Fluid Directed Across Optical Element Patents (Class 359/509)
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Publication number: 20130094086Abstract: A system for minimizing the accumulation of debris on a lens of a rear view camera of a vehicle, wherein the lens has a lens surface, includes a formed channel having a first end and a second end. The first end is in fluid communication with an external airstream effected by movement of the vehicle. The second end is disposed adjacent to the lens and is configured to direct a portion of the passing airstream over the lens surface.Type: ApplicationFiled: October 13, 2011Publication date: April 18, 2013Applicant: ROBERT BOSCH GMBHInventor: Jeffrey Bochenek
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Patent number: 8421046Abstract: In a method for keeping clean a sensor window of an optical sensor for detecting value documents and/or at least one property of value documents which is disposed with at least one portion in a beam path of the sensor, a gas film attached to a surface of the portion is generated on the portion of the sensor window from gas moving relative to the portion.Type: GrantFiled: August 8, 2008Date of Patent: April 16, 2013Assignee: Giesecke & Devrient GmbHInventor: Karl-Heinz Leuthold
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Patent number: 8374209Abstract: A multi-pass optical cell with an actuator for actuating a reflective surface is provided. In one preferred embodiment, an apparatus is provided comprising a first reflective surface, a second reflective surface, and a support structure supporting the first and second reflective surfaces. The support structure positions the first and second reflective surfaces to create an optical cell. The apparatus also comprises a source and a detector, which are positioned such that light emitted from the source is reflected in the optical cell at least one time between the first and second reflective surfaces before reaching the detector. The apparatus further comprises an actuator coupled with and operative to actuate the first reflective surface. In some embodiments, the actuator rotates the first reflective surface. Also, in some embodiments, the multi-pass optical cell is an open path multi-pass optical cell, while, in other embodiments, the multi-pass optical cell is a closed path multi-pass optical cell.Type: GrantFiled: June 14, 2011Date of Patent: February 12, 2013Assignee: LI-COR, Inc.Inventors: Robert D. Eckles, Tyler G. Anderson
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Patent number: 8282393Abstract: A system and method are provided in which a laminar flow of pressurized gas from a curved slit in a chamber is directed across a surface to propel a laminar flow of a liquid, below the laminar flow gas, across the surface to prevent surface contamination or remove contaminants from the surface. In a particular application, the system and method are employed in a self-cleaning dental mirror tool including a dental mirror attached to a handle, wherein the gas is air, the liquid is water, and the surface is the reflective surface of the dental mirror.Type: GrantFiled: April 7, 2010Date of Patent: October 9, 2012Inventor: Randy Miles Widen
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Publication number: 20120246808Abstract: An induced draft anti-fog system for goggles and similar optical devices having an air tight goggle with ports, fixedly attached to a hollow elastomeric conduit. Said hollow conduit having an intake port and exhaust fan. The exhaust fan has an on/off switch in communication with two battery packs. When the fan is in operation air is drawn into the intake port and circulated into the goggle housing thereby defogging the goggle lens and then is circulated out through the fan.Type: ApplicationFiled: April 1, 2011Publication date: October 4, 2012Inventor: Mark Spiro
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Publication number: 20120176677Abstract: The invention is the device for mechanical cleaning the glasses of the spectacles with the frontal brush. On the stand at least one frontal brush is mounted which is joined to the rotary movement source. On the stand the frontal brushes are located at a distance corresponding to the spacing of the spectacles glasses. The frontal brushes are arranged opposite each other mutually.Type: ApplicationFiled: January 4, 2012Publication date: July 12, 2012Inventors: Denis TRAUDICH, Josef Formánek
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Patent number: 8199407Abstract: An immersion objective for microscopic investigation of a specimen is provided wherein an outer lens is disposed in an objective body. A delivery device including a cap that is disposed over the objective body so as to form a space adapted to receive an immersion liquid is also provided. The cap is open in a region of the outer lens so as to form a gap with the outer lens. The cap includes at least one connector configured to provide a continuous supply of the immersion liquid to the space so that the immersion liquid emerges through the gap to a region between the outer lens and at least one of the specimen and a specimen slide.Type: GrantFiled: September 7, 2007Date of Patent: June 12, 2012Assignees: Leica Microsystems CMS GmbH, EMBL European Molecular Biology LaboratoryInventors: Urban Liebel, Siegfried Winkler, Frank Sieckmann
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Patent number: 8167442Abstract: A device for preventing and clearing fouling on a side-view mirror includes a curved tube affixable to a vehicle having an inlet positionable facing forward in spaced-apart relation from the side-view mirror. An outlet is positionable facing the mirror's surface. An outer wall defines a lumen extending from the inlet to the outlet. The tube describes a partial “U”, with a rearmost portion of the tube extending generally rearward. Apertures extend through the wall adjacent the tube's rearmost portion, facing rearward. When the vehicle is moving forward, air is forced into the device's inlet and passes through the tube's lumen to exit the outlet, onto the mirror, preventing droplet buildup and fogging. The rearward-facing apertures channel moisture out of the tube's lumen, preventing additional droplets from impinging on the mirror. In an embodiment, a side window portion also provides for preventing and clearing fouling of a side window.Type: GrantFiled: September 3, 2009Date of Patent: May 1, 2012Inventor: Frank L. Hidden
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Publication number: 20120092655Abstract: An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.Type: ApplicationFiled: October 15, 2010Publication date: April 19, 2012Inventors: David M. Dozor, Yullin Kim, Kris Tumidajski, Gary Fancher, Ken Salvestrini, Douglas Holt, Ron DeWitt, JR.
