From Zone Plate Patents (Class 359/565)
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Publication number: 20100288913Abstract: Methods and apparatus (1100) for trapping fluid-borne object(s) (212) using one or more Fresnel zone plates (202) located in proximity to a fluid medium (208). Optical tweezers based on one or more Fresnel zone plates may be integrated with a microfluidic structure (e.g., chambers, channels) (1104) of various geometries so as to form one or more optical traps (215) within a fluid medium contained by the microfluidic structure(s). Three-dimensional trapping of objects can be obtained with stiffness comparable to that of conventional optical tweezers based on a microscope objective. In one example, a single Fresnel zone plate is particularly configured to form multiple optical traps upon irradiation, so as to trap multiple objects simultaneously. Exemplary applications of the methods and apparatus disclosed herein include determination of various fluid medium properties (e.g., velocity, refractive index, viscosity, temperature, pH) and object sorting.Type: ApplicationFiled: September 23, 2008Publication date: November 18, 2010Applicant: President and Fellows of Harvard CollegeInventors: Ethan Schonbrun, Charles Rinzler, Kenneth B. Crozier
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Patent number: 7821714Abstract: An apparatus for measuring an image of a pattern to be formed on a semiconductor by scanning the pattern using a scanner, the apparatus including an EUV mask including the pattern, a zoneplate lens on a first side of the EUV mask and adapted to focus EUV light on a portion of the EUV mask at a same angle as an angle at which the scanner will be disposed with respect to a normal line of the EUV mask, and a detector arranged on another side of the EUV mask and adapted to sense energy of the EUV light from the EUV mask, wherein NAzoneplate=NAscanner/n and NAdetector=NAscanner/n*?, where NAzoneplate denotes a NA of the zoneplate lens, NAdetector denotes a NA of the detector, and NAscanner denotes a NA of the scanner, ? denotes an off-axis degree of the scanner, and n denotes a reduction magnification of the scanner.Type: GrantFiled: March 2, 2010Date of Patent: October 26, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-gun Lee, Seong-sue Kim
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Publication number: 20100238554Abstract: One embodiment of sighting optics according to the teachings provided herein may comprise a front sight and a rear sight positioned in spaced-apart relation. The rear sight includes optical element having a first focal length and a second focal length. The first focal length is selected so that it is about equal to a distance separating the optical element and said front sight and the second focal length is selected so that it is about equal to a target distance. The optical element thus brings into simultaneous focus for a user images of the front sight and the target.Type: ApplicationFiled: May 24, 2010Publication date: September 23, 2010Applicant: BATTELLE ENERGY ALLIANCE, LLCInventor: David Lynn Crandall
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Patent number: 7801008Abstract: A diffractive optical element includes a first optical part and a second optical part bonded to each other with a bonded surface therebetween configured as a diffraction surface. In this diffractive optical element, the diffraction order of diffracted light with the largest quantity of light out of diffracted light for one of a plurality of kinds of laser beams obtained on the diffraction surface is different from the diffraction order for at least another laser beam.Type: GrantFiled: May 1, 2007Date of Patent: September 21, 2010Assignee: Panasonic CorporationInventors: Yasuhiro Tanaka, Michihiro Yamagata, Katsuhiko Hayashi
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Patent number: 7775668Abstract: A color-mixing laser module is disclosed, which is comprised of a laser unit capable of emitting red, blue and green laser beams; a beam combiner, for receiving and converging the laser beams emitted from the laser unit and then directing the converged laser light to illuminate on a light pattern adjusting unit; and the light pattern adjusting unit, capable of receiving the converged laser light from the beam combiner for adjusting the pattern of the same.Type: GrantFiled: August 7, 2007Date of Patent: August 17, 2010Assignee: Industrial Technology Research InstituteInventors: Po-Hung Yao, Cheng-Huan Chen, Ya-Yu Nieh
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Publication number: 20100195208Abstract: A method of producing a film having a diffractive surface pattern in selected areas by processing a precursor film having a diffractive surface relief throughout one or more zones together defining a target area of the precursor film; the method comprising applying material to a selected zone of the diffractive surface relief so as to nullify the diffractive effect of the surface relief in the zone.Type: ApplicationFiled: February 4, 2010Publication date: August 5, 2010Applicant: API GROUP PLCInventors: Stephen DONE, Alan LAKE
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Patent number: 7724439Abstract: A lens, a lens array and imaging device and system containing a lens, and a method of forming a lens array and an imaging device and system containing a lens. Each lens has varying reflection indices in a radial direction.Type: GrantFiled: October 24, 2007Date of Patent: May 25, 2010Assignee: Aptina Imaging CorporationInventors: Jin Li, Jiutao Li
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Patent number: 7710650Abstract: A diffractive optical element includes a plurality of layered diffraction gratings which includes two diffraction gratings made of materials having different dispersive powers. The plurality of diffraction gratings includes a first diffraction grating having a plurality of grating portions provided on a first base surface, and a second diffraction grating having a plurality of grating portions which are provided on a second base surface. In the second diffraction grating, a height of the grating portion of the central circular zone from the second base surface is greater than a height of the grating portion of the peripheral circular zone from the second base surface.Type: GrantFiled: August 29, 2007Date of Patent: May 4, 2010Assignee: Canon Kabushiki KaishaInventor: Kazutaka Inoguchi
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Publication number: 20100097703Abstract: A dichromatic lens includes a plurality of zones being arranged on a lens structure, each of the zones having a specified radius and varying height. The lens structure focuses propagating light applicable to any intensity distribution for a plurality of wavelengths.Type: ApplicationFiled: October 17, 2008Publication date: April 22, 2010Inventors: Rajesh Menon, Paul Rogge, Hsin-Yu Tsai
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Patent number: 7688511Abstract: Provided are an easy-to-handle thin diffraction type light-condensing film exhibiting high light transmissivity and condensation ability, and a planar light source device using the film. A hologram optical element using diffraction/interference phenomena based on wave properties of light is used instead of a conventional prism sheet using refraction. As a result, the diffraction type light-condensing film and the planar light source device have high light transmissivity and are thin. In the diffraction type light-condensing film, dependence of bending angle on wave length is low and light entering from an oblique direction is bent in the vertical direction and emitted with spectral separation of white light suppressed. High light-condensation impossible in a conventional optical element is realized by suppressing angular variation in emission light for angular variation in incident light.Type: GrantFiled: March 24, 2005Date of Patent: March 30, 2010Assignee: Hitachi Chemical Company, Ltd.Inventors: Tokutaro Komatsu, Yasuhiko Awano
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Patent number: 7672050Abstract: A refractive index controlled diffractive optical element having a two-dimensional refractive index distribution to be written on a transparent material, wherein a first refractive index region with a refractive index n1 and width d1 is formed in a transparent material, and the ith refractive index region with a refractive index ni (assuming ni?ni?1) and a width di is formed adjacent to the (i?1)th refractive index region and opposite to the (i ?2)th refractive index region (at an arbitrary side of the (i?1)th refractive index region when i=2) where i is an integer within a range of 2?i?x. Accordingly, a diffractive optical element simultaneously having high diffraction efficiency to a particular order and thinness of the element itself can be obtained.Type: GrantFiled: July 14, 2006Date of Patent: March 2, 2010Assignee: Namiki Semitsu Houseki Kabushiki KaishaInventors: Daisuke Shibata, Takayuki Nakaya, Hidetoshi Takeda, Yoshihito Hatazawa, Toshiro Kotaki
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Publication number: 20090284725Abstract: A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.Type: ApplicationFiled: May 14, 2009Publication date: November 19, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Wouter Anthon SOER, Maarten Marinus Johannes Wilhelmus VAN HERPEN
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Patent number: 7619811Abstract: The invention includes a master lens, which initially focuses a laser pulse, and then the pulse passes through a zonal lenslet array, which uses different lenslet elements that provide for predetermined focal lengths so as to establish a three or two dimensional, predetermined dispersion of foci of the laser pulse. The zonal lenslet array of the present invention may be thought of as a variant of a Shack-Hartman wave front sensor, but used for an entirely different application.Type: GrantFiled: October 7, 2004Date of Patent: November 17, 2009Assignee: The United States of America as represented by the Secretary of the Army PentagonInventor: Jerome B. Franck
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Patent number: 7580187Abstract: The invention provides a diffractive optical element that can be used as a light beam splitter device, an optical low-pass filter or the like having a two-dimensionally multi-valued fine periodic structure. The surface of a transparent substrate for the diffractive optical element is divided into fine rectangular areas of identical shape which line up in two orthogonal directions while a plurality of rows line up with ends in alignment in any one of the directions. With respect to standard wavelength light incident vertically on the surface of the transparent substrate, an l-th, and a (l+1)-th rectangular area in an l-th row, where l is an odd number, gives a phase 2p?, and a phase {(4q+1)?/2+??/2}, respectively, and an l-th, and a (l+1)-th rectangular area in a (l+1)-th row gives a phase {(4r+3)?/2+3??/2}, and a phase {(4s+2)?/2+??}, respectively. However, ?0.25???0.25, and p, q, r, and s is an integer.Type: GrantFiled: June 16, 2005Date of Patent: August 25, 2009Assignee: Dai Nippon Printing Co., Ltd.Inventors: Mitsuru Kitamura, Akiko Tanaka
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Publication number: 20090135486Abstract: A method and objective apparatus are provided for implementing an enhanced phase contrast microscope. A focusing vortex lens, defined by a diffractive spiral zone plate (SZP) lens, is used for the objective for the phase contrast microscope. The SZP lens focuses and imparts a helical phase to incident illumination to image the specimen with spiral phase contrast. The spiral phase contrast microscope is sensitive to phase gradients in all sample axes. Replacing the objective of a microscope with the diffractive SZP lens of the invention immediately provides existing instruments with spiral phase contrast capability.Type: ApplicationFiled: September 17, 2007Publication date: May 28, 2009Inventor: Ian McNulty
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Patent number: 7499612Abstract: A spectral filter comprises a planar optical waveguide having at least one set of diffractive elements. The waveguide confines in one transverse dimension an optical signal propagating in two other dimensions therein. The waveguide supports multiple transverse modes. Each diffractive element set routes, between input and output ports, a diffracted portion of the optical signal propagating in the planar waveguide and diffracted by the diffractive elements. The diffracted portion of the optical signal reaches the output port as a superposition of multiple transverse modes. A multimode optical source may launch the optical signal into the planar waveguide, through the corresponding input optical port, as a superposition of multiple transverse modes. A multimode output waveguide may receive, through the output port, the diffracted portion of the optical signal. Multiple diffractive element sets may route corresponding diffracted portions of optical signal between one or more corresponding input and output ports.Type: GrantFiled: January 17, 2006Date of Patent: March 3, 2009Inventors: Thomas W. Mossberg, Christoph M. Greiner, Dmitri Iazikov
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Publication number: 20090052619Abstract: [Object] To provide a Fresnel zone plate having a complex irradiation function capable of improving resolution even when the outermost opaque band width cannot be reduced and an X-ray microscope using the Fresnel zone plate. [Solution] A Fresnel zone plate 1 having a complex irradiation function according to the present invention has opaque bands 3 and transparent bands 4 arranged alternately in the radial direction from the center on a flat transparent substrate 2, and a transmission window 7 formed such that a portion of a plane wave vertically applied onto the upper surface vertically enters directly a sample 6 disposed below the Fresnel zone plate 1.Type: ApplicationFiled: April 18, 2006Publication date: February 26, 2009Inventor: Hisamitsu Endoh
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Publication number: 20090046349Abstract: A lens system is presented having a diffractive optical power region. The diffractive optical power region has a plurality of concentric surface relief diffractive structures. A greater portion of light incident on a diffractive structure near the center point contributes to the optical power than light incident on a diffractive structure peripherally spaced therefrom.Type: ApplicationFiled: July 2, 2008Publication date: February 19, 2009Inventors: Joshua N. Haddock, William Kokonaski, Roger Clarke, Mark Mattison-Shupnick, Ronald D. Blum
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Publication number: 20090040614Abstract: A dispersive filter includes two dispersion systems with an intermediate slit between them. The two dispersion systems have similar but mirror image dispersion characteristics at the plane of the intermediate slit and are configured so that the entrance port of the dispersive filter is polychromatically imaged on the exit port. The intermediate slit passes blocks selected wavelengths and transmits the remaining dispersed wavelengths from the first dispersion system to the second dispersion system. The second dispersion system combines the dispersed beam that passes through the intermediate slit to form an output beam, which is focused on the exit port. In this manner, the radiance of the input radiation is preserved ignoring losses caused by the optical elements and the blocked wavelengths.Type: ApplicationFiled: August 7, 2007Publication date: February 12, 2009Inventor: Michael J. Hammond
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Publication number: 20090034050Abstract: A Fresnel antenna includes a plurality of Fresnel elements spaced to selectively attenuate electromagnetic waves having a predetermined wavelength, selected wavelengths, or range of wavelengths, and to concentrate electromagnetic waves having a predetermined wavelength, selected wavelengths, or range of wavelengths other than the attenuated wavelengths.Type: ApplicationFiled: July 31, 2007Publication date: February 5, 2009Inventors: Alexandre M. Bratkovski, R. Stanley Williams, Shih-Yuan Wang
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Publication number: 20090002829Abstract: An imaging device is provided and includes: an imaging element that outputs an imaging signal based on an optical image; and a diffractive optical element disposed on an image formation surface side of the imaging element.Type: ApplicationFiled: June 5, 2008Publication date: January 1, 2009Inventor: Yoshikazu SHINOHARA
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Patent number: 7455404Abstract: An ophthalmic lens for providing a plurality of foci has an optic comprising an anterior surface, a posterior surface, and an optical axis. The optic has a first region and a second region. The first region has a refractive optical power and comprises a multifocal phase plate for forming a first focus and a second focus. The second region has a refractive optical power and comprises a monofocal phase plate for forming a third focus. The multifocal phase plate and the monofocal phase plate may be disposed on first and second base curvatures, respectively, that may have different radii of curvature. The ophthalmic lens may also have an intermediate phase plate located between the multifocal phase plate and the monofocal phase plate, the intermediate phase plate comprising a third plurality of echelettes disposed on a third base curvature having a third radius of curvature.Type: GrantFiled: October 25, 2005Date of Patent: November 25, 2008Assignee: Advanced Medical Optics, Inc.Inventors: Mark H. Bandhauer, Alan J. Lang
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Patent number: 7452820Abstract: Disclosed are radiation-resistant zone plates for use in laser-produced plasma (LPP) devices, and methods of manufacturing such zone plates. In one aspect, a method of manufacturing a zone plate provides for forming a masking layer over a supporting membrane, and creating openings through the masking layer in a diffractive grating pattern. Such a method also provides depositing radiation absorbent material in the openings in the masking layer and on the supporting membrane, and then stripping the remaining portions of the masking layer. Then, portions of the supporting membrane not covered by the absorbent material are removed, wherein the remaining portions of the supporting membrane covered by the absorbent material form separate grates. Also in such methods, cross-members are coupled to the grates for holding positions of the grates with respect to each other.Type: GrantFiled: August 5, 2005Date of Patent: November 18, 2008Assignee: Gatan, Inc.Inventors: Scott H. Bloom, James J. Alwan
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Patent number: 7443587Abstract: Novel methods are disclosed for designing and constructing miniature optical systems and devices employing light diffractive optical elements (DOEs) for modifying the size and shape of laser beams produced from a commercial-grade laser diodes, over an extended range hitherto unachievable using conventional techniques. The systems and devices of the present invention have uses in a wide range of applications, including laser scanning, optical-based information storage, medical and analytical instrumentation, and the like. In the illustrative embodiments, various techniques are disclosed for implementing the DOEs as holographic optical elements (HOEs), computer-generated holograms (CGHs), as well as other diffractive optical elements.Type: GrantFiled: October 12, 2006Date of Patent: October 28, 2008Assignee: Metrologic Instruments, Inc.Inventors: LeRoy Dickson, Timothy A. Good, John Groot, Thomas C. Amundsen, C. Harry Knowles, Thomas Carullo
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Patent number: 7420737Abstract: A reconfigurable zone plate lens is disclosed. Some embodiments may include a central annular element having a first a first circumference centered about a central axis. Embodiments may also include a plurality of concentric annular elements of increasing circumference centered about the central axis and the central annular element, where each annular element is positioned around an annular element having a smaller circumference. The annular elements of some embodiments may each be adapted to be in either an active or inactive state where the active and inactive annular elements form a plurality of alternating active rings and inactive rings. Each active ring may include one or more annular elements in an active state and each inactive ring may include one or more annular elements in an inactive state. Each annular element may include one or more liquid crystal display (LCD) elements or micromirrors. Other embodiments are disclosed and claimed.Type: GrantFiled: December 21, 2005Date of Patent: September 2, 2008Assignee: Intel CorporationInventors: David Williams, James P. Kardach, Joshua Posamentier
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Patent number: 7418170Abstract: A virtual image display device is provided which displays a two-dimensional image for viewing a virtual image in a magnified form by a virtual optical system. The virtual image display device includes an optical waveguide (13) to guide, by internal total reflection, parallel pencil groups meeting a condition of internal total reflection, a first reflection volume hologram grating (14) to diffract and reflect the parallel pencil groups incident upon the optical waveguide from outside and traveling in different directions as they are so as to meet the condition of internal total reflection inside the optical waveguide and a second reflection volume hologram grating (15) to project the parallel pencil groups guided by internal total reflection inside the optical waveguide as they are from the optical waveguide by diffraction and reflection thereof so as to depart from the condition of internal total reflection inside the optical waveguide.Type: GrantFiled: March 28, 2005Date of Patent: August 26, 2008Assignee: Sony CorporationInventors: Hiroshi Mukawa, Katsuyuki Akutsu
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Publication number: 20080198465Abstract: An optical pickup device is disclosed. The device includes: a light source that emits a light beam of a predetermined wavelength of about 405 nm; an objective lens being a plastic lens provided with, on at least one surface, diffraction means of a zone diffractive structure suppressing generation of aberration to be caused by a temperature change, and has a numerical aperture of 0.82 or larger for gathering the light beam emitted from the light source with respect to an optical disk; and a collimator lens disposed between the light source and the objective lens, and derives a substantially-collimated light by converting an angle of divergence of the light beam emitted from the light source.Type: ApplicationFiled: February 15, 2008Publication date: August 21, 2008Applicant: Sony CorporationInventors: Masahiro SAITO, Kiyoshi Toyota, Motoo Aiba
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Publication number: 20080198466Abstract: An anamorphic optical element and an adjustment mechanism for selectively rotating the optical element either around an axis substantially in a vertical direction, an axis substantially in an optical axis direction, an axis substantially in a plane formed by the vertical direction and the optical axis direction, or combination of axes thereof is used to vary a vertical separation between two or more spots.Type: ApplicationFiled: February 21, 2007Publication date: August 21, 2008Inventors: Michael Plotkin, David Towner, Haim Livne, Peter Gysling, Craig Breen, Dale Wolin
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Patent number: 7414787Abstract: A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.Type: GrantFiled: August 31, 2006Date of Patent: August 19, 2008Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang
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Patent number: 7405883Abstract: An optical component or optical low-pass filter has two or more regions demarcated by differences in refractive indexes, in which a region having a refractive index different from the refractive index of the continuous region with the largest volume among the two or more regions is formed in the interior of a transparent material. This optical component or optical low-pass filter has regions with different refractive indexes formed in the interior by pulsed laser irradiation or focused irradiation of the transparent material.Type: GrantFiled: November 29, 2005Date of Patent: July 29, 2008Assignee: Ohara Inc.Inventor: Tomohiro Hashimoto
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Patent number: 7400458Abstract: An imaging system includes a wavelength dependent aperture stop, which transmits light with different ranges of wavelengths through apertures of different diameters. Thus, different colored light will have different F-stops, which can be selected based on the power transfer and image quality requirements for the different colored light. For example, a smaller F-stop may be used with a weaker light source to produce a higher throughput for a specific range of wavelengths. Accordingly, the optical system's design and optimization is wavelength and F-stop dependent.Type: GrantFiled: August 12, 2005Date of Patent: July 15, 2008Assignee: Philips Lumileds Lighting Company, LLCInventor: Mina Farr
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Patent number: 7365909Abstract: Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.Type: GrantFiled: October 17, 2003Date of Patent: April 29, 2008Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang, Michael Feser, Alan Lyon
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Patent number: 7348104Abstract: A method is disclosed for forming an array of focusing elements for use in a lithography system. The method involves varying an exposure characteristic over an area to create a focusing element that varies in thickness in certain embodiments. In further embodiments, the method includes the steps of providing a first pattern via lithography in a substrate, depositing a conductive absorber material on the substrate, applying an electrical potential to at least a first portion of the conductive absorber material, leaving a second portion of the conductive material without the electrical potential, and etching the second portion of the conductive material to provide a first pattern on the substrate that is aligned with the first portion of the conductive absorber material.Type: GrantFiled: October 2, 2003Date of Patent: March 25, 2008Assignee: Massachusetts Institute of TechnologyInventors: Dario Gil, Jeffrey T. Hastings, James G. Goodberlet, Rajesh Menon, David J. Carter, Henry I. Smith
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Publication number: 20070258143Abstract: A multifocal ophthalmic lens includes a lens element having an anterior surface and a posterior surface, a refractive zone, or base surface having aspherically produced multifocal powers disposed on one of the anterior and posterior surfaces; and a near focus diffractive multifocal zone disposed on one of the anterior and posterior surfaces.Type: ApplicationFiled: July 31, 2006Publication date: November 8, 2007Inventor: Valdemar Portney
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Patent number: 7283205Abstract: A method and structure for optimizing an optical lithography illumination source may include a shaped diffractive optical element (DOE) interposed between the illuminator and a lens during the exposure of a photoresist layer over a semiconductor wafer. The DOE may, in some instances, increase depth of focus, improve the normalized image log-slope, and improve pattern fidelity. The DOE is customized for the particular pattern to be exposed. Description and depiction of a specific DOE for a specific pattern is provided. Additionally, a pupilgram having a particular pattern, and methods for providing a light output which forms the pupilgram, are disclosed.Type: GrantFiled: January 19, 2005Date of Patent: October 16, 2007Assignee: Micron Technology, Inc.Inventors: Jeffrey L. Mackey, William A. Stanton
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Patent number: 7268945Abstract: An extreme ultraviolet (EUV) AIM tool for both the EUV actinic lithography and high-resolution imaging or inspection is described. This tool can be extended to lithography nodes beyond the 32 nanometer (nm) node covering other short wavelength radiation such as soft X-rays. The metrology tool is preferably based on an imaging optic referred to as an Achromatic Fresnel Optic (AFO). The AFO is a transmissive optic that includes a diffractive Fresnel zone plate lens component and a dispersion-correcting refractive lens component. It retains all of the imaging properties of a Fresnel zone plate lens, including a demonstrated resolution capability of better than 25 nanometers and freedom from image distortion. It overcomes the chromatic aberration of the Fresnel zone plate lens and has a larger usable spectral bandwidth.Type: GrantFiled: October 10, 2003Date of Patent: September 11, 2007Assignee: Xradia, Inc.Inventors: Wenbing Yun, Yuxin Wang
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Patent number: 7262915Abstract: A blazed diffractive optical element has a support and a plurality of blazed diffraction structures. The diffraction structures are applied on the support and are spaced apart by a locally varying grating constant. In a first region, the diffraction structures have an at least approximately ramp-shaped profile. In a second region, the diffraction structures are binary blazed by splitting them into substructures that may have the shape of pillars or bars.Type: GrantFiled: November 17, 2005Date of Patent: August 28, 2007Assignee: Carl Zeiss AGInventor: Bernd Kleemann
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Patent number: 7227690Abstract: A layer arrangement is proposed, particularly for transfer films or laminated films, which exhibits at least two superposed synthetic resin layers, between which there is provided an interface surface having a refractive structure producing a lens-like effect, the novelty claimed being a special design of the structure having a diffractive effect.Type: GrantFiled: November 7, 2003Date of Patent: June 5, 2007Assignee: OVD Kinegram AGInventors: Andreas Schilling, Wayne Robert Tompkin
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Patent number: 7209293Abstract: An optical imaging system, for example, for a surgical microscope (100) has a beam deflecting unit in order to cast light rays out of an object region (112) into an image plane (104) with an optical beam path. An optical phase plate (107) is mounted in the optical beam path. In the optical imaging system, a unit for generating a geometric image of the image plane is provided, for example, an ocular unit (105). The optical phase plate (107) is arranged on the end of the objective lens (101) facing away from the object or is arranged in a region of the optical imaging system in which the beam path is parallel.Type: GrantFiled: August 23, 2004Date of Patent: April 24, 2007Assignee: Carl Zeiss AGInventors: Gerhard Gaida, Hans-Joachim Miesner
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Patent number: 7180669Abstract: A diffractive optical element is positioned in an optical path between a coherent light source and a surface. The diffractive optical element is designed to disperse the light across one or more spots on the surface in a manner designed to create speckle patterns having substantially uniform intensities.Type: GrantFiled: December 17, 2004Date of Patent: February 20, 2007Assignee: Avago Technologies ECBU IP (Singapore) Pte. Ltd.Inventors: Susan Hunter, Annette C. Grot
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Patent number: 7170681Abstract: An optical scanning device (1) for scanning three information layer (2, 2?, 2?) with three respective radiation beams (4, 4?, 4?) having three respective wavelengths (?1, ?2, ?3) and polarizations (p1, p2, p3). The three wavelengths differ from each other. At least one of the three polarizations differs from the others. The device comprises a diffractive part (24) including a pattern of pattern elements which have one stepped profile for forming three diffracted beams (15, 15?, 15?) from the three radiation beams, the part comprising birefringent material, sensitive to the three polarizations. The stepped profile is designed such that the heights (hj) of the steps of a pattern element introduce phase changes that equal at least two different multiples of 2? for one (?1) of the three wavelengths and equal at least two different phase changes modulo 2? for one (?2) of the two other wavelengths.Type: GrantFiled: December 18, 2002Date of Patent: January 30, 2007Assignee: Koninklijke Philips Electronics N.V.Inventor: Bernardus Hendrikus Wilhelmus Hendriks
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Patent number: 7164534Abstract: An electromagnetic radiation diffuser, operative at extreme ultraviolet (EUV) wavelengths, is fabricated on a substrate. The diffuser comprises a randomized structure having a peak and valley profile over which a highly reflective coating is formed. The reflective coating substantially takes the form of the peak and valley profile beneath it. An absorptive grating can be fabricated over the reflective coating. The grating spