Abstract: A method for detecting an edge of an object is carried out by means of a detection device (10), which has an emission region running along a first straight line and has a receiving region which runs along a second straight line, which is arranged in parallel to the first straight line. An emission subregion (11a-p) of the emission region is selected, which extends up to a first end of the emission region. Light is emitted from the emission subregion (11a-p) and a light signal of light reflected on the object is received in the receiving region. The emission subregion (11a-p) is then shifted along the first straight line in the direction of a second end of the emission region. Emitting, receiving and shifting are repeated until the emission subregion (11a-p) extends up to the second end at the start of the shifting step. A signal course is compiled from the received light signals, and the detection of the edge from the signal course is carried out.

Abstract: A three-dimensional space detection system, including: a locating base station, a label device to be located, and a computing device. The locating base station synchronizes a base time point to the label device to be located, sends an ultrasonic signal to the label device to be located, rotationally sends a first laser plane signal about a first rotation axis, and rotationally sends a second laser plane signal about a second rotation axis perpendicular to the first rotation axis. The label device to be located synchronizes a base time point from the locating base station, detects the ultrasonic signal, the first laser plane signal and the second laser plane signal.

Abstract: An apparatus and method for detecting a difference in width of a strip of material from a desired width of material. The apparatus may comprise a light source, a light detector, an alarm, a first fiber optic cable coupled with the light source, a second fiber optic cable coupled with the light detector, and a housing. The housing may comprise a material slot for passing the strip of material therethrough such that edges of the strip of material may at least partially intersect a plurality of light fields directed from the first fiber optic cable to the second fiber optic cable. The amount of light detected by the light detector is dependant on the amount of light blocked by the strip of material. If the amount of light received is outside of a range of tolerance from the desired width of material, the alarm may be actuated.

Abstract: A device for optical measuring of grains for analysis of the quality of the grains, comprises a feeder which is arranged to feed at least one grain in a direction of transport, a light source which is arranged to illuminate the grain along a line, a detector which is arranged to detect reflection from the surfaces of the grain and an analyzer which is arranged to analyze the detected reflection in order to determine a height profile of the grain along the line and to determine three-dimensional surface topographical information on the grain based on a plurality of determined height profiles as the grain is transported. The device further comprises an arrangement used in generating a two-dimensional image and the analyzer is arranged to determine a quality of the grain based on the three-dimensional surface information and the two-dimensional image of the same grain.

Abstract: An optical metrology model is created for a patterned structure formed on a semiconductor wafer. The optical metrology model has profile parameters, material refraction parameters, and metrology device parameters. Ranges of values for the parameters are defined. One or more measured diffraction signals of the patterned structure are obtained. The optical metrology model is optimized to obtain an optimized optical metrology model using the defined ranges of values defined and the one or more obtained measured diffraction signals of the patterned structure. For at least one parameter from amongst the material refraction parameters and the metrology device parameters, the at least one parameter is set to a fixed value within the range of values for the at least one parameter. At least one profile parameter of the patterned structure is determined using the optimized optical metrology model and the fixed value for the at least one parameter.

Abstract: A method and system for determining the lateral position of an edge of a web are disclosed. The system includes an array of light transmitting elements and a corresponding array of lenses and an array of light receiving elements and a corresponding array of lenses. The light transmitting elements are each paired with a light receiving element and the light transmitting elements each transmit a beam of light energy towards the corresponding receiving element. The beams of light can be occluded by a web passing between the transmitting elements and the receiving elements, thereby reducing the light received by the receiving elements. The receiving elements can generate a signal that is proportional to the amount of they receive, and a controller can be used to determine the lateral position of an edge of the web in response to the signals generated by the receivers. A compensation light beam can be employed to enable the controller to compensate for several factors that can affect measurement accuracy.

Abstract: The present invention relates generally to photolithographic systems and methods, and more particularly to systems and methodologies that facilitate the reduction of line-edge roughness (LER) during gate formation in an integrated circuit. Systems and methods are disclosed for improving critical dimension (CD) of photoresist lines, comprising a non-lithographic shrink component that facilitates mitigating LER, and a trim etch component that facilitates achieving and/or restoring a target critical dimension.

