of a temperature of the component. The processing unit is further programmed to filter out signals representative of the first portion of the radiation.Type: ApplicationFiled: November 14, 2011Publication date: May 16, 2013Applicant: General Electric CompanyInventors: Guanghua Wang, Anquan Wang, Nirm Velumylum Nirmalan, Jordi Estevadeordal, Sean Patrick Harper, Bradford Allen Lewandowski
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Publication number: 20130038222Abstract: A light-emitting diode (LED) lamp includes a number of different color LEDs that can be turned on and off in different combinations using an external switch operable by a user. A user or a controller can adjust the color temperature of light output by the lamp. The color temperature change may be a user preference and can compensate for decreased phosphor efficiency over time.Type: ApplicationFiled: August 12, 2011Publication date: February 14, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Yu YEH, Chih-Hsuan SUN
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Patent number: 8274644Abstract: A system (100) for sensing a temperature of a light emitting diode (LED). The system may comprise an LED having a spectral output centered at a first wavelength, a first filter (104) that transitions from attenuation to transmission at about the first wavelength, and a second filter (106) that transitions from transmission to attenuation at about the first wavelength. The system may also comprise a first sensor (108) positioned to sense a first intensity of the LED through the first filter and a second sensor (110) positioned to sense a second intensity of the LED through the second filter. It will be appreciated that a single sensor may be substituted instead of the first and second sensors, provided that the single sensor is capable of selectively viewing the LED through the first and the second filters. The system may also comprise a computer (112) configured to derive a temperature of the LED considering the first intensity and the second intensity.Type: GrantFiled: August 15, 2006Date of Patent: September 25, 2012Assignee: X-Rite, Inc.Inventors: Jon K. Nisper, Michael J. Mater
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Publication number: 20120092646Abstract: The invention relates to a sensor having a filter arrangement, downstream of which there is arranged a detector arrangement, and an evaluating device which is connected to the detector arrangement, the filter arrangement has at least a first filter, the suspect filter, which is configured as a band pass filter allowing the passage of a first predetermined band, the suspect band, at least one second filter, the reference filter(s), which is configured as band pass filters allowing the passage of a second predetermined band(s), the reference band(s), and where the detector arrangement has at least one detector associated with the at least one of the filters. The sensor uses the band pass filters to measure the temperature of an emitting source. The sensor with advantage could be utilized within the IR band, and could advantageously be used to detect CO2.Type: ApplicationFiled: April 16, 2010Publication date: April 19, 2012Applicant: DANFOSS IXA A/SInventors: Thomine Stolberg-Rohr, Jens Moeller Jensen, Arun Krishna, Lars Munch, Rainer Buchner, Henrik Gedde Moos
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Publication number: 20110091391Abstract: Discrete sensing elements are described that can be integrated into dental hygiene products and can provide rapid and direct feedback to a user as to oral environmental status and as to the performance of the intended oral care product. Selectively tuned elements can both sense and report relevant information including usage time, adequacy of performance during use, training for better usage, and/or the physical or biological status as can be measured by direct oral contact. Sensing and reporting mechanisms can be tuned for increased or decreased sensitivities. Sensing elements can comprise one or more discrete optical changes, structural changes, or other physical changes to the dental hygiene product as a means of alerting a user of a stimulus. Use of optical reference colors provides a high level of accuracy and objectivity as to the status of a sensing event. Enabling delivery and application compositions and methods are described.Type: ApplicationFiled: November 14, 2006Publication date: April 21, 2011Inventor: Hans O. Ribi
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Publication number: 20100128254Abstract: A system (100) for sensing a temperature of a light emitting diode (LED). The system may comprise an LED having a spectral output centered at a first wavelength, a first filter (104) that transitions from attenuation to transmission at about the first wavelength, and a second filter (106) that transitions from transmission to attenuation at about the first wavelength. The system may also comprise a first sensor (108) positioned to sense a first intensity of the LED through the first filter and a second sensor (110) positioned to sense a second intensity of the LED through the second filter. It will be appreciated that a single sensor may be substituted instead of the first and second sensors, provided that the single sensor is capable of selectively viewing the LED through the first and the second filters. The system may also comprise a computer (112) configured to derive a temperature of the LED considering the first intensity and the second intensity.Type: ApplicationFiled: August 15, 2006Publication date: May 27, 2010Inventors: Jon K. Nisper, Michael J. Mater
