Abstract: Certain example embodiments relate to a motor-driven dynamic shade provided in an insulating glass (IG) unit, and/or associated methods. A spacer system helps maintain first and second substrates in substantially parallel spaced apart relation to one another and defines a gap therebetween. A shade and a motor are provided in the gap. The motor, provided close to a first peripheral edge of the IG unit, is dynamically controllable to cause the shade to extend towards a second peripheral edge of the IG unit opposite the first peripheral edge and to cause the shade to retract from the second peripheral edge towards the first peripheral edge. The shade may be electrostatically couplable to one of the first and second substrates when the shade is extended via complementary electrostatic connection areas provided to the shade and the one of the first and second substrates.

Abstract: A substrate is cleaned by performing a scrubbing process on a surface to be cleaned of the rotating substrate with a roll-shaped cleaning member while holding an outer circumferential surface of the roll-shaped cleaning member in contact with the surface to be cleaned of the substrate across a predetermined contact width. During at least a part of the scrubbing process, the roll-shaped cleaning member is placed at an offset cleaning position where the central axis of the roll-shaped cleaning member is spaced from the central axis of the substrate by a distance which is 0.14 to 0.5 times the contact width. The surface to be cleaned of the substrate is scrubbed with more uniform cleaning intensity while taking into account the cleaning intensity at each position (area) along the radial direction of the surface to be cleaned of the substrate.

Abstract: A method for modulating light using a micro-electro-mechanical structure includes providing a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: Methods of fabricating an electromechanical systems (EMS) device with spacers between plates and EMS devices formed by the same are disclosed. In one embodiment, a EMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier may be released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the EMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The resulting EMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

Abstract: An optical projection apparatus includes a first light source, a second light source, and an imaging element, which is illuminated by the first light source and the second light source during operation. The light source includes a light-emitting diode chip that emits red light during operation. The second light source includes a first light-emitting diode chip, which emits green light during operation. A second light-emitting diode chip emits blue light during operation. The second light-emitting diode chip is arranged on the first light-emitting diode chip at a radiation exit surface of the first light-emitting diode chip. Electromagnetic radiation generated in the first light-emitting diode chip during operation passes through the second light-emitting diode chip.

Abstract: A micro shutter device and a method of manufacturing the same are provided. A barrier is provided to define a unit pixel. Film actuators are formed within the unit pixel. The film actuators are configured to be bent in opposite directions to each other from a substrate so that light passing through the substrate from an external light source is blocked in a voltage non-applied state, and to be straightened perpendicularly to the substrate so that the light is transmitted upon voltage application. Accordingly, it is possible to increase the aperture ratio and thus improve the light efficiency. Furthermore, it is possible to reduce voltage necessary to drive the film actuators and thus increase the drive speed.

Abstract: A scanned, one-dimensional, phased-array display system combines imaging optics on one axis with Fourier transform optics on another. The display offers the energy efficiency and fault tolerance of phase modulator-based displays, and the compactness, flexibility and speed of optical MEMS. Also described is a mechanism to introduce amplitude variations on the Fourier axis if needed to compensate for image artifacts.

Abstract: The present invention provides an apparatus that includes a waveguide and one or more pixels deployed adjacent the top surface of the waveguide which contains TIR light therein. Each pixel includes a deformable active layer having a first conductor and a driver electronics layer having a second conductor. The driver electronics layer is deployed in spaced-apart relation to the active layer and opposite the waveguide. In a quiescent state of a pixel, the active layer is in contact or near contact with the top surface of the waveguide so as to optically couple light out via FTIR (i.e., pixel's ON state). To actuate the pixel, the electronics layer is configured to selectively apply an electrical potential difference to the second conductor thereby causing the active layer to move away from the top surface so as to prevent the optical coupling of light out of the waveguide (i.e., pixel's OFF state).

Abstract: A pseudo bipolar method for driving a MEMS ribbon device reduces charging effects in the device.

