Abstract: An apparatus for manufacturing a hydro dynamic bearing device is provided for the finishing treatment of lubricating oil after lubricating the hydro dynamic bearing device. The hydro dynamic bearing is constructed of an axial member housed in a housing, a radial bearing part for supporting the axial member in a non-contact manner in a radial direction by a hydro dynamic pressure action of the lubricating oil generated in a radial bearing clearance, and a sealing part arranged in an opening part of the housing, and the apparatus has a laser for measuring an oil-level height of the lubricating oil in the housing.

Abstract: There is provided a recording medium imaging device capable of properly selecting pixels used for determining the kind of the recording medium from the captured surface image to remove pixels from which the surface property of the recording medium cannot be properly determined because the pixels extremely high in light quantity are affected by some sort of dirt or scratches in determining the kind of a recording medium. This allows the determination of kind of the recording medium based on the normally captured surface image to reduce the decrease in accuracy in determining the kind of the recording medium.

Abstract: Disclosed is a method involving repeatedly measuring a pressure within a flow of processing gas that is provided in a semiconductor processing apparatus for treatment of a semiconductor substrate, such as a semiconductor wafer. The flow of processing gas is made to extend between a surface of the substrate and a surface of a processing body. From the pressure measurements the occurrence of an event that is related to a variation in the position of the substrate's surface relative to the surface of the processing body is determined.

Abstract: A method for manufacturing a hydro dynamic bearing device is provided for the finishing treatment of lubricating oil after lubricating the hydro dynamic bearing device. The hydro dynamic bearing is constructed of an axial member housed in a housing, a radial bearing part for supporting the axial member in a non-contact manner in a radial direction by a hydro dynamic pressure action of the lubricating oil generated in a radial bearing clearance, and a sealing part arranged in an opening part of the housing, and the method has the step of measuring the oil-level height of the lubricating oil in the housing by a laser detector.

Abstract: A lighting apparatus for use with line scan cameras in plants for detecting and recognizing objects in a flow of materials such as goods to be sorted, in which several separately controllable diodes and an optical device are provided, with the diodes being disposed at least in one row next to one another over the width of the respective section of the plant and the optical device regularizes the light emitted by the diodes in such a way that a secure detection of the objects and its properties such as material composition, color, size or the like is ensured by cameras. The optical device comprises two diffusers and an interposed lens.

Abstract: There is provided a clustered device for manufacturing a semiconductor device in which a cleaning chamber, a rapid thermal processing chamber, an optical measurement chamber, and the like are arranged around a load-lock room. In an optical measurement system, there are disposed an exciting light source, a measuring light source, a light detector, a control/analyze system, and the like. During the formation of an oxide film, for example, a wafer is cleaned in the cleaning chamber and then the amount of a natural oxide film remaining on the wafer or the like is measured by optical modulation reflectance spectroscopy in the optical measurement chamber. Thereafter, the wafer is oxidized in the rapid thermal processing chamber. As a result, the surface of the wafer is prevented from being oxidized on exposure to an atmosphere and the surface state of the wafer can be monitored in the course of a sequential process steps.

Abstract: A monitoring tool for monitoring an article in a wet environment, the monitoring tool including a monitoring station having an optical unit, a liquid holding unit for receiving the article, and a window, through which at least a portion of the article is viewable by the optical unit, a buffer station associated with the monitoring station having a plurality of supporting assemblies for receiving the article before and after being monitored, wherein at least one of the supporting assemblies includes a liquid receptacle for holding the article therein, and a gripping unit operating in conjunction with the monitoring station for moving the article from the buffer station to the liquid holding unit of the monitoring station.