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Patent number: 7718968Abstract: A detector assembly for imaging a scene over a predetermined temperature range and a predetermined wavelength range including a central wavelength includes an imaging-sensor array, a plurality of focusing elements and a plurality of optical filtering elements. The imaging-sensor array includes a plurality of detector-array sections and the focusing elements are arranged with respect to the detector array such that each focusing element is capable of focusing upon a corresponding one of the detector-array sections an image of the scene correlating to the image of the scene that each of the other focusing elements is capable of focusing upon the detector-array section corresponding thereto. Each focusing element and the detector-array section corresponding thereto defines an associated optical path.Type: GrantFiled: January 14, 2008Date of Patent: May 18, 2010Assignee: Solid State Scientific CorporationInventor: James E. Murguia
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Patent number: 7435010Abstract: Disclosed is a method of forming an optical monitoring or transmitting light guide and a resulting apparatus that begins by bonding a bundle of optical fibers together using an epoxy and polishing the distal end of the bundle of optical fibers to create an optical aperture. The ratio of fiber size to binder particulate size of the epoxy used in the bonding process is sufficient to maintain the integrity of the bundle of optical fibers during the polishing of the distal end. The method positions the bundle of optical fibers into a protective sheath and a connector. The coefficient of thermal expansion of the epoxy used in the bonding process matches that of the connector. Once assembled, the invention positions the connector through the opening in the surface of a device, such that the distal end of the bundle of optical fibers is either recessed in, substantially flush with, or extends from the surface of the device through which the connector extends, depending on field-of-view requirements.Type: GrantFiled: January 3, 2007Date of Patent: October 14, 2008Assignee: The Johns Hopkins UniversityInventors: Leo R. Gauthier, Jr., James E. McDonald, Louis A. Mattes
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Patent number: 7075629Abstract: A pyrometer having at least two detectors and at least two band-pass filters near each to limit the detectable wavelength band emitted by an object, and a device to exchange their filters to eliminate detector output ratio errors. The detector output ratio is then used to derive the color temperature of the object, which may have fast changes in emission intensity output.Type: GrantFiled: May 12, 2003Date of Patent: July 11, 2006Assignee: Honeywell International Inc.Inventors: Ulrich Bonne, Barrett E. Cole, Roland A. Wood, Rudolph Dudebout, Emmanuel Nwadiogbu
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Patent number: 6976782Abstract: In a plasma processing system, a method of determining the temperature of a substrate is disclosed. The method includes positioning the substrate on a substrate support structure, wherein the substrate support structure includes a chuck. The method further includes creating a temperature calibration curve for the substrate, the temperature calibration curve being created by measuring at least a first substrate temperature with an electromagnetic measuring device, and measuring a first chuck temperature with a physical measuring device during a first isothermal state. The method also includes employing a measurement from the electromagnetic measurement device and the temperature calibration curve to determine a temperature of the substrate during plasma processing.Type: GrantFiled: November 24, 2003Date of Patent: December 20, 2005Assignee: Lam Research CorporationInventor: Robert J. Steger
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Patent number: 6908770Abstract: A system for the rapid characterization of multi-analyte fluids, in one embodiment, includes a light source, a sensor array, and a detector. The sensor array is formed from a supporting member into which a plurality of cavities may be formed. A series of chemically sensitive particles are, in one embodiment positioned within the cavities. The particles may be configured to produce a signal when a receptor coupled to the particle interacts with the analyte. Using pattern recognition techniques, the analytes within a multi-analyte fluid may be characterized.Type: GrantFiled: April 7, 1999Date of Patent: June 21, 2005Assignee: Board of Regents, The University of Texas SystemInventors: John T. McDevitt, Eric V. Anslyn, Jason B. Shear, Dean P. Neikirk