Abstract: In each light modulator element of a special light modulator with diffraction grating structure where moving ribbons and fixed ribbons are alternately arranged, the maximum light-amount (I1) when an output light-amount first becomes maximum from when the moving ribbons start to sag and the maximum light amount-voltage becoming an displacement amount (P1) at the maximum light-amount, are obtained and the minimum of a plurality of maximum light-amounts is set as a target ON light-amount (It). Since a voltage (corresponding to a displacement amount (Pt1)) between the maximum light amount-voltage and the minimum light amount-voltage at a displacement amount (P2) is obtained as a target ON-voltage for the target ON light-amount (It), it is thereby possible to prevent moving distance of the moving ribbons among ON/OFF from largely differing among the light modulator elements and achieve an appropriate image recording.

Abstract: The invention relates to an electro-optic light control element, electro-optic displays containing said elements and display systems such as TV screens and computer monitors. The inventive light control elements contain a mesogenic control medium which is present in the isotropic phase during operation of the light control elements and arc characterized both by good contrast and low angular field dependence and particularly by very short switching, times. The invention also relates to the mesogenic control media used in the electro-optic light control elements.

Abstract: Embodiments of the present invention provide structures for microelectromechanical systems (MEMS) that can be sensed, activated, controlled or otherwise addressed or made to respond by the application of forcing functions. In particular, an optical shutter structure suitable for use in an optical switch arrangement is disclosed. In one embodiment, an optical shutter or switch can be scaled and/or arranged to form arbitrary switch, multiplexer and/or demultiplexer configurations. In another embodiment of the present invention, an optical switch can include: a shutter; and a flexure coupled to the shutter, whereupon a vibration transmitted to the flexure when in the presence of a resonant frequency causes the shutter to move across an opening for the passage of an optical signal.

Abstract: In each light modulator element of a special light modulator with diffraction grating structure where moving ribbons and fixed ribbons are alternately arranged, the maximum light-amount (I1) when an output light-amount first becomes maximum from when the moving ribbons start to sag and the maximum light amount-voltage becoming an displacement amount (P1) at the maximum light-amount, are obtained and the minimum of a plurality of maximum light-amounts is set as a target ON light-amount (It). Since a voltage (corresponding to a displacement amount (Pt1)) between the maximum light amount-voltage and the minimum light amount-voltage at a displacement amount (P2) is obtained as a target ON-voltage for the target ON light-amount (It), it is thereby possible to prevent moving distance of the moving ribbons among ON/OFF from largely differing among the light modulator elements and achieve an appropriate image recording.

Abstract: Disclosed herein is a raster scanning-type display device using a diffractive optical modulator. The raster scanning-type display device includes an optical illumination unit, a diffractive optical modulator, and a projection unit. The optical illumination unit radiates light, which is emitted from a light source, in a spot beam form. The diffractive optical modulator causes an element to modulate the spot beam incident from the optical illumination unit, and generate diffracted light whose intensity is adjusted and which has a plurality of diffraction orders. The projection unit generates an image by projecting the diffracted light incident from the diffractive optical modulator onto a screen in a scanning spot beam form and performing raster scanning in which horizontal scanning and vertical scanning are alternated.

Abstract: A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.

Abstract: Disclosed herein is an interdigitation-type diffractive light modulator. In the interdigitation-type diffractive light modulator of the present invention, each of a pair of ribbons has a plurality of diffractive branches which are arranged in a comb shape, and the diffractive branches of the ribbons interdigitate with each other. Furthermore, the respective ribbons moves upwards and downwards or, alternatively, one ribbon moves upwards and downwards, so that the diffractive branches of the ribbons which interdigitate with each other form a stepped structure, thus diffracting incident light.

Abstract: In one embodiment, a capacitive micro electro-mechanical systems (MEMS) device includes a dielectric spacer between a bottom electrode and a movable member. The movable member may serve as a top electrode. A gap separates the top electrode from the dielectric spacer. The movable member may be actuated to deflect towards the bottom electrode by electrostatic force. The dielectric spacer reduces the height of the gap that would otherwise be formed between a top surface of the bottom electrode and a bottom surface of the movable member, thereby improving squeeze-film damping. The movable member may be a ribbon of a ribbon-type diffractive spatial light modulator, for example.

