Abstract: A scanning device includes a planar scanning mirror disposed within a frame and having a reflective upper surface. A pair of flexures have respective first ends connected to the frame and respective second ends connected to the mirror at opposing ends of a rotational axis of the mirror. A rotor including a permanent magnet is disposed on the lower surface of the mirror. A stator includes first and second cores disposed in proximity to the rotor on opposing first and second sides of the rotational axis and first and second coils of wire wound respectively on the cores. A drive circuit drives the first and second coils with respective electrical currents including a first component selected so as to control a transverse displacement of the mirror and a second component selected so as to control a rotation of the mirror about the rotational axis.

Abstract: A microrobot is disclosed. The microrobot includes a magnet configured to provide a motive force when magnetic force of one or more electrical coils act upon the magnet, a support member coupled to the magnet, a thermo-responsive polymer member coupled to each end of the support member at a proximal end, the thermo-responsive polymer member configured to articulate when heated, wherein the thermo-responsive polymer members configured to receive light from a microrobot structured light system and convert the received light into heat.

Abstract: An optical fiber scanning device includes a housing, an optical fiber configured to emit light, a magnet disposed on the optical fiber, four drive coils configured to drive the optical fiber by applying to the magnet a magnetic field generated by a received drive power signal, and four detection coils configured to output an induced electromotive force signal corresponding to variation of a magnetic field, wherein the drive power signal is controlled based on the induced electromotive force signal, and four coil assemblies each including any one of the drive coils and any one of the detection coils are disposed at rotationally symmetrical positions so as to interpose the optical fiber among the four coil assemblies.

Abstract: A display device includes a light projection device which projects light including an image, an optical mechanism which is capable of adjusting a distance from a predetermined position to a position where the light is formed as a virtual image, a concave mirror which reflects light toward a reflector, a concave mirror actuator which adjusts a reflection angle of the concave mirror, and a control device which controls the light projection device and the concave mirror actuator, in which the control device adjusts a projection position on a projection surface of the light projected from the light projection device having an angle formed by a horizontal surface passing through a predetermined position on an image and a segment from the predetermined position to a position where the light is formed as a virtual image so as to curb fluctuation occurring due to movement of a vehicle.

Abstract: A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.

Abstract: The invention relates to an apparatus and a method for checking value documents marked with feature substances, and to the corresponding feature substances. The feature substances are detected on the basis of Raman or SERS spectroscopy also at high transport speeds with a spatial resolution in the low millimeter region or better and reliably identified.

Abstract: A method and/or system is provided for detecting and/or identifying inclusions (e.g., nickel sulfide based inclusions/defects) in glass such as soda-lime-silica based float glass. In certain example instances, during and/or after the glass-making process, following the stage in the float process where the glass sheet is formed and floated on a molten material (e.g., tin bath) and cooled or allowed to cool such as via an annealing lehr, energy such as infrared (IR) energy is directed at the resulting glass and reflectance at various wavelengths is analyzed to detect inclusions.

Abstract: An optical deflector is used for optically scanning a target surface. The optical deflector includes: a mirror device configured to include a mirror capable of oscillating; and a casing configured to include a window unit for facing the mirror device, and to accommodate the mirror device. The window unit has a transmissive reflection structure in which part of an incident beam is caused to transmit through the window unit toward the mirror, and at least part of a remainder of the incident beam is reflected by the window unit to a direction separated from an optical deflection range that is deflected by the mirror device, and the transmissive reflection structure includes a diffraction grating provided on one of a front surface and a back surface of the window unit.

Abstract: A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.

Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.

Abstract: A video projection apparatus includes: an optical deflector having a mirror projecting a first view field and projecting a second view field, an actuator for rocking the mirror and a sensor; an optical guide unit provided within the second view field; a photodetector; and a control unit. The control unit is adapted to calculate a resonant frequency of the sinusoidal-wave voltage; detect a first timing point from a sense voltage; detect a second timing point from a photo detection voltage when the second light beam is incident to the optical guide unit; calculate a time period from the first timing point to the second timing point; calculate a product value between the time period and the resonant frequency; and control an amplitude of the sinusoidal-wave voltage.

Abstract: According to an embodiment, a distance measuring apparatus includes a multi laser beam emitting unit, an irradiating position changing unit, an image acquiring unit, and a distance calculating unit. The multi laser beam emitting unit irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction. The irradiating position changing unit reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams. The image acquiring unit receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face. The distance calculating unit calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face.