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Patent number: 6843202Abstract: A lamp house storing a plurality of flash lamps and a chamber storing and holding a semiconductor wafer are fitted to each other in an openable/closable manner. The lamp house and the chamber are fixed to a closed state with male screws. In order to process a semiconductor wafer, a shutter plate is drawn out to open an irradiation window. In this state, the shutter plate shields a space located above the male screws so that the male screws cannot be detached for opening the lamp house and the chamber. In order to open the lamp house and the chamber, the shutter plate must be inserted for shielding the irradiation window while opening the space located above the male screws. Thus, a thermal processing apparatus capable of preventing the lamps from breaking during maintenance thereof is provided.Type: GrantFiled: July 17, 2003Date of Patent: January 18, 2005Assignee: Dainippon Screen Mfg. Co., Ltd.Inventor: Tatsufumi Kusuda
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Patent number: 6814484Abstract: Method and apparatus for measuring a surface temperature of an object body, by calculating a temperature at each picture element of an image of the object body, on the basis of a radiant intensity ratio at each pair of corresponding picture elements of a first and a second image which are obtained with respective radiations having respective first and second wavelengths which are selected from a light emitted from the surface of the body, by a first filter which permits transmission therethrough a radiation having the first wavelength which is selected according to a radiant-intensity curve corresponding to a wavelength of a black body at a lower limit of a temperature measurement range, and which is within a high radiant-intensity range in which the radiant intensity is higher than a radiant intensity at a normal room temperature, and a second filter which permits transmission therethrough a radiation having the second wavelength which is selected within the high radiant-intensity range, such that the secondType: GrantFiled: July 1, 2002Date of Patent: November 9, 2004Assignees: Noritake Co., LimitedInventors: Kenji Yano, Misao Iwata, Miyuki Hashimoto, Kuniyuki Kitagawa, Norio Arai
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Publication number: 20030107724Abstract: Method and apparatus for measuring a surface temperature of an object body, by calculating a temperature at each local portion of an image of the object body, on the basis of a radiant intensity ratio at each pair of corresponding local portions of a first and a second image which are obtained by respective first and second photosensitive areas of an image detector, which detect respective radiations having respective first and second wavelengths selected from a light emitted from the surface of the body, wherein the image detector is constructed such that each pair of mutually corresponding two photosensitive elements in the respective first and second photosensitive areas, which corresponds to each pair of mutually corresponding two local portions of the first and second images, has a percentage of difference in light sensitivity of not higher than 0.25%.Type: ApplicationFiled: October 4, 2002Publication date: June 12, 2003Applicants: NORITAKE CO., LIMITED, Kuniyuki KITAGAWAInventors: Miyuki Hashimoto, Kenji Yano, Misao Iwata, Kuniyuki Kitagawa, Norio Arai, Satoshi Arai
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Patent number: 6406179Abstract: A temperature sensor for measuring a temperature of a substrate in a thermal processing chamber is described. The chamber includes a reflector forming a reflecting cavity with a substrate when the substrate is positioned in the chamber. The temperature sensor includes a probe having an input end positioned to receive radiation from the reflecting cavity, and a detector optically coupled to an output end of the probe. The radiation entering the probe includes reflected radiation and non-reflected radiation. The detector measures an intensity of a first portion of the radiation entering the probe to generate a first intensity signal and measures an intensity of a second portion of the radiation entering the probe to generate a second intensity signal. The detector is configured so that a ratio of the reflected radiation to the non-reflected radiation is higher in the first portion than the second portion. The two intensity signals are used to calculate the temperature and emissivity of the substrate.Type: GrantFiled: January 8, 2001Date of Patent: June 18, 2002Assignee: Applied Materials, Inc.Inventors: Bruce Adams, Aaron Hunter, Alex Rubinchik, Mark Yam, Paul A. O'Brien
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Patent number: 6057912Abstract: A method to compensate for lamp spectrum shift, comprises exposing a first detector to a first light from a lamp, thereby generating a first signal indicative of intensity of said first light; exposing a second detector to a wavelength (.lambda.) of a second light from said lamp, thereby generating a second signal indicative of intensity of said wavelength of said second light, after said second light has interacted with a sample; determining a new color temperature (T.sub.1) of said first light using the following equationT.sub.1 =(F.sub.1 /A).sup.1/xwhere A=F.sub.i /(T.sub.i).sup.x,x=a color temperature exponent of said lamp, F.sub.1 =said first signal, F.sub.i =an initial reference signal, and T.sub.i =an initial color temperature corresponding to said initial reference signal; and determining a first compensated signal (I.sub.1) using the following equationI.sub.1 32 S.sub.1 /B.sub.1where ##EQU1## S1=said second signal, h=Planck's constant, c=speed of light in vacuum, and k=Boltzman constant.Type: GrantFiled: February 11, 1999Date of Patent: May 2, 2000Assignee: UMM Electronics, Inc.Inventors: Mike Celentano, Greg Wiley
