Having Partially Reflecting Plates In Series (e.g., Fabry-perot Type) Patents (Class 356/519)
  • Patent number: 10816406
    Abstract: The present invention provides an infrared detector pixel structure and manufacturing method thereof. The bottom portion of a silicon substrate is bonded with a bonding substrate, an infrared absorbing layer in the bonding substrate is used for absorbing a part of infrared light, a closed cavity filled with infrared-sensitive gas is set in the silicon substrate, and a piezoelectric transforming unit is bonded onto the closed cavity. When the infrared-sensitive gas absorbs the infrared light to expand, the infrared sensitive gas will press the piezoelectric transforming unit, which causes piezoelectric signal generated by the piezoelectric transforming unit to be changed, thereby achieving the detection on the infrared light.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: October 27, 2020
    Assignee: SHANGHAI IC R&D CENTER CO., LTD
    Inventor: Xiaoxu Kang
  • Patent number: 10802150
    Abstract: A laser radar apparatus includes: a scanner capable of beam scanning at a first angular speed; a measurable wind distance calculator monitor to calculate and to monitor a measurable wind distance based on wind measurement data obtained through beam scanning by the scanner; an optical axis angular correction amount deriver to derive an optical axis angular correction amount being able to obtain the largest distance of the measurable wind distance, based on a first angular speed and the wind measurement data obtained through beam scanning at a second angular speed lower than the first angular speed, when decrease of the measurable wind distance is detected by the measurable wind distance calculator monitor; and an optical axis corrector to correct an optical axis angular deviation between transmitted light and reception light, based on the optical axis angular correction amount.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: October 13, 2020
    Assignee: Mitsubishi Electric Corporation
    Inventors: Yusuke Ito, Masaharu Imaki, Shumpei Kameyama
  • Patent number: 10768051
    Abstract: A process for characterizing an optical source including a fixed cavity having a free spectral range, the process including: generating a first radiation; receiving at least a portion of this first radiation by at least one sensor; measuring a signal by each sensor and for each scanned state of the source; on the basis of the signals measured, and for each scanned state of the source, calculating a first data item which represents the wavelength of the first radiation, the calculation including, for each scanned state of the source, a selection of a selected value of the first data item from a plurality of possible values, the selection including the elimination of the values of the first data item which do not correspond to a modulo constant of the free spectral range of the fixed cavity expressed according to the units of the first data item.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: September 8, 2020
    Assignee: BLUE INDUSTRY AND SCIENCE
    Inventors: Johann Georges Des Aulnois, Benjamin Szymanski, Bertrand Hardy-Baranski
  • Patent number: 10724915
    Abstract: A static pressure measurement probe system comprises: a base to be fixed onto the cockpit of an aircraft; at least one local pressure tapping formed through the base and coupled to a pressure measurement sensor; for each local pressure tapping, at least two assemblies each comprising an optical window that is transparent to a laser radiation and a laser anemometry probe configured to take anemometry measurements in an imaginary cylinder centred on the local pressure tapping and of a diameter less than 3 cm and of a height less than 4 cm counted from the outer end of the local pressure tapping, so that the measurements are within the airflow limit layer.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: July 28, 2020
    Assignee: THALES
    Inventors: Jean-Pierre Schlotterbeck, Jean-Philippe Pineau
  • Patent number: 10718938
    Abstract: An optical scanning device, an image display device, a heads-up display, and a mobile object. The optical scanning device includes a light source configured to emit scanning light, a light quantity adjuster provided with a plurality of optical attenuators having different light transmittances, the light quantity adjuster configured to change a light-intensity of the scanning light by switching one of the plurality of optical attenuators placed on an optical path, by movement of the light quantity adjuster, to scan a to-be-scanned surface using the scanning light passed through the light quantity adjuster, and a home position sensor configured to detect that the light quantity adjuster is present at a predetermined position. The light source starts emitting the scanning light after one of the plurality of optical attenuators is placed on the optical path at a time of startup.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: July 21, 2020
    Assignee: RICOH COMPANY, LTD.
