Having A Rotating, Pendulous, Or Wedge Scanning Element Patents (Class 356/455)
  • Patent number: 11668603
    Abstract: Embodiments are disclosed relating to a refractively-scanning interferometer comprising an aperture that receives an incident light beam at a receiving angle, a beam splitter configured to split the incident light beam into a first beam and a second beam, a first and a second reflector arranged to reflect the first beam and second beam, respectively, towards a combining optical element, and a refractive Optical Path Difference (rOPD) assembly interposed between the beam splitter and the first reflector, wherein the rOPD Assembly refracts the first light beam an even number of times with induced phase discrepancy being a vector sum of a first phase discrepancy induced by a first refraction and a second phase discrepancy induced by a second refraction, the rOPD Assembly being configured such that the first phase discrepancy is substantially opposite in direction to the second phase discrepancy, a portion of the first and second phase discrepancies cancelling one another out to decrease magnitude of the phase di
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: June 6, 2023
    Assignee: Rapid Phenotyping Pty Limited
    Inventor: Selene Rodd-Routley
  • Patent number: 11531193
    Abstract: The invention relates to an optical arrangement, particularly for the detection beam path of a multi-spot scanning microscope, comprising a detection plane, in which a detector is positionable, comprising a dispersive device for spectrally splitting detection light. According to the invention, the optical arrangement is characterized in that a distorting optical unit is present for guiding the detection light into the detection plane, said distorting optical unit being arranged downstream of the dispersive device and upstream of a detection plane, and in that a rotating device is present for the relative rotation of a luminous field of the spectrally separated detection light and the distorting optical unit. The invention additionally relates to a multi-spot scanning microscope and a method for operating a microscope.
    Type: Grant
    Filed: October 25, 2017
    Date of Patent: December 20, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Matthias Wald, Tierno Anhut, Daniel Schwedt
  • Patent number: 11426068
    Abstract: A laser eye surgery system includes a laser source, a ranging subsystem, an integrated optical subsystem, and a patient interface assembly. The laser source produces a treatment beam that includes a plurality of laser pulses. The ranging subsystem produces a source beam used to locate one or more structures of an eye. The ranging subsystem includes an optical coherence tomography (OCT) pickoff assembly that includes a first optical wedge and a second optical wedge separated from the first optical wedge. The OCT pickoff assembly is configured to divide an OCT source beam into a sample beam and a reference beam. The integrated optical subsystem is used to scan the treatment beam and the sample beam. The patient interface assembly couples the eye with the integrated optical subsystem so as to constrain the eye relative to the integrated optical subsystem.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: August 30, 2022
    Assignee: AMO Development, LLC
    Inventors: David Angeley, Zhao Wang
  • Patent number: 11162775
    Abstract: The present invention relates to a housing of a Michelson interferometer that may facilitate optical alignment of a plurality of optical components by applying a two-part structured housing to the Michelson interferometer.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: November 2, 2021
    Assignee: AGENCY FOR DEFENSE DEVELOPMENT
    Inventors: Jongmin Lee, Juno Lee, Jaehwan Lee, Hyowook Bae
  • Patent number: 10908650
    Abstract: A mobile computing system includes a case and a frame installed into the case. The components of the mobile computing system are affixed to the frame. The frame includes a first section and a second section. The first section is flexibly coupled to the second section by at least one first flexible joint and is not otherwise rigidly coupled to the second section. The frame is fabricated as a single molded piece.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: February 2, 2021
    Assignee: Dell Products, L.P.
    Inventors: Chris Chang, Bruce Hw Chen, Rick Wu, Maggie Mei-Chih Wu, Chen Yu Hsu, Yue Hui Jiang
  • Patent number: 10648914
    Abstract: An optical sample detection system includes: a sensor chip including a dielectric member, a metal film adjacent to an upper surface of the dielectric member, a reaction layer adjacent to an upper surface of the metal film, and a lid member disposed on an upper surface of the reaction layer; a chip holding unit for holding the sensor chip; and a light projecting unit that irradiates the metal film with excitation light through the dielectric member. A sample is detected by irradiating the metal film with excitation light through the dielectric member. The lid member is wider than the dielectric member in an optical path cross section of the excitation light.
    Type: Grant
    Filed: October 25, 2016
    Date of Patent: May 12, 2020
    Assignee: Konica Minolta, Inc.
