Abstract: An optical device may include a lens system. The optical device may include a first scanning component to receive an optical beam and to scan the lens system with the optical beam. The optical device may include a second scanning component to receive the optical beam from the lens system and to scan a field of view with the optical beam, where the lens system is positioned between the first scanning component and the second scanning component. The lens system may include a beam expander.

Abstract: The present invention is a method for producing a spectacle lens from a lens material, and includes: a marking step (step S10) of marking an identification mark for identifying the spectacle lens, and a processing information mark which is used to process a lens blank and includes a tray identification 2D code, a tray identification code, a shape line and a position mark by forming a hole or a groove in a convex surface of the lens material by laser; and a concave surface machining processing step (step S13) of reading the processing information mark, and machining a concave surface of the lens blank based on the read processing information mark.

Abstract: A near-eye display device is provided, including a display light source, a rotation module and a refractive amplification component. The rotation module rotates around the rotation center axis. The rotation module is provided with a light source scanning component and a mirror group. The light source scanning component converts the light of some pixel points of the display light source into radial propagation, and then the light is emitted through the mirror group and the refractive amplification component. The light source scanning component turns the light of some pixel points of the display light source into radial propagation, so that the optical path becomes radial direction from axial direction, and increases the optical path distance without increasing the volume of the device, which is conducive to reducing the thickness and volume of the device.

Abstract: An optical scanning apparatus, an image projecting apparatus, and a mobile object. The optical scanning apparatus includes a light source to emit light, a light deflector to deflect the light emitted from the light source at least in a sub-scanning direction to perform optical scanning on a scan region, a light receiver to receive, within a predetermined range in the sub-scanning direction, the light used for optical scanning performed by the light deflector, and a controller to control the light deflector based on a number of times of light reception of the light receiver at a plurality of positions in the sub-scanning direction within the predetermined range. The image projecting apparatus includes the optical scanning apparatus, and a projection optical system configured to project light emitted from the optical scanning apparatus to the scan region.

Abstract: A microscope device includes: an illumination optical system that has an illumination optical axis; and an observation optical system that has an observation optical axis. The illumination optical system includes a first scanning device that moves a condensing position in which the illumination light is condensed in a direction that is substantially parallel to the illumination optical axis. The first scanning device includes: a rotary mirror that includes a reflection surface; and a condenser lens that is arranged so as to irradiate the reflection surface with the illumination light and to receive the illumination light reflected by the reflection surface. The rotary mirror is rotationally moved or rotated in such a way that a distance between the condenser lens and the reflection surface on an optical axis of the condenser lens changes.

Abstract: Provided is an apparatus, including: an image input unit configured to receive input of an image on which a target object placed on an operation plane imaged as a subject; an operation detecting unit configured to detect movement of a predetermined operation object in a state of being in contact with the target object using the image; a partial-image acquiring unit configured to acquire a partial image corresponding to a portion of the target object from the image in accordance with a position of the predetermined operation object being moved in a case where the movement of the predetermined operation object is detected by the operation detecting unit; and a generating unit configured to generate an image representing the target object using a plurality of the partial images acquired by the partial-image acquiring unit.

Abstract: Provided is a reference mirror converter of a Linnik interferometer in which a first object lens 30 focuses light emitted from a beam splitter 20 on a reference mirror 40, a plurality of reference mirrors 40 reflects light incident from the first object lens 30, a plurality of reference mirrors 40 is disposed on a plurality of reference mirror brackets 45, respectively, the plurality of reference mirror brackets 45 is disposed on a rotary plate 60 at the same angles, and the rotary plate 60 is rotated using a motor 70 to control a rotation of the rotary plate 60 to select the reference mirror 40 having a reflectivity similar to that of a target 200 to be measured from among the plurality of reference mirrors 40. Accordingly, since a separate state between articles is maintained at all times, adhesiveness between articles packaged with an easily adhesive material may be prevented.

Abstract: Methods and systems for source multiplexing illumination for mask inspection are disclosed. Such illumination systems enable EUV sources of small brightness to be used for EUV mask defect inspection at nodes below the 22 nm. Utilizing the multiple plane or conic mirrors that are either attached to a continuously rotating base with different angles or individually rotating to position for each pulse, the reflected beams may be directed through a common optical path. The light may then be focused by a condenser to an EUV mask. The reflected and scattered light from the mask may then be imaged by some imaging optics onto some sensors. The mask image may be subsequently processed for defect information.