    Inventor: Hiroshi Johno
  • Patent number: 10625373
    Abstract: Optical arrangements for processing a workpiece include a fiber laser arrangement for emitting laser radiation, a fiber arrangement directly coupled to the fiber laser arrangement and configured to guide the laser radiation in a direction to the workpiece to be processed, the fiber arrangement including a transport fiber having a fiber core and at least one fiber cladding surrounding the fiber core, and at least one coupling device for coupling a portion of the laser radiation guided in the fiber arrangement into at least one fiber cladding of the transport fiber. The coupling device has a spectral bandwidth of at least the same magnitude as a spectral bandwidth of the laser radiation. The fiber laser arrangement is configured to change a beam profile of the guided laser radiation to shift the spectral bandwidth of the laser radiation relative to the spectral bandwidth of the coupling device.
    Type: Grant
    Filed: April 10, 2017
    Date of Patent: April 21, 2020
    Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KG
    Inventor: Andreas Popp
  • Patent number: 10591715
    Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: March 17, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Toshimitsu Kawai
  • Patent number: 10564334
    Abstract: A spectral filter (10) is provided with a long-pass filter (12) and a short-pass filter (13). The long-pass filter (12) has a film thickness gradient GL wherein film thickness increases monotonically in a single direction, and transmits light of a wavelength region longer than a cut-off wavelength WL. The short-pass filter (13) has a film thickness gradient GS wherein film thickness increases monotonically in a single direction, and transmits light of a wavelength region shorter than a cut-off wavelength WS. The long-pass filter (12) and the short-pass filter (13) are overlapped such that the single directions match each other. At the positions in the single directions, a transmittance peak is formed by the cut-off wavelength WL being shorter than the cut-off wavelength WS. The film thickness gradient GL is greater than the film thickness gradient GS.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: February 18, 2020
    Assignee: KONICA MINOLTA, INC.
    Inventors: Hidetaka Jidai, Munenori Kawaji, Ryoji Matsuda
  • Patent number: 10551642
    Abstract: A tunable light source includes a substrate; a light source; a wavelength selecting device that selects, according to a control signal, output light with a specific wavelength from light output from the light source; a wavelength filter that is disposed on the substrate, filters the output light, and outputs the filtered light; a light-receiving device that receives the filtered light from the wavelength filter; and a controller configured to generate the control signal based on an output transmittance corresponding to a quantity of the received light received by the light-receiving device, a first transmittance corresponding to a target wavelength, a second transmittance corresponding to a shorter-wavelength limit of a control range including the target wavelength, and a third transmittance corresponding to a longer-wavelength limit of the control range, and output the generated control signal to the wavelength selecting device.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: February 4, 2020
    Assignee: FUJITSU OPTICAL COMPONENTS LIMITED
    Inventor: Masaki Sugiyama
  • Patent number: 10466132
    Abstract: In some embodiments, at least one processor is employed to determine a boundary of a survey area. Data representative of the locations of measurement points adjacent to or outside of the survey area is received, as well as data representative of wind direction at the measurement points. The boundary of the survey area is determined according to the data representative of wind direction and a maximum detection distance value representative of an estimated maximum distance from a potential gas leak source at which a gas leak from the potential source can be detected.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: November 5, 2019
    Assignee: Picarro Inc.
    Inventors: Sze M. Tan, Chris W. Rella
  • Patent number: 10461493
    Abstract: A device may include a first photodetector to generate a first current based on an optical power of an optical beam. The device may include a beam splitter to split a portion of the optical beam into a first beam and a second beam. The device may include a wavelength filter to filter the first beam and the second beam. The wavelength filter may filter the second beam differently than the first beam based on a difference between an optical path length of the first beam and an optical path length of the second beam through the wavelength filter. The device may include second and third photodetectors to respectively receive, after the wavelength filter, the first beam and the second beam and to generate respective second currents.
    Type: Grant
    Filed: August 10, 2018
    Date of Patent: October 29, 2019
    Assignee: Lumentum Operations LLC
    Inventors: Wei Xiong, Michael C. Larson, Paul Colbourne, Sheldon McLaughlin
  • Patent number: 10451784
    Abstract: A narrow bandpass filter that may be used in a mid-infrared sensor for monitoring a species, which may be a component of a fluid or a solid material. The filter comprises a cavity comprising a low refractive index material. By providing a high ratio of low refractive index material in the filter with respective to high refractive index material, the filter is configured so that wavelength transmission remains constant with varying temperature. Materials used for the low and/or high refractive index provide a temperature invariant filter that transmits mid-infrared spectra without serious degradation.