    Inventors: Fumio Nagai, Tetsuya Noda
  • Patent number: 10613229
    Abstract: An interferometer is provided. The interferometer includes a multifaceted beamsplitter. Angles of incidence between beams entering the beamsplitter and a beamsplitting surface of the beamsplitter are less than 45 degrees. The arms of the interferometer feature a refractive compensator or a catseye optical configuration to provide an optical path length difference for rays that is the same at any location along the effective aperture of the interferometer. A detector assembly can be included with at least four detectors that lie in a plane and that receive light along paths that are orthogonal to that plane.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: April 7, 2020
    Assignee: Ball Aerospace & Technologies Corp.
    Inventors: Jeff Applegate, Jason Micali, Sara C. Tucker
  • Patent number: 10314479
    Abstract: A laser eye surgery system includes a laser source, a ranging subsystem, an integrated optical subsystem, and a patient interface assembly. The laser source produces a treatment beam that includes a plurality of laser pulses. The ranging subsystem produces a source beam used to locate one or more structures of an eye. The ranging subsystem includes an optical coherence tomography (OCT) pickoff assembly that includes a first optical wedge and a second optical wedge separated from the first optical wedge. The OCT pickoff assembly is configured to divide an OCT source beam into a sample beam and a reference beam. The integrated optical subsystem is used to scan the treatment beam and the sample beam. The patient interface assembly couples the eye with the integrated optical subsystem so as to constrain the eye relative to the integrated optical subsystem.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: June 11, 2019
    Assignee: OPTIMEDICA CORPORATION
    Inventors: David Angeley, Zhao Wang
  • Patent number: 9971162
    Abstract: A cloaking device includes cloaking region boundary planes oriented non-planar to each other, each of the cloaking region boundary planes having an outward facing mirror surface and an inward facing opaque surface. The cloaking device includes a cloaking region bounded at least partially by the inward facing opaque surfaces of the cloaking region boundary planes. Half mirrors are spaced apart from and generally parallel to the outward facing mirror surfaces such that a half mirror is spaced apart from and generally parallel to each outward facing mirror surface. Light from an object on an object-side of the cloaking device is directed around an article within the cloaking region and forms an image on an image-side of the cloaking device such the article appears transparent to an observer looking towards the object.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: May 15, 2018
    Assignee: Toyota Motor Engineering & Manufacturing North America, Inc.
    Inventors: Debasish Banerjee, Hideo Iizuka
  • Patent number: 9952031
    Abstract: An interferometer (10) is provided that has a stage (28) configured to have a linear motion path. A first retroreflector (18) and a second retroreflector (24) are fixedly coupled to the stage (28). A tube (32) is provided, and the stage (28) is configured to reciprocate about the tube (32). A beamsplitter (14) and a 45° mirror (16) are disposed in the tube (32). A detector (22) is configured to detect light passing through the beamsplitter (14), and the beamsplitter (14) is configured to split an incident light beam into a transmitted beam (15) and a reflected beam (17), wherein the transmitted beam (15) passes to the second retroreflector (24) and the reflected beam (17) passes to the first retroreflector (18). The transmitted beam (15) and a reflected beam (17) are focused on the detector (22).
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: April 24, 2018
    Assignee: University Corporation for Atmospheric Research
    Inventors: James Hannigan, William Mankin
  • Patent number: 9445946
    Abstract: A laser eye surgery system includes a laser source, a ranging subsystem, an integrated optical subsystem, and a patient interface assembly. The laser source produces a treatment beam that includes a plurality of laser pulses. The ranging subsystem produces a source beam used to locate one or more structures of an eye. The ranging subsystem includes an optical coherence tomography (OCT) pickoff assembly that includes a first optical wedge and a second optical wedge separated from the first optical wedge. The OCT pickoff assembly is configured to divide an OCT source beam into a sample beam and a reference beam. The integrated optical subsystem is used to scan the treatment beam and the sample beam. The patient interface assembly couples the eye with the integrated optical subsystem so as to constrain the eye relative to the integrated optical subsystem.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: September 20, 2016
    Assignee: Optimedica Corporation
    Inventors: David Angeley, Zhao Wang
  • Patent number: 9400168
    Abstract: A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: July 26, 2016
    Assignee: DR. JOHANNES HEIDENHAIN GMBH
    Inventors: Walter Huber, Ralph Joerger, Wolfgang Holzapfel
  • Patent number: 9176391
