Abstract: A shake correction device may include a housing unit; a movable body; a fixed body; a swing support mechanism; a shake correction drive mechanism; and a posture return mechanism. The shake correction drive mechanism may include a magnet and a coil, the coil being configured to apply an electromagnetic force to the movable body. The posture return mechanism may include the magnet and a magnetic member, the magnetic member configured to urge the movable body toward the reference posture. The magnetic member may include a convex surface protruding, and the other body may include a radial positioning unit to press the convex surface of the magnetic member against the radial positioning unit by the attraction force to position the magnetic member in a direction orthogonal to the axial line. The radial positioning unit may include a concave surface with which the convex surface is contacted.

Abstract: A camera system suitable for use on an automated vehicle, includes an imager used to detect an image of a field-of-view of the system, a light-shield operable to block a portion of the image from being received by the imager, and a controller in communication with the imager and the light-shield. The controller is configured to position the light-shield in a line-of-sight between a bright-spot and the imager.

Abstract: An example method of coating a substrate involves cleaning the substrate and, after cleaning the substrate, sensitizing the substrate using a sensitizing solution including tin chloride and hydrochloric acid. The method also involves, after sensitizing the substrate, activating the substrate in an activating solution including palladium chloride and hydrochloric acid. Further, the method involves subsequently neutralizing the substrate using a neutralizing solution including ammonium hydroxide. Still further, the method involves, after neutralizing the substrate, depositing an electroless nickel layer on the substrate. The method may then involve depositing an electrolytic nickel layer on top of the electroless nickel layer, and depositing an outer layer of metallic material, ceramic material, polymeric material, or any combination thereof on top of the electrolytic nickel layer.

Abstract: Embodiments of the present disclosure provide a MEMS light valve, a pixel array and a display apparatus. The MEMS light valve includes a first grating including first openings arranged in a matrix; a second grating, parallel to the first grating and including light emitting areas corresponding to the first openings, wherein the second grating is capable of moving with respect to the first grating along a shifting direction parallel to the first grating. Light emitting materials which emit lights having certain wavelengths by means of excitation by external lights are provided on the light emitting areas.

Abstract: A light adjusting apparatus includes substrates arranged in parallel, each including an opening to pass light, a rotary shaft member which is rotatable around an axis perpendicular to the substrates and movable in an axial direction, a light adjusting section fixed integrally to the rotary shaft member in a space between the substrates and configured to move to an insertion position or a retracted position along with the rotation of the rotary shaft member and adjust light that passes through the opening, and a holding member configured to restrict the rotation of the light adjusting section that moves to one substrate side in the space from the insertion/retracted position and allow the rotation of the light adjusting section that moves to the other substrate side in the space.

Abstract: A system for illuminating an object is provided, the system comprising a coherent or semi-coherent light source and a first diffuser positioned relative to the coherent or semi-coherent light source so as to receive said coherent or semi-coherent light. The first diffuser may diffuse the light to produce diffused light. An actuator having moveable elements, such as a moveable reflective and/or phosphorus surfaces, may be positioned to project the diffused light onto an object, and may be moved to project light onto different portions of the object. This movement may be performed with such rapidity that it is not perceived by a person viewing the object. Rather, the entire object would appear to be illuminated. Movement of the elements may be controlled by a computer, and may be performed according to a predefined routine.

Abstract: A transmission gear shifter arrangement includes a shift lever assembly and a position sensor assembly each associated with a shifter housing. The shift lever assembly is operably coupled to a vehicle transmission, and is selectively movable to gear select positions corresponding to respective transmission gears. The position sensor assembly includes a light source and light sensor, where the sensor is configured to selectively receive light emitted from the light source. When the shift lever assembly is in a predetermined one of the gear select positions, the shift lever assembly enables light emitted from the light source to reach the sensor thereby indicating that the shift lever assembly is in the predetermined one of the gear select positions, and when the shift lever assembly is not in the predetermined one of the gear select positions, the shift lever assembly prevents light emitted from the light source from reaching the sensor.

Abstract: A light adjusting apparatus including a drive section provided with an axial magnet, a coil core member and a coil, a first substrate provided an opening and a first cut-out portion, a second substrate provided with an opening and a second cut-out portion, located at a predetermined distance from the first substrate, an incident light adjusting section to which the axial magnet is joined, and an axial magnet support member provided with a distance keeping portion that keeps a distance between the coil core member and the axial magnet to within a certain range and a dropout prevention portion that prevents dropout of the axial magnet from the first cut-out portion, the axial magnet support member being fixed to the coil core member, in which the incident light adjusting section is rotated by the drive section for adjusting the incident light.