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Publication number: 20120069439Abstract: A demisting mirror assembly is provided. The demisting mirror assembly having a substantially hollow interior, an air blower with an outlet positioned within the interior of the housing, an air outlet, and a mirror on a front face of the housing.Type: ApplicationFiled: September 19, 2011Publication date: March 22, 2012Inventor: Russell Calla
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Publication number: 20120050854Abstract: The present invention relates to a remote-controlled telescope lens cleaning system and a telescope fitted with the same.Type: ApplicationFiled: September 1, 2010Publication date: March 1, 2012Inventor: Robert S. Capon
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Publication number: 20110242659Abstract: A multi-pass optical cell with an actuator for actuating a reflective surface is provided. In one preferred embodiment, an apparatus is provided comprising a first reflective surface, a second reflective surface, and a support structure supporting the first and second reflective surfaces. The support structure positions the first and second reflective surfaces to create an optical cell. The apparatus also comprises a source and a detector, which are positioned such that light emitted from the source is reflected in the optical cell at least one time between the first and second reflective surfaces before reaching the detector. The apparatus further comprises an actuator coupled with and operative to actuate the first reflective surface. In some embodiments, the actuator rotates the first reflective surface. Also, in some embodiments, the multi-pass optical cell is an open path multi-pass optical cell, while, in other embodiments, the multi-pass optical cell is a closed path multi-pass optical cell.Type: ApplicationFiled: June 14, 2011Publication date: October 6, 2011Applicant: LI-COR, Inc.Inventors: Robert D. Eckles, Tyler G. Anderson
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Publication number: 20110216410Abstract: A semi truck side view mirror road spray contamination deflector for use on such vehicles using a side view mirror in conjunction with a separate convex spot mirror. The deflector is comprised of a rigid, weatherproof shield with a pliable weatherstripping attached, that when mounted horizontally, bridges the gap between the two mirrors, effectively redirecting the airflow thus eliminating road spray and excess moisture from creeping up the back of the spot mirror and splashing onto the upper mirrors reflective surface.Type: ApplicationFiled: February 22, 2011Publication date: September 8, 2011Inventor: Jill Anne Jenssen
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Publication number: 20110170191Abstract: In one embodiment, a mirror comprising a squeegee and a slot for receiving the squeegee blade is used in steamy environments. The mirror may include a reservoir to be filled with hot water to prevent the mirror from fogging.Type: ApplicationFiled: November 4, 2010Publication date: July 14, 2011Applicant: Toilettree Products, Inc.Inventors: Steven Parisi, Gary Parisi, Paul Parisi
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Publication number: 20110164224Abstract: A video projector including a light source lamp and an optical component having a light transmission plane. A cooling system sends cooling air in parallel currents to the light transmission surface over a predetermined period after the light source lamp goes off to perform auto-cooling on the optical component. A shutter unit includes a planar shutter door that has a planar portion extending parallel to a direction the cooling air flows. The shutter door is moved parallel to the flow direction of the cooling air to open and close an optical path of the optical component. The shutter unit includes a current deflector formed integrally with the shutter door to deflect the flow of the cooling air toward the light transmission surface, and the current deflector directs the cooling air against the light transmission surface of the optical component during the auto-cooling.Type: ApplicationFiled: December 29, 2010Publication date: July 7, 2011Applicant: SANYO ELECTRIC CO., LTD.Inventors: Yosuke Nishihata, Satoshi Kitamura
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Publication number: 20110032614Abstract: An optoelectronic detector and method of using same. In order to avoid any condensation on a surface, it has been known to heat such a surface. However, heating an optoelectronic detector will create a stronger hissing noise due to the greater dark current that is caused thereby. The invention is intended to avoid any condensation on an optoelectronic detector without airtight encapsulation. To this end, the detector is cooled and equipped with a sensor for the determination of a current value of one of the variables ambient humidity and ambient dew point temperature and a control unit that is connected with the sensor and designed to control the cooling device in dependence of such a value. By taking into account the ambient humidity or, respectively, the dew point temperature in the control of the cooling device, condensation on the detector can be avoided. An airtight encapsulation of the detector and the cooling device is not required.Type: ApplicationFiled: August 4, 2010Publication date: February 10, 2011Applicant: Carl Zeiss Microlmaging GmbHInventors: Mirko LIEDTKE, Matthias John