    Abstract: A method and apparatus operable for displacing an image, which is transmitted by electromagnetic radiation, perpendicular to the direction of radiation by use of a rotatably disposed radiation-refracting body, located in the path of an imaging beam, having a refractive index that differs from the surrounding medium with regard to the radiation used. The method allows for precise image displacement. The rotation of the radiation-refracting body causing the displacement is measured, and the change of the optical path length caused by the angular change in a further electromagnetic beam utilized for the measurement is determined by evaluating the superimposition of the radiation reflected by a planar reflecting surface with the incident electromagnetic radiation. Part of the electromagnetic measurement beam, which is reflected on the surface of the radiation-refracting body, strikes a measurement unit, which supplies an electrical signal as a function of the incident position of the electromagnetic radiation.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: November 3, 2015
    Assignee: Heidelberg Instruments Mikrotechnik GMBH
    Inventors: Michael Fangerau, Alexander Mangold, Roland Kaplan
  • Patent number: 9146161
    Abstract: An optical wavelength meter includes: an interferometer; a reference optical source unit with a laser configured to oscillate in a multi-longitudinal mode; and a signal processor configured to calculate a wavelength of a input beam with reference to interference fringe information of reference beam and interference fringe information of the input beam obtained from the interferometer.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: September 29, 2015
    Assignees: YOKOGAWA ELECTRIC CORPORATION, YOKOGAWA METERS & INSTRUMENTS CORPORATION
    Inventors: Toshikazu Yamamoto, Manabu Kojima
  • Publication number: 20150103354
    Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 16, 2015
    Inventor: Vidi A. Saptari
  • Patent number: 9001334
    Abstract: A novel means of provided velocity control of an interferometer wherein one of the moving components includes the beamsplitter element is introduced herein. Using a moving beamsplitter and coupled flexure mounting allows improved velocity control because the low mass of the beamsplitter enables the systems disclosed herein to respond faster than conventional mirror velocity controlled interferometer instruments with a resultant lower velocity error so as to provide a more stable and lower noise spectra from the analytical instrument. The control of the velocity of the beamsplitter and if desired, one or both of the configured mirrors, reduces the time wasted changing velocity at the ends of each scan. The result is an increase in data collection available in any given experiment time frame. Such desirable arrangements of the present invention thus allow scans to be collected at higher rates, which beneficially increase the ability to monitor rapidly changing systems.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: April 7, 2015
    Assignee: Thermo Electron Scientific Instruments LLC
    Inventor: John Magie Coffin
  • Patent number: 8896839
    Abstract: The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: November 25, 2014
    Assignee: Pason Systems Corp.
    Inventor: Vidi A. Saptari
  • Patent number: 8885163
    Abstract: Various systems and methods for performing optical analysis downhole with an interferogram (a light beam having frequency components with a time variation that identifies those frequency components. The interferogram is produced by introducing an interferometer into the light path, with the two arms of the interferometer having a propagation time difference that varies as a function of time. Before or after the interferometer, the light encounters a material to be analyzed, such as a fluid sample from the formation, a borehole fluid sample, a core sample, or a portion of the borehole wall. The spectral characteristics of the material are imprinted on the light beam and can be readily analyzed by processing electronics that perform a Fourier Transform to obtain the spectrum or that enable a comparison with one or more templates. An interferometer designed to perform well in the hostile environments downhole is expected to enable laboratory-quality measurements.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: November 11, 2014
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Marian L. Morys, Steve Zannoni, Christopher M. Jones
  • Patent number: 8825142
    Abstract: An imaging apparatus for diagnosis is connected with a probe including a transmitting and receiving unit transmitting a light transmitted from a light source continuously to the inside of a body cavity and concurrently, receiving a reflected light continuously from the inside of the body cavity, and generates a tomographic image inside the body cavity based on the obtained reflected light by obtaining the reflected light from the transmitting and receiving unit while rotating the transmitting and receiving unit. The apparatus includes a mechanism for extracting intensity of the reflected light obtained by a phenomenon that the light transmitted to the transmitting and receiving unit is reflected at the transmitting and receiving unit; and a mechanism for judging whether or not the extracted intensity of each reflected light at each rotary angle of the transmitting and receiving unit lies in a range of a predetermined variation width.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: September 2, 2014
    Assignee: Terumo Kabushiki Kaisha
    Inventor: Satoru Suehara
  • Patent number: 8786862
    Abstract: The invention relates to an apparatus for generating a scannable optical delay for a beam of light and an apparatus for Fourier domain optical coherence tomography having said apparatus for generating a scannable optical delay in its reference arm (15). The light beam is directed to a pivotably driven mirror (10) from where it is reflected to a fixed mirror (12), and from there back retro reflected along the reference arm (5). Lens optics (9) are provided to ensure accurate optical alignment in several pivot positions of the pivotably driven mirror (10).