Abstract: The invention includes an apparatus for modulating an optical signal. The apparatus includes a modulating mechanism comprising a plurality of modulating component arrays, each modulating component array comprising a plurality of modulating components, wherein adjacent ones of the plurality of modulating components in each modulating component array are separated by gaps, and wherein adjacent ones of the plurality of modulating component arrays are offset along a dispersion direction of an incident optical signal such that the gaps associated with the adjacent ones of the plurality of modulating component arrays are offset. In one embodiment, rows of the modulating components in the modulating component arrays are offset along the dispersion direction of the incident optical signal by a fraction of the modulating component pitch.

Abstract: Systems and methods are disclosed herein to provide position information, such as for example via a mirror actuator position sensor. For example, in accordance with an embodiment of the present invention, a mirror actuator is disclosed which utilizes its own capacitance to directly sense and provide mirror position information. The mirror position information may be utilized as a position feedback signal to assist in controlling a position of the mirror.

Abstract: A light valve for use in an imaging head for imaging a regular pattern with relatively large imaged areas in a pre-determined orientation has low resolution channels and high resolution channels corresponding to the pattern to be imaged.

Abstract: An optical MEM device is fabricated with a patterned device layer formed on a silicon wafer. Preferably, the patterned device layer is patterned with plurality of ribbons and/or access trenches. The central portion of the ribbon is released from the silicon wafer using a selective etch process, wherein a cavity is formed under the central portion of the ribbon, while opposing ribbon ends remain attached to the wafer. The selective etching process preferably utilizes an enchant comprising xenon difluoride. In accordance with further embodiments, the silicon wafer is doped, patterned or otherwise modified to enhance the selectivity of the etching process.

Abstract: In one embodiment, a delay circuit is configured to delay pixel information from an image source, such as a frame buffer. The delay circuit may be configured to delay the pixel information by an amount of time that would move a pixel projected on a surface by a distance less than a dimension of the pixel. A light modulator may modulate a light beam onto a surface, such as a display screen, based on the delayed pixel information. This advantageously allows for sub-pixel electronic alignment.

Abstract: One embodiment disclosed relates to an apparatus for controlled diffraction of light. The apparatus includes a plurality of vertically movable reflective members and an arrangement of the reflective members along a grating plane. The grating plane is configured to be controllably tiltable. Another embodiment disclosed relates to a method for controlled diffraction of light. The method includes illuminating incident light upon an element, and controllably deflecting reflective members within the element to control a fraction of the incident light reflected by the element. The reflective members may be controllably deflected so as to be positioned along a tiltable grating plane.

Abstract: An electrostatic micromechanical device with continuously variable displacement, that includes: a movable member having a first electrode; an opposing surface having a second electrode; a channel separating the movable member from the opposing surface; a liquid situated in the channel, wherein the liquid has a sufficiently high dielectric constant so as to enable continuously variable and stable control of a displacement of the movable member over a travel range spanning at least half of the channel; the displacement being a result of a voltage applied between the first electrode and the second electrode; and at least one solid dielectric layer physically situated between the first electrode and the second electrode.

Abstract: A device comprising movable micro-structures configured to contact a substrate is disclosed. The substrate has a metal-insulator-metal construction with an upper metal layer and an insulator being patterned to provide substrate contact regions to a lower metal layer. The micro-structures have metal under layers for providing ribbon contact regions and non-contact regions. In use, a bias voltage is applied across the micro-structures and the top metal layer of the substrate causing the micro-structures and the substrate to contact through the contact regions. During contact, the contact regions are maintained at a potential that is substantially less than the applied bias voltage, thereby reducing the formation of asperities and/or sticking between contacting parts. The micro-structures are preferably ribbon structures in an optical MEM device configured to modulate light.

