Abstract: The present invention relates to an optic seismic MEMS sensor. More specifically, a proof mass is supported by a frame having supporting beams. The proof mass is positioned within the frame and has a hinged attachment to the beams. The proof mass has a sensor gap having a first reflector and a second reflector positioned at opposing ends of the sensor gap. An optical fiber injects light into the sensor gap and light is reflected to determine seismic movement of the proof mass with respect to the frame. Stops are provided for limiting the movement of the proof mass to minimize strain on the attachment of the beams and the proof mass.

Abstract: A displacement sensor comprising at least one pair of co-planar photonic crystal waveguide (PCWG) sections aligned along or parallel to a common axis and separated by a gap, one PCWG section of a pair operative to perform a displacement relative to the other section of the pair. In some embodiments, the sensor is linear, comprising two PCWG sections separated by a gap that forms a cross PCWG, the displacement sensing performed preferrably differentially between two edges of the cross PCWG. In other embodiments, the sensor includes Mach Zehnder Interferometer (MZI) configurations with gaps between fixed and moving PCWG sections. Displacement induced changes in the gap widths are reflected in changes in an output parameter of the MZI.

Abstract: An optical inclination sensor is provided having at least one reflective surface and at least two separate optical fibers having ends spaced from a reflective surface. As the reflective surface tilts with respect to a pre-determined reference position the gap lengths between the fiber ends and the reflective surface change and the differences in these gap lengths is used to calculate an angle of inclination with respect to a reference position. The optical inclination sensor can include at least one mass attached to a housing and moveable with respect to the housing as the mass and housing are rotated about one or more axes. Optical strain sensors are disposed a various locations between the mass and housing so that as the mass moves with respect to the housing, each one of the optical strain sensors are placed in compression or tension. The housing can be a generally u-shaped housing having two arms and a base section with the mass disposed within the housing.

Abstract: An interferometric method and system enabling light echoes-to-spectrum mapping, applicable for laser rangefinder, biomedical imaging including surface 3D mapping and tomography, vehicle position identification, and spectrum analysis. The direct mapping into spectrum allows a time-of-flight detection without using any timing pulse modulation. The sensitivity of the detection can be as high as that of the conventional low coherence interferometry, thereby an eye-safe and low-cost solution not compromising performance. In a practical implementation, high accurate range detection can be easily achievable with the level of accuracy equivalent to the laser rangefinder using a 20 ps Full-Width-at-Half-Maximum (FWHM) timing pulse. The system and method comprise applying dispersion-unbalanced interference (referred to as ‘cross-chirp interference’) and gating a phase matched spectral component.

Abstract: We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.

Abstract: A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include “primary” fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include “secondary” fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.

Abstract: A displacement measurement apparatus includes a first diffraction grating transmitting light from a light source and producing diffracted beams including first to third diffracted beams output in different directions; a second diffraction grating movable together with an object to be measured, provided in a plane parallel to the first diffraction grating, and reflecting the first to third diffracted beams transmitted through the first diffraction grating; a first photodetector receiving the first and second diffracted beams diffracted by the second diffraction grating; a second photodetector receiving at least the third diffracted beam transmitted through the first diffraction grating; and a calculation unit calculating displacement of the object in a first direction in accordance with the beams received by the first photodetector, and displacement of the object in a second direction, different from the first direction, in accordance with the beam received by the second photodetector.

Abstract: The present invention discloses a method for generating elevation maps or images of a tissue layer/boundary with respect to a fitted reference surface, comprising the steps of finding and segmenting a desired tissue layer/boundary; fitting a smooth reference surface to the segmented tissue layer/boundary; calculating elevations of the same or other tissue layer/boundary relative to the fitted reference surface; and generating maps of elevation relative to the fitted surface. The elevation can be displayed in various ways including three-dimensional surface renderings, topographical contour maps, contour maps, en-face color maps, and en-face grayscale maps. The elevation can also be combined and simultaneously displayed with another tissue layer/boundary dependent set of image data to provide additional information for diagnostics.