    Type: Grant
    Filed: July 10, 2009
    Date of Patent: July 22, 2014
    Assignee: Optopol Technology SP. Z O.O
    Inventors: Maciej Wojtkowski, Maciej Szkulmowski, Tomasz Bajraszewski
  • Patent number: 8780355
    Abstract: According to a first aspect the invention relates to a reconstruction process of a narrow-band signal acquired by an instrument producing irregular sampling, in which two series of samples are acquired at the same sampling period, the two series being offset relative to one another such that the sampling errors are identical or quasi identical over both series. According to a second aspect, the invention relates to an instrument configured to carry out the process according to the first aspect of the invention.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: July 15, 2014
    Assignee: Centre National Detudes Spatiales
    Inventors: Elodie Cansot, Emmanuel Christophe, Alain Rosak
  • Patent number: 8760664
    Abstract: Provided is an imaging apparatus using Fourier-domain optical coherence tomography, the imaging apparatus removing noises caused by the autocorrelation component of returning light to obtain a high-resolution tomographic image. A first switching unit 17 switches a first state in which returning light 12 is combined with reference light (a state in which the returning light 12 is conducted to a combining unit 22) and a second state different from the first state (a state in which the light path of the returning light 12 is blocked or changed). A controlling unit 18 controls the switching unit 17 to change the first and the second state. A interferometric information acquiring unit 19 acquires interferometric information on the returning light 12 and the reference light 14 using the reference light 14 or the returning light 12 detected by the detecting unit 16 in the second state and the combined light 15.
    Type: Grant
    Filed: July 6, 2009
    Date of Patent: June 24, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventor: Nobuhito Suehira
  • Patent number: 8717573
    Abstract: A tunable interferometric scanning spectrometer is provided. In one aspect of the disclosure, the interferometric scanning spectrometer splits incoming light beams among different optical paths in the spectrometer, recombines the light beams from the different optical paths to produce combined light beams, detects intensities of the combined light beams across a focal plane (e.g., with a sensor array), and calculates a spectra based on the detected intensities and a filter function that is a function of optical path difference (OPD) between the optical paths. In one aspect, the filter function varies across the focal plane. In another aspect, the spectrometer comprises a rotatable dispersive element (e.g., glass plate) in one the optical paths and/or a moveable mirror in the other optical path. In this aspect, the spectrometer may be adjusted away from zero OPD by rotation of the dispersive element and/or displacement of the mirror.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: May 6, 2014
    Assignee: Lockheed Martin Corporation
    Inventors: Jason D. Mudge, Christopher W. Tischhauser, Gregory S. Feller, James Wes Irwin
  • Patent number: 8711360
    Abstract: A spectral measurement device includes: an optical band-pass filter section that has first to n-th wavelengths (n is an integer of 2 or more) having a predetermined wavelength width as a spectral band thereof; a correction operation section that corrects a reception signal based on an output optical signal from the optical band-pass filter section; and a signal processing section that executes predetermined signal processing based on the reception signal corrected by the correction operation section that corrects the reception signal based on the change in the spectral distribution of the reception signal.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: April 29, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Tatsuaki Funamoto
  • Patent number: 8559011
    Abstract: Micro-spectral sensors and methods are presented in which a Fizeau wedge interference filter is disposed between a focal plane array and a visible scene with an increasing wedge filter dimension varying along a scan direction, where the scene is scanned along the FPA to obtain light intensity measurements of a given scene location at different times using different FPA sensor elements through different wedge filter thicknesses, and the measurements correlated to the given scene location are Fourier transform to generate spectral data for the location.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: October 15, 2013
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Michael Wilson, Thomas G Giallorenzi
  • Publication number: 20130120755
    Abstract: A method for the acquisition (AU) of a spectrally resolved, two-dimensional image by means of Fourier transform (=FT) spectroscopy or Fourier transform infrared (=FTIR) spectroscopy, is characterized in that, during multiple passes (D1-D4) of an optical path difference (OG) between two partial rays (14a, 14b) over an identical range (IB), different subsets of detector elements (22) of an array detector (5) are read out and the signals of the read-out detector elements (22) of the multiple passes (D1-D4) are Fourier transformed and combined to form the spectrally resolved image. A method is thereby provided for the acquisition of two-dimensional, spectrally resolved images, in which the influence of vibrations on the measurement is reduced, and which is less affected by the movement of objects to the resolved spectrally.