Abstract: An engine includes an engine body, a DPF case therein, high pressure and low pressure EGR paths, and a supercharger. The high pressure EGR path is between exhaust and intake manifolds. An exhaust gas discharge path extends from the DPF case. An intake pipe extends from the supercharger air compressor. The low pressure EGR path is between the exhaust gas discharge path of the DPF case and the intake pipe. The low pressure EGR path includes a low pressure EGR cooler. An extending direction of a crankshaft defines a longitudinal direction. A flywheel exists on a rear side. A width direction of the engine body defines a lateral direction. The low pressure EGR path includes a rear path portion extending along a rear side of the engine body, and a side path portion extending along a lateral side of the engine body on a side close to the exhaust manifold.

Abstract: Electromechanical light modulators and backlight providing efficient, low cost and high performance displays.

Abstract: An assembly of zoom lens module includes a main lens, plural associate lens and a rotator mechanism. The plural associated lens disposed around the mail lens and each associated lens has a shiftable lens element shifted by the rotator mechanism. When the rotator mechanism rotates, plural shiftable lens elements are shifted such that the zoom effects of the plural associate lens can be changed. Therefore, the assembly of zoom lens module may provide plentiful zoom effects without increasing the volume, particularly the total track length, and weight of the zoom lens assembly.

Abstract: A display apparatus includes a backlight and an aperture layer that is positioned in front of the backlight and defines a plurality of apertures. The display apparatus also includes a microelectromechanical system (MEMS) light modulator configured to modulate light emitted by the backlight passing through the apertures to form an image on the display apparatus. The MEMS light modulator includes a shutter that has a light blocking portion having an aperture layer-facing surface and a front-facing surface and at least one depression formed in the light blocking portion. The width of the at least one depression accounts for at least 50% but less than 100% of a distance separating two edges of the shutter.

Abstract: A display apparatus includes a first substrate, a second substrate facing the first substrate, and a plurality of pixels including a first pixel. The first substrate includes first openings through which a light is transmitted. The pixels are disposed on at least one of the first substrate and the second substrate. The first pixel includes a first flexible electrode, a second flexible electrode, and a shutter including second openings and disposed between the first and second flexible electrodes. The first flexible electrode receives a first voltage. The second flexible electrode receives a second voltage different from the first voltage. The shutter receives a third voltage. The shutter moves to the first flexible electrode or the second flexible electrode according to a level of the third voltage, thereby controlling the position of the second openings relative to the first openings to control the transmission of the light.

Abstract: Apparatus for interrupting and/or scanning a beam of penetrating radiation, such as for purposes of inspecting contents of a container. A source, such as an x-ray tube, generates a fan beam of radiation effectively emanating from a source axis, with the width of the fan beam collimated by a width collimator, such as a clamshell collimator. An angular collimator, stationary during the course of scanning, limits the extent of the scan, and a multi-aperture unit, such as a hoop, or a nested pair of hoops, is rotated about a central axis, and structured in such a manner that beam flux incident on a target is conserved for different fields of view of the beam on the target. The central axis of hoop rotation need not coincide with the source axis.

Abstract: A shutter assembly includes a first shutter blade having a first toothed arm extending therefrom and a first light transmitting aperture therein, and a second shutter blade positioned adjacent and parallel to the first shutter blade. The second shutter blade has a second toothed arm extending therefrom and a second light transmitting aperture therein. The first and second shutter blades are supported to allow parallel linear motion. A motor gear is disposed between, and meshed with, the first and second toothed arms such that rotation of the gear causes the first and second shutter blades to move linearly in opposite directions between an open position in which the first and second light transmitting apertures are in an overlapping relationship with respect to one another, and a closed position in which the first and second light transmitting apertures are in a non-overlapping relationship with respect to one another.

Abstract: A viewing panel unit is disclosed, comprising: a first panel comprising one or more light transparent regions that are substantially transparent to visible light and one or more light hindering regions which substantially hinder transmission of visible light; a second panel comprising one or more light transparent regions that are substantially transparent to visible light and one or more light hindering regions which substantially hinder transmission of visible light; and an actuator (6) for moving the second panel relative to the first panel in a plane parallel to the plane of the first panel, wherein the actuator comprises: a cam (10) configured such that rotational movement of the cam causes linear movement of said second panel relative to said first panel; a shaft (8) extending through the cam; and an engaging member (15), wherein: the engaging member provides a non-rotatable connection between the shaft and the cam such that rotation of the shaft in use causes a corresponding rotation of said cam; the e

Abstract: The present invention provides optical systems, devices and methods which utilize one or more electroactive polymer actuators to provide shutter and/or aperture control.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes dual-level shutter assemblies. Each dual-level shutter assembly includes front and rear light obstructing levels positioned adjacent to respective front and rear light blocking layers. The front and rear light blocking layers define apertures providing optical paths from a backlight to the front of the display. The dual-level shutters selectively obstruct these optical paths to generate an image.