    Type: Grant
    Filed: September 9, 2015
    Date of Patent: October 22, 2019
    Assignees: SCHLUMBERGER TECHNOLOGY CORPORATION, UNIVERSITY OF READING
    Inventors: Timothy Jones, Nathan Lawrence, Gary Hawkins, Richard Sherwood, Karim Djotni
  • Patent number: 10429287
    Abstract: An observation apparatus (100) includes an observing optical system (101) capable of obtaining an image of a measurement target present in a gap included in a device (1). One end of the gap included in the device (1) is wider than the other end thereof, and upon light beam irradiation to the device (1), an interference fringe appears in the gap. The observing optical system (101) irradiates the gap included in the device (1) with a plurality of light beams having different wavelengths to cause a plurality of interference fringes to appear in the gap. Then the observing optical system (101) obtains an image of the plurality of interference fringes.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: October 1, 2019
    Assignee: OSAKA UNIVERSITY
    Inventors: Makoto Kawano, Hitoshi Watarai, Nobutoshi Ota
  • Patent number: 10281650
    Abstract: An optical comb filter, comprising an input/output collimator (50), an output collimator (60), a spectroscope (10), and first, second and third GT resonant cavities (20, 30, 40), wherein each GT resonant cavity comprises a transparent solid block coated with a membrane layer and a spacing part, a through hole is provided on the transparent solid block, and the transparent solid block and the spacing part form a hollow cavity; and rectangular orientation of an insertion loss curve is realized, and the bandwidth utilization rate is high.
    Type: Grant
    Filed: March 16, 2015
    Date of Patent: May 7, 2019
    Assignee: O-NET COMMUNICATIONS (SHENZHEN) LIMITED
    Inventors: Shuliang Huang, Yimin Hua, Liancheng Li
  • Patent number: 10267687
    Abstract: Techniques for controlling an optical system include accessing a measured value of a property of a particular pulse of a pulsed light beam emitted from the optical system, the property being related to an amount of coherence of the light beam; comparing the measured value of the property of the light beam to a target value of the property; determining whether to generate a control signal based on the comparison; and if a control signal is generated based on the comparison, adjusting the amount of coherence in the light beam by modifying an aspect of the optical system based on the control signal to reduce an amount of coherence of a pulse that is subsequent to the particular pulse.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: April 23, 2019
    Assignee: Cymer, LLC
    Inventors: Thomas Frederick Allen Bibby, Joshua Jon Thornes, Rostislav Rokitski, Thomas Patrick Duffey
  • Patent number: 10211592
    Abstract: In one embodiment, a laser system includes a seed laser diode configured to produce a free-space seed-laser beam. The laser system also includes a pump laser diode configured to produce a free-space pump-laser beam. The laser system further includes an optical-beam combiner configured to combine the seed-laser and pump-laser beams into a combined free-space beam and a focusing lens configured to focus the combined beam. The laser system also includes an optical gain fiber that includes an input end configured to receive the focused beam. The laser system also includes a mounting platform, where one or more of the optical-beam combiner, the focusing lens, and the input end of the gain fiber are mechanically attached to the platform.
    Type: Grant
    Filed: May 21, 2018
    Date of Patent: February 19, 2019
    Assignee: LUMINAR TECHNOLOGIES, INC.
    Inventors: Alain Villeneuve, Jason M. Eichenholz, Laurance S. Lingvay
  • Patent number: 10168213
    Abstract: A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough light incident on the interference filter unit 20, a light-detecting substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the interference filter unit 20, and a first coupling layer 11 arranged between the interference filter unit 20 and the light-transmitting substrate 3. The cavity layer 21 and the first coupling layer 11 are silicon oxide films.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: January 1, 2019
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Katsumi Shibayama, Takashi Kasahara
  • Patent number: 10113958
    Abstract: A multilayered film and a method for performing spectroscopic measurements in a fluid are provided. The multilayered film includes a substrate; a porous layer adjacent to the substrate; and a reflective layer formed on the porous layer, wherein the porous layer selectively allows a component of a fluid to be optically measured when the multilayered film is immersed in the fluid. A sensor for spectroscopic measurements in crude oil samples including a multilayered film as above is also provided. A method of manufacturing a multilayered film for spectroscopic measurements in fluids as above is also provided.
