Abstract: An Etalon filter includes a first substrate, a second substrate which faces the first substrate, a first optical film which is provided on the first substrate, and a second optical film which is provided on the second substrate to face the first optical film. The reflective characteristic of the first optical film determined by the reflectance of light of each wavelength in a reflective band is different from the reflective characteristic of the second optical film determined by the reflectance of light of each wavelength in the reflective band. The first optical film can have a reflective characteristic with a first wavelength ?1 as a center wavelength, and the second optical film can have a reflective characteristic with a second wavelength ?2 different from the first wavelength as a center wavelength.

Abstract: A portion of a first portion of light (13, 90, 90?) from a source of light (11) is masked by a mask (138), and the resulting masked first portion of light (90?) is combined using a beam splitter optic (136) with at least one second portion of the light (30) that had been subject to scattering by a medium (20, 20?, 20?). The mask (138) is configured so that interference patterns (104, 47) generated from the first and at least one second portions of light are substantially mutually exclusive even though those interference patterns (104, 47) would otherwise overlap one another absent the mask (138).

Abstract: A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: A colorimetric sensor includes an etalon including a first substrate, a second substrate facing the first substrate, a fixed mirror formed on a surface of the first substrate facing the second substrate, and a movable mirror formed on the second substrate so as to face the fixed mirror with a prescribed gap therebetween, a light receiving element that receives a test subject light having passed through the etalon, and a holding member holding the etalon. The etalon includes a light interference area facing the first and second substrates in a plan view as seen in a thickness direction of the substrate, and a protruding area protruding from the light interference area. The holding member holds the etalon at one end side of the protruding area opposite to the light interference area.

Abstract: An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Abstract: A spectrometer includes: a tungsten lamp which emits light with no peak wavelength within a wavelength range of visible light and having a light amount increasing as the wavelength becomes longer; a violet LED which emits light having a peak wavelength within the wavelength range of visible light; a light mixer which mixes light emitted from the tungsten lamp and the violet LED; an etalon which receives light mixed by the light mixer and transmits light contained in the received mixed light and having a particular wavelength; a light receiving unit which receives light transmitted by the etalon; and a measurement control unit which changes the wavelength of light that can pass through the etalon and measures spectral characteristics of the light having passed through the etalon based on the light received by the light receiving unit.

Abstract: In accordance with the present invention, a dual-gas Raman sensor is provided that is based on an enhanced spontaneous dual emission as a result of cavity quantum electrodynamic effects. The dual-gas sensor includes a first reflector that exhibits a high reflectivity near the Raman shifted emission for the first species of interest and a moderate reflectivity near the Raman shifted emission for the second species of interest and a second reflector that exhibits a high reflectivity near the Raman shifted emission for the first species of interest and a moderate reflectivity near the Raman shifted emission for the second species of interest, allowing for the simultaneous measurement of the density of both the first species of interest and the second species of interest.

Abstract: A spectrophotometer includes a plurality of sensor elements arranged together, each sensor element including a filter; a light sensor optically coupled with an output of the filter; and a barrier that surrounds the filter and light sensor and a space between the filter and light sensor. For each sensor element, the barrier blocks light that has not passed through the filter from reaching the light sensor including such that light from one sensor element is not detected by another of the sensor elements.

Abstract: A spectrometer includes: a tungsten lamp which emits light with no peak wavelength within a wavelength range of visible light and having a light amount increasing as the wavelength becomes longer; a violet LED which emits light having a peak wavelength within the wavelength range of visible light; a light mixer which mixes light emitted from the tungsten lamp and the violet LED; an etalon which receives light mixed by the light mixer and transmits light contained in the received mixed light and having a particular wavelength; a light receiving unit which receives light transmitted by the etalon; and a measurement control unit which changes the wavelength of light that can pass through the etalon and measures spectral characteristics of the light having passed through the etalon based on the light received by the light receiving unit.

Abstract: An environmental condition sensing device includes an interferometric modulator with optical properties, which change in response to being exposed to a predetermined environmental threshold or condition. The device includes an environmental reactive layer, which alters composition, in an optically-detectable manner, in response to being exposed to a predetermined environmental threshold or condition.

Abstract: A spectral measurement device includes: an optical band-pass filter section that has first to n-th wavelengths (n is an integer of 2 or more) having a predetermined wavelength width as a spectral band thereof; a correction operation section that corrects a reception signal based on an output optical signal from the optical band-pass filter section; and a signal processing section that executes predetermined signal processing based on the reception signal corrected by the correction operation section that corrects the reception signal based on the change in the spectral distribution of the reception signal.