Abstract: The display apparatus including a microelectromechanical (MEMS) shutter is disclosed. The MEMS shutter is shifted by the switching element in a horizontal direction corresponding to the light control area to turn on or turn off the light control area. A first slit transmits light generated from the light source to the MEMS shutter of a first substrate and a second slit of a second substrate corresponding to the first slit provides apertures by overlapping the first slit and the second slit. The apertures of the MEMS shutter are distributed on a two dimensional plane and form a geometrically symmetric pattern that are capable of enhancing light-use efficiency.

Abstract: The present invention provides a projection type display apparatus for displaying an image by which reduction of contrast is suppressed, including: a light source; a first lens array and a second lens array having a plurality of lens cell areas; a collecting lens; a display element; a projection lens; and a light shielding unit which light-shields the light fluxes from the first lens array to the second lens array, wherein the light shielding unit light-shields at least parts of all the lens cell areas except for the lens cell area in contact with an optical axis among a plurality of rectangular lens cell areas of the second lens array, and a light shielding area in the lens cell area in contact with the optical axis is smaller than that in any of the lens cell areas except for the lens cell area in contact with the optical axis.

Abstract: A system for providing flexible optical aperture shapes in an optical inspection system (e.g., an optical wafer inspection system) is described. The system includes one or more mechanisms for providing multiple optical aperture shapes along an optical beam path in the optical wafer inspection system. The multiple optical apertures shapes are stacked or overlapped to combine the shapes and form a single combined optical aperture shape along the optical beam path.

Abstract: An aperture stop 10A includes a filter area 1 formed on a flat-plate substrate 23, and an aperture area 2 formed inside the filter area 1. The filter area 1 transmits infrared light and reduces or blocks the transmission of visible light. The aperture area 2 transmits light in the wavelength range corresponding to fluorescent light from an observed area of a subject and light in the wavelength range corresponding to illumination light to the subject. The aperture stop 10A does not reduce the light in the wavelength range corresponding to fluorescent light from the observed area of the subject, but variably reduces visible light since the area of the aperture area 2 is variable. Therefore, it becomes possible to simultaneously and clearly observe, with a simple method, a subject image formed by illumination light in the visible light band and an observed image formed by weak fluorescent light from the observed area of the subject in the infrared light band.

Abstract: A display apparatus includes a first insulating substrate including a display area in which a first opening is formed, as well as a non-display area. A second insulating substrate faces the first insulating substrate. The second insulating substrate includes a shutter part having a second opening corresponding to the first opening. The shutter part moves between two different positions to transmit or block light according to an overlap between the first opening and the second opening.

Abstract: A light path adjustment apparatus includes a support plate that has a first through hole through which light passes and optical units that move between an open location where the first through hole is opened by the optical units moving toward an outside of the first through hole and a closing location where the first through hole is divided into a plurality of regions by the plurality of optical units moving toward the first through hole. The optical units block at least a part of the light in the closing location.

Abstract: A light controlling apparatus includes a substrate having an aperture, a light controlling section which includes at least one incident-light controlling means, having a magnet joined to a position of a center of rotation, and which rotates in a plane perpendicular to an optical axial direction, on the substrate, and at least one coil which imparts a rotational force to the magnet. The incident-light controlling means is displaced to a retracted position of being retracted from the position of the aperture, by supplying an electric power supply, and in the light controlling apparatus in which, incident light which passes through the aperture is controlled, the coil is disposed to be extended in a direction parallel to the optical axis.

Abstract: A lens device includes a base, a lens unit, a dividing plate, a cover plate, a shutter unit, and an actuator unit. The base has a front section with a front surface, a rear section with a rear surface, a lens hole, and a mounting space. The lens unit is disposed in the lens hole, and includes a lens. The dividing plate is mounted on the front section and has a first light hole. The cover plate is mounted on the front section and has a second light hole. The dividing plate and the cover plate define a working space therebetween. The shutter unit includes a first shutter piece pivotally disposed in the working space. The actuator unit is mounted in the mounting space, and includes a rotation portion, and an operating portion formed on the rotation portion and extending into the working space.