    Type: Application
    Filed: November 9, 2012
    Publication date: May 16, 2013
    Applicant: BRUKER OPTIK GMBH
    Inventor: BRUKER OPTIK GMBH
  • Publication number: 20130120754
    Abstract: Micro-spectral sensors and methods are presented in which a Fizeau wedge interference filter is disposed between a focal plane array and a visible scene with an increasing wedge filter dimension varying along a scan direction, where the scene is scanned along the FPA to obtain light intensity measurements of a given scene location at different times using different FPA sensor elements through different wedge filter thicknesses, and the measurements correlated to the given scene location are Fourier transform to generate spectral data for the location.
    Type: Application
    Filed: November 15, 2011
    Publication date: May 16, 2013
    Inventors: Michael Wilson, Thomas G. Giallorenzi
  • Patent number: 8411922
    Abstract: Methods and apparatus for reducing noise in images acquired with a scanning beam device are disclosed. A representative method may include scanning a beam of light over a surface in a scan with a variable velocity. Light backscattered from the surface may be detected at different points in time during the scan at a substantially constant rate. Reduced-noise representations of groups of the detected light that each correspond to a different position in an image of the surface may be generated. The reduced-noise representations may be generated for groups having multiple different sizes. The image of the surface may be generated by representing the different positions in the image with the reduced-noise representations of the corresponding groups. Other methods and apparatus are disclosed.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: April 2, 2013
    Assignee: University of Washington
    Inventors: Cameron M. Lee, Richard S. Johnston
  • Publication number: 20120120405
    Abstract: A novel means of provided velocity control of an interferometer wherein one of the moving components includes the beamsplitter element is introduced herein. Using a moving beamsplitter and coupled flexure mounting allows improved velocity control because the low mass of the beamsplitter enables the systems disclosed herein to respond faster than conventional mirror velocity controlled interferometer instruments with a resultant lower velocity error so as to provide a more stable and lower noise spectra from the analytical instrument. The control of the velocity of the beamsplitter and if desired, one or both of the configured mirrors, reduces the time wasted changing velocity at the ends of each scan. The result is an increase in data collection available in any given experiment time frame. Such desirable arrangements of the present invention thus allow scans to be collected at higher rates, which beneficially increase the ability to monitor rapidly changing systems.
    Type: Application
    Filed: November 11, 2010
    Publication date: May 17, 2012
    Inventor: John Magie COFFIN
  • Patent number: 8153987
    Abstract: A calibration pad having multiple calibration sites is provided. A particular calibration site may be utilized until that particular site has been determined to have become unacceptable for further use, for example from contamination, in which case the calibration processes may then move to use a different calibration site(s) on the calibration pad(s). A variety of techniques may be utilized to provide the determination that a site is no longer acceptable for use. Movement may thus occur over time from site to site for use in a calibration process. A variety of criteria may be established to determine when to move to another site. Though the designation of a site as “bad” may be based upon measured reflectance data, other criteria may also be used. For example, the number of times a site has been exposed to light may be the criteria for designating a site as bad. Alternatively the cumulative exposure of a site may be the criteria.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: April 10, 2012
    Assignee: Jordan Valley Semiconductors Ltd.
    Inventors: Jeffrey B. Hurst, Matthew Weldon, Phillip Walsh, Cristian Rivas, Dale A. Harrison
  • Patent number: 7990536
    Abstract: There are disclosed a system and a method for measuring reflectance of an object. The system for measuring reflectance of an object according to the present invention includes: a light source unit including a light source irradiating light to the object; a light source position adjusting unit that adjusts a position and a direction of the light source unit; a light receiving unit that acquires image data by detecting light reflected on the object; and a reflectance acquiring unit that acquires the reflectance of the object from the image data. According to the present invention, it is possible to more precisely acquire the reflectance of the object within a shorter time.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: August 2, 2011
    Assignee: Gwangju Institute of Science and Technology
    Inventors: Kwan Heng Lee, Duck Bong Kim, Kang Su Park, Kang Yeon Kim, Myoung Kook Seo
  • Publication number: 20110157595
    Abstract: An angular displacement of an object is measured interferometrically by splitting a laser beam into a reference beam and a measuring beam. The reference beam is directed at a stationary reference retroreflector and then a phase shift detector. The measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.