Abstract: A cholesteric liquid crystal device is provided. The cholesteric liquid crystal device includes a first substrate, a second substrate disposed opposite to the first substrate, a first reflective layer disposed over the first substrate, a second reflective layer disposed over the second substrate, facing the first reflective layer, and a partition structure disposed between the first and the second substrates, wherein a cavity is formed by the partition structure, the first reflective layer and the second reflective layer, and a cholesteric liquid crystal layer is filled in the cavity.

Abstract: In an embodiment, a dual-etalon cavity-ring-down frequency-comb spectrometer system is described. A broad band light source is split into two beams. One beam travels through a first etalon and a sample under test, while the other beam travels through a second etalon, and the two beams are recombined onto a single detector. If the free spectral ranges (“FSR”) of the two etalons are not identical, the interference pattern at the detector will consist of a series of beat frequencies. By monitoring these beat frequencies, optical frequencies where light is absorbed may be determined.

Abstract: A method for reducing fringe interference of light created in a passive cavity defined by partially reflecting optical surfaces in a laser spectroscopy system, wherein the optical path length of the cavity is varied with a triangular back-and-forth movement (x). In accordance with the invention, the spectroscopic measurement is performed in successive measurement cycles with a time interval between each two successive measurement cycles, the triangular movement is performed such that the turning points of the triangular movement (x) are positioned in successive ones of the time intervals, and after each or at each n-th measurement cycle, the time position of the turning points is moved relative to the measurement cycle.

Abstract: A system (10) for directly measuring the depth of a high aspect ratio etched feature on a wafer (80) that includes an etched surface (82) and a non-etched surface (84). The system (10) utilizes an infrared reflectometer (12) that in a preferred embodiment includes a swept laser (14), a fiber circulator (16), a photodetector (22) and a combination collimator (18) and an objective lens (20). From the objective lens (20) a focused incident light (23) is produced that is applied to the non-etched surface (84) of the wafer (80). From the wafer (80) is produced a reflected light (25) that is processed through the reflectometer (12) and applied to an ADC (24) where a corresponding digital data signal (29) is produced. The digital data signal (29) is applied to a computer (30) that, in combination with software (32), measures the depth of the etched feature that is then viewed on a display (34).

Abstract: An apparatus is provided. The apparatus includes a laser source and a ring-down optical resonator that performs cavity ring-down spectroscopy, the optical resonator receives coherent optical energy from the laser, wherein an extinction rate of optical resonance within the optical resonator is at least 100 times longer than an extinction rate of optical energy emitted from the laser source first following deactivation of the laser source.

Abstract: An interference filter includes: a first substrate; a second substrate that faces one side of the first substrate and is bonded to the first substrate; a first reflection film formed on the side of the first substrate that faces the second substrate; and a second reflection film provided on the second substrate and faces the first reflection film, the first substrate including a first gap formation region in which the first reflection film is disposed and which is not contact with the second substrate, and wherein the first substrate and the second substrate are adhesively bonded to each other with the adhesive applied into the adhesive grooves with the first bonding region and the second bonding region bonded to each other.

Abstract: A component analyzer includes a casing, a light source unit, a light incident unit guiding light from a test object into the casing, a tunable interference filter extracting light having a predetermined wavelength from the incident light, an imaging unit receiving the extracted light and taking a spectroscopic image, a control unit performing a component analysis of the test object based on the spectroscopic images, and a display displaying a component analysis result. The light incident unit, the imaging unit, and the control unit are provided within the casing. The tunable interference filter includes a fixed substrate having a fixed reflection film and a movable substrate provided to face the fixed substrate and having a movable reflection film opposed to the fixed reflection film across a gap between reflection films, and an electrostatic actuator changing the gap between reflection films.

Abstract: The present invention relates to an apparatus for gas sensing including: a header part to generate interference wave to light from light source by the principle of fiber fabry-perot interferometer; and an optical spectrum analyzer to decide existence of specific gas based on change of spectrum periodicity of the interference wave, wherein the header part includes a sensing material that expands or shrinks by the above specific gas and the above interference wave changes its spectrum periodicity depending on expansion and shrinkage of the above sensing material.

Abstract: An etalon has an effective cavity length that can be tuned to compensate for temperature-dependent frequency shift and/or for random variations in the manufacturing process. The effective cavity length of an etalon is adjusted by changing the orientation of a tuning plate positioned in the etalon cavity. A screw adjustment and bending beam spring are used to change tuning plate orientation and precisely tune the etalon resonance frequency after the manufacturing process has been completed. Orientation of the tuning plate is adjusted during operation of the etalon using a passive thermal compensation mechanism, such as a bimetal support arm, which is fixed to the tuning plate and configured to reposition the tuning plate with changing temperature.