Abstract: The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.

Abstract: A diaphragm device for projector includes a first gear unit, a second gear unit and two diaphragm plates. The first gear unit includes a partial circular arc portion and a gear portion with partial no tooth. The second gear unit includes a circular arc portion corresponding to the partial circular arc portion, and a pinion and a gear corresponding to the gear portion with partial no tooth. When the partial circular arc portion abuts on the circular arc portion, the gear does not rotate. When the partial circular arc portion does not abut on the circular arc portion, the gear portion with partial no tooth meshes the gear to transmit rotation of the first gear unit to the gear. The two diaphragm plates each on which a rack meshing the pinion is formed, moves in directions opposed to each other according to rotation of the pinion.

Abstract: A projector includes: an illuminator that emits an illumination light flux; a light control mechanism that blocks at least part of the illumination light from the illuminator; a light modulator illuminated with the illumination light from the illuminator; a projection system capable of projecting modulated light formed by the light modulator and switching the f number when the modulated light is projected; and a control unit that controls the open/close state of the light control mechanism in accordance with the f number of the projection system so that illumination light having an angular distribution corresponding to the f number of the projection system is incident on the projection system.

Abstract: This disclosure provides systems, methods and apparatus for providing continuous light-transmissivity tuning through a mechanical smart window. In one aspect, a mechanical smart window including multiple layers is provided, each layer featuring light-blocking and light-transmitting areas. The layers may be moved relative to each other, changing the amount by which each light-blocking area occludes light-transmitting areas on other layers.

Abstract: A micro-shutter includes a reflective layer, a shutter, and a first actuator. The reflective layer includes a plurality of first openings transmitting a portion of external light, and reflecting the remaining portion of the external light. The shutter includes a plurality of second openings corresponding to the first openings to transmit the portion of the external light. The first actuator is provided at one side of the shutter and includes at least three electrodes. The first actuator adjusts an overlap area between the first openings and the second openings according to a level of a voltage applied to the actuator electrodes.

Abstract: A light adjusting apparatus includes a substrate (10, 40) having an aperture, a plurality of incident light adjusting units (20a, 20b, 20c) each moving in a same plane, and a plurality of driving units (50a, 50b, 50c) respectively driving the incident light adjusting units (20a, 20b, 20c), and adjusts an incident light passing through the aperture by mutually moving the incident light adjusting units (20a, 20b, 20c) with the driving units to an aperture position that is center-aligned with the aperture and a retracted position that is retracted from the aperture. An incident light adjusting unit that is moved to the aperture position is positioned by contacting with at least one of other incident light adjusting units that are retracted from the aperture.

Abstract: Disclosed are optical projection lenses for projecting three dimensional images. Exemplary lenses comprise a chassis, first and second sets of offset truncated optical elements and first and second polarizers respectively disposed in light paths of the first and second sets of optical elements. An optional hot mirror may be disposed between the polarizers and the sets of optical elements. Preferably, an aperture plate is disposed at an output end of the chassis. The aperture plate may comprise upper and lower adjustable masking strips that are adjustable up and down to allow masking of an image for a particular throw. The lenses comprise focus adjustment apparatus for adjusting the relative focus of the sets of optical elements, and convergence adjustment apparatus for adjusting the convergence of the sets of optical elements.

Abstract: A light amount adjustment apparatus having a plurality of light-shielding blade members that can be so manufactured by simple machining as to reduce undesired reflection on end faces of the light-shielding blade members which are parallel with the optical axis and prevent degradation in image quality such as flare and ghosts. A driving force of a stepping motor is transmitted to the light-shielding blade members so that an aperture diameter can be changed. The light-shielding blade members are formed by injection molding of a light-shielding resin material. By performing blasting on an end face of each light-shielding blade member in a part that forms the aperture diameter, an aperture end face whose surface is roughened while substantially maintaining outside dimensions of the light-shielding blade member is formed, and an oblique portion tilted relative to the aperture end face is formed.