    Type: Grant
    Filed: December 28, 2012
    Date of Patent: October 30, 2018
    Assignee: HALLIBURTON ENERGY SERVICES, INC.
    Inventor: David L. Perkins
  • Patent number: 10082740
    Abstract: An alignment system having long term stability in illumination center wavelength is discussed. The alignment system includes a tunable radiation source and a feedback control system. The tunable radiation source includes a light source configured to provide a broadband radiation beam and a tunable multi-passband filter configured to filter the broadband radiation beam into narrow band radiation beam having a center wavelength value. The feedback control system is configured to measure the center wavelength value of the narrow band radiation beam and compare the measured center wavelength value with a desired center wavelength value. The feedback control system is further configured to generate a control signal based on the comparison in response to a difference being present between the measured center wavelength value and the desired center wavelength value and tune the tunable filter based on the control signal to eliminate or substantially reduce the difference.
    Type: Grant
    Filed: November 26, 2015
    Date of Patent: September 25, 2018
    Assignee: ASML Holding N.V.
    Inventors: Tao Chen, King Pui Leung, Kevin J. Violette
  • Patent number: 10050703
    Abstract: A tracking system includes a tracking arrangement including a processor, memory, and at least a first interface port; and one or more optical modules. Each optical module includes a housing having at least one input port, at least a first output port, and at least a first monitoring port. An optical power splitter arrangement and an optical receiver are disposed within the housing. The splitter arrangement splits optical signals received at the input port onto one or more output lines and one or more monitoring lines. The output lines are routed to the output ports and the monitoring lines are routed to the optical receiver. The optical receiver measures the power of optical signals received from the first monitoring line and provides a measurement signal to the first monitoring port of the housing.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: August 14, 2018
    Assignee: COMMSCOPE TECHNOLOGIES LLC
    Inventors: Trevor D. Smith, Erik J. Gronvall, Timothy G. Badar
  • Patent number: 10024648
    Abstract: The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: July 17, 2018
    Assignee: MITUTOYO CORPORATION
    Inventors: Tatsuya Nagahama, Ken Motohashi, Han Haitjema, Johannes Anna Quaedackers
  • Patent number: 9970819
    Abstract: A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: May 15, 2018
    Assignee: Si-Ware Systems
    Inventors: Diaa Khalil, Bassam A. Saadany, Yasser M. Sabry
  • Patent number: 9924247
    Abstract: An optical paired channel transceiver component comprises an optical channel interface to concurrently receive an inbound optical signal at a designated receiver frequency, and output an outbound optical signal at a designated transmitter frequency distinct from the receiver frequency; a receiver operable to process the inbound optical signal at the receiver frequency; a laser input interface to receive a laser input at the transmitter frequency to produce the outbound optical signal; and a resonant optical structure optically coupling each of the laser input interface and the receiver to the optical channel interface via respective optical paths, and having a resonance corresponding to one of the transmitter frequency and the receiver frequency such that a resonant one of the inbound signal and the outbound signal is resonantly redirected by the resonant optical structure along a resonant one of the respective paths.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: March 20, 2018
    Assignee: Elenion Technologies, LLC
    Inventors: Michael Hochberg, Bernd-Harald Horst Jurgen Rohde
  • Patent number: 9816803
    Abstract: Optical Coherence Tomography (OCT) system and apparatus of this instant application is very useful for diagnosis and management of 3ophthalmic diseases such as retinal diseases and glaucoma etc. Instant innovative OCT diagnostic system leverages advancements in cross technological platforms. The Michelson interferometric system presented in this application could be used for the OCT imaging, which includes biological OCT imaging, medical OCT imaging, ophthalmic OCT imaging, corneal OCT imaging, retinal OCT imaging, and the like. A tunable filter is placed in front of the detector to make the interferometer more sensitive and accurate for examining various samples for diagnosis.
    Type: Grant
    Filed: February 25, 2016
    Date of Patent: November 14, 2017
    Assignee: NETRA SYSTEMS, INC.
    Inventor: Manish Dinkarrao Kulkarni
  • Patent number: 9813158
    Abstract: Methods and system for transmitting data includes converting multiple optical beams to distinct respective spatial modes. Data is modulated onto each of the optical beams. The optical beams are combined into a single transmission beam. The transmission beam is launched onto a multimode optical fiber having an elliptical core.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: November 7, 2017
    Assignee: NEC Corporation
    Inventors: Giovanni Milione, Ezra Ip, Ting Wang
  • Patent number: 9746428
    Abstract: Embodiments include devices, systems and processes for using a white light interferometer (WLI) microscope with a tilted objective lens to perform in-line monitoring of both resist footing defects and conductive trace undercut defects. The defects may be detected at the interface between dry film resist (DFR) footings and conductive trace footing found on insulating layer top surfaces of a packaging substrate. Such footing and undercut defects may other wise be considered “hidden defects”. Using the WLI microscope with a tilted objective lens provides a high-throughput and low cost metrology and tool for non-destructive, non-contact, in-line monitoring.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: August 29, 2017
    Assignee: Intel Corporation
    Inventors: Shuhong Liu, Zhiyong Wang, Nilanjan Z. Ghosh, Deepak Goyal
  • Patent number: 9681798
    Abstract: Imaging spectrometers can be used to generate hyperspectral images for medical diagnoses, contaminant detection, and food safety inspections, among other applications. An exemplary imaging spectrometer includes an integrated position sensing array that measures the relative positions of the interferometer components based on an interference pattern generated by illuminating the interferometer with a reference beam. Such an imaging spectrometer includes a processor that controls the interferometer component position by actuating a voice coil and several piezo-electric elements to align the components with respect to each other and to provide a desired optical path length mismatch between the interferometer arms. In some cases, the processor may use feedback and feed forward control, possibly based on the actuators' transfer functions, for more precise positioning. The processor may also implement adaptive and recursive spectral sampling to reduce the image acquisition period.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: June 20, 2017
    Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Ian W. Hunter, Yi Chen
  • Patent number: 9647417
    Abstract: A laser beam combining and power scaling device and method. A first highly reflective mirror residing perpendicular to the first optical axis reflecting radiation emitted from the first laser head. A first Q-switch in alignment with the first optical axis interposed between the first highly reflective mirror and the first laser head. A second highly reflective mirror residing perpendicular to the second optical axis reflecting radiation emitted from the second laser head. The second Q-switch in alignment with the second optical axis is interposed between the second highly reflective mirror and the first laser head. A third optical axis is coincident with the first optical axis. A third highly reflective mirror residing perpendicular to the third optical axis in alignment therewith. The third optical axis may include a third diode pumped laser head and Q-switch. A beam splitter resides at the intersection of the axes.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: May 9, 2017
    Assignee: LEE LASER, INC.
    Inventors: Dwight Kimberlin, Donald Bishop
  • Patent number: 9647411
    Abstract: There is provided a method of controlling the wavelength of a laser beam. The method includes measuring an absolute wavelength of the laser beam; calculating a difference between a reference wavelength and the absolute wavelength of the laser beam; and adjusting the reference wavelength of the laser beam based on the difference between the reference wavelength and the absolute wavelength of the laser beam, at an interval shorter than an interval for which the absolute wavelength of the laser beam is measured.
    Type: Grant
    Filed: August 5, 2015
    Date of Patent: May 9, 2017
    Assignee: GIGAPHOTON INC.
    Inventors: Takashi Matsunaga, Takahito Kumazaki, Osamu Wakabayashi
  • Patent number: 9618822
    Abstract: An all-optical information exchange device and method are provided. The all-optical information exchange device includes: a second-order nonlinear optical waveguide, a first optical coupler, a third optical coupler, a fourth optical coupler, a first optical filter, a second optical filter and a first polarization controller; the first optical filter is transmissive to a first wavelength/waveband signal light, and the second optical filter is transmissive to a second wavelength/waveband signal light during use.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: April 11, 2017
    Assignee: Huawei Technologies Co., Ltd.