Abstract: One embodiment disclosed relates to a method for driving a micro electromechanical (MEM) device. The method includes generating a high-frequency AC drive signal that is substantially greater in frequency than a resonance frequency of a movable feature in the MEM device, and modulating the amplitude of the high-frequency AC drive signal. A DC-like displacement of the movable feature in the MEM device is achieved by driving the movable feature using the amplitude modulated high-frequency AC drive signal.

Abstract: An imaging system is disclosed that includes an illumination source, a modulator and a variable Fourier diaphragm. The illumination source produces a first illumination field having a first frequency and a second illumination field having a second frequency. The modulator receives the first illumination field and the second illumination field, and produces a first modulated illumination field and a second modulated illumination fields. The variable Fourier diaphragm selectively passes one of the first modulated illumination field and the second modulated illumination field.

Abstract: A quasi-optical system is provided. More specifically, a quasi-optical system is provided comprising various embodiments of quasi-optical grids (such as arrays or layers and the like) with reconfigurable quasi-optical unit cells. The quasi-optical system, grids and unit cells are configured to control an incident beam in a variety of ways.

Abstract: An electromechanical conformal grating device including: at least two sets of elongated ribbon elements; a pair of end supports for supporting each elongated ribbon element at both ends over a substrate; a plurality of intermediate supports placed under each elongated ribbon element; and at least two inputs for selectively applying a force to the at least two sets of elongated ribbon elements; wherein the force causes selected elongated ribbon elements to deform between first and second operating states, wherein during the second operating state the elongated ribbon elements mechanically conform to the intermediate supports.

Abstract: A method for actuating an electromechanical grating device that has ribbon elements. The method includes the steps of: providing a data stream, generating a pulse width modulated waveform including at least two different non-zero voltages from the data stream, and applying the pulse width modulated waveform to the ribbon elements such that the ribbon elements transition through at least three different states of actuation that correspond to the pulse width modulated waveform.

Abstract: An improved projection system that includes a conformal grating electromechanical system (GEMS) device for forming an image on a medium, and also including: a light source providing illumination; a linear array of conformal GEMS devices receiving the illumination; an obstructing element for blocking a zeroth order reflected light beam from reaching the medium; a cross-order filter placed substantially near a Fourier plane of a lens system for blocking a plurality of diffracted cross-order light beams from reaching the medium; a scanning element for moving non-obstructed diffracted light beams relative to the medium; and a controller for providing a data stream to the linear array of conformal GEMS devices.

Abstract: Provided is a micro-electromechanical assembly including an out-of-plane device formed on a device layer of a single crystal silicon substrate. A ribbon structure is formed on the device layer, where the ribbon structure has at least one of a width or depth, which is less than the width or depth of the out-of-plane device. A connection interface provides a connection point between a first end of the out-of-plane device and a first end of a ribbon structure, wherein the ribbon structure and out-of-plane device are integrated as a single piece.

Abstract: An optical MEM device is encapsulated with a dampening gas to reduce oscillatory vibrations of movable parts during the operation of the device. Preferably, the dampening gas comprises one or more noble gases, such as neon and/or krypton with a partial pressure in a range of 50 to 100% of the total dampening gas pressure. In further embodiments, the dampening gas comprises a mixture of one or more noble gases and an inert carrier gas, such as nitrogen. Preferably, the optical MEM device is sealed within a die with a dampening gas pressure between 0.5 to 3.0 atmospheres at 20 degree Celsius. The current invention is particularly useful for reducing oscillatory vibrations of optical MEM devices having a plurality of movable ribbon structures configured to modulate light with one or more wavelengths in the near infrared (800 to 4000 nanometers) and which operate at high switching rates (4-40 Volts/nano second) and at high switching frequencies (1 kHz and greater).