Abstract: A method of driving light controlling apparatus which includes a substrate, which has an aperture, a plurality of incident-light controlling unit which are displaced on the substrate, a plurality of driving unit which exert on the incident-light controlling unit, an aperture-displacing driving force which displaces the incident-light controlling unit to an aperture position, and a retracting-displacement driving force which displaces the incident-light controlling unit to a retracted position which is different from the aperture position, and in which, the incident-light controlling unit is displaced by the driving unit to the aperture position and the retracted position alternately, and incident light passing through the aperture is adjusted, and the displacement of each incident-light controlling unit to the aperture position is exclusive for the other incident-light controlling unit, includes a step of displacing the incident-light controlling unit, which includes a step of displacing a first incident-ligh

Abstract: A shutter includes micro-optics having first and second concentrator arrays. A transducer laterally displaces one of the first and second concentrator arrays between transmissive and shuttered modes. In the transmissive mode, the arrays of concentrators are optically aligned to permit electromagnetic energy passing through the first array of concentrators to pass through the second array of concentrators. In the shuttered mode, the electromagnetic radiation is blocked from passing through the second array of concentrators. The concentrators may be compound parabolic concentrators, or lenslets positioned on opposing plates with pinholes printed therethrough. The shutter may increase f-number of radiation passing therethrough, and may be used in a limited f-cone radiation source with shuttering abilities, for example reducing f-cone of radiation output from the radiation source.

Abstract: A blade drive device includes: a board including an optical path opening; first and second blades cooperatively defining an amount of light passing through the optical path opening to a given amount of light. The first blade includes a first opening. The second blade includes: a first cutout portion defining the amount of light in cooperation with the first opening; and a second cutout portion defining the amount of light in cooperation with the first opening. The second cutout portion overlaps the first blade when the first cutout portion and the first opening cooperatively define the amount of light.

Abstract: The present invention provides a projection type display apparatus for displaying an image by which reduction of contrast is suppressed, including: a light source; a first lens array and a second lens array having a plurality of lens cell areas; a collecting lens; a display element; a projection lens; and a light shielding unit which light-shields the light fluxes from the first lens array to the second lens array, wherein the light shielding unit light-shields at least parts of all the lens cell areas except for the lens cell area in contact with an optical axis among a plurality of rectangular lens cell areas of the second lens array, and a light shielding area in the lens cell area in contact with the optical axis is smaller than that in any of the lens cell areas except for the lens cell area in contact with the optical axis.

Abstract: A continuous variable non-circular aperture for an infra-red camera is formed by a plurality of positionable metal blades arranged to define there between an aperture of non-circular shape. A rotatable actuator plate positions the blades. Actuator rotation in one direction moves the metal blades to increase the size of the non-circular aperture without changing the non-circular shape of the aperture and vice-versa when the actuator plate is rotated in the opposite direction also maintaining the non-circular aperture shape. A preferred non-circular shape for a continuous variable aperture now possible is a rectangle; another is configured as a racetrack.

Abstract: A domestic viewing panel unit for a door, comprising: a first panel comprising one or more first panel light transparent regions that are substantially transparent to visible light and one or more first panel light hindering regions which substantially hinder transmission of visible light; a second panel comprising one or more second panel light transparent regions that are substantially transparent to visible light and one or more second panel light hindering regions which substantially hinder transmission of visible light; an actuator for moving the second panel relative to the first panel in a plane parallel to the plane of the first panel; wherein the first and second panels are arranged such that the amount of visible light transmitted unhindered through the domestic viewing panel is a non-linear function of the relative position of the first and second panels.

Abstract: A variable space shutter includes: a first frame having vertically spaced slats forming vertical openings; a second frame having a horizontal indented channel, the second frame being affixed to the first frame around a periphery of the first frame; and a shutter part having vertically spaced slats forming vertical openings, the shutter part being sandwiched between the first and second frames such that a portion of the shutter part rests within the horizontal indented channel to permit selective sliding movement of the shutter within the channel between a first position, wherein the vertical openings of the first frame line up with the vertical openings of the shutter part, to permit light to pass through the variable space shutter, and a second position, wherein the vertical openings of the first frame line up with the vertical slats of the shutter part, to block light from passing through the variable space shutter.

Abstract: There is provided a light adjusting apparatus which is to be used for a small-size image pickup equipment which is easy to assemble. The light adjusting apparatus includes two substrates (an upper substrate and a lower substrate), out of which, one has an aperture, a spacing portion which regulates a distance between the two substrates, at least one incident-light adjusting unit which has a shaft member which becomes a center of rotation, and which is turned in a plane perpendicular to an optical axial direction, between the substrates, and at least one driving unit which drives the incident-light adjusting unit. Incident light which passes through the aperture is adjusted by turning the incident-light adjusting unit alternately, to the aperture and to a retracted position which is retracted from the aperture, by the driving unit.