Abstract: A variable spectroscopic element in which a placed position of first sensor and a placed position of the third sensor are symmetrical and a placed position of second sensor and a placed position of fourth sensor are symmetrical with respect to a line connecting the centers of mass of the surfaces of a pair of optical substrates opposite to each other respectively and first to fourth actuators are arranged includes a control unit which calculates a distance between the centers of mass, a first angle that is made between the moved optical substrate and the other optical substrate and a second angle that is made between the other optical substrate and the moved optical substrate, with signals from the first to fourth sensors, and drives the first to fourth actuators on the basis of the distance between the centers of mass, the first angle, and the second angle.

Abstract: A self-referencing composite Fabry-Pérot cavity sensor, including methods of use and manufacture. The cavity sensor comprises a substrate defining a first cavity portion juxtaposed to a second cavity portion. The first and second cavity portions are provided having a predetermined depth offset. A polymer or other dielectric material is disposed within the first and second cavity portions. An interference spectrum resulting from a light source of a known wavelength is reflected through the sensor and produces a first refractive index from the first cavity portion offset by a second refractive index from the second cavity portion. The difference in refractive indices can be used to determine various physical parameters. An optical sensor according to the present technology may be used with vapor sensing, pressure sensing, protein detection, photo-acoustic imaging, and the like.

Abstract: In a tunable interference filter according to the invention, a second substrate includes a light transmission hole and alight transmissive member provided within the light transmission hole, and the light transmission hole is formed in a tapered shape having a diameter dimension of an inner circumferential surface increasing from the first surface toward the second surface, and the light transmissive member has a light incident surface in parallel to the first reflection surface and the second reflection surface, a light exiting surface in parallel to the first reflection surface and the second reflection surface, and a tapered side surface having a diameter dimension increasing from the first surface toward the second surface, and the tapered side surface is in contact with the inner circumferential surface of the light transmission hole.

Abstract: The variable spectroscopic element includes a pair of optical substrates 21-22, four sensors 31-34, four piezoelectric elements 41-44, and a control section. The sensors 31, 33 are arranged to form symmetry with respect to the center axis, which links gravity centers of mutually facing surfaces of the optical substrates 21-22, and so are the sensors 32, 34. The control section calculates, from signals of the sensors 31-34, a distance x between the gravity centers of the mutually facing surfaces, and angles ?, ? each of which is formed by a plane perpendicular to the center axis and the facing surface of the movable substrate 22, to drive the piezoelectric elements 41-44 on the basis of the distance x, the angles ?, ?, and to carry out feedback control and feed forward control with respect to at least one of the distance x, the angle ?, and the angle ?.

Abstract: A Fabry-Perot interferometer includes a fixed mirror structure and a movable mirror structure. The fixed mirror structure has a fixed mirror in a spectral region. The movable mirror structure includes a membrane spaced from the fixed mirror structure. The membrane has a movable mirror in the spectral region and multiple springs arranged one inside the other around the spectral region. A spring constant of the inner spring is less than a spring constant of the outer spring. One of the fixed mirror structure and the membrane has multiple electrodes, and the other of the fixed mirror structure and the membrane has at least one electrode that is paired with the electrodes to form opposing electrode pairs arranged one inside the other around the spectral region. The number of the opposing electrode pairs is equal to the number of the springs.

Abstract: A Fabry-Pérot tuneable filter device is described with reflecting elements separated by an optical path length to form an optical resonator cavity. A first actuator means is directly or indirectly coupled with a first reflecting element. And the first actuator means is configured to modulate the optical path length between first and second reflecting elements by a modulation amplitude to thereby sweep the optical resonator cavity through a band of optical resonance frequencies with a sweep frequency of 70 kHz or more. And the mechanical coupling between selected elements of the arrangement is sufficiently low such that when operated at the sweep frequency, the selected elements act as a system of coupled oscillating elements. In addition or alternatively, the first actuator means is directly or indirectly coupled with the first reflecting element so as to substantially drive the first reflecting element only.

Abstract: The use of optical microcavities, high-Q resonators and slow-light structures as tools for detecting molecules and probing conformations and measuring polarizability and anisotropy of molecules and molecular assemblies using a pump-probe approach is described. Resonances are excited simultaneously or sequentially with pump and probe beams coupled to the same microcavity, so that a pump beam wavelength can be chosen to interact with molecules adsorbed to the microcavity surface, whereas a probe beam wavelength can be chosen to non-invasively measure pump-induced perturbations. The induced perturbations are manifest due to changes of resonance conditions and measured from changes in transfer characteristics or from changes of the scattering spectra of a microcavity-waveguide system. The perturbations induced by the pump beam may be due to polarizability changes, changes in molecular conformation, breakage or formation of chemical bonds, triggering of excited states, and formation of new chemical species.