Abstract: A variable spacing diffraction grating is fabricated using micro-electromechanical (MEMS) technology. An array of interconnected beam elements is fabricated into a diffraction grating and mounted in such a manner that one or both ends of the array of beam elements may be actuated using a mechanical actuator. The beam elements may be linear, spiral shaped or arranged in a staircase structure. Applying a force to one or both ends of the array of beam elements changes the spacing of the grating, and presents a different ruling spacing distribution to incoming radiation, thus altering the diffracted angle among individual diffraction orders of the wavelength. Controlling the diffracted signal in this way allows for specific diffraction pass bands to be fixed on a particular detector or a particular area of a detector or optical relay lens or lenses.

Abstract: A protective cover (10) for an optical device, such as a spatial light modulator or an infrared detector or receiver. The cover (10) has an optically transmissive window (11), which has a coating (12) on one or both of its surfaces. The coating (12) is made from a halogenated material, which is deposited to form a chemical bond with the surface of the window (11).

Abstract: A light shutter for controlling a light signal between occluded and uninterrupted states. The shutter has a frame which mounts a beam under compression so that it assumes either of two bi-stable buckled positions. An occluder is mounted on the beam, A shape memory alloy actuator is provided which applies a force transverse on the beam as the actuator is heated to its shape change transition temperature. The transverse force bends the beam, causing it to buckle to the opposite bi-stable position. This moves the occluder into or out of the path of the light signal.

Abstract: An electromechanical conformal grating device having a period &Lgr;, that includes: an elongated ribbon element including a light reflective surface; a pair of end supports for supporting the elongated ribbon element at both ends over a substrate; an intermediate support; and means for applying a force to the elongated ribbon element to cause the element to deform between first and second operating states, where in the second operating state the elongated ribbon element mechanically conforms to the intermediate support forming a conformal grating having alternating raised and lowered portions, and wherein the length of the raised and lowered portions are substantially equal.

Abstract: An optical switch that any vibration or oscillation transmitted to the optical switch from the outside is substantially prevented from being transmitted to a movable electrode is provided. In an optical switch comprising: a stationary electrode; a movable electrode opposed to the stationary electrode with a predetermined space therebetween; and a mirror mounted to the movable electrode, wherein the movable electrode and the mirror are moved together by applying a voltage between the stationary electrode and the movable electrode thereby to switch the path of an incident optical signal to the optical switch, a buffer member provided with a diaphragm is attached to the bottom of the stationary electrode, and a vibration or oscillation is substantially prevented from being transmitted to the movable electrode by the damping effects of the diaphragm and the space area formed above the diaphragm.

Abstract: A diffraction grating device operable as a reflection or transmission grating, and a method of manufacturing and using any number of such grating devices so that each device is individually electrically addressable to diffract radiation of different wavelengths. The grating device comprises first and second sets of interdigitated elements so that each element of the first set defines an element pair with an immediately adjacent element of the second set, a first gap is defined between the elements of each element pair, and a second gap is defined between each adjacent pair of element pairs. The elements of an element pair are selectively movable toward and away from each other. As such, the widths of the gaps can be selectively sized to diffract radiation of a desired wavelength.

Abstract: An electromechanical conformal grating device having a period &Lgr;, that includes: an elongated ribbon element including a light reflective surface; a pair of end supports for supporting the elongated ribbon element at both ends over a substrate; an intermediate support; and means for applying a force to the elongated ribbon element to cause the element to deform between first and second operating states, where in the second operating state the elongated ribbon element mechanically conforms to the intermediate support forming a conformal grating having alternating raised and lowered portions, and wherein the length of the raised and lowered portions are substantially equal.

Abstract: An interferometric light modulator includes a base and a ribbon suspended above the base. The ribbon has a central region and first and second conducting regions located outside of the central region. The ribbon includes a first mirror between the first and second conducting regions. The base includes a second mirror located parallel and adjacent to the first mirror so that the first and second mirrors form an interferometric cavity. An electrical bias applied to the first and second conducting regions adjusts the interferometric cavity in order to modulate light which is incident upon the central region of the ribbon. In an alternative interferometric light modulator, the light is incident upon a second central region of the base.