    Inventors: Jian Wang, Jifang He, Hongyan Fu
  • Patent number: 9606339
    Abstract: A mirror (M) of a projection exposure apparatus for microlithography configured for structured exposure of a light-sensitive material and a method for producing a mirror (M). The mirror (M) has a substrate body (B), a first mirror surface (S) and a second mirror surface (S?). The first mirror surface (S) is formed on a first side (VS) of the substrate body (B). The second mirror surface (S?) is formed on a second side (RS) of the substrate body (B), the second side being different from the first side of the substrate body (B). The mirror (M) may be embodied, in particular, such that the substrate body (B) is produced from a glass ceramic material.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: March 28, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Jochen Hetzler, Ralf Mueller, Wolfgang Singer
  • Patent number: 9588333
    Abstract: A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: March 7, 2017
    Assignee: Seiko Epson Corporation
    Inventors: Akira Sano, Koji Kitahara
  • Patent number: 9588334
    Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
    Type: Grant
    Filed: May 8, 2013
    Date of Patent: March 7, 2017
    Assignee: TEKNLOGIAN TUTKIMUSKESKUS VTT OY
    Inventors: Tapani Antila, Jussi Mäkynen, Christer Holmlund, Jarkko Antila, Jyrki Ollila, Heikki Saari
  • Patent number: 9438336
    Abstract: There is provided a method for determining a noise parameter characterizing an optical Signal-Under-Test (SUT) having a signal contribution, an Amplified Spontaneous Emission (ASE) noise contribution and a non-ASE optical noise contribution, such as a carrier-leakage contribution or a depolarized-signal contribution, within an optical-signal bandwidth. The method comprises acquiring optical spectrum trace(s) of the SUT, discriminating at least the non-ASE optical noise contribution from the ASE-noise contribution using the optical spectrum trace(s) and/or a trace obtained from the optical spectrum trace(s); and determining the noise parameter using discriminated non-ASE optical noise contribution and/or the discriminated ASE-noise contribution.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: September 6, 2016
    Assignee: EXFO INC.
    Inventors: Gang He, Daniel Gariepy, Hongxin Chen, Bernard Ruchet
  • Patent number: 9423605
    Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: August 23, 2016
    Assignee: Cornell University
    Inventors: Sasikanth Manipatruni, Michal Lipson, Jacob T. Robinson
  • Patent number: 9417052
    Abstract: In part, the invention relates to methods, devices, and systems suitable for controlling a light source. The light source is configured for use in a data collection system such as an optical coherence tomography system. The light source can be controlled with a drive waveform. Linearizing and symmetrizing parameters of the light source such as forward and backward scan durations is achieved using a suitable drive waveform. Phase, amplitude, and other parameters for different harmonics of a fundamental wave can be identified that improve operating parameters such as the duty cycle and peak frequency matching between scans. The fundamental wave and one or more of such harmonics can be combined to generate the suitable drive wave form. The light source can include a tunable light source that includes or is in optical communication with a tunable filter.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: August 16, 2016
    Assignee: LIGHTLAB IMAGING, INC.
    Inventor: Desmond Adler
  • Patent number: 9369201
    Abstract: An optical-source monitor images and diffracts received optical signals using an optical device that has a reflective geometry. For example, the optical device may include a diffraction grating on a curved surface, such as an echelle grating. By imaging and diffracting the optical signals, the optical device may couple to the optical signals on different diffraction orders of the optical device (which have different carrier wavelengths) from input optical waveguides to corresponding output optical waveguides. Then, output power monitors may measure the output power levels of the optical signals, and control logic may provide wavelength control signals to optical sources that provide the optical signals based on measured output power levels.
    Type: Grant
    Filed: April 23, 2012
    Date of Patent: June 14, 2016
    Assignee: ORACLE INTERNATIONAL CORPORATION
    Inventors: Ying L. Luo, Xuezhe Zheng, Ashok V. Krishnamoorthy, Guoliang Li
  • Patent number: 9347830
    Abstract: An apparatus for obtaining spectral image includes a variable spectral element capable of changing its spectral characteristics, a transmission wavelength setting unit for setting a wavelength of light to be transmitted by the variable spectral element, a variable spectral element control unit changing a first control of the variable spectral element and a second control of the variable spectral element for controlling spectral characteristics of the variable spectral element to each other, an image capturing unit capturing an image that is formed by light transmitted by the variable spectral element, and an image correction unit acquiring a difference image between a first image captured in the first control and a second image captured in the second control.