Abstract: A variable spectroscopic element in which a placed position of first sensor and a placed position of the third sensor are symmetrical and a placed position of second sensor and a placed position of fourth sensor are symmetrical with respect to a line connecting the centers of mass of the surfaces of a pair of optical substrates opposite to each other respectively and first to fourth actuators are arranged includes a control unit which calculates a distance between the centers of mass, a first angle that is made between the moved optical substrate and the other optical substrate and a second angle that is made between the other optical substrate and the moved optical substrate, with signals from the first to fourth sensors, and drives the first to fourth actuators on the basis of the distance between the centers of mass, the first angle, and the second angle.

Abstract: A spectral imaging apparatus includes: a spectral transmittance variable element having a spectral transmittance characteristics such that a transmittance periodically varies with wavelength and being capable of changing the variation period, for converting light from an object under observation into light having a plurality of peak wavelengths; a light extracting device for extracting, from the light having a plurality of peak wavelengths, light for imaging that contains a peak wavelength proximate to a predetermined command wavelength designated by a user and light for calibration that contains a peak wavelength other than the peak wavelength proximate to the command wavelength; an image sensor for capturing an image of the object under observation formed of the light for imaging; a detector for detecting, from the light for calibration, the peak wavelength other than the peak wavelength proximate to the command wavelength; and a control unit including, an operation processing section that calculates the pe

Abstract: A spectrometer has a multi-input aperture for admitting an input wavefront and an array of multiple waveguide structures terminating at the multi-input aperture. The input wavefront is incident on each of the waveguide structures, which provide a dispersive function for the input wavefront. Interferometers are formed by elements of the waveguide structures. The interferometers have different optical path length differences (OPDs). The interferometers provide a wavelength responsive output for spatially extended light sources. The output of the interferometers is detected with a detector array. The spectrometer has an improved etendue, and in some embodiments very high resolution.

Abstract: The invention relates to an optical detector device (1) for generating at least one electrical output signal in response to a received beam of light, comprising an optical band-pass filter (3a), adapted to receive the beam of light and to provide a filtered beam of light, which filter (3a) has a transmission wavelength which increases in direction of at least one axis (4) and an array of detector elements (2) arranged in direction of the axis (4) to receive the filtered beam of light for generating the electrical output signal.

Abstract: A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ?1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.

Abstract: A plasmonic Fabry-Perot filter includes a first partial mirror and a second partial mirror separated from the first partial mirror by a gap. At least one of the first partial mirror or the second partial mirror includes an integrated plasmonic optical filter array.

Abstract: A method for analyzing an optical signal comprising: directing the optical signal into a scanning spectrometer system comprising a variable-wavelength filter and a detector; continuously modulating the variable-wavelength filter at a given modulation frequency to produce a time-based waveform; measuring the time-based waveform with the detector; converting the time-based waveform into a frequency spectrum comprising harmonics of the modulation frequency; and comparing the harmonics of the modulation frequency to premeasured harmonic spectra in a reference database.

Abstract: Systems and methods for performing spectral-spatial mapping in (one and two dimensions) and coded spectroscopy are described. At least one embodiment includes a system for performing spectral-spatial mapping and coded spectroscopy comprising a cylindrical beam volume hologram (CBVH), the CBVH configured to receive input beams and generate diffracted beams in a first direction to perform spectral-spatial mapping, the CBVH further configured to allow input beams to pass in a second direction orthogonal to the first direction unaffected. The system further comprises a first lens configured to receive the diffracted beams and perform a Fourier transform on the input beams in the first direction, a second lens configured to receive the diffracted beams and focus the beams in the second direction to generate output beams, and a charged coupled device (CCD) configured to receive the outputs beams, the output beams used to provide spectral analysis of the input beams.

Abstract: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

Abstract: Systems and methods for performing two-dimensional (2D) high resolution spectral-spatial mapping are described. At least one embodiment includes a spectrometer for performing two-dimensional (2D) high resolution spectral-spatial mapping comprising a Fabry-Perot component configured to receive a diffuse input beam and provide a high resolution spectral mapping of the diffuse input beam in a first direction. The spectrometer further comprises a volume hologram for increasing a spectral operating range, the volume hologram configured to perform spectral mapping in a second direction orthogonal to the first direction to increase the spectral operating range. The spectrometer further comprises a charged coupled device (CCD) configured to receive output beams, the output beams used to provide spectral analysis of the input beams.