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Patent number: 7839480Abstract: Where a framed pellicle is mounted on a photomaps, the framed pellicle comprises a pellicle frame and a pellicle membrane coupled to the pellicle frame, the pellicle frame has first and second apertures each communicating a first space surrounded by the photomask and the framed pellicle with a second space outside of the framed pellicle, exposing a photoresist layer formed on a substrate by flowing gas from within the first space to outside the framed pellicle through the first aperture while simultaneously exposing the photoresist layer to ultraviolet light through the pellicle membrane and the photomask.Type: GrantFiled: April 25, 2007Date of Patent: November 23, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Chue San Yoo
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Patent number: 7829839Abstract: An optical tweezers lifting apparatus is provided. The optical tweezers lifting apparatus includes an optical tweezers and a particle-lifting device. The particle-lifting device includes a substrate and a plurality of electrodes that are disposed on the bottom of a flow path in the substrate. When a dielectrophoresis (DEP) solution with a plurality of floating particles is conducted into the flow path and upon those electrodes and a voltage is applied to these electrodes, these particles would be driven by a negative DEP force to move upward to a specific depth in the flow path. Meanwhile, the optical tweezers of the apparatus is selectively focused at the specific depth in the flow path.Type: GrantFiled: October 17, 2008Date of Patent: November 9, 2010Assignees: Raydium Semiconductor Corp.Inventors: Cheng-Hsien Liu, William Wang, Long Hsu, Chung-Cheng Chou, Sheng-Yang Tseng, Chen Peng, Fung-Hsu Wu, Ta-Yuan Lee
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Patent number: 7760323Abstract: At least one exemplary embodiment is directed to an exposure apparatus for exposing a substrate to light through an original plate including a shield configured to surround an optical path space of the exposure apparatus where a gas supply system is configured to supply gas into the optical path space which is deflected by a rectifier to direct the flow outside of the optical path space.Type: GrantFiled: February 17, 2006Date of Patent: July 20, 2010Assignee: Canon Kabushiki KaishaInventors: Hiromitsu To, Hidekazu Furumoto
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Publication number: 20100027109Abstract: An immersion objective for microscopic investigation of a specimen is provided wherein an outer lens is disposed in an objective body. A delivery device including a cap that is disposed over the objective body so as to form a space adapted to receive an immersion liquid is also provided. The cap is open in a region of the outer lens so as to form a gap with the outer lens. The cap includes at least one connector configured to provide a continuous supply of the immersion liquid to the space so that the immersion liquid emerges through the gap to a region between the outer lens and at least one of the specimen and a specimen slide.Type: ApplicationFiled: September 7, 2007Publication date: February 4, 2010Applicants: Leica Microsystems CMS GmbH, EMBL European Molecular Biology LaboratoryInventors: Urban Liebel, Siegfried Winkler, Frank Sieckmann
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Publication number: 20090231707Abstract: An optical arrangement, in particular a projection exposure apparatus (1) for EUV lithography, includes: a housing (2) that encloses an interior space (15); at least one, in particular reflective, optical element (4 to 10, 12, 14.1 to 14.6) that is arranged in the housing (2); at least one vacuum generating unit (3) for generating a vacuum in the interior space (15) of the housing (2); and at least one vacuum housing (18, 18.1 to 18.10) that is arranged in the interior space (15) of the housing (2) and that encloses at least the optical surface (17, 17.1, 17.2) of the optical element (4 to 10, 12, 14.1 to 14.5), wherein a contamination reduction unit is associated with the vacuum housing (18.1 to 18.10), which contamination reduction unit reduces the partial pressure of contaminating substances, in particular of water and/or hydrocarbons, at least in close proximity to the optical surface (17, 17.1, 17.2) in relation to the partial pressure of the contaminating substances in the interior space (15).Type: ApplicationFiled: March 12, 2009Publication date: September 17, 2009Applicants: Carl Zeiss SMT AG, AMSL NETHERLANDS B.V.Inventors: Dirk Heinrich EHM, Stephan MUELLENDER, Thomas STEIN, Johannes Hubertus Josephina MOORS, Bastiaan Theodoor WOLSCHRIJN, Dieter KRAUS, Richard VERSLUIS, Marcus Gerhardus Hendrikus MEIJERINK