    Type: Grant
    Filed: December 5, 2013
    Date of Patent: May 24, 2016
    Assignee: OYMPUS CORPORATION
    Inventor: Toshiaki Watanabe
  • Patent number: 9310564
    Abstract: A tunable multiport optical filter includes various types of arrays of optical ports. The tunable filter also includes a light dispersion element (e.g., a grating) and a reflective beam steering element (e.g., a tilting mirror). An optical signal exits an optical (input) port, is dispersed by the light dispersion element, reflects off the reflective beam steering element back to the light dispersion element, and on to another optical (output) port. The reflective beam steering element can be steered such that a wavelength portion of the dispersed optical signal can be coupled to the optical output port. For example, the input optical signal may be a wavelength division multiplexed signal carrying multiple channels on different wavelengths, and the tunable multiport optical filter directs one of the channels to the output optical port. Additionally, the tunable filter may be incorporated into a device acting as a wavelength reference.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: April 12, 2016
    Assignee: II-VI Incorporated
    Inventors: Massimo Martinelli, Mark H. Garrett, Ruipeng Sun, Mikhail I. Rudenko
  • Patent number: 9304040
    Abstract: A method of optical spectroscopy and a device for use in optical spectroscopy. The device includes a substrate, and a plurality of etalon cavities affixed to or coupled to the substrate. A signal is received from a Fabry-Perot interferometer. The signal is sampled using the device according to a generalized Nyquist-Shannon sampling criterion. The signal is sampled using the device according to a phase differential criterion for wave number resolution. An input spectrum for the signal is reconstructed based on the signal sampled according to the generalized Nyquist-Shannon sampling criterion and the signal sampled according to the phase differential criterion for wave number resolution.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: April 5, 2016
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Michael K. Yetzbacher, Christopher W. Miller, Michael J. Deprenger, Andrew J. Boudreau
  • Patent number: 9279770
    Abstract: Described herein are methods for mid-infrared imaging of nucleic acid microarrays by employing mid-infrared reflective labels combined with detection in the reflection mode. The methods described herein provide intrinsic image contrast, and permit detection of DNA microarray hybridization on infrared absorbing substrates such as glass slides.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: March 8, 2016
    Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY, DEPARTMENT OF HEALTH AND HUMAN SERVICES
    Inventors: Magdi M. Mossoba, Sufian Al-Khaldi, Brianna Schoen, Betsy Jean Yakes
  • Patent number: 9153939
    Abstract: A system and method for triggering data acquisition in a semiconductor laser system including outputting electromagnetic energy from the semiconductor laser over a range of wavelengths according to a signaling path. The signaling path includes a plurality of discrete data inputs to the semiconductor laser for outputting electromagnetic energy over a range of wavelengths and the signaling path includes one or more perturbances in transitioning from one wavelength to another wavelength along the signaling path. A series of triggering signals are generated for input to a measurement system by the semiconductor laser. The series of triggering signals include a non-uniform period between at least a first triggering signal and an adjacent second triggering signal, and the non-uniform period corresponds to at least one perturbance. The electromagnetic energy output from the semiconductor laser is detected based on the series of triggering signals.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: October 6, 2015
    Assignee: Insight Photonic Solutions, Inc.
    Inventors: Michael Minneman, Michael Crawford, Jason Ensher
  • Patent number: 9143229
    Abstract: A method of monitoring optical power in an optical channel includes directing a portion of a broadband optical signal propagating through an optical channel to an optical input of an electrically controllable tunable optical filter. The portion of the broadband optical signal is filtered with the electrically controllable tunable filter to select an optical channel for optical power monitoring. The selected optical channel is detected and an electrical signal that represents the selected optical channel is generated. An optical power of the selected optical channel is estimated from the electrical signal that represents the selected optical channel by performing an iterative deconvolution of the selected optical channel signal with a predetermined response function of the electrically controllable tunable optical filter.
    Type: Grant
    Filed: October 11, 2010
    Date of Patent: September 22, 2015
    Assignee: II-VI Photonics, (US) Inc.
    Inventor: Michael Cahill
  • Patent number: 9121818
    Abstract: A movable body spectrum measuring apparatus includes a spectrum sensor mounted in a movable body to measure spectrum data containing information including wavelength information and optical intensity information of a measuring object, a processor mounted in the movable body to discriminate the measuring object by processing the measured spectrum data, and a signal transmission path for transmitting the measured spectrum data from the spectrum sensor to the processor. The movable body spectrum measuring apparatus further includes a data transfer device which acquires reconfigured spectrum data by reconfiguring the measured spectrum data so that selected information as predetermined information is selected from the information contained in the measured spectrum data. The data transfer device transfers the reconfigured spectrum data to the processor via the signal transmission path.