Abstract: A gas concentration-measuring device makes it possible to measure gas components in a gas sample. An interferometer, based on a dual-band Fabry-Perot interferometer (1), is provided with a transmission spectrum that can be set by a control voltage (38). The control voltage (38) of the dual-band Fabry-Perot interferometer (1) is synchronized over the course of time with the activation and deactivation of the radiation sources (11, 12).

Abstract: Light in a desired wavelength band is accurately separated by changing the distance between optical substrates while minimizing deformation thereof. A variable spectroscopic element (1) includes: a plurality of optical substrates (3, 4) opposed to each other with a space therebetween, the optical substrates being provided with coating layers (2a, 2b) on opposed surfaces; actuators (5) arranged circumferentially at intervals around a central axis of the optical substrates (3, 4), the actuators being capable of expansion and contraction in a direction of the gap between the optical substrates (3, 4); and connecting members (10) connecting the actuators (5) and the optical substrates (3, 4) at several locations at intervals in the circumferential direction.

Abstract: The invention relates to apparatus and methods for assessing occurrence of a hazardous agent in a sample by performing multipoint spectral analysis of the sample. Methods of employing Raman spectroscopy and other spectrophotometric methods are disclosed. Devices and systems suitable for performing such multipoint methods are also disclosed.

Abstract: To provide a miniaturized Fabry-Perot type tunable filter that can be applied to e.g. a light of wide wavelength range from infrared rays to ultraviolet rays and actuated at a low voltage. A movable portion moving in a direction parallel to the surface of the SOI substrate (hereafter called ‘plane direction’), a suspension supporting member supporting the movable portion elastically and movably, and a fixed portion secured to the SOI substrate are provided. By the comb-teeth electrode of the comb-teeth type electrostatic actuator that moves the movable portion, the first mirror structure body formed bonding to the surface of the movable portion is controlled and moved in the plane direction.

Abstract: Even when only a few antigens exist in a specimen, a change in a dielectric constant and a change in an optical spectrum accompanied thereto in the periphery of a conductive member are made larger, so that sensing at high sensitivity can be performed. A structure including a protrusion including a dielectric material protruded on a substrate and a conductive member provided on a first surface of the protrusion, in which the maximum value of the cross-sectional area in the cross-section in parallel with a first surface of the conductive member is larger than the area of the first surface.

Abstract: A temperature-tuned dielectric-slab-etalon scanning spectrometer that is low cost and simple to fabricate uses cascaded etalon modules, each module comprising a Fabry-Perot (FP) etalon having a relatively small Free Spectral Range (FSR), with at least two modules provided with a temperature control. According to the invention, the multiple FP modules produce Vernier tuning control. In these devices, the tuning temperature range is typically less than 10° C., and the required slab thickness may be less than 1 mm. This reduces fabrication and material requirements, and results in lower device cost and improved reliability.

Abstract: Sensor electrodes and wiring patterns can be formed with fewer processes, and easy assembly without interference between the wires and optical substrates is realized.

Abstract: The invention relates to a spectrometer, a spectrometric method and detector, and a new use of an interferometer. The spectrometer comprises a Fabry-Perot interferometer (120), to which light can be guided from the object (100) being investigated, in order to produce an interference image, and a detector (130) at which the interference image is aimed. The transmittance of the interferometer (120) is spectrally sliced to at least two separate wavelength bands. For its parts, the detector (130) is arranged to detect the interference image from at least two separate wavelength bands spatially. The detector is arranged to detect the said wavelength bands simultaneously, by exploiting the response of the image elements of the detector, calibrated as a function of the mirror gap of the interferometer, in order to detect simultaneously at least two different orders of the interference.

Abstract: A tunable optical cavity can be tuned by relative movement between two reflection surfaces, such as by deforming elastomer spacers connected between mirrors or other light-reflective components that include the reflection surfaces. The optical cavity structure includes an analyte region in its light-transmissive region, and presence of analyte in the analyte region affects output light when the optical cavity is tuned to a set of positions. Electrodes that cause deformation of the spacers can also be used to capacitively sense the distance between them. Control circuitry that provides tuning signals can cause continuous movement across a range of positions, allowing continuous photosensing of analyte-affected output light by a detector.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: In an embodiment, a dual-etalon cavity-ring-down frequency-comb spectrometer system is described. A broad band light source is split into two beams. One beam travels through a first etalon and a sample under test, while the other beam travels through a second etalon, and the two beams are recombined onto a single detector. If the free spectral ranges (“FSR”) of the two etalons are not identical, the interference pattern at the detector will consist of a series of beat frequencies. By monitoring these beat frequencies, optical frequencies where light is absorbed may be determined.

Abstract: Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.