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Publication number: 20090207494Abstract: The lens at the tip of a laparoscopic camera is kept clean by creating a compartment in front of it pressurized by CO2 gas. The gas exits the compartment via a small aperture that also serves as an aperture for the optical system. The escaping gas is vented to the body cavity. Because of the small size of the aperture, even a small gas flow prevents fluids from entering the cavity and soiling the lens.Type: ApplicationFiled: February 20, 2008Publication date: August 20, 2009Inventors: Daniel Gelbart, Samuel Victor Lichtenstein
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Patent number: 7555194Abstract: An improved illumination device shortens a redundant area of insufficient light intensity close to a longitudinal end thereof. The device includes a casing, a bar-shaped light guide housed in the casing to cause a light-emitting surface thereof to be exposed, a light-emitting unit secured to an end section of the casing, wherein light from the light-emitting unit is introduced into the bar-shaped light guide through the end face thereof and is totally reflected within the bar-shaped light guide to be emitted through the light-emitting surface, and a shielding section provided to cover an end section of the bar-shaped light guide including the redundant area at the end section of the casing close to the light-emitting unit.Type: GrantFiled: December 7, 2005Date of Patent: June 30, 2009Assignee: Nippon Sheet Glass Co., Ltd.Inventors: Makoto Ikeda, Hiroyuki Nemoto, Takashi Kishimoto, Takeshi Ishimaru, Hirohiko Iwase, Hidemitsu Takeuchi, Tomihisa Saito
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Publication number: 20090052033Abstract: The present invention relates to an analyzer (1) including a photometry mechanism (6) for photometrically analyzing a reagent pad of an analytical tool to which a sample is applied, and a table (4) including a placing portion (41) at which the analytical tool is to be placed. The light emitting surface (68) or the light incident surface (68) of the light from the light emitting elements (66) of the photometry mechanism (6) is cleaned, with a cleaning tool (22) placed at the table (4). The present invention further provides a cleaning tool (22) for cleaning the photometry mechanism (6) of the analyzer (1).Type: ApplicationFiled: April 19, 2006Publication date: February 26, 2009Inventors: Toshinori Fujiwara, Hideki Tanji, Naoyuki Usagawa
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Publication number: 20080285131Abstract: Certain example embodiments of this invention relate to forced air environmental separators and/or methods of making the same that are capable of reducing the number and/or amount of deposits (e.g., moisture and/or debris) that form on the lens(es) of viewing devices that reduce the viewing quality and/or experience. In certain example embodiments, an air supply may be configured to supply a flow of pressurized air. A collar may include a plurality of holes formed therein. The plurality of holes may be disposed at one or more angles such that the flow of pressurized air is capable of flowing therethrough. A conduit may connect the air supply to the collar such that the flow of pressurized air flows from the air supply through the conduit to the collar. Certain example embodiments may be used in connection with, for example, a video camera, still camera, telescope, binoculars, glasses or goggles, and/or scope.Type: ApplicationFiled: May 18, 2007Publication date: November 20, 2008Inventors: Kevin J. O'Kane, Martin H. Abbott
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Publication number: 20080285132Abstract: Certain example embodiments of this invention relate to element deflectors and/or methods of making the same that are capable of reducing the number and/or amount of deposits (e.g., moisture and/or debris) that form on the lens(es) of viewing devices that reduce the viewing quality and/or experience. An air supply is configured to supply a flow of pressurized air. A matte box includes a plurality of holes and/or jets formed in or around a frame or hood thereof, with the plurality of holes or jets being disposed at one or more angles such that the flow of pressurized air is capable of flowing therethrough to reduce the number and/or amount of deposits from forming on the lens of the viewing device. A conduit connects the air supply to the holes or jets so that the flow of pressurized air flows from the air supply through the conduit to the holes or jets. The holes or jets may be capable or creating a desirable cyclonic or swirling effect for the air.Type: ApplicationFiled: April 1, 2008Publication date: November 20, 2008Inventor: Kevin James O'Kane