    Type: Grant
    Filed: July 30, 2010
    Date of Patent: September 1, 2015
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Ryuji Funayama, Kenji Sasaki, Jun Sato
  • Patent number: 9086488
    Abstract: One of first and second beams (28) of corresponding first and second light (13) are projected into an atmosphere (20) and at least one physical property of the atmosphere (20) is detected from the interference pattern (47) generated from the resulting scattered light (30). The first and second beams (20) are selected responsive to either a detected signal-to-noise ratio (SNR) or a detected aerosol-to-molecular ratio (AMR). The wavelength (740) of the first light (13) provides for either molecular or aerosol scattering, whereas the wavelength (738) of the second light (13) provides for primarily only aerosol scattering. In accordance with a second aspect, scattered light (30) from one or more beams (28) of substantially monochromatic light (13) projected into the atmosphere (20) and received from a plurality of interaction regions (17) or measurement volumes (52) provides for determining wind power (P*) within a region of the atmosphere (20).
    Type: Grant
    Filed: February 2, 2011
    Date of Patent: July 21, 2015
    Assignee: Michigan Aerospace Corporation
    Inventors: Peter Tchoryk, Jr., David Michael Zuk, David Keith Johnson, Charles J. Richey, Parviz Tayebati
  • Patent number: 9046679
    Abstract: A wavelength variable interference filter includes: a first substrate which has a light transmissive property; a second substrate which has a light transmissive property and is disposed to face one surface of the first substrate and is bonded thereto; a first reflection film which is provided on the first substrate; a second reflection film which is provided on the second substrate; and a variable section which varies the gap; wherein the second substrate includes: a first layer which has a movable section; and a second layer which is laminated to a surface of the first layer facing the first substrate, is formed in a plate shape with a uniform thickness, and has a support section configured to displaceably support the movable section; and the first layer is not laminated to at least a region overlapping with the support section in the planar view.
    Type: Grant
    Filed: January 3, 2011
    Date of Patent: June 2, 2015
    Assignee: Seiko Epson Corporation
    Inventors: Nozomu Hirokubo, Seiji Yamazaki
  • Publication number: 20150139451
    Abstract: A device comprising measurement (7) and reference (3) interferometers is disclosed. Each interferometer is configured to receive light from the same light source (1) and to emit light to respective detectors (6) and has a respective operating point. The measurement interferometer (7) is configured to respond to variations in a physical parameter by varying the intensity of light emitted, whereas the reference interferometer (3) is configured to be unresponsive to variations in the physical parameter. The device further comprises a signal processor for generating a differential output signal depending on respective output signals generated by the detectors (6).
    Type: Application
    Filed: May 16, 2012
    Publication date: May 21, 2015
    Applicant: XARION LASER ACCOUSTICS GMBH
    Inventors: Balthasar Fischer, Friedrich Reining, Ernst Wintner
  • Publication number: 20150124263
    Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
    Type: Application
    Filed: May 8, 2013
    Publication date: May 7, 2015
    Applicant: Teknologian tutkimuskeskus VTT
    Inventors: Tapani Antila, Jussi Mäkynen, Christer Holmlund, Jarkko Antila, Jyrki Ollila, Heikki Saari
  • Patent number: 8994955
    Abstract: A Fabry-Perot interferometer includes an input mirror and an output mirror arranged facing the input mirror via a gap. Each mirror includes a pair of high-refractive layers and a space layer arranged selectively between the high-refractive layers. At least one of an input-side bridge part and an output-side bridge part arranged crossing the gap, is movable as a membrane. Each bridge part includes a transmission portion and a periphery portion. Each transmission portions includes a mirror element in which the space layer is sandwiched by the pair of high-refractive layers. In a second direction perpendicular to the first direction, the mirror element of the input mirror has a width larger than seven times of a maximum wavelength of a transmission light output from the output mirror, and functions as a diffraction restriction mirror.
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: March 31, 2015
    Assignee: DENSO CORPORATION
    Inventors: Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi
  • Patent number: 8995044
    Abstract: The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: March 31, 2015
    Assignee: Teknologian Tutkimuskeskus VTT Oy
    Inventor: Martti Blomberg