Abstract: An optical probe includes: an optical fiber; a substantially cylindrical ferrule integrally fixed to the optical fiber in the vicinity 2of the distal end of the fiber; a distal optical system for deflecting laser emitted from the optical fiber toward a subject to be measured; a holding portion for holding the distal optical system, the holding portion being supported by the ferrule rotatably about the optical axis of the optical fiber; a rotating oscillator slidably engaging with the outer circumferential surface of the ferrule; a driving unit for imparting oscillation in the direction of the optical axis to the rotating oscillator; and a coupling member for coupling the holding portion with the rotating oscillator elastically in the direction of the optical axis. The rotating oscillator rotates about the optical axis and reciprocates in the direction of the optical axis due to the oscillation applied from the driving unit.

Abstract: This disclosure presents a version of a coherent laser radar system that is immune to environmental effects on Mach-Zehnder-configured interferometers and reference length standards comprising such systems. The present disclosure also describes methods and materials which alleviate interferometer drift due to vapor absorption using a polyimide coated polarization maintaining fiber to reduce the change in the length of a reference arm.

Abstract: In general, in one aspect, the invention features a system including a light source, a plurality of interferometers configured to receive light from the light source and to form output light, each interferometer including a first optic and a second optic, the first and second optics configured to be mounted on a first object and a second object, respectively, where first object is moveable with respect to the second object, the first and second optics being configured introduce an optical path length difference (OPD) between two components of the light to form the output light, the OPD being related to the position of the first optic with respect to the second optic.

Abstract: An optical displacement measuring device includes a diffraction grating, a reflecting optical system configured to irradiate two one-time diffracted beams diffracted at the diffraction grating on the diffraction grating again, and the reflecting optical system includes a first imaging element, a second imaging element, a first reflector, and a second reflector, wherein the focal length of the first imaging element and the focal length of the second imaging element are the same, the diffraction grating and first reflector are disposed around the focal position of the first imaging element, and the diffraction grating and second reflector are disposed around the focal position of the second imaging element, thereby suppressing influence of displacement of the diffraction grating as to other than a direction where a movement position is detected.

Abstract: A stand-alone speedometer directly measuring the translational speed of a moving body comprises a source emitting two spaced light beams which interfere each other, mirrors or beam splitters changing directions of propagation of light beams, and a detector measuring the phase difference of light beams. Compared with the phase difference when the speedometer is stationary, the detector measures a first-order change of phase differences, which indicates the motion speed.

Abstract: A system for measuring gravity is disclosed. In the illustrative embodiment, the system uses a pair of retro-reflectors located on a free-falling test mass. These retro-reflectors enable the movement of the test mass to change the length of both a reference arm and sample arm in an interferometer system. As a result, gravity sensors in accordance with the present invention have higher sensitivity than prior-art interferometer-based gravity sensors.

Abstract: Devices for monitoring structural health conditions of host structures. A device includes at least one optical fiber sensor and an electronic module. The optical fiber sensor includes a rolled optical fiber cable operative to generate a frequency shift of a light signal passing therethrough and a coating layer applied to the rolled optical cable. The frequency shift is commensurate with vibration of the host structure. The electronic module sends an input light signal to the optical fiber sensor, receives a sensor signal from the optical fiber sensor, and processes the sensor signal.

Abstract: Apparatus and method for monitoring vibration levels in rotatable machinery (52). In one embodiment, a system (50) includes a source (66) for generating coherent radiation (70) and a first partially transmissive, partially reflective device (90) positioned to receive radiation (70) from the source (66) and transmit a part of the radiation there through. A second partially transmissive, partially reflective device (100) is mounted to the machinery (52), positioned to reflect a first signal (72) and transmit radiation (70) transmitted by the first device (90). A third device 104) is mounted to the machinery (52) and positioned to reflect radiation transmitted through the second device to provide a second signal (78).

Abstract: A fiber optic interferometric position sensor and measurement method thereof suitable for determining the moving direction of a measurement object in an environment of high electric or magnetic field strengths are disclosed. The fiber optic interferometric position sensor comprises at least one light source, a plurality of fiber optic couplers, a plurality of sensing fibers and a plurality of photodetectors. The fiber optic couplers are connected to the at least one light source, the photodetectors, and the sensing fibers, respectively.