Abstract: A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

Abstract: According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

Abstract: Optical scanning device 1 according to the present invention includes: main movable portion 10; a pair of torsionally deformable main torsion beams 21 and 22 arranged opposite to each other at both ends of main movable portion 10 and swingably supporting main movable portion 10; and main driving unit 30 that drives main movable portion 10 to oscillate. Main movable portion 10 includes mirror unit 11 having reflection surface 11a for reflecting light, and a pair of permanent magnets 12 and 13 arranged opposite to each other to sandwich mirror unit 11, each permanent magnet extending along oscillation axis X-X of main movable portion 10. Main driving unit 30 includes yoke unit 31, 32, and 33 arranged along oscillation axis X-X of main movable portion 10 to surround permanent magnets 12 and 13, and coil 34 wound on yoke unit 31, 32, and 33 and configured to be energized to magnetize yoke unit 31, 32, and 33, thereby generating magnetic fields to be applied on permanent magnets 12 and 13.

Abstract: The invention relates to a device for scanning an object comprising a carrier body (10) and a first electromagnetic drive (2). The carrier body (10) is movably mounted in a plane and holds an optical element (12) that focuses an illuminating light beam (19) on a first object plane of the object that is parallel to the plane. The first electromagnetic drive (2) moves the carrier body (10) with the optical element (12) and a focus region (23) of the illuminating light beam (19) within the first object plane.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop; and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, in regard to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

Abstract: A mirror rotating apparatus includes a stationary portion and a rotating portion. The stationary portion includes a detection sensor configured to detect rotation of the rotating portion. The rotating portion includes a mirror portion whose outside surface includes a plurality of mirror surfaces that face radially outward. The mirror portion includes a rotation detection surface opposite to the detection sensor, and a balance correction portion defined by a groove or a projection extending in a circumferential direction in the rotation detection surface. The balance correction portion locates a center of gravity of the mirror portion closer to the rotation axis. The rotation of the rotating portion causes the balance correction portion to pass through a region to which light is emitted from the detection sensor.

Abstract: A magnetic force drive device (7) has the first movable part (100) and the first driving unit (200). The first movable part (100) has the first movable plate (111), and a permanent magnet (120) that is magnetized in a direction substantially parallel to the first movable plate (111), and is supported by the first frame body (112) and the first pair of beam parts (113), so as to be able to oscillate around the Y axis, which is substantially parallel to the first movable plate (111) and substantially perpendicular to the direction in which the permanent magnet (120) is magnetized. The first driving unit (200) has a yoke (210), and a coil (220) that magnetizes the yoke (210). The yoke (210) has the first end part (211a), and a second end part (212a) that is placed on substantially the opposite side of the first end part (211a) against one magnetic pole of the permanent magnet (120).

Abstract: In a two-dimensional optical deflector apparatus comprising an optical deflector and a driver for driving the optical deflector, the optical deflector includes a mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, and a second piezoelectric actuator of a meander type for rocking the mirror with respect to a second axis of the mirror perpendicular to the first axis. The driver generates a curved-type saw-tooth drive voltage and applies the curved-type saw-tooth drive voltage to the second piezoelectric actuator.

Abstract: An aspect of the present invention provides a mirror driving apparatus, including: a mirror section having a reflecting surface which reflects light; a pair of piezoelectric actuator sections arranged on either side of the mirror section; coupling sections which respectively connect one end of each of the piezoelectric actuator sections to an end portion of the mirror section which is distant from an axis of rotation of the mirror section in a direction along the reflecting surface and perpendicular to the axis of rotation; a fixing section which supports another end of each of the piezoelectric actuator sections; and a perpendicular movement suppressing structure which suppresses translational motion of the axis of rotation of the mirror section in a direction perpendicular to the reflecting surface, one end of the perpendicular movement suppressing structure being connected to the fixing section and another end thereof being connected to the mirror section.

Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

Abstract: A method and apparatus of driving a motor in a light scanning arrangement. The method includes the following steps: (1) driving a drive coil with a drive signal to oscillate a scan mirror and a light beam reflected from the scan mirror; (2) generating a feedback signal having zero crossings during oscillation of the scan mirror by a feedback coil in proximity to the drive coil; (3) integrating the feedback signal to generate an integrated feedback signal; and (4) processing the integrated feedback signal to generate a periodic drive signal that has the same time period as the feedback signal.

Abstract: A method of projecting into space, from a first object, a plurality of modulated lines to form a grid defining a first relative reference frame, the method includes projecting polarized light having a first orientation to form a horizontal grid line projecting from the first object and projecting polarized light having a second orientation different than the first orientation to from a vertical grid line projecting from the first object and modulating the horizontal grid line and the vertical grid line to carry first and second grid words, respectively.