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Patent number: 6016190Abstract: A method of true temperature determination, including, (a) acquiring radiation emitted by an object at a plurality of wavelengths (50), (b) determining a characteristic of the acquired radiation which is based on a relationship between radiative emissions acquired at more than one wavelength (50), (c) determining a factor related to an error, using the characteristic (54) and calculating a current temperature of the object based on the correctional factor (56). Preferably, the factor is a vector of values indicating at least one emissivity value.Type: GrantFiled: March 6, 1998Date of Patent: January 18, 2000Assignee: 3T True Temperature TechnologiesInventor: Evgeny Glazman
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Patent number: 5993194Abstract: Systems and methods are disclosed that optimize the combustion process in various reactors, furnaces, and internal combustion engines. Video cameras are used to evaluate the combustion flame grade. Depending on the desired form, standard or special video devices, or beam scanning devices, are used to image the combustion flame and by-products. The video device generates and outputs image signals during various phases of, and at various locations in, the combustion process. Other forms of sensors monitor and generate data signals defining selected parameters of the combustion process, such as air flow, fuel flow, turbulence, exhaust and inlet valve openings, etc. In a preferred form, a neural networks initially processes the image data and characterizes the combustion flame. A fuzzy logic controller and associated fuzzy logic rule base analyzes the image data from the neural network, along with other sensor information.Type: GrantFiled: June 21, 1996Date of Patent: November 30, 1999Inventors: Jerome H. Lemelson, Robert D. Pedersen, John H. Hiett
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Patent number: 5963311Abstract: An optical pyrometer and method of use provides a dual path optical system for processing light from a radiating stationary object or a moving thermal stream. Light is collected by primary optics forming an intermediate image in a plane of a field limiting aperture for establishing a preferred field of view. The light is then split into a pair of complimentary beams with one beam directed through a long wavelength filter and the other directed through a short wavelength filter. Both beams then move through separate secondary optics and are then rejoined and directed as normal non-overlapping and adjacent images onto a digitizing detector for capturing the images. Signals from the detector are handled by a computer where a ratio mapping of pair of signals from corresponding points on the two images is constructed and displayed on a monitor for viewing a temperature map of the object or thermal stream.Type: GrantFiled: September 12, 1997Date of Patent: October 5, 1999Assignee: Stratonics, Inc.Inventors: James E. Craig, Ronald A. Parker, David Y. Lee, Ernesto Hurtado
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Patent number: 5874711Abstract: The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semiconductive wafer, by sampling from the object radiation being emitted at a particular wavelength. In particular, a reflective device is placed adjacent to the radiating object. The reflective device includes areas of high reflectivity and areas of low reflectivity. The radiation being emitted by the object is sampled within both locations generating two different sets of radiation measurements. The measurements are then analyzed and a correction factor is computed based on the optical characteristics of the reflective device and the optical characteristics of the wafer. The correction factor is then used to more accurately determine the temperature of the wafer. Through this method, the emissivity of the wafer has only a minor influence on the calculated temperature.Type: GrantFiled: April 17, 1997Date of Patent: February 23, 1999Assignee: AG AssociatesInventors: Robert J. Champetier, Avner Man, Arnon Gat, Ram Z. Fabian
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Patent number: 5822222Abstract: An apparatus and method for non-contact real-time measurements of temperature and emissivity profiles of radiant targets with unknown spectral emissivity. The selected points or regions on the radiant target are imaged onto an array of photodetectors through an assembly of narrow-band optical filters. Produced multi-wavelength images of the radiant target are processed by the computer workstation and 1D or 2D temperature and emissivity profiles are obtained by means of the curve-fitting of radiometric model of imager sensor response to measured response and performing spatial interpolation of the results. Method for calibration of said apparatus by means of curve-fitting of radiometric model of the apparatus to sensor responses obtained by imaging pre-calibrated blackbody. Method for compensation for inherent non-linearities of pyrometer response.Type: GrantFiled: April 5, 1995Date of Patent: October 13, 1998Assignee: New Jersey Institute of TechnologyInventors: Michael B. Kaplinsky, Walter F. Kosonocky, Nathaniel J. McCaffrey
