Abstract: Embodiments of the disclosure provide a mirror assembly for controlling optical directions in an optical sensing system. The mirror assembly may include a frame and a beam structure mechanically coupled to the frame. The beam structure may define a rotational axis. The mirror assembly may also include a micro mirror suspended by the beam structure. The mirror assembly may further include a plurality of piezoelectric actuators mechanically coupled to the frame and configured to rotate the micro mirror along the rotational axis. Each of the plurality of piezoelectric actuators may be disposed between the rotational axis and an outer edge of the frame.

Abstract: A device including a waveguide having a first waveguide surface and a second waveguide surface parallel to the first waveguide surface is disclosed. The device may include a first light coupling device operatively coupled to the waveguide. The first light coupling device may include a first duct structure and a second duct structure oriented to reflect in-coupled light. Each of the first duct structure and the second duct structure may include a first planar region and a second planar region parallel to the first planar region and a first surface and a second surface parallel to the first surface. The device may also include a second light coupling device disposed between the first waveguide surface and the second waveguide surface. The second light coupling device may be positioned to receive reflected in-coupled light from the first light coupling device.

Abstract: A light deflector includes a fixed part, a movable part provided with a reflection plane, a pair of elastic supporting units configured to support the movable part, a pair of connecting parts configured to connect between the pair of elastic supporting units and the fixed part, and a driving unit configured to deform the pair of connecting parts to make the movable part oscillate. The pair of connecting parts are supported by the fixed part in a cantilevered state, and each one of the pair of connecting parts having a folded structure. An optical scanning system includes the light deflector. An image projection device includes the light deflector.

Abstract: An actuator including a beam configured to support an object to be driven, and a drive source to which a drive signal is input, wherein the drive signal includes a drive waveform in a shape of sawtooth waveform, a rising of the drive waveform in the shape of sawtooth waveform includes a first staircase waveform and a second staircase waveform continuing from the first staircase waveform, the first staircase waveform generates oscillation of a ringing suppressing waveform for suppressing a ringing waveform to be generated in the second staircase waveform, and the object to be driven is driven to swing in a direction of rotating around the predetermined axis by driving the drive source.

Abstract: The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.

Abstract: A device has memory and processing circuitry coupled to the memory. The processing circuitry generates a resonant axis drive signal to drive a Micro Electro Mechanical System (MEMS) mirror system at a resonance frequency, and generates a linear axis drive signal to drive the MEMS mirror system at a linear frequency corresponding to a video frame rate. Generating the linear axis drive signal includes generating, using interpolation, a current set of shape values based on a stored set of shape values and an indication of the video frame rate. The linear axis drive signal is generated using the current set of shape values.

Abstract: An image display apparatus that includes a first light collecting-reflecting device (10, 11) which image light (L0) from an image forming apparatus enters, and a second light collecting-reflecting device (20, 21) which second light (L2), of the image light, having passed through the first light collecting-reflecting device enters. The first light collecting-reflecting device has transmission action and light collecting-reflecting action with respect to the image light. The first light collecting-reflecting device collects and reflects first light (L1), of the entering image light, toward a first conversion position in a viewer's eye (201). The second light collecting-reflecting device has at least the light collecting-reflecting action with respect to the image light. The second light collecting-reflecting device causes the second light to reenter the first light collecting-reflecting device and collects and reflects the second light toward a second conversion position.

Abstract: A light deflection device includes a reflector; a drive beam supporting the reflector such that the reflector is movable; a supporting section supporting the drive beam; and a piezoelectric drive circuit disposed on the drive beam. The light deflection device further includes circuitry configured to output a first drive-voltage waveform and a second drive-voltage waveform to the piezoelectric drive circuit. The first drive-voltage waveform has a period of a positive slope within one cycle, the period of the positive slope includes a period of a first slope and a period of a second slope different from the first slope. The second drive-voltage waveform has a period of a negative slope within one cycle, and the period of the negative slope includes a period of a third slope and a period of a fourth slope different from the third slope.

Abstract: A device including a waveguide having a first waveguide surface and a second waveguide surface parallel to the first waveguide surface is disclosed. The device may include a first light coupling device operatively coupled to the waveguide. The first light coupling device may include a first duct structure and a second duct structure oriented to reflect in-coupled light. Each of the first duct structure and the second duct structure may includes a first planar region and a second planar region parallel to the first planar region and a first surface and a second surface parallel to the first surface. The device may also include a second light coupling device disposed between the first waveguide surface and the second waveguide surface. The second light coupling device may be to positioned to receive reflected in-coupled light from the first light coupling device.