Abstract: A drive assembly for a centrifugal processing system is provided for rotating the yoke assembly (36) about a first axis at a first angular velocity and rotating the chamber assembly (30) coaxially with the yoke assembly at a second angular velocity A drive motor (60) is provided for rotating the yoke assembly at the first angular velocity A stationary gear (70) is mounted coaxially with the yoke assembly, with a drive linkage (72) comprising a shaft (74) secured to the yoke assembly so as to be rotatable therewith. The shaft is operatively connected on its first end to the stationary gear (70), so that the shaft rotates about its axis as the yoke assembly (36) rotates relative to the stationary gear. The shaft (74) is rotatably connected on its second end to the chamber assembly (30), so that when the shaft is rotated, the shaft rotates the chamber assembly.

Abstract: A drive assembly for a centrifugal processing system is provided for rotating the yoke assembly (36) about a first axis at a first angular velocity and rotating the chamber assembly (30) coaxially with the yoke assembly at a second angular velocity A drive motor (54) is provided for rotating the yoke assembly at the first angular velocity and simultaneously rotating the chamber assembly at the second angular velocity by a sun gear (66) mounted to the chamber assembly for rotation about the first axis and a planetary gear (64) mounted to the yoke assembly that is operatively connected to the sun gear such as to impart rotation to the sun gear as it orbits thereabout upon rotation of the yoke assembly.

Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.

Abstract: An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.

Abstract: A light scanning unit includes a light source unit emitting a light beam according to an image signal, a light deflector scanning the light beam that is deflectively emitted by the light source unit, a housing having a side portion where the light source unit is provided and a base surface on which the light deflector is provided, and a deformation prevention member connecting opposite sides of the housing across an upper side of the base surface. The light scanning unit is employed by an image forming apparatus.

Abstract: An optical scanning device including a light source and a rotating polygon mirror having a plurality of reflective surfaces scans a scan area of a surface in a main scanning direction with the light flux emitted from the light source and reflected by the rotating polygon mirror. All the light flux is reflected by a first reflective surface when light flux deflected by the rotating polygon mirror is directed onto a center position of the scan area, and a part of the light flux incident to the rotating polygon mirror is reflected by a second reflective surface adjacent to the first reflective surface when light flux reflected by the rotating polygon mirror is directed onto at least one end of both ends of the scan area and the light flux obliquely enters a plane perpendicular to a rotation axis of the rotating polygon mirror.

Abstract: An optical scanning device includes a rotationally-moving mirror on which a reflection plane is provided in a rotationally-movable manner, and a sealing unit over which a light-transmissive cover is provided, a first plane of the light-transmissive cover, a second plane of the light-transmissive cover, and the reflection plane of the rotationally-moving mirror within a rotationally-moving range being non-parallel to each other, the first plane being on the opposite side to the side of the rotationally-moving mirror, the second plane being on the side of the rotationally-moving mirror.

Abstract: There is provided an optical scanning device and an image forming apparatus including the optical scanning device. The optical scanning device includes an optical box containing light source units, a rotating polygon mirror, and a motor. In order to prevent the entire optical box from being deformed by deformation occurring in the installation region due to heat of the driving unit, the optical box includes a connection region between a second sidewall and an installation region where a driving unit is installed. The optical box further includes regions provided next to the connection region and having heights different from each other. A concave portion is formed in the connection region.

Abstract: A luminous flux limit device, an optical scanning unit employing the luminous flux limit device, and an electrophotographic image forming apparatus are provided. The luminous flux limit device is a device that limits a luminous flux of the optical scanning unit and includes a body portion with an aperture and a light-blocking portion that prevents light from being transmitted via a portion of the aperture. The aperture includes a blocking region in which light is blocked by the light-blocking unit, and a transmissive region that is a remaining region of the aperture excluding the blocking region.

Abstract: A cover member to be attached to a housing including a bottom portion and a side wall, the cover member including: a closing surface configured to close an opening surrounded by the side wall; at least three protruding portions protruding from the closing surface so as to be located on an inside of the housing; and a protection portion configured to protect a circuit board fixed to the side wall, the protection portion having: a first opposed portion opposed to the circuit board and provided to stand on the closing surface; a second opposed portion opposed to the circuit board and protruding with respect to the first opposed portion away from the circuit board; and a connecting portion configured to connect the first opposed portion and the second opposed portion, wherein a length of the at least three protruding portions is larger than a length of the first opposed portion.

Abstract: An optical scanning device includes a pre-deflection optical system including a first optical element that adjusts the shape of beams emitted from the light source; and a second and third optical elements arranged such that the second optical element is arranged closer to the light source than the third optical element is. Both of the second and third optical elements have no refracting power in the deflection scanning direction and have positive refracting power only in a direction perpendicular to the deflection scanning direction. An interval between scanning lines formed on the scanned area and a deviation of the scanning-line interval between scanning positions are adjusted by displacement of the second and third optical elements in a direction of an optical axis of the pre-deflection optical system and displacement of at least one of the second and third optical elements in the direction perpendicular to the deflection scanning direction.