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Patent number: 5714392Abstract: A broadband pyrometer is used for sensing temperature of a semiconductor wafer in an RTA system in association with a monochromator to cancel the backside characteristics of the semiconductor wafer. A rapid thermal anneal (RTA) system includes a rapid thermal anneal (RTA) chamber, a heating lamp arranged in the vicinity of the RTA chamber for heating interior to the RTA chamber, a broadband pyrometer disposed in the vicinity of the RTA chamber and directed to measure interior to the RTA chamber, and a grating monochromator connected to the broadband pyrometer.Type: GrantFiled: July 26, 1996Date of Patent: February 3, 1998Assignee: Advanced Micro Devices, Inc.Inventors: Robert Dawson, Frederick N. Hause, Charles E. May
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Patent number: 5641419Abstract: The radiation generated by at least one radiation source is controlled so as to generate a constant radiation intensity, thereby to cause the object to be heated, and the radiation intensity from the object at a first wavelength is sensed until it is equal to the present radiation intensity generated by the at least one radiation source, whereby the temperature of the object has a predetermined value. From that time on, the development of the actual temperature of the object is controlled accurately according to a predetermined program merely by sensing the radiation intensity from the object at a second wavelength larger than the first wavelength, and using the measuring signal representative of the sensed radiation intensity to continuously control the radiation intensity generated by the at least one radiation source.Type: GrantFiled: June 17, 1994Date of Patent: June 24, 1997Inventor: Peter Vandenabeele
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Patent number: 5565990Abstract: A photographic color temperature meter capable of measuring light including stationary light and flash light. The meter controls timing of light measurements so that light measurement is performed during the time when stationary light and flash light are included and when only stationary light is included. Thereafter, calculation of color temperature only of flash light is performed.Type: GrantFiled: February 17, 1993Date of Patent: October 15, 1996Assignee: Minolta Camera Kabushiki KaishaInventors: Norihisa Hosoi, Seiki Yamaguchi, Mikio Uematsu, Yoshihiro Okui
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Patent number: 5507576Abstract: A bichromatic pyrometer for detecting the high temperature of a surface element of an object comprises two photodiodes (18, 19) receiving radiation from the object, each of the photodiodes having a large forbidden band and being sensitive to radiation in a given range of wavelengths, said sensitivity ranges being different and being situated in the visible or near visible regions of the spectrum, said ranges being obtained by selecting the value of the forbidden band of the material constituting each of the photodiodes (18) and (19), said forbidden band being greater than or equal to that of silicon (.gtoreq.1.11 eV). The pyrometer is capable of measuring rapidly changing surface temperatures with great accuracy.Type: GrantFiled: March 30, 1994Date of Patent: April 16, 1996Assignee: European Gas Turbines SAInventor: Jacques Fally
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Patent number: 5469265Abstract: The present invention discloses a method for demodulating, processing and multiplexing the signals from an array of structurally integrated Bragg grating laser sensors in an optoelectronic element in order that this sensing information can be transmitted from the structure by means of a single channel and a user friendly interconnect or free-space propagation. The invention also discloses a method for determining the wavelength of narrowband optical signals such as arises from Bragg grating laser sensors and includes, for each sensor, processing the optical signal through a spectral filter with a spectral transmission function that can be accurately translated by a control parameter which has been calibrated with respective to wavelength. The filtered signal is compared to the reference signal at different values of the control parameter to determine a value of the control parameter where a predetermined relationship of the spectrally filtered signal and the reference signal is achieved.Type: GrantFiled: December 2, 1992Date of Patent: November 21, 1995Inventors: Raymond M. Measures, Tino Alavie, Serge M. Melle, Trent Coroy, Beck Mason, Shawn E. Karr, Kexing Liu
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Patent number: 5387969Abstract: Positions of the spindles (116-124) of a multi-axis drilling machine (130,132,140,142) are precisely measured by three scanning laser beams (165,167,169). The scanning laser beams are swept in oscillating sweeps across areas of motion of each of three corner reflectors (160,162,164) that are fixedly mounted to an unguided spindle carrying structural beam (132) that is driven by three screw actuators (150,152,154). Each scanning laser beam is projected from a fixed reference position and tracks one of the corner reflectors. Each beam locks onto its associated corner reflector, and, while locked on, an interferometer (180,190,198) measures incremental changes of the distance between each scanning mirror (166,168,170) and its corner reflector.Type: GrantFiled: June 22, 1993Date of Patent: February 7, 1995Assignee: Optima Industries, Inc.Inventor: William F. Marantette
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Patent number: 5388115Abstract: An absolute length measuring apparatus comprising light sources, a beam splitter, an object of measurement, a scanning mirror, a light receiver, sampling parts and a distance measuring part. The light sources emit alternately a plurality of coherent light beams having different wavelengths. The beam splitter splits the coherent light beam from the light sources into two optical paths. The object of measurement is located on one of the two optical paths stemming from the beam splitter. The scanning mirror is located on the other optical path stemming from the beam splitter and made movable in the direction of optical axis. The light receiver receives both the reflected light beam from the object of measurement and the reflected light beam from the scanning mirror through the beam splitter. The sampling parts generate sampling signals of various wavelengths by sampling the output of the light receiver every time the light sources emit a coherent light beam while scanned by the scanning mirror.Type: GrantFiled: May 17, 1993Date of Patent: February 7, 1995Assignee: Kabushiki Kaisha TopconInventors: Hiroyuki Kawashima, Fumio Ohtomo, Susumu Saito, Isao Minegishi
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Patent number: 5372426Abstract: A thermal condition sensor system monitors equipment such as aircraft engines. The thermal condition sensor system includes a collector which collects radiation from the equipment and a detector assembly which detects collected radiation over a discriminating spectral band region in at least three spectral bands and generates signals representative of detected radiation in each spectral band. A processor receives the signals and generates a report of the thermal conditions of the equipment using interband comparison of the at least three spectral bands.Type: GrantFiled: December 22, 1993Date of Patent: December 13, 1994Assignee: The Boeing CompanyInventors: Robert M. Broudy, Edward C. Goldstick, David A. Holm, Federick B. Holt, Alan N. Iverson, Dietrich E. Riemer
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Patent number: 5319439Abstract: In a stationary wave interpolator for detecting very rapid movements of objects with high resolution in real-time operation, the mode distance frequency of a laser is fed to a first conductive path and the mode distance frequency plus/minus the Doppler shift is fed to a second conductive path. The two conductive paths are connected by double balanced mixers which are connected in parallel, whose reference inputs are connected to the first conductive path and whose measurement inputs are connected to the second conductive path. The outputs of the double balanced mixers are connected to a digital discriminator for decoupling a phase-shifted Doppler frequency.Type: GrantFiled: March 12, 1992Date of Patent: June 7, 1994Assignee: Carl Zeiss JENA GmbHInventors: Matthias Chour, Mario Netzel
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Patent number: 5315376Abstract: A concentration correcting apparatus comprising a correction coefficient calculating means and a correcting means is shown and described. The correction coefficient calculating means calculates a correction coefficient for correcting the concentration of the material when the actual density of the medium at the measurement of the material is calculated in terms of the density of the medium under the reference temperature and pressure, from the results of the temperature measuring means and the pressure measuring means. The correcting means corrects the results of the material measuring means to a concentration under the reference temperature and pressure on the basis of the correction coefficient.Type: GrantFiled: October 11, 1991Date of Patent: May 24, 1994Assignees: JASCO Corporation, Nippondenso Co., Ltd.Inventors: Akio Wada, Mitsuo Watanabe, Yoshikazu Yuki, Kazunori Ebisawa, Masashi Nishimoto, Kazuhisa Hayashi, Kiyoharu Kutsuna, Takehito Mizutani
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Patent number: 5311279Abstract: Apparatus for measurement of light waves with an unbalanced optical interferometer. The apparatus consists of waveguides on a flat substrate material characterized by direction-dependent thermal expansion. Thermal compensation is achieved without active regulation by a predetermined spatial arrangement and length ratio of the light paths so that the optical lengths of the two waveguides change by precisely the same amount. As a result, the optical path difference is independent of temperature changes.Type: GrantFiled: November 12, 1992Date of Patent: May 10, 1994Assignee: Litef GmbHInventor: Martin Wendler