Abstract: A mirror actuator includes: a base; a first rotation portion that is supported on the base so as to be rotatable about a first rotation axis; a second rotation portion that is supported on the first rotation portion so as to be rotatable about a second rotation axis perpendicular to the first rotation axis; a mirror disposed at the second rotation portion; a first drive portion that rotates the first rotation portion around the first rotation axis; and a second drive portion that rotates the second rotation portion around the second rotation axis. The second drive portion has a coil part and a magnet part applying a magnetic field to the coil part. One of the coil part and the magnet part is disposed at the first rotation portion, and the other is disposed at the second rotation portion.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: An optical scanning device includes an optical fiber, a holding member cantilevering the optical fiber, a first driving device placed on the distal end of the optical fiber and making the optical fiber vibrate in a first direction, and a second driving device placed between the holding member for the optical fiber and the first driving device and making the optical fiber vibrate in a second direction which crosses the first direction.

Abstract: Scanning distance measuring equipment includes a light emitter/receiver and a deflector for deflecting and reflecting measurement light emitted from the light emitter/receiver to outside through an optical window. The deflector is provided with a first deflection mechanism including a movable unit swingable about a first axis and a drive unit for driving to swing the movable unit; a second deflection mechanism for driving to rotate the first deflection mechanism about a second axis perpendicular to the first axis; and a contactless power supply unit including a second coil that is located to rotate about the second axis along with the rotating second deflection mechanism, and a first coil that is located to face the second coil on a common axis.

Abstract: An optical deflection unit for targeted radiation, e.g., produced by laser or superluminescent diodes, in scanning, ophthalmological measuring and therapy systems, comprises a deflection mirror, a position sensor and a control unit, which form a control circuit for minimizing the deviation of the actual positions, detected by the position sensor, from the desired positions of the deflection mirror, whereby the optical deflection unit comprises a deflection mirror, oscillatingly movable by means of non-contacting electromagnetic drives around at least one rotation axis, and which is positioned in the direction of the, at least, one rotation axis between at least two bearings. The optical deflection unit is designed may also be used for beam guidance in high and ultrahigh vacuum installations, such as UV and EUV exposure installations for semiconductor lithography.

Abstract: A light scanner includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a first rotation center axis and a second rotation center axis, a pair of movable beams extending from the movable part, a displacement part connected to the movable beams and rotating the movable part around the first rotation center axis, a first drive part that drives the displacement part, a pair of drive beams extending from the displacement part in parallel to the light reflection surface and orthogonal to an extension direction of the movable beams, a support frame that supports the drive beams, and a second drive part that rotates the movable part around the second rotation center axis, and the movable beam has a bending part that bendingly deforms due to displacement of the displacement part.

Abstract: The present invention relates to an optical probe (1) suitable for miniature applications. An example application is a fiber-based confocal miniaturized microscope. The optical probe comprises a coil-based actuation system (9, 10) comprising drive coils (9) capable of displacing the distal end (3) of an optical guide (2) housed (4) by the optical probe. The probe makes use of a feedback loop which alternate between driving the displacement of the optical guide by driving a current through the drive coils and switching off the current through the drive coils, and while the drive current being switched off, measure the speed of the distal end of the optical guide. The measured speed is compared to the set-point speed, and if a difference is detected, the drive current is adjusted to eliminate, or at least bring down, this difference.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.

Abstract: A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.

Abstract: The present invention is directed to a two-dimensional scanning arrangement for a laser vein-illumination device that includes a base and a frame connected to the base using at least one flexible hinge. The hinge allows the frame to move angularly with respect to the base in a first direction. The invention further includes a means for exciting angular oscillations of the frame at or near said frame's resonant frequency. An elastic torsional element having a proximal end rigidly attached to said frame and a distal end rigidly attached to a mirror is also included. The torsional element allows the mirror to move angularly with respect to the frame in a second direction, generally perpendicular to the first direction. There may also be a means for exciting the angular oscillations of the mirror. The invention also includes a device for optically inspecting confined spaces having one or more small access orifices.

Abstract: The present invention provides a light field display device (300) comprising an array of light field display elements (310) populating a display surface, each display element (310) comprising: a beam generator (522) for generating an output beam of light; a radiance modulator (524) for modulating the radiance of the beam over time; a focus modulator (530) for modulating the focus of the beam over time; and a scanner (504, 506) for scanning the beam across a two-dimensional angular field.

Abstract: The invention relates to a deflection mirror arrangement (30) for an optical measurement apparatus having at least one mirror unit (31, 32), which is arranged on a rotatable shaft (34) and comprises at least one deflection mirror (31.1, 31.2, 32.1, 32.2), and having a drive unit (33), which drives the rotatable shaft (34), and to an optical measurement apparatus having such a deflection mirror arrangement (30). In order to enable a reduction in the necessary installation space, the at least one mirror unit (31, 32) comprises at least two deflection mirrors (31.1, 31.2, 32.1, 32.2), which are arranged in a common horizontal plane such that they are radially spaced apart with respect to the rotatable shaft (34), with the drive unit (33) being arranged at least partially in the space between the two deflection mirrors (31.1, 31.2).