Abstract: An instrument for measuring gravitational acceleration from within a borehole, the instrument including: a light source having a semiconductor that comprises a bandgap greater than about two electron volts (eV); and a gravimeter for receiving light from the light source and providing output light with a characteristic related to the gravitational acceleration, the gravimeter implemented at least one of a nano electromechanical system (NEMS) and a micro electromechanical system (MEMS); wherein the light source and the gravimeter are disposed in a housing adapted for insertion into the borehole.

Abstract: The present invention relates to an optical interferometric apparatus and method for measuring acceleration, pressure, and pressure of fluids during flow using micro-opto-electro-mechanical-systems (MOEMS). The high-sensitivity and high-resolution apparatus includes a movable mass, a stationary mass, a light source, and a photo detector. The light source emits a beam which is converted into two beam portions after impinging onto the movable and stationary masses. Interference between the beam portions are used to measure acceleration or pressure. The MOEMS structure may be integrated with a photo detector or planar waveguide. Differential amplification can be realized by employing two similar detecting structures.

Abstract: A fiber optic sensor includes a housing having first and second end plates with a sidewall extending therebetween with the sidewall having an inwardly facing groove. A flexural disk having a central passage therethrough has an outer edge portion mounted in the inwardly facing groove in the housing. The flexural disk has a stepped thickness that is thinner at the outer edge portion than at a region spaced apart from the housing. A first fiber optic coil is mounted on a first side of the flexural disk in the thicker region of the flexural disk, and a second optical fiber is mounted on a second side of the flexural disk opposite the first fiber optic coil. The first and second fiber optic coils are optically coupled together by a fiber optic coupler to form an interferometer that produces an output signal in response to axial acceleration of the flexural disk.

Abstract: An optical sensor for determining a distance between a target and a probe head is described. The optical sensor comprises a light source delivering a broadband spectrum; a fiber-optic Michelson interferometer (FOMI) for creating an interferogram; and an analyzer unit for receiving the interferogram from an output of the FOMI and for determining the distance of the target by finding a position corresponding to a maximum in a Fourier transform of the spectral distribution of the interferogram. The FOMI comprises a probing optical fiber terminated by the probe head and a reference optical fiber, the reference optical fiber having a fixed optical path length.

Abstract: A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4).

Abstract: A displacement sensor comprising at least one pair of co-planar photonic crystal waveguide (PCWG) sections aligned along or parallel to a common axis and separated by a gap, one PCWG section of a pair operative to perform a displacement relative to the other section of the pair. In some embodiments, the sensor is linear, comprising two PCWG sections separated by a gap that forms a cross PCWG, the displacement sensing performed preferrably differentially between two edges of the cross PCWG. In other embodiments, the sensor includes Mach Zehnder Interferometer (MZI) configurations with gaps between fixed and moving PCWG sections. Displacement induced changes in the gap widths are reflected in changes in an output parameter of the MZI.

Abstract: This invention is a device for measuring of absolute distances by means of low coherence optical interferometry. The proposed apparatus eliminates thermal of the conventional fiber optic interferometers caused by variation of the refractive index of the optical fiber material to change of the temperature.

Abstract: A displacement sensor comprising at least one pair of co-planar photonic crystal waveguide (PCWG) sections aligned along or parallel to a common axis and separated by a gap, one PCWG section of a pair operative to perform a displacement relative to the other section of the pair. In some embodiments, the sensor is linear, comprising two PCWG sections seperated by a gap that forms a cross PCWG, the displacement sensing performed preferrably differentially between two edges of the cross PCWG. In other embodiments, the sensor includes Mach Zehnder Interferometer (MZI) configurations with gaps between fixed and moving PCWG sections. Displacement induced changes in the gap widths are reflected in changes in an output parameter of the MZI.