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Publication number: 20080205878Abstract: A digital camera includes: a camera body provided with an inlet port and an outlet port for a spray gas, the camera body defining a space in a photographic light path; a first passage formed in the camera body to communicate the inlet port and the outlet port, the first passage being provided with a restricted section; and a communication unit that communicates the restricted section of the first passage with the space in the photographic light path in the camera body. When the dust is floating in the space in the photographic light path and the spray gas flows through the first passage, the dust floating in the space is led to the restricted section.Type: ApplicationFiled: January 28, 2008Publication date: August 28, 2008Applicant: NIKON CORPORATIONInventor: Masao Owashi
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Publication number: 20080137192Abstract: Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced.Type: ApplicationFiled: December 23, 2005Publication date: June 12, 2008Inventors: Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach, Harald Woelfle
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Patent number: 7374294Abstract: A method and apparatus for improving image quality in a reflector-type telescope are provided, through utilization of one or more nozzles disposed about the periphery of a reflecting mirror of the telescope, for directing a flow of air from a backside of the mirror across a concave reflecting surface of the mirror, to thereby sweep away and/or preclude formation of image distorting thermal boundary layers, or other impediments to image quality, resulting from the mirror not being in thermal equilibrium with ambient air surrounding the mirror. Supply nozzles are provided around a portion of the periphery of the mirror, and exhaust pick-up nozzles are provided around another portion of the periphery of the mirror, to thereby cause a flow of air to closely adhere to the concave surface of the mirror.Type: GrantFiled: November 3, 2006Date of Patent: May 20, 2008Inventor: Gerald Willey
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Patent number: 7344258Abstract: Forward view apparatus (10) for a motor vehicle, to enable the driver of the vehicle to view an image of objects which are located forward of the apparatus (10), includes a housing (12) in which a rear view mirror (14) is located. A two-mirror arrangement (20, 24) within the housing (12) provides an image of objects forward of the assembly (10) in a viewing portal (16). The first mirror (20) is planar and adjustable. A second mirror (24) is fixed and has a curved reflecting surface. The reflecting surface of the fixed mirror (24) is aspheric, spherical, substantially spherical, parabolic or quasi-parabolic. A window (26) is provided on the forward side of the housing, to enable light to pass to the two-mirror arrangement (20, 24). A shutter (332) is able to close across the window (26) to prevent bright lights or other distracting images being seen by the driver.Type: GrantFiled: April 13, 2007Date of Patent: March 18, 2008Inventor: Craig Hart MacDougall
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Patent number: 7249858Abstract: Compact features provide faster and more efficient gathering and storage of a sufficient reservoir of heated water to heat a shaving mirror to non-fogging temperature. The features are arranged on the vertical surfaces of the mirror to enable water to enter the reservoir over a large surface area relative to the mirror size.Type: GrantFiled: January 23, 2004Date of Patent: July 31, 2007Inventor: Miles Blackwood
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Patent number: 7148951Abstract: A lithographic apparatus includes a radiation system for providing a beam of radiation, and a first support for supporting a patterning device. The patterning device serves to pattern the beam of radiation. The apparatus includes a second support for supporting a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and an interferometer measurement system for providing an interferometric measurement beam extending along an axis in an elongated volume of gas extending below the projection system. The apparatus also includes a gas conditioning structure for providing a conditioned gas flow in the volume. The gas conditioning structure includes a plurality of gas guiding vanes disposed at an outlet of the structure for guiding the gas flow to the volume. The gas guiding vanes are shaped continuously and are oriented diverging away from the axis of the volume.Type: GrantFiled: October 25, 2004Date of Patent: December 12, 2006Assignee: ASML Netherlands B.V.Inventors: Nicolas Lallemant, Marcel Beckers, Stephan Koelink, Rob Jansen, Wladimir Fransiscus Gerardus Maria Hertog, David Theodorus Willy Van Der Plas
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Patent number: 7140740Abstract: A vehicle side-view mirror water removal arrangement is easily retrofitted to vehicles having an existing source of compressed air and a side-view mirror with a reflective surface. The arrangement includes a valve having an input port connected to the existing source of compressed air and an output port, the valve being movable between open and closed positions to control the flow of compressed air from the existing source of compressed air to the output port of the valve. A conduit's proximal end is connected to the output port of the valve with its distal end located at the side-view mirror for conducting the compressed air from the output port of the valve to the side-view mirror.Type: GrantFiled: September 30, 2005Date of Patent: November 28, 2006Inventor: Joseph Richard Cooper
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Patent number: 7128427Abstract: Apparatus and method for a substantially distortion free immersion lithography is provided. The apparatus includes a lens element, an outlet for drawing immersion fluid towards the lens element, and a collector ring coupled to the central outlet for removing the immersion fluid. The method includes positioning a lens element relative to a wafer to provide a space between the lens element and wafer, introducing immersion fluid to that space, and drawing the immersion fluid from that space to minimize gas bubbles in the immersion fluid, and repeating the introducing and drawing steps to maintain the flow of the immersion fluid during a lithography process.Type: GrantFiled: November 5, 2004Date of Patent: October 31, 2006Assignee: Sematech, Inc.Inventors: Christian K. Van Peski, Walter J. Trybula
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Patent number: 7070288Abstract: In a vehicle door mirror device (10), an outer side surface (20B), with respect to a vehicle, of a projection (20) of a door mirror stay (16) is made to be flat. Further, an angle of the outer side surface (20B) with respect to a front-rear direction of the vehicle, inward or outward with respect to the vehicle, is not more than 2 degrees. Therefore, wind arriving at the outer side surface (20B) flows rearward with respect to the vehicle with fluctuation thereof being suppressed, and its flow is straightened. Furthermore, a radius of curvature of a corner portion (20E) at an outer rear side, with respect to the vehicle, of the projection (20) is not more than 15 mm. Therefore, wind arriving at the outer side surface (20B) of the projection (20) is suppressed from flowing along the corner portion (20E), and its flow is straightened. Thus, wind noise performance of the door mirror stay (16) can be improved.Type: GrantFiled: March 19, 2003Date of Patent: July 4, 2006Assignee: Kabushiki Kaisha Tokai-Rik-A-Denki-SeisakushoInventors: Toshinobu Mizutani, Masakazu Iwatsuki, Masakazu Aoki, Masaaki Itou, Yasunobu Okatsu
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Patent number: 7061576Abstract: An exposure apparatus includes a light source, which emits an exposure beam, an optical system including a casing and an optical element, the casing having a closed space and the optical element being disposed in the casing, a first supplier, which supplies an inert gas into the closed space, a second supplier, which supplies one of oxygen and clean air into the closed space and a controller, which changes a wavelength of the exposure beam between exposure of a substrate and cleaning of the optical element.Type: GrantFiled: June 8, 2001Date of Patent: June 13, 2006Assignee: Canon Kabushiki KaishaInventors: Tomoharu Hase, Yukio Yamane
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Patent number: 7057701Abstract: An exposure apparatus for exposing a substrate to light via a mask. The apparatus includes a projection optical system configured to project a pattern of the mask onto the substrate, a cover configured to surround a path of light from the projection optical system toward the substrate, a first supply port arranged inside the cover and configured to supply inert gas inside the cover, a first recovery port arranged inside the cover and configured to recover gas inside the cover, a second supply port arranged outside the cover and configured to supply gas outside the cover, and a second recovery port arranged outside the cover and configured to recover gas outside the cover. The first direction from the first supply port to the first recovery port and a second direction from the second supply port to the second recovery port oppose each other at an angle not greater than 90°.Type: GrantFiled: February 26, 2004Date of Patent: June 6, 2006Assignee: Canon Kabushiki KaishaInventors: Takahito Chibana, Kiyoshi Arakawa
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Patent number: 7050148Abstract: In a barrel of an optical unit a ring shaped support member is integrally arranged, and three projected portions are arranged on the upper surface of the support member. The projected portions support a lower surface of a parallel flat plate supported in direct contact. In this supported state, the parallel flat plate opposes a surface of the support member with a clearance of several ?m in between. With this arrangement, the space in one side of the parallel flat plate is substantially isolated from the space in the other side. Accordingly, for example, even if gas environment in the space on one side of the parallel flat plate is different from the other side, gases can be effectively kept from mixing. In addition, since the parallel flat plate is supported at three coplanar points, deformation of the parallel flat plate can be suppressed due to the force supporting the parallel flat plate, thereby suppressing the index of refraction from varying.Type: GrantFiled: November 29, 2004Date of Patent: May 23, 2006Assignee: Nikon CorporationInventor: Naomasa Shiraishi