Abstract: An optical scanner includes: a movable section which has a light reflecting member with a light reflecting surface and which is rotatable around the central axis of rotation; at least a pair of movable beams extending from the movable section along the light reflecting surface; a displacement section which is connected to the movable beams and has a through hole including two fixed surfaces crossing each other; two driving beams which extend from the displacement section along a surface direction of the light reflecting surface so as to be perpendicular to the movable beams; a support section connected to each of the driving beams; a driving section which drives the displacement section; and a permanent magnet which is inserted in the through hole and is fixed to the two fixed surfaces.

Abstract: An optical device includes: an axis member including a plate-shaped attachment portion and an elastic support portion that swingably supports the attachment portion around a predetermined axis; a rigid member attached to one side of the attachment portion; and a light reflecting member attached to the other side of the attachment portion and having an area larger than that of the attachment portion.

Abstract: An image display apparatus includes a plurality of light source sections, a light combining section that combines light fluxes, an optical scan section that swings around a first axis and a second axis to deflect a combined light from the light combining section for scanning, and a controller that controls an amplitude of the optical scan section around the first axis to be greater than that of the optical scan section around the second axis, wherein an optical axis of each of the light fluxes from the plurality of light source sections to the optical scan section and the first axis are present in a first plane, the optical scan section has a light reflection surface configured to be perpendicular to the first plane, and the light reflection surface is irradiated with the combined light and traveling in a direction inclined to a normal to the light reflection surface.

Abstract: Implementations of actuators and capacitor-based position sensors for monitoring and controlling positioning of the actuators are provided, including implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.

Abstract: A light scanning apparatus, including: a light source configured to emit a light beam; a beam splitter configured to split the light beam into a first and a second light beams; a rotary polygon mirror configured to deflect the first light beam to scan a photosensitive member; a motor configured to rotate the rotary polygon mirror; a first lens configured to guide the first light beam to the photosensitive member; an optical sensor configured to receive the second light beam; a second lens configured to condense the second light beam on the optical sensor; and an optical box has a wall standing from a bottom surface between a region in which the rotary polygon mirror and the motor are disposed and a region in which the second lens is disposed, and a height of the wall from the bottom surface is higher than a height of the rotary polygon mirror.

Abstract: An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame 13 is shaped so as to enclose a mirror 11, and holds the mirror 11, via torsion bars 121 and 122, so as to be vibratable. A unimorph 15 is constituted by four unimorphs 151, 152, 153, and 154 formed on upper left, lower left, upper right, and lower right sides, and holds the mirror frame 13, via a shaft section 14, so as to be vibratable. The shaft section 14 has a connection section 144. On the mirror frame 13, an adjustment member 16 for increasing a moment of inertia m1 of the mirror frame 13 is provided.

Abstract: A light deflecting element includes: a movable plate provided with a light reflecting section having light reflectivity; a support section; a coupling section adapted to couple the movable plate rotatably to the support section; and a magnet disposed on an opposite surface of the movable plate to the light reflecting section, wherein the coupling section has a shape having a width gradually increasing in a direction from a side of the light reflecting section toward a side of the magnet in a cross-sectional view perpendicular to a rotational axis of the movable plate.

Abstract: An optical scanning or positioning mechanism has a head on which optical components are mounted and an actuator coupled to the head to cause the head to move when the actuator is actuated. There are one or more sets of flexure bearings mounted in the mechanism. The flexure bearings have a restoring torque when moved from a rest position. The bearings are coupled to the head to allow the head to move when actuated by the actuator. One or more magnets are mounted in the mechanism in a location other than in the actuator to compensate for the flexure bearings restoring torque.

Abstract: A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.

Abstract: A light deflection apparatus, including a stator section including a radial bearing having a first dynamic pressure generating groove, a thrust bearing having a second dynamic pressure generating groove, and a stator coil; and, a rotor section including a polygon minor, a magnet facing the stator coil, and a rotating body having a dynamic pressure surface facing the radial bearing and a dynamic pressure surface facing the thrust bearing, the rotor supporting the polygon minor and the magnet; wherein one end portion of the dynamic pressure bearing section included of the thrust bearing, the radial bearing and of the rotating body in the thrust direction is closed excluding a gap between the dynamic pressure bearing section of the radial bearing and the dynamic pressure bearing section of the rotating body.

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.