Abstract: Various edge detection arrangements are disclosed, including an edge detection method and arrangement that utilizes outputs of commonly illuminated reference and edge sensors as the inputs for a comparator. The reference sensor is configured to have a wide field of view and the edge sensor is configured to have a narrow, high gain, field of view. Therefore, the reference sensor has a broad signal response to an edge passage and the edge sensor a steep and narrow signal response. When the two signals are biased to cross each other, the comparator output changes state, indicating passage of an edge. Because the reference sensor provides a base signal level directly related to the real time illumination level that the edge sensor also receives, the reference sensor provides a switch point along the transition ramp of the edge sensor that integrates a majority of the random error sources.

Abstract: A plurality of microswitches are arranged in a photosensitive material receiving section in a row, in a direction perpendicular to the travel direction of a printing plate. The printing plate is carried while being centered with respect to a center of a transport path. The plurality of microswitches are arranged in an asymmetrical manner with respect to the center of the transport path. Thus the width of a photosensitive material can be precisely calculated with a small number of microswitches. Further, deviation of the photosensitive material from the center of the transport path can be easily detected.

Abstract: According to one exemplary embodiment of the present invention, a method for sensing the position of an edge of a stock being feed to a printing press is provided. The method includes the steps of providing a light source, utilizing the light source to illuminate with planar radiation a preselected area of the stock, and a preselected area adjacent to the stock, and further providing a retro-reflecting surface on at least a portion of the preselected area adjacent to the stock illuminated by the light source. According to a feature of the present invention, a measuring device is provided and utilized to measure radiation reflected by the retro-reflecting surface.

Abstract: A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.

Abstract: A method and system for determining the lateral position of an edge of a web are disclosed. The system includes an array of light transmitting elements and a corresponding array of lenses and an array of light receiving elements and a corresponding array of lenses. The light transmitting elements are each paired with a light receiving element and the light transmitting elements each transmit a beam of light energy towards the corresponding receiving element. The beams of light can be occluded by a web passing between the transmitting elements and the receiving elements, thereby reducing the light received by the receiving elements. The receiving elements can generate a signal that is proportional to the amount of they receive, and a controller can be used to determine the lateral position of an edge of the web in response to the signals generated by the receivers. A compensation light beam can be employed to enable the controller to compensate for several factors that can affect measurement accuracy.

Abstract: The invention is directed to a method and apparatus for detecting a substrate feature. A sensor is secured opposite the substrate. The sensor emits a signal onto the surface of the substrate. The sensor detects the amount of signal reflected from the substrate. The sensor is programmed with the relative signal reflective properties for a surface of the substrate. The sensor compares the expected signal reflection rates for a surface of the substrate to the actual signal reflection rate. The sensor generates an output signal to an output device.

Abstract: A sensor system for determining the position of an edge of a moving web of material travelling along a predetermined travel path. the sensor system comprising a transmitter/receiver assembly, a beam reflector assembly and sensor signal processing. The transmitter/receiver assembly is positioned adjacent to the travel path of the moving web of material. The transmitter/receiver assembly has a transmitter transmitting a light curtain across at least a portion of the travel path, and a receiver receiving a shifted light curtain transmitted across at least a portion of the travel path and generating video output signals indicative of the position of the edge of the moving web of material. The beam reflector assembly is also positioned adjacent to the travel path of the moving web of material such that the travel path passes between the transmitter/receiver assembly and the beam reflector assembly.

Abstract: A critical dimension measurement method and apparatus capable of measurement even for a object below a resolution of an optical microscope. An image of an object is picked up by using an optical microscope and an image sensor. From an obtained video signal, signal positions of two points coinciding with a predetermined luminance level are extracted. A difference in position between the two points is multiplied by a ratio of maximum luminance between the two points to maximum luminance serving as a reference. On the basis of a resultant product, a size of the object is measured.

Abstract: The width measuring apparatus according to this invention includes a light emitting element, a pair of light receiving elements, a measurement support table for fixing them and calculating device, where a pair of partial laser beams of the laser beam from the light emitting element which are not projected over a traveling elongated object to be measured are received by the light receiving elements, and a width of the elongated object calculated from the received light quantities of the pair of partial laser beams. The width measuring apparatus according to this invention further includes a single light emitting element, pairs of light receiving elements, a measurement support table for fixing and calculating devise, where pairs of partial laser beams of the laser beams from the light emitting element which are not projected over traveling elongated objects are received by the light receiving elements, and widths of the elongated objects are calculated from light quantities of the received partial laser beams.

Abstract: A process for the determination of the thickness transverse profile and the thickness longitudinal profile of a running material strip.