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Patent number: 7044610Abstract: The imaging debris produced by imaging a media with a higher power laser is prevented from accumulating on an optical imaging element by establishing a substantially non-turbulent fluid flow across the optical element. The non-turbulent flow forms a barrier between the optical element and the imaging environment such that debris is not able to reach a surface of the optical element during an imaging operation.Type: GrantFiled: February 10, 2003Date of Patent: May 16, 2006Assignee: Kodak Graphic Communications Canada CompanyInventors: Vincent Charles Beyer, David Bruce Burgess, Marc Aaron Trudeau, Andrew Leroy Dobric
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Patent number: 6951396Abstract: A reflecting or transparent member such as a shower mirror having a hard surface is striated with a striating member sufficiently so that the surface is finely striated. The striating member has an abrasive surface that has a concentration of abrasives in the range of 100 to 500 grit. After the surface is striated, water is applied to the surface and the water coheres to the striations forming a thin lamina or sheet of water. The thin lamina prevents the condensation of water vapor on the surface when the temperature of the ambient air adjacent the surface falls below the dew-point.Type: GrantFiled: June 28, 2004Date of Patent: October 4, 2005Inventor: Kenneth Casebier
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Patent number: 6890080Abstract: An air purge system for an optical sensor is disclosed. The air purge system includes a two sided lens having an optical sensor positioned on the first side and a fluid stream on the second side. The air purge system further includes, a plenum having an inlet, an array of parallel channels and an outlet, whereby the array of parallel channels, is disposed between the inlet and the outlet. The outlet is positioned on the second side of the housing and may be adapted to direct a fluid stream substantially parallel to the second side of the lens.Type: GrantFiled: January 22, 2003Date of Patent: May 10, 2005Assignee: Ircon, Inc.Inventors: Eugene F. Kalley, Sam Paris, Tommy C. Tam, Amilio Donado
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Patent number: 6847431Abstract: An optical assembly (222) for directing and/or focusing a beam of light energy for an exposure apparatus (10) includes an optical housing (240) and one or more optical elements (242) that cooperate to form an optical cavity (270) having one or more stagnant flow areas (272). The optical assembly (222) also includes one or more flow diverters (246) for improving the flow a replacement fluid (250) in the stagnant flow areas (272) of the optical cavity (270) during purging of the optical assembly (222) with the replacement fluid (250).Type: GrantFiled: March 10, 2003Date of Patent: January 25, 2005Assignee: Nikon CorporationInventors: Derek Coon, Bernard Fay
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Patent number: 6809811Abstract: A shield is disclosed that is particularly useful for protecting exposed optical elements at the end of optical probes used in the analysis of hazardous emissions in and around an industrial environment from the contaminating effects of those emissions. The instant invention provides a hood or cowl in the shape of a right circular cylinder that can be fitted over the end of such optical probes. The hood provides a clear aperture through which the probe can perform unobstructed analysis. The probe optical elements are protected from the external environment by passing a dry gas through the interior of the hood and out through the hood aperture in sufficient quantity and velocity to prevent any significant mixing between the internal and external environments. Additionally, the hood is provided with a cooling jacket to lessen the potential for damaging the probe due to temperature excursions.Type: GrantFiled: March 26, 2002Date of Patent: October 26, 2004Assignee: Sandia National LaboratoriesInventors: Howard A. Johnsen, James R. Ross, Sal R. Birtola
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Patent number: 6799335Abstract: A fogless mirror for use in showers includes a shower arm adapter having a tubular body attachable at one end to a shower arm and at the other end to a shower nozzle; a bore disposed longitudinally through the tubular body conveys warm water from the shower arm to the nozzle, and a small orifice disposed radially through the tubular body diverts a small portion of water conveyed through the bore. A first rotatable coupler rotatably mounted to the shower arm adapter and angularly adjustable in a first plane conducts water diverted from the bore of the tubular body into a first outlet port boss. A second rotatable coupler rotatably mounted to the first outlet port boss and angularly adjustable in a second plane conducts water through a rigid tubular support arm to a mirror support frame, heating the mirror and thereby inhibiting condensation fogging thereof.Type: GrantFiled: January 13, 2003Date of Patent: October 5, 2004Inventor: Zlatko Zadro