Abstract: In an optical tomography system, polarization maintaining optical fibers are employed to guide a light beam emitted by a light source unit to a light dividing means, to guide a measuring light beam from the light dividing means to a probe, to guide the measuring light beam and a reflected light beam within the probe, to guide the reflected light beam from the probe to a combining means, and to guide a reference light beam from the light dividing means to the combining means.

Abstract: A method for demodulating signals from a dispersive, white light interferometer includes generating test interferometry spectra from an interferometer forming part of a sensor for various values of interferometer sensor optical path length. The various test spectra are correlated to a measured spectrum from the sensor to generate a correlation function.

Abstract: In a circuit arrangement for analyzing a clocked signal reflected from an object, particularly an optical signal, wherein at least one radiation emitter which, for providing the clocked signal, is connected to a clocking signal generator, and at least one radiation receiver which receives radiation pulses emitted by the radiation emitter and reflected from the object, and a comparator by which the output signal pulses of the radiation are compared with reference pulses whose amplitudes depend on output signals of the comparator, are provided, the reference signal pulses occur concurrently with the radiation impulses received by the radiation receiver and the impulses received by the radiation receiver are compensated for each by a respective internal reference impulse before their analysis in the circuit arrangement.

Abstract: An apparatus (100) for measuring a thickness of a thin article according to an embodiment of the present apparatus is provided. The apparatus includes an optical fiber interferometer (101), a signal processor module (102) and a measuring module (103). The optical fiber interferometer is configured for obtaining an optical distance difference. This optical distance difference is a result of the thickness of the thin article between a first optical path in which the thin article is measured and a second optical path. The signal processor module is configured for converting an optical distance difference into a phase difference and processing the optical distance difference to obtain a linear signal. That linear signal is convertible into a thickness value of the thin article.

Abstract: An accurate measure of eye length can be obtained using concurrent OCT measurements. A position OCT device can be used to continually monitor the position of the front surface of the cornea, while a distance OCT device can determine the apparent distance between the front surface of the cornea and the front surface of the retina. Since the eye is likely to move during the period of time between measurements of the cornea and retina, the monitored position of the cornea can be used to correct the apparent length measurement by the amount of eye movement over that period of time, in order to obtain an accurate measure of eye length. In some embodiments a single OCT device can serve the dual role of monitoring eye position while making eye length measurements.

Abstract: A system for forming an anodized coating on at least a portion of a substrate thereby creating an anodized substrate is disclosed. The system includes a bath, a coating thickness monitor, at least one probe and at least one controller. The coating thickness monitor includes at least one radiation source directed at at least a portion of the anodized substrate; at least one probe for capturing at least a portion of the radiation reflected and refracted by the anodized coating on the anodized substrate, the captured radiation being at least a portion of the radiation directed the anodized substrate from the radiation source; and at least one detector in communication with the at least one probe, the at least one detector capable of processing the captured radiation to allow a determination of at least the thickness.

Abstract: A fiber optic interferometric position sensor and measurement method thereof suitable for determining the moving direction of a measurement object in an environment of high electric or magnetic field strengths are disclosed. The fiber optic interferometric position sensor comprises at least one light source, a plurality of fiber optic couplers, a plurality of sensing fibers and a plurality of photodetectors. The fiber optic couplers are connected to the at least one light source, the photodetectors, and the sensing fibers, respectively.

Abstract: An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into ±1st order beams, a pair of mirrors that reflect the ±1st order beams to converge toward the scale grating. The ±1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only ±1st order light reaches the receiver channels.

Abstract: An optical sensor for determining a distance between a target and a probe head is described. The optical sensor comprises a light source delivering a broadband spectrum; a fiber-optic Michelson interferometer (FOMI) for creating an interferogram; and an analyzer unit for receiving the interferogram from an output of the FOMI and for determining the distance of the target by finding a position corresponding to a maximum in a Fourier transform of the spectral distribution of the interferogram. The FOMI comprises a probing optical fiber terminated by the probe head and a reference optical fiber, the reference optical fiber having a fixed optical path length.