    Type: Application
    Filed: December 30, 2009
    Publication date: June 30, 2011
    Inventors: William S. Yerazunis, Richard C. Waters
  • Publication number: 20110032531
    Abstract: The invention pertains to a static interferometry system comprising two mirrors produced respectively by vertical assemblage (EH) and horizontal assemblage (EV) of a set of parallel plates of constant width, shifted along the optical axis so as to form stairs of variable optical path difference, the said two staircase mirrors (EH, EV) being disposed orthogonally so as to form, by optical superposition, a set of square facets engendering different optical path differences for the incident signal, and a detection device (DET) for detecting the set of optical path differences of the resulting interferogram. The system comprises, furthermore, means of continuous variation (LC) of the optical path difference during the acquisition of data by the detection device (DET), and sampling means (S, ACQL) for sampling the continuous optical path difference acquired while complying with the Nyquist criterion.
    Type: Application
    Filed: June 18, 2010
    Publication date: February 10, 2011
    Inventors: Denis Simeoni, Olivier Pigouche, Bruno Chetrite, Christian Buil
  • Publication number: 20100265512
    Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.
    Type: Application
    Filed: April 16, 2010
    Publication date: October 21, 2010
    Applicant: SI-WARE SYSTEMS
    Inventors: MOSTAFA MEDHAT, BASSAM A. SAADANY, DIAA A. KHALIL, BASSEM MORTADA
  • Patent number: 7768699
    Abstract: A phase difference detecting device includes a splitter for splitting laser beams into a first group which will travel along a first path and a second group which will travel along a second path, a beam selection/extraction unit for selecting, as reference light, one beam from the first group to allow it to pass therethrough, a path length changing unit for changing the length of the first path, a combining unit for combining the reference light and beams which construct the second group to produce interference light, and a detector for detecting the intensity of the interference light. The device changes the length of the first path using the path length changing unit to detect a path length which maximizes the intensity of the interference light for each of the beams which construct the second group, and determines a phase difference among the beams from the detected path length.
    Type: Grant
    Filed: August 20, 2004
    Date of Patent: August 3, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Jiro Suzuki, Yoshihito Hirano, Yutaka Ezaki, Yasushi Horiuchi, Masaki Tabata, Kouji Namura, Izumi Mikami
  • Patent number: 7742172
    Abstract: An apparatus for varying the path length of a beam of radiation, the apparatus comprising: an element (51) rotatably mounted about an axis, said element comprising two reflective surfaces in fixed relation to one another such that radiation may be reflected between said reflective surfaces and out of the element (51); and driving means (55) for rotatably oscillating said element about said axis.
    Type: Grant
    Filed: September 18, 2003
    Date of Patent: June 22, 2010
    Assignee: TeraView Limited
    Inventors: Julian A. Cluff, Michael J. Withers, Ian V. Bradley
  • Patent number: 7738108
    Abstract: The present invention relates to an interferometer, comprising at least a beamsplitter (10), at least one end reflector (11) for returning beams (S2, S3), and a set of reflectors (14, 15) for reflecting the beams (S2, S3) between the beamsplitter (10) and the end reflector (11) or the end reflectors, at least some of said set of reflectors (14, 15) being adapted to be rotatable around an axis (?). Said set of reflectors comprises two angle reflectors (14, 15), constituted by plane reflectors, and the said end reflector (11) is or the end reflectors are an angle reflector constituted by plane reflectors (11?, 11?). An angle line of the end reflector (11) is or the angle lines of end reflectors are arranged perpendicular to an angle line of both of the angle reflectors (14, 15).
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: June 15, 2010
    Assignee: Gasera Ltd.
    Inventor: Jyrki Kauppinen
  • Patent number: 7701583
    Abstract: A spectrometry device comprising at least one wavefront-dividing interferometer comprising at least two unbalanced arms and at least one air wedge, a device for imaging interference fringes, an imaging sensor of the fringes and a processor that processes a signal derived from the sensor.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: April 20, 2010
    Assignee: Centre National de la Recherche Scientifique—CNRS
    Inventors: Lionel Canioni, Stéphane Santran, Bruno Bousquet
  • Publication number: 20090273783
    Abstract: An inspection method is provided to determine a value related to a parameter of a target pattern printed on a substrate by a lithographic process used to manufacture a device layer on a substrate. The inspection method can include using an optical system with a high-NA objective lens, where the high-NA objective lens includes an object plane and a pupil plane. The inspection method can also include providing an aperture member to define at least one obscuration, determining a radial distance between a radially innermost point of each dark area and a nominal center of an image in a pupil plane, and determining an axial distance between the target and an object plane from the determined radial distance.