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Patent number: 6796664Abstract: A method and a device for decontaminating optical surfaces, in particular for decontaminating the surfaces of beam-guiding optics employing UV-radiation in a cleansing atmosphere. The wavelength of the UV-radiation employed falls within a range where oxygen strongly absorbs and the cleansing atmosphere has an oxygen concentration less than that of air. The method and device have application to, e.g., cleaning the surfaces of the beam-guiding optics of microlithographic projection-exposure systems.Type: GrantFiled: March 12, 2003Date of Patent: September 28, 2004Assignee: Carl Zeiss SMT AGInventors: Jens Luedecke, Christoph Zazcek, Alexandra Pazidis, Jens Ullmann, Annette Muehlpfordt, Michael Thier, Stefan Wiesner
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Patent number: 6786607Abstract: In an arrangement for storing and transporting at least one optical component, it is the object of the invention to protect the optical components from contamination not only during their storage and transport, but also when installing them in operative condition in the optical projection beam path so as to ensure their readiness for immediate operation. This object is met in that every optical component is fastened in an aligned manner to a carrier that is provided in a vessel, and a manipulator acts on the carrier to transfer the carrier into an optical beam path enclosed by a cleanroom through an airlock opening which is formed when the vessel door is open. The arrangement can be used particularly when optics must be stored and manipulated so as to be protected from environmental influences.Type: GrantFiled: December 17, 2002Date of Patent: September 7, 2004Assignee: Jenoptik Laser, Optik, Systems GmbHInventor: Thomas Dressler
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Publication number: 20040156049Abstract: Purging of a light beam path in an effective manner that minimizes the affect of the purging requirement on system throughput. In one embodiment, the invention is incorporated into a birefringence measurement system that has several components for directing light through a sample optical element and thereafter detecting and analyzing the light. The segment of the beam path through the sample is isolated to reduce the volume that requires continual purging.Type: ApplicationFiled: February 10, 2003Publication date: August 12, 2004Applicant: Hinds Instruments, Inc.Inventors: Andrew H. Breninger, Christopher O. Griffiths, Douglas C. Mark, Artemiy Mikheyev, Baoliang Wang
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Publication number: 20040156107Abstract: Compact features provide faster and more efficient gathering and storage of a sufficient reservoir of heated water to heat a shaving mirror to non-fogging temperature. The features are arranged on the vertical surfaces of the mirror to enable water to enter the reservoir over a large surface area relative to the mirror size.Type: ApplicationFiled: January 23, 2004Publication date: August 12, 2004Inventor: Miles Blackwood
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Patent number: 6749306Abstract: A device disposed to direct a stream of air across the reflective face of an exteriorly-mounted rear view mirror on an automotive vehicle. The device is especially adaptable to large trucks whose exterior mirrors are positioned in a way to create a vacuum on the reflective face when the truck is in motion. This vacuum tends to pull moisture and foreign matter to the reflective face, thereby causing loss of vision. The device directs a stream of air over the reflective face to break the vacuum and prevent foreign matter from adhering to the face, thereby enhancing the view of the driver and reducing risk. The device is constructed in a manner to be easily mounted (only one screw is required) to a standard rear view mirror of a truck or the like.Type: GrantFiled: August 9, 2002Date of Patent: June 15, 2004Inventor: James D. Lindsay
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Patent number: 6712413Abstract: A mirror assembly is provided for use on an external surface of a vehicle having a mirrored surface disposed in an external shell and a mirror flag operably connected to the external shell for attachment to an external surface of a vehicle. The mirror flag includes at least one spoiler disposed between the external shell and the mirror flag for directing air flow caused by forward movement of the vehicle. Specifically, the at least one spoiler serves to direct the air flow away from the mirror assembly as well as away from the vehicle surface to improve the aerodynamics of the vehicle and reduce wind noise produced by the air flow contacting the mirror.Type: GrantFiled: September 20, 2002Date of Patent: March 30, 2004Assignee: DaimlerChrysler CorporationInventor: Randall B Flowerday