Abstract: A light valve capable of operating in an “off” state for reflecting light and in an “on” state for diffracting and reflecting light. The valve includes a semiconductor substrate having a plurality of electrodes formed therein for receiving voltages and for generating an electric field in response to the received voltages. A layer of transparent deformable dielectric material is disposed on the reflective electrodes which deforms in response to the generated electric field. When the valve is in its “on” state, the electric field causes deformities in the dielectric material which diffract incident light reflected off of the valve. In another embodiment, the dielectric material is placed on the reflective electrodes or on a transparent substrate having a transparent electrode formed thereon. The transparent substrate is then disposed in spaced relation from the semiconductor substrate containing the reflective electrodes.

Abstract: A display system, that includes a light source for providing illumination; a linear array of electromechanical grating devices of at least two individually operable devices receiving the illumination wherein a grating period is oriented at a predetermined angle with respect to an axis of the linear array wherein the angle is large enough to separate diffracted light beams prior to a lens system for projecting light onto a screen; an obstructing element for blocking a discrete number of diffracted light beams from reaching the screen; a scanning element for moving non-obstructed diffracted light beams on the screen; and a controller for providing a data stream to the individually operable devices.

Abstract: A system for modulating a beam of light in accordance with an input data stream having a data rate greater than 2 MHz, includes a source of light for directing light along a predetermined path, and a self-damped electromechanical conformal grating disposed in the predetermined path, the self-damped electromechanical conformal grating. The self-damped electromechanical conformal grating includes an elongated ribbon element including a light reflective surface, a substrate and a pair of end supports for supporting the elongated ribbon element at both ends over the substrate; and at least one intermediate support between the end supports so that there are deformable portions of the elongated ribbon element above and movable into a channel containing a gas.

Abstract: A mechanical grating device for modulating an incident beam of light by diffraction includes an elongated element including a light reflective surface; a pair of end supports for supporting the elongated element at both ends over a substrate; at least one intermediate support between the end supports; and means for applying a force to the elongated element to cause the element to deform between first and second operating states

Abstract: A method of manufacturing a conformal grating device, that includes the steps of: forming a spacer layer on a substrate; removing portions of the spacer layer to define an active region with at least two channels and at least one intermediate support; forming a sacrificial layer in the active region; forming conductive reflective ribbon elements over the active region, and removing the sacrificial layer from the active region.

Abstract: A method for damping electro-mechanical ribbon elements over a channel defining a bottom surface and having a bottom conductive layer formed below the bottom surface includes the steps of: providing at least one constant amplitude voltage pulse to at least one ribbon element wherein the actuation pulse causes the ribbon element to contact the bottom surface of the channel; and providing at least one braking pulse to the ribbon elements wherein the braking pulse is separated by a narrow temporal gap from the constant amplitude voltage pulse. Furthermore, the method can also provide a sophisticated damping for ribbon elements which are actuated so that they do not contact the bottom of the channel.

Abstract: A light valve which can be fabricated as an array of individually addressable micromachined linear mirror reflective light valves is disclosed. Each light valve may comprise a metallized silicon nitride ribbon situated above a micromachined cavity. Incident light is reflected by the ribbons. The reflected beam travels into an optical collecting system. The ribbons may be caused to deform into the micromachined cavities by the application of electrical signals. Only a small area on the ribbons is required to be reflective. The deformation causes light reflected by the deformed ribbon to be substantially collimated. The collimated reflected light can be directed through a slit and focussed on a spot to record a data element on a recording surface. A light valve array according to the invention may be used for various data recording applications including exposing printing plates, printed circuit boards, silicon wafers, masks for making semiconductor devices, optical data storage systems and the like.

Abstract: A method for transferring an image to a medium includes: generating a substantially uniform line of radiation; producing diffractive light from the uniform line of radiation; passing zero order diffractive light to the medium in a telecentric fashion while blocking non-zero order diffractive light; adjusting image magnification on the medium independent of image focus in response to the zero order diffractive light; and adjusting image focus on the medium independent of image magnification in response to the zero order magnification-adjusted diffractive light.