    Type: Application
    Filed: July 17, 2009
    Publication date: November 5, 2009
    Applicant: ASML Netherlands B.V.
    Inventor: Arie Jeffrey DEN BOEF
  • Patent number: 7528958
    Abstract: An optical scanner for use in conjunction with an infrared spectrometer is disclosed. The optical scanner translates a beam of radiation to a stationary spot on a traveling sheet of material so that ample integration time within the spectrometer is achieved. The beam path impinges on the traveling web and the radiation is reflected off the traveling web back through the optical scanner and recombined at an interferometer. The beam of radiation is kept stationary with respect to both the traveling sheet and the carriage which houses the spectrometer.
    Type: Grant
    Filed: December 30, 2005
    Date of Patent: May 5, 2009
    Assignee: Honeywell International Inc.
    Inventors: Michael K Y Hughes, Sebastien Tixier
  • Patent number: 7528967
    Abstract: A measurement-purpose light source generates a measurement light used for measuring an optical characteristic of an object to be measured, and the measurement light includes a component in a wavelength range for measurement of the optical characteristic of the object. An observation-purpose light source generates an observation light used for focusing on the object to be measured and checking a position of measurement. The observation light is selected such that the observation light includes a component that can be reflected from the object to be measured. The measurement light and the observation light are thus applied independently to the object to be measured, through a common objective lens, and accordingly improvement of the precision in measurement of the optical characteristic and facilitation of focusing on the object to be measured are achieved simultaneously.
    Type: Grant
    Filed: May 15, 2008
    Date of Patent: May 5, 2009
    Assignee: Otsuka Electronics Co., Ltd.
    Inventors: Makoto Okawauchi, Tsutomu Mizuguchi, Shiro Kawaguchi
  • Patent number: 7499158
    Abstract: A structure for calibrating an image sensor or other photosensor includes a baffle for passage of a sheet therethrough. A photosensor is disposed to receive light reflected from a sheet passing through the baffle. A selectably-positionable target member has a target surface associated therewith, and is positionable in one position establishing a width of the baffle suitable for passage of a sheet through the baffle, and another position wherein the first target surface is disposed adjacent to the photosensor.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: March 3, 2009
    Assignee: Xerox Corporation
    Inventors: Richard W. Flemming, Timothy D. Turner, Wayne C. Powley
  • Patent number: 7480055
    Abstract: A two-beam interferometer for Fourier Transform spectroscopy has a double pivot scanning mechanism. The interferometer has two rigid pendulums that are each rotatable to swing around an associated one of distinct axes of rotation. A linkage links the two rigid pendulums to each other and constrains their rotation relative to each other. The interferometer has bearings, which may be flexure bearings, for rotatably mounting the two pendulums to swing around an associated one of the distinct axes of rotation and a first and a second bearing linking the linkage to an associated one of the pendulums. The two rigid pendulums, the linkage and the bearings can be a monolithic structure.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: January 20, 2009
    Assignee: ABB Bomem Inc.
    Inventors: Henry L. Buijs, Jacques McKinnon
  • Patent number: 7466421
    Abstract: A diffractive interferometric optical device is provided for measuring spectral properties of light. The device includes means for coupling in a single spatial mode of an incoming light field to be examined, means for splitting the single spatial mode of incoming light field into at least two partial fields, means for changing one of a shape or a direction of propagation of the wavefront of at least one of the at least two partial fields in dependence on the wavelength and means for generating an interference pattern superimposing the at least two partial fields. The device further comprises detection means to record and evaluate the interference pattern at a plurality of discrete spatial positions in order to derive spectral properties of the incoming light field.
    Type: Grant
    Filed: July 15, 2002
    Date of Patent: December 16, 2008
    Assignee: CAMPus Technologies AG
    Inventor: Thilo Weitzel
  • Patent number: 7423257
    Abstract: In a signal transmission device as well as a method for transmission of signals between two elements moving relative to one another, in particular for transfer of measurement and/or control data between a rotating part and a stationary part of a computed tomography apparatus, a transmission device with an RF strip conductor is used on a first of the two elements, the RF strip conductor is composed of a dielectric layer with electro-optical properties between two strips made of an electrically-conductive material, into which the signals are fed. In the method and the associated device, local temporal changes of optical properties of the dielectric layer that are electrically induced in the dielectric layer by the signals proceeding along the strip conductor are scanned with a light beam of a scanning unit arranged on the second element, at least during a movement segment of the relative movement of the two elements.