Abstract: Actuators (140), which are a pair of members, are disposed one on either side of a movable frame (120) in the X-axis direction, and oscillate the movable frame (120) about the X axis in relation to a fixed frame (110) by deformation caused by stretching and contracting of piezoelectric elements. Actuators (150), which are a pair of members, are disposed one on either side of a mirror (130) in the Y-axis direction, and oscillate the mirror (130) about the Y axis in relation to the movable frame (120) by deformation caused by stretching and contracting of the piezoelectric elements. The length of each actuator (140) extending in the Y-axis direction is longer than a distance between an inner side of the fixed frame (110) to which the actuator (140) is connected and the middle point of an outer side of the movable frame (120) in the Y-axis direction.

Abstract: Improved systems, methods, and devices relating to optical fiber scanners are provided. In one aspect, a scanning apparatus includes an optical fiber and a piezoelectric actuator coupled to the optical fiber to deflect a distal end of the optical fiber in a scanning pattern. The apparatus can include drive circuitry coupled to the piezoelectric actuator, sense circuitry electrically coupled to the piezoelectric actuator and the drive circuitry to determine displacement of the piezoelectric actuator, and a processor coupled to the drive circuitry and the sense circuitry to drive the piezoelectric actuator in response to the displacement.

Abstract: An optical device includes: a piezoelectric element of a sheet shape; a restriction section attached to the piezoelectric element, the restriction section configured to restrict a movable area in the piezoelectric element to a polygonal predetermined region; an optical element attached to the movable area of the piezoelectric element; and a plurality of electrodes disposed on the piezoelectric element, the plurality of electrodes configured to be applied with voltage independently, wherein: the electrodes are disposed at adjacent two comers in the movable area; and the piezoelectric element expands and contracts based on voltage applied to the electrodes in a manner that a periphery of the corner where the electrode is disposed in the movable area expands and contracts in multiple directions including two directions along two sides forming the corner.

Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

Abstract: A surface emission laser includes a first beam, a second reflector disposed in an opening portion formed in the first beam, and a second beam disposed in the opening portion, and extending in a widthwise direction of the first beam to connect the second reflector and the first beam, wherein a length, in a longitudinal direction of the first beam, of the second beam is smaller than a length, in the longitudinal direction of the first beam, of the second reflector.

Abstract: An optical scanner comprises a light source and an MEMS mirror. The light source emits a light beam. The MEMS mirror has a reflecting surface for reflecting the light beam coming from the light source. the light source is configured in such a manner that the optical axis of the light beam vertically irradiates the reflecting surface of the MEMS mirror at a specific position.

Abstract: A light deflector is provided including a mirror unit having a light reflection plane, a movable frame to support the mirror unit, a support frame disposed to surround the movable frame, a pair of serpentine beams each disposed between the movable frame and the support frame on both sides of the movable frame to form a turning shape, each of the serpentine beams having one end attached to the support frame, and another end attached to the movable frame, and a vibration damper provided on a portion that moves due to deformation of the serpentine beams caused by application of voltage being transferred.

Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: An optical deflecting device includes a mirror having a reflecting surface and a support unit to support the mirror. The support unit includes a first drive unit. The first drive unit includes a plurality of continuously meandering first beams and a plurality of first piezoelectric members respectively provided to the plurality of first beams to swing the mirror around a first axis to deflect light incident on the reflecting surface of the mirror. Two voltages having non-similar waveforms are respectively applied in parallel to each two of the first piezoelectric members respectively provided to adjacent two of the first beams.

Abstract: An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A1 includes a control circuit 20 that detects a mechanical natural frequency relevant to swinging about a second axis X2 of a movable part 9. The control circuit 20 applies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuators 10a and 10b. The control circuit 20 removes a frequency component, which is equal to or greater than a second threshold value G2 within a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body 62, from a drive voltage.

Abstract: Optical coherence tomography (OCT) imaging systems are provided including a source of broadband optical radiation coupled to a sample arm of the OCT imaging system; a beam shaping optical assembly in the sample arm, the beam shaping optical assembly being configured to receive optical radiation from the source as a beam of optical radiation and to shape the spatial profile of the beam of optical radiation; a scan mirror assembly coupled to the beam shaping optical assembly; and objective lens assembly coupled to the beam shaping optical assembly. The beam shaping optical assembly includes a lens assembly configured to change a NA of the OCT system without changing a focus; to change a focus of the OCT system without changing a NA of the system; or to change both the NA and the focus of the OCT system responsive to a control input.

Abstract: An aspect of the present invention provides a mirror driving apparatus, including: a mirror section having a reflecting surface which reflects light; a pair of piezoelectric actuator sections arranged on either side of the mirror section; coupling sections which respectively connect one end of each of the piezoelectric actuator sections to an end portion of the mirror section which is distant from an axis of rotation of the mirror section in a direction along the reflecting surface and perpendicular to the axis of rotation; a fixing section which supports another end of each of the piezoelectric actuator sections; and a perpendicular movement suppressing structure which suppresses translational motion of the axis of rotation of the mirror section in a direction perpendicular to the reflecting surface, one end of the perpendicular movement suppressing structure being connected to the fixing section and another end thereof being connected to the mirror section.

Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

Abstract: A scanning endoscope system includes: a fiber that guides illuminating light from a light source; a first actuator provided on a side of the fiber and expands/contracts according to an applied voltage, thereby swinging the fiber; a second actuator disposed at a position facing the first actuator across the fiber and expands/contracts according to an applied voltage, thereby swinging the fiber; a drive signal output section applying a first voltage for setting a reference position of the fiber where the first actuator is in a contracted state, to the first actuator, and applying a second voltage for setting the reference position of the fiber where the second actuator is in a contracted state, to the second actuator; and a controller that in order to change the reference position of the fiber, controls the drive signal output section to change at least one of the first voltage and the second voltage.

Abstract: A flow through Micro-Electromechanical Systems (MEMS) package and methods of operating a MEMS packaged using the same are provided. Generally, the package includes a cavity in which the MEMS is enclosed, an inlet through which a fluid is introduced to the cavity during operation of the MEMS and an outlet through which the fluid is removed during operation of the MEMS, wherein the package includes features that promote laminar flow of the fluid across the MEMS. The package and method are particularly useful in packaging spatial light modulators including a reflective surface and adapted to reflect and modulate a light beam incident thereon. Other embodiments are also provided.

Abstract: The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a uniform reflective surface on a substrate, an elastic substance coupled to the substrate, and an energy source that applies a voltage to the elastic substance to alter the shape of the surface of the substrate, for example, by about 10% to about 25% of a wavelength of light projected onto the substrate at a frequency of at least 60 Hz. Another exemplary embodiment includes micromechanical structures formed on a surface of a substrate, a reflective diaphragm connected to the substrate, an elastic substance coupled to the diaphragm, and an energy source that applies a voltage to the elastic substance to vibrate the diaphragm at a frequency of at least 60 Hz.

Abstract: An actuator is configured of a frame element, a pair of beam elements, a movable element rotatably supported by the frame element via the beam elements, a driver configured to rotate the movable element relative to the frame element around the beam elements as a rotary shaft; and damper elements provided on the rotary axis of the beam elements.

Abstract: In an optical deflector including a mirror, a fixed frame, and a piezoelectric actuator connected to the fixed frame for rocking the mirror with respect to an axis of the mirror, at least one piezoelectric sensor is provided on the fixed frame to sense a rocking vibration of the mirror caused by the piezoelectric actuator.

Abstract: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.

Abstract: An optical scanning device includes an optical fiber, a holding member cantilevering the optical fiber, a first driving device placed on the distal end of the optical fiber and making the optical fiber vibrate in a first direction, and a second driving device placed between the holding member for the optical fiber and the first driving device and making the optical fiber vibrate in a second direction which crosses the first direction.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.

Abstract: A deflection device for a scanner with Lissajous scanning includes a micromirror that oscillates in at least two deflection axes and that includes a frame and a mirror plate that is movably arranged via a suspension mount. The deflection device also includes a control device for generating control signals for a resonant operation of the micromirror in the at least two deflection axes. The suspension mount includes at least one spring connected at one end to the mirror plate and at the other end to the frame. The frequencies of the control signals for the resonant operation of the micromirror are substantially equal in the at least two deflection axes, but differ at least in terms of the predefined scanning repetition rate. The levels of the resonance frequencies of the deflection axes and control signals are determined by a predefined scanning resolution and a predefined scanning repetition rate.

Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 ?m.

Abstract: An optical scanning projection system includes a scanning light source component, a second reflecting element, a transparent element, a scanning element, a photosensitive element and a control module. The transparent element receives a main light beam emitted by the scanning light source component and reflects a part of the main light beam to be a reflected light. The reflected light is reflected by the second reflecting element, and the scanning element reflects the reflected light from the second reflecting element in a scanning manner. The photosensitive element receives the reflected light from the scanning element and outputs a sensing signal, and the control module actuates or stops actuating the scanning light source component according to the sensing signal. Therefore, when the scanning element is damaged, the control module may instantly stop actuating the scanning light source component, thereby enhancing the using safety of the optical scanning projection system.

Abstract: A laser scanning unit includes a laser light source, rotating polygon mirror, drive motor, and entry detection, intensity detection, intensity adjustment, and drive control portions. The laser light source radiates first and second laser lights in first second directions, respectively. The drive motor rotates the polygon mirror reflecting the first laser light. The intensity adjustment portion adjusts the first laser light in accordance with the second laser light detected by the intensity detection portion, until a second time after a first time has elapsed since the first laser light entry detection by the entry detection portion. The drive control portion, upon adjustment by the intensity adjustment portion, drives the drive motor at a first rotation speed, wherein a return light entry timing is included within the first time or from when the second time has elapsed to the timing of the entry detection portion detection.

Abstract: The present invention is directed to a two-dimensional scanning arrangement for a laser vein-illumination device that includes a base and a frame connected to the base using at least one flexible hinge. The hinge allows the frame to move angularly with respect to the base in a first direction. The invention further includes a means for exciting angular oscillations of the frame at or near said frame's resonant frequency. An elastic torsional element having a proximal end rigidly attached to said frame and a distal end rigidly attached to a mirror is also included. The torsional element allows the mirror to move angularly with respect to the frame in a second direction, generally perpendicular to the first direction. There may also be a means for exciting the angular oscillations of the mirror. The invention also includes a device for optically inspecting confined spaces having one or more small access orifices.

Abstract: A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.

Abstract: A mirror driving device of an aspect can include: a mirror part; a pair of inner actuator parts; a pair of outer actuator parts; fixing and supporting parts; an inner actuator driving voltage supply part; and an outer actuator driving voltage supply part. A driving voltage with a frequency inducing oscillation of the mirror part in a rotating direction of the mirror part associated with resonance drive of the corresponding actuator parts can be supplied from one driving voltage supply part of the inner actuator driving voltage supply part and the outer actuator driving voltage supply part to the inner actuator parts or the outer actuator parts corresponding to the one driving voltage supply part. Simultaneously with the resonance drive, a driving voltage for inclining the mirror part without exciting resonance drive can be supplied from the other driving voltage supply part to corresponding actuator parts.

Abstract: In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.

Abstract: The present invention provides a light field display device (300) comprising an array of light field display elements (310) populating a display surface, each display element (310) comprising: a beam generator (522) for generating an output beam of light; a radiance modulator (524) for modulating the radiance of the beam over time; a focus modulator (530) for modulating the focus of the beam over time; and a scanner (504, 506) for scanning the beam across a two-dimensional angular field.

Abstract: A two-dimensional optical scanner and an image display apparatus are provided. The optical scanner includes: a movable portion having a mirror portion, and a first driving portion which is configured to oscillate the mirror portion around a first axis; a second driving portion which is configured to oscillate the movable portion around a second axis perpendicular to the first axis; and a driving controller which is configured to drive the first driving portion in a first driving method and is configured to drive the second driving portion in a second driving method different from the first driving method. While the first driving portion oscillates the mirror portion around the first axis, the second driving portion oscillates the movable portion around the second axis, so that the mirror portion reflects a beam of light incident to the mirror portion such that the two-dimensional optical scanner performs a two-dimensional scanning.

Abstract: A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).

Abstract: Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.

Abstract: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

Abstract: Disclosed is a double-projection apparatus. The double-projection apparatus includes a frame, a carrier, two eccentric axles, a mirror-twisting axle, two scanning mirrors and two piezoelectric actuators. The carrier is provided in the frame, and includes an opening defined therein. Each of the eccentric axles includes an end connected to the frame and another end connected to the carrier. The mirror-twisting axle is provided in the opening. The scanning mirrors are provided in the opening and connected to two sides of the mirror-twisting axle. The piezoelectric actuators are connected to two sides of the frame.

Abstract: An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A1 includes a control circuit 20 that detects a mechanical natural frequency relevant to swinging about a second axis X2 of a movable part 9. The control circuit 20 applies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuators 10a and 10b. The control circuit 20 removes a frequency component, which is equal to or greater than a second threshold value G2 within a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body 62, from a drive voltage.

Abstract: A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.

Abstract: A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.

Abstract: A scanning lens apparatus with a bimorph actuator is provided. The scanning lens apparatus includes: a housing having a hollow cylindrical shape; a first suspension and a second suspension which are parallel to each other, and a first end of each of the first suspension and the second suspension is fixed on an inner surface of the housing; first bimorphs disposed on first surfaces of the first and second suspensions and second bimorphs disposed on second surfaces facing the first surfaces of the first and second suspensions; a first lens which is fixed between a second end of the first suspension and a second end of the second suspension; a second lens fixed parallel to the first lens between the first and second suspensions; and an object lens disposed on an end of the housing to face the second lens with respect to the first lens.

Abstract: Disclosed is a double-projection apparatus. The double-projection apparatus includes a frame, a carrier, two eccentric axles, a mirror-twisting axle, two scanning mirrors and two piezoelectric actuators. The carrier is provided in the frame, and includes an opening defined therein. Each of the eccentric axles includes an end connected to the frame and another end connected to the carrier. The mirror-twisting axle is provided in the opening. The scanning mirrors are provided in the opening and connected to two sides of the mirror-twisting axle. The piezoelectric actuators are connected to two sides of the frame.