Abstract: In order to detect a passage timing of a light beam and to suppress cost, a light beam detection circuit (2) includes a detection signal generation section (34) configured to receive a light beam for scanning of a scanning target (101A) with one optical sensor (10), and generate a detection signal corresponding to an amount of received light; a reference signal output section (44) configured to output a reference signal that is in proportion to a light-amount control signal of a light-emission element (LD1) that emits the light beam; and a synchronizing signal generation section (35) configured to compare a detection signal generated by the detection signal generation section (34) with a reference signal output from the reference signal output section (44) to generate a synchronizing signal to determine a position to start scanning of the scanning target (101A) with the light beam.

Abstract: A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Abstract: A polygonal rotating mirror, a light scanning unit employing the polygonal rotating mirror, and an electrophotographic image forming apparatus are shown. The polygonal rotating mirror is employed in the light scanning unit for scanning a light beam and includes a plurality of reflective surfaces enclosing outer side surfaces thereof. One of the plurality of reflective surfaces is a reference surface, a region of the reference surface where a light beam for a synchronization signal is to be incident is formed as a non-reflective region, and regions of the remaining reflective surfaces of the plurality of reflective surfaces where a light beam for a synchronization signal is to be incident, are formed as reflective regions.

Abstract: A device includes an optical scanner that comprises a mirror, a first actuator that rotates the mirror around a first axis of rotation, a first angular position sensor that senses an angular position of the mirror around the first axis of rotation, a second actuator that rotates the mirror around a second axis of rotation, a second angular position sensor that senses an angular position of the mirror around the second axis of rotation, and a controller coupled to the first and second drivers to drive the respective first and second actuators to rotate the mirror into respective angles around the first and second axes of rotation.

Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

Abstract: An on-vehicle laser radar device scans laser light in front and side zones through the windshield glass of a vehicle in a horizontal direction in order to detect an obstacle. When projecting the laser light emitted from the light source to the windshield glass, the device rotates a polarization plane of the laser light according to the angle of inclination of the windshield glass and an azimuth angle in the horizontal direction, and outputs the polarized laser light through the windshield glass in order to scan the laser light toward front and side visual zones of the vehicle.

Abstract: A polygonal mirror, a light scanning unit using the polygonal mirror, and an image forming apparatus. The polygonal mirror is formed of a plastic and includes a plurality of reflection surfaces that are formed in an outer portion of the polygonal mirror and rotate around a rotational axis, and an internal mirror surface that defines a hole, wherein a ratio of an internal diameter d to an outer diameter D satisfies 0.1?d/D?0.3.

Abstract: An optical scanning device is provided, which includes a casing including a supporting wall supporting a deflector, a first reflecting mirror supporting portion and a second reflecting mirror supporting portion that are opposed to each other across the deflector and extend from the supporting wall and a reinforcing wall configured to extend from the supporting wall, between the deflector and first and second light source units, so as to connect the first reflecting mirror supporting portion with the second reflecting mirror supporting portion, the reinforcing wall including a first through-hole configured such that a first laser beam emitted by the first light source unit toward the deflector and the second laser beam emitted by the second light source unit toward the deflector pass therethrough.

Abstract: In accordance with an embodiment, an optical scanning apparatus for exposing a photoconductor includes a light source configured to radiate light, a deflector configured to deflect and scan the light from the light source and guide the light to the photoconductor, a lens configured to guide the light from the light source to the deflector and a holder configured to hold the light source and the lens. The holder includes a first wall portion for holding the light source, a second wall portion for holding the lens, and a pair of third wall portions which are integrally formed with the first and second wall portions to place the light path between the light source and the lens.

Abstract: Exemplary methods and systems for applying a correction to an initiated signal are disclosed. In some examples the correction may be a compensation for dispersion present, e.g., in an optical signal. An exemplary method may include receiving an initiated signal, and forming a curved surface with a first array of discrete elements. The exemplary method may further include impinging the initiated signal upon the curved surface, thereby applying a correction to the initiated signal determined at least in part by the curved surface.

Abstract: An optical scanning apparatus includes a light source configured to emit a light beam, a rotating polygon mirror configured to deflect the light beam such that the light beam scans a photosensitive member, an optical box to which the rotating polygon mirror is attached and which includes a first portion, and a holding member configured to hold the light source, including a second portion and a protrusion portion, and attached to the optical box such that the first portion of the optical box and the second portion of the holding member form a gap therebetween, wherein the holding member is attached to the optical box with an adhesive poured into the gap, and the protrusion portion is arranged toward the optical box from the holding member along a position in the gap into which the adhesive is poured to prevent the adhesive from falling off the position.

Abstract: An optical scanning system includes a frame having a central axis along which is mounted a first elevation mirror for receiving an incident light and reflecting the incident light along a first optical path, a telescope for receiving the reflected incident light and outputting an output light, a visible linear array imager for receiving the output light from the telescope, and a folding mirror positioned to receive part of the output light from the telescope and directing it to a linear array infrared imager. The optical scanning system scans large areas of sky using multiple linear sensors in order to detect, identify and track low and slow flying manned and unmanned aircraft as well as to surveil large areas of terrain.

Abstract: A wavelength-changeable laser apparatus including a laser light source, a collimating lens, a diffraction grating, and a mirror is shown. The laser light source provides a laser light. The collimating lens collects the laser light provided from the laser light source and providing a light that is substantially parallel. The diffraction grating diffracts the light provided from the collimating lens. The mirror reflects the light provided from the diffraction grating back to the diffraction grating, a rotation axis rotatable within a predetermined range of a tuning angle being set therein so that a wavelength of the laser light is changed in a mode hopping form, the minor rotating based on the rotation axis serving as a pivot point. Therefore, a wavelength change speed may be increased and a stability of wavelength change may be improved.

Abstract: A fixing structure for fixing an optical element at a predetermined position in an optical device, the fixing structure has a plurality of first pressing members to fix the optical element at at least two positions on a surface of the optical element orthogonal to an optical axis of the optical element and a second pressing member to fix the optical element at a predetermined position on a surface of the optical element to the optical axis. A depth of pressing of the surface of the optical element by a tip of the second pressing member is larger than the depth of pressing of the surface of the optical element by the tips of the first pressing members.

Abstract: Scanning apparatus includes a transmitter, which is configured to emit a beam comprising pulses of light, and a scanning mirror, which is configured to scan the beam over a scene. A receiver is configured to receive the light reflected from the scene and to generate an output indicative of the pulses returned from the scene. A grating is formed on an optical surface in the apparatus and is configured to diffract a portion of the beam at a predetermined angle, so as to cause the diffracted portion to be returned from the scanning mirror to the receiver. A controller is coupled to process the output of the receiver so as to detect the diffracted portion and to monitor a scan of the mirror responsively thereto.

Abstract: A mirror unit of an exposure device includes: a mirror having support points including one support point on one end portion in a longitudinal direction thereof and two support points at two portions in a width direction perpendicular to the longitudinal direction on the other end portion thereof; and a mirror base member that holds the mirror in a way to support the mirror at the three support points, wherein the mirror is arranged so that the support point on a side of the one support point and a support point on one side of the two support points is positioned on a scanning optical axis, and so that the longitudinal direction is tilted from the scanning optical axis in the width direction.

Abstract: A laser scanning device and a method using the same are provided. The laser scanning device includes a laser output unit, a shape rotation unit, a scanning unit and a control unit. The laser output unit is used to output a laser beam. The shape rotation unit is disposed on a propagation path of the laser beam for rotating a spot of the laser beam by a predetermined angle. The scanning unit receives the laser beam whose spot has been rotated by the predetermined angle to scan a work piece set on a carrier unit. The control unit is set between the shape rotation unit and the scanning unit for generating the predetermined angle based on a scanning position of the scanning unit.

Abstract: An optical scanning device includes a rotationally-moving minor on which a reflection plane is provided in a rotationally-movable manner, and a sealing unit over which a light-transmissive cover is provided, a first plane of the light-transmissive cover, a second plane of the light-transmissive cover, and the reflection plane of the rotationally-moving mirror within a rotationally-moving range being non-parallel to each other, the first plane being on the opposite side to the side of the rotationally-moving minor, the second plane being on the side of the rotationally-moving minor.

Abstract: A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

Abstract: A rotary construction laser is disclosed. The rotary construction laser having a deflection device rotatably mounted around an axis of rotation for emitting laser light as well as a stepper motor for rotating the deflection device around the axis of rotation.

Abstract: Operating methods of an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements. The invention simplifies the design of electromechanical light modulators and permits the construction of large size displays with greater mechanical tolerances on glass substrates.

Abstract: A device for image gating using an array of reflective elements is provided herein. The device includes an array of reflective elements, wherein each one of the reflective elements is movable within a range of a plurality of tilt positions, wherein the array is located at an image plane of the device, wherein the array is perpendicular to an optical axis of the device. The device further includes a control unit configured to control the reflective elements such that in at least some of the tilt positions, the reflective elements reflect the radiant flux at said image plane, to one or more projection planes. A gradual rotation of the reflective elements along the plurality of tilt positions result in a gradual increase or decrease in the intensity of the image reflected from the array of reflective elements while maintaining the image integrity.

Abstract: Provided is an optical scanning element that includes mirror unit 1, and movable unit 2 including mounting unit 7 on which mirror unit is mounted and which is configured to be rotatable. Mirror unit 1 includes: a dielectric multilayer film that reflects a part of incident light while transmitting the remainder of the light; and a first substrate on one surface of which the dielectric multilayer film is formed, and which transmits the remainder of the light passed through the dielectric multilayer film. Mounting unit 7 includes a through-hole at a portion facing the dielectric multilayer film.

Abstract: An optical scanning system includes a frame having a central axis along which is mounted a first elevation mirror for receiving an incident light and reflecting the incident light along a first optical path, a telescope for receiving the reflected incident light and outputting an output light, a visible linear array imager for receiving the output light from the telescope, and a folding mirror positioned to receive part of the output light from the telescope and directing it to a linear array infrared imager. The optical scanning system scans large areas of sky using multiple linear sensors in order to detect, identify and track low and slow flying manned and unmanned aircraft as well as to surveil large areas of terrain.

Abstract: An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Abstract: An optical scanning device for scanning a photoreceptor surface with a beam, said optical scanning device having: a light source for emitting the beam; an optical system for causing the beam emitted from the light source to converge; and a deflector that includes a polygon mirror with a plurality of reflecting surfaces and that deflects the beam that has passed through the optical system by rotations of the polygon mirror. Between the deflector and the photoreceptor surface, no optical system for causing the beam to converge or diverge is disposed. The optical system for causing the beam emitted from the light source to converge generates spherical aberration depending on which part of the optical system in a main-scanning direction the beam passes through. The beam enters into three or more adjacent reflecting surfaces of the polygon mirror at a time.

Abstract: A method of balancing a mirror in a limited rotation motor system is disclosed. The method includes the steps of providing a mirror on a rotor shaft of the limited rotation motor system such that the mirror is initially imbalanced in that the mirror is slightly more weighted to lean to a front side of the mirror that includes a front reflective face of the mirror, and adjusting at least one threaded counterweight screw on a back side of the mirror at least to a position at which the mirror becomes balanced between the front and back sides.

Abstract: A display apparatus includes: a light emitting unit which emits light; a light scanning unit which includes a light reflector reflecting light emitted from the light emitting unit and being swingably installed around a swing axis and scans the light reflected by the light reflector on a display surface where an image is to be displayed in a first direction and a second direction perpendicular to the first direction; and an amplitude changing unit which changes an amplitude of the swing of the light reflector, in which the amplitude changing unit changes the amplitude of the swing of the light reflector, so that a first state where the light is scanned in a first region of the display surface and a second state where the light is scanned on the first region and a second region different from the first region of the display surface is switched over each other.

Abstract: A display apparatus includes: a light emitting unit which emits light; a light scanning unit which includes a light reflector and scans the light in first and second directions; an amplitude changing unit which changes an amplitude of the swing of the light reflector; and a light emitting control unit which adjusts an amount of light of the light emitting unit, wherein the amplitude changing unit allows a first state where the light is scanned in a first region of the display surface and a second state where the light is scanned on the first region and a second region of the display surface is switched, and wherein the light emitting control unit allows an amount of light per unit area of the first region in the first state and an amount of light per unit area of the first region in the second state to be equalized.

Abstract: The invention refers to a compact multispectral scanning system comprising a primary mirror (1) and secondary mirror (2), wherein the mirrors face each other, are adapted to be rotated at the same angular speed in opposite directions, and are tilted with respect to their rotation axes. The primary mirror is concave, the secondary mirror is smaller than the primary mirror and the rotation axes of both mirrors are aligned. This arrangement makes the system more compact than prior art devices and avoids the dependency of the system on the operation frequency.

Abstract: A scanning mirror includes a substrate that is patterned to include a mirror area, a frame around the mirror area, and a base around the frame. A set of actuators operate to rotate the mirror area about a first axis relative to the frame, and a second set of actuators rotate the frame about a second axis relative to the base. The scanning mirror can be fabricated using semiconductor processing techniques or processing methods that do not require clean room process. Drivers for the scanning mirror may employ feedback loops that operate the mirror for triangular motions. Some embodiments of the scanning mirror can be used in a LADAR system for a Natural User Interface of a computing system.