    Type: Grant
    Filed: October 14, 2005
    Date of Patent: September 9, 2008
    Assignee: Siemens Aktiengesellschaft
    Inventor: Stefan Popescu
  • Publication number: 20080170232
    Abstract: A two-beam interferometer for Fourier Transform spectroscopy has a double pivot scanning mechanism. The interferometer has two rigid pendulums that are each rotatable to swing around an associated one of distinct axes of rotation. A linkage links the two rigid pendulums to each other and constrains their rotation relative to each other. The interferometer has bearings, which may be flexure bearings, for rotatably mounting the two pendulums to swing around an associated one of the distinct axes of rotation and a first and a second bearing linking the linkage to an associated one of the pendulums. The two rigid pendulums, the linkage and the bearings can be a monolithic structure.
    Type: Application
    Filed: January 12, 2007
    Publication date: July 17, 2008
    Inventors: Henry L. Buijs, Jacques McKinnon
  • Patent number: 7388669
    Abstract: The present invention provides methods for generating interferometric information. Interferometric information from refractively scanned interferometers can contain errors due to wavelength-dependent refractive indices. The wavelength-dependent refractive indices of elements of the interferometer can produce errors when the OPD at a reference wavelength is different than the OPD at a sample wavelength. The invention can provide correction of interferometric information using relationships between the OPD at the wavelengths of interest, which correction can also be dependent on physical relationships among elements of the interferometer.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: June 17, 2008
    Assignee: InLight Solutions, Inc.
    Inventor: Russell E. Abbink
  • Publication number: 20080117425
    Abstract: A scanning technique for imaging sites in an array includes illuminating or irradiating sites in lines of the array, and collecting returned radiation from the sites for imaging. The sites are sequentially scanned by means of confocally directed radiation lines from source optics. The orientation of the radiation lines with respect to the lines of sites in the array is such that the distance between nearest edges of sites in adjacent lines is greater than lines through those edges in a direction parallel to the radiation lines used for scanning. The resulting system experiences less crosstalk and a greater ability to distinguish between neighboring sites in resulting images.
    Type: Application
    Filed: November 21, 2006
    Publication date: May 22, 2008
    Inventor: Robert Kain
  • Patent number: 7364543
    Abstract: Probes, and systems and methods for optically scanning a conical volume in front of a probe, for use with an imaging modality, such as Optical Coherence Tomography (OCT). A probe includes an optical fiber having a proximal end and a distal end and defining an axis, with the proximal end of the optical fiber being proximate a light source, and the distal end having a first angled surface. A refractive lens element is positioned proximate the distal end of the optical fiber. The lens element and the fiber end are both configured to separately rotate about the axis so as to image a conical scan volume when light is provided by the source. Reflected light from a sample under investigation is collected by the fiber and analyzed by an imaging system. Such probes may be very compact, e.g., having a diameter 1 mm or less, and are advantageous for use in minimally invasive surgical procedures.
    Type: Grant
    Filed: September 26, 2006
    Date of Patent: April 29, 2008
    Assignee: California Institute of Technology
    Inventors: Changhuei Yang, Jigang Wu
  • Publication number: 20080074671
    Abstract: A fluorescence sensor is constituted by: a light source, for emitting excitation light of a predetermined wavelength; a dielectric block, formed of a material that transmits the excitation light; a metal film, formed on a surface of the dielectric block; a non flexible film of a hydrophobic material, formed on the metal film at a film thickness within a range of 10 to 100 nm; a sample holding portion, for holding a sample such that the sample contacts the non flexible film; an incident optical system, for causing the excitation light to enter the interface between the dielectric block and the metal film through the dielectric block such that conditions for total internal reflection are satisfied; and fluorescence detecting means, for detecting fluorescence emitted by a substance within the sample, which is excited by evanescent waves that leak from the interface when the excitation light enters the interface.
    Type: Application
    Filed: September 21, 2007
    Publication date: March 27, 2008
    Applicant: FUJIFILM CORPORATION
    Inventors: Hisashi OHTSUKA, Morihito IKEDA