Abstract: A laser interferometer is disclosed comprising a housing capable of being substantially repeatably mounted to a wall of an environmental chamber, the housing including a laser source, a reflector attached to an object located within the environmental chamber, and a light passage provided through the wall of the environmental chamber enabling passage of a laser beam from the laser source to the reflector. At least one beam steerer may be provided for adjusting direction of passage of a laser beam through the light passage. Also disclosed is a column laser interferometer.

Abstract: Interrogation systems for monitoring structural health conditions. An interrogation system includes at least one wave generator for generating a wave signal and optical fiber sensors applied to a structure. The interrogation system also includes at least one electronic module for generating an input sensor signal and sending the input sensor signal to the optical fiber sensors. Each optical fiber sensor impresses the wave signal onto the input sensor signal to generate an output sensor signal that is frequency shifted from the input sensor signal. The electronic module generates an information signal in response to the output sensor signal. The interrogation system also includes a signal processing unit and a relay switch array module that has relay switches. Each relay switch relays the information signal to the signal processing unit and the signal processing unit generates a digital sensor signal that is subsequently sent to a computer.

Abstract: This invention provides a device or method for measuring vibration with high sensitivity and over a wide bandwidth. A curved section is formed in an optical fiber. The curved section is disposed on a place to be measured. Light is input in the optical fiber, and then variation of frequency between the input light and the output light is detected. Infinitesimal vibration applied to the curved section can be measured as variation of frequency between the input light and the output light. Further, it is possible to measure vibration over a wide bandwidth.

Abstract: A system and method for measuring the thickness of materials and coatings across a moving length of material such as sheet, film, or web by the use of non-contact optical interferometry is provided. Also, a system and method for evaluating the seal integrity in flexible packaging across a moving web by the use of non-contact optical interferometry is provided. Measurement of optical density and thickness, and the combination of various measurements in the production and process of manufacturing materials such as flexible packaging items that involve moving webs of material is disclosed. The present invention concerns the system and method involved in the collection and interpretation of data for these measurements and inspections.

Abstract: Sensors and systems for monitoring structural health conditions. The present invention provides a device for monitoring structural health conditions including a dielectric substrate, a piezoelectric device for actuating and/or sensing Lamb waves, a molding layer deposited over the piezoelectric device, a cover layer deposited over the molding layer and a hoop layer surrounding the piezoelectric device and being attached to the substrate. The device further includes an optical fiber coil sensor attached to the dielectric substrate, where the coil sensor has a rolled optical fiber cable and a coating layer applied to the rolled optical fiber cable. The present invention also provides a diagnostic patch network that includes a plurality of patch sensors attached to a host structure and a bridge box connected to the patch sensors. The bridge box sends information of structural health conditions to and receive power from a ground control system using a wireless communication technique.

Abstract: Apparatus for determining the thickness of a configuration having flat, parallel surfaces that are transparent, or nearly so, to pre-specified types of energy. Embodiments comprise a mechanism for illuminating a front surface with an energy source and mechanisms for measuring reflections of the illumination from a parallel back surface. The energy is contained in a spectrum of wavelengths, the energy being refracted in components at unique wavelengths, e.g., different colored light bands, and similarly reflected from the back surface. The measuring mechanisms, e.g., spectrometers, determine the relative lateral displacement between two spectral lines in the refracted and reflected beams to enable determination of thickness. Other characteristics of the material of the configuration may be ascertained, e.g., chemical composition is ascertained by measuring the intensity of responses at multiple wavelengths and comparing this to responses of known materials.

Abstract: An optical displacement sensor is provided, in which an optical fiber is disposed between a light source and a light receiving means so that light emitted from the light source is conducted therethrough so as to be duly received by the light receiving means whereby a beam diameter can be controlled and a uniform intensity distribution of emitted light can be ensured without providing a pinhole aperture. Also, a six-axis force sensor incorporating such an optical displacement sensor is provided.

Abstract: Methods and apparatus for characterizing and compensating non-cyclic errors in fiber optic pickups in interferometry systems are disclosed.

Abstract: Techniques for measuring spatial locations. An apparatus for measuring spatial locations includes a first object at a first location, a second object at a second location, and a waveguide-based interferometer coupled between the first object and the second object. The waveguide-based interferometer includes a waveguide material. The waveguide material is adapted to carry at least a reference beam and a measurement beam. The reference beam traverses a first path defined within the waveguide material. The measurement beam traverses a second path defined within the waveguide material and a third path defined outside of the waveguide material. The third path is related to at least one of the first location and the second location.

Abstract: A system for determining at least one condition of a substrate includes an optical waveguide for transmitting light from a light source. The optical waveguide can be embedded in the substrate and operatively coupled to an interferometric system. The interferometric system is operatively coupled to a processor. The interferometric system provides the processor with information relating to transmissions through the wave guide, which are indicative of substrate conditions and/or operations being performed relative to the substrate.

Abstract: A fiber optic sensor system for acoustic measurements over a 6 kHz bandwidth, the design of which allows for multiplexity of the input side of the system, and where the optical part of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer as well, that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source, as well as the optical intensity fluctuations. A phase modulation and demodulation scheme takes advantage of the Integrated Optical Circuit phase modulator and multi-step phase-stepping algorithm for providing for high frequency and real time phase signal demodulation. The system includes fiber tip based Fabry-Perot sensors which have a diaphragm, which is used as the transducer. Pressure microphone, velocity sensor, as well as accelerometer, are built based on the fiber tip based Fabry-Perot sensors.

Abstract: Techniques and devices using a fiber to couple light efficiently and compactly in a direction transverse to the fiber core for optical sensing, optical switching, and optical data storage applications. Devices are described for all-fiber optical switching, multiple-disk high-data-rate optical disk drives with compact optical fiber read/write heads, compact fiber-optic interferometers for position, measurements, and endoscopic probes for medical tissue modification and measurement.

Abstract: In a preferred embodiment, the invention provides a fiber optic pressure sensor apparatus which includes a light source, a reflective sensor diaphragm movable in accordance with pressure in a medium and an optical fiber coupled to the light source for delivering a first wavefront of light to the reflective sensor diaphragm. The optical fiber has an endface which is separated from the reflective sensor diaphragm by a gap, the endface receiving a second wavefront of light reflected from the reflective sensor diaphragm. The first and second wavefronts constructively and destructively interfere to create a modulated optical signal. A spectrometer is coupled to the optical fiber for converting the optical signal into a series of digital values, and means for analyzing the digital values is provided for obtaining a measurement of the pressure in the medium. An optical coupler is preferably provided for coupling the light source, the optical fiber, and the spectrometer.

Abstract: A fiber optic fault detector and generic fiber optic sensor system for detecting breaks in an optical fiber using a low coherence interferometric technique. The system comprises a light source configured to produce light traveling along the optical path, a modulator optically coupled to the light source configured to modulate at least a portion of the light as a function of a modulation signal, a detector optically coupled to the modulator configured to produce a detector output based upon a sensed intensity of the light, and an electronic array configured to receive the detector output and determine the optical fault. The low coherence interferometric technique allows for detection of a fault in the fiber with a minimal amount of test equipment and with higher measurement sensitivity and resolution. The system may alternatively include a transducer, positioned in place of the fiber under test, having a response which changes in reflective or optical path length.

Abstract: The present invention is directed to a fiber optic media thickness sensor used in a print media or document processing device. The invention is further directed to a method for measuring media thickness in a media processing device using a fiber optic sensor.

Abstract: At each measurement time, reflected light from a semiconductor wafer W or the like by measurement light from a measurement light source 11 is coupled to reference light from a reference light generating section 14, and interference light is detected by a photodetector 15. A raw thickness value calculating section 16b selects two light intensity peaks corresponding to the upper and lower surfaces of the wafer W from a light intensity distribution between an interference light intensity and a reference optical path length and calculates a raw thickness value. A statistical thickness value calculating section 16c executes statistical processing including data sorting, determination whether the raw thickness value falls within an allowable numerical value range, and determination of a thickness change line, thereby obtaining a statistical thickness value.