Abstract: The invention relates in general level to radiation transference techniques as applied for utilisation of material handling. The invention relates to a radiation source arrangement comprising a path of radiation transference, or an improved path of radiation transference, which path comprises a turbine scanner or an improved turbine scanner. The invention also concerns a target material suitable for vaporization and/or ablation. The invention concerns an improved turbine scanner. The invention concerns also to a vacuum vaporization/ablation arrangement that has a radiation source arrangement according to invention. The invention concerns also a target material unit, to be used in coating and/or manufacturing target material.
Type:
Application
Filed:
July 13, 2006
Publication date:
July 22, 2010
Inventors:
Jari Ruuttu, Reijo Lappalainen, Vesa Myllymäeki, Lasse Pulli, Juha Mäkitalo