Abstract: An optical system has an aperture device having a multiplicity of aperture elements for the delimitation of the cross section of a ray bundle running through the optical system. The aperture device has a first aperture element, which is pivotable about a first rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a first aperture opening delimited by a first aperture edge. The aperture device also has at least one second aperture element, which is pivotable about a second rotation axis between an engagement position in the beam path of the optical system and a neutral position outside the beam path of the optical system and has a second aperture opening delimited by a second aperture edge. The second aperture opening is smaller than the first aperture opening. The aperture elements pivoted into the engagement position form an effective aperture opening.

Abstract: A projection display apparatus 101 in which the light quantity adjusting means has a simple and readily interchangeable structure, and which can improve image quality by adjusting the quantity of light received by a light valve continuously, without causing illuminance irregularities, and without having unwanted light radiated onto the screen, the light quantity adjusting means 9 having light blocking members 91L, 91R for blocking light in transit to a second lens array 22, and rotational axes 91LA, 91RA for turnably supporting each of the light blocking members on an xy plane, the light blocking members 91L, 91R and rotational axes 91LA, 91RA being positioned so that the rotational axes 91LA, 91RA are disposed in positions symmetric with respect to the optical axis AX on the xy plane, and the turning range from the light blocking initiation position at which the light blocking members 91L, 91R, by being turned, start to block light in transit toward the second lens array 22 to the maximum light blocking posi

Abstract: A focal plane shutter device includes a shutter base plate having an opening part, a front curtain, a first elastic member, a rear curtain, a second elastic member, and a drive unit. The front curtain is movable between a first and second position to cover and uncover the opening. The first urging member is configured to move the front curtain between the first and second positions. The rear curtain is movable between a first and second position to cover and uncover the opening. The second urging member is configured to move the rear curtain between the first and second positions. The drive unit is configured to resist the first and second urging members. The drive unit is also configured to hold the front curtain at the second position when resisting the first urging member and hold the rear curtain at the first position when resisting the second urging member.

Abstract: A blade drive device includes: a board including an optical path opening; first and second blades cooperatively defining an amount of light passing through the optical path opening to a given amount of light. The first blade includes a first opening. The second blade includes: a first cutout portion defining the amount of light in corporation with the first opening; and a second cutout portion defining the amount of light in corporation with the first opening. The second cutout portion overlaps the first blade when the first cutout portion and the first opening cooperatively define the amount of light.

Abstract: A flat panel display includes a first substrate, a thin film transistor formed on the first substrate, a second substrate facing the first substrate, and a light controller formed on the second substrate, wherein the light controller is electrically connected to the thin film transistor, wherein the light controller includes an opening plate having a plurality of first openings and a light blocker moving horizontally with respect to the opening plate to selectively pass light through the first openings.

Abstract: A component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus is disclosed. The component includes a plurality of diaphragms which are arranged alongside one another with respect to a direction perpendicular to the scan movement and which differ in their form and the position of which can be altered approximately in the scan direction so that a portion of the illumination energy can be vignetted by at least one diaphragm. The form of the individual diaphragm is specifically adapted to the form of the illumination in a diaphragm plane in which the component is arranged. This has the effect that at least parts of the delimiting edges of two diaphragms always differ in the case of an arbitrary displacement of the diaphragms.

Abstract: A light adjusting apparatus includes a substrate (10, 40) having an aperture, a plurality of incident light adjusting units (20a, 20b, 20c) each moving in a same plane, and a plurality of driving units (50a, 50b, 50c) respectively driving the incident light adjusting units (20a, 20b, 20c), and adjusts an incident light passing through the aperture by mutually moving the incident light adjusting units (20a, 20b, 20c) with the driving units to an aperture position that is center-aligned with the aperture and a retracted position that is retracted from the aperture. An incident light adjusting unit that is moved to the aperture position is positioned by contacting with at least one of other incident light adjusting units that are retracted from the aperture.

Abstract: The contrast offered by a spatial light modulator device may be enhanced by positioning nonreflective elements such as supporting posts and moveable hinges, behind the reflecting surface of the pixel. In accordance with one embodiment, the reflecting surface is suspended over and underlying hinge-containing layer by integral ribs of the reflecting material defined by gaps in a sacrificial layer. In accordance with an alternative embodiment, the reflecting surface is separated from the underlying hinge by a gap formed in an intervening layer, such as oxide. In either embodiment, walls separating adjacent pixel regions may be recessed beneath the reflecting surface to further reduce unwanted scattering of incident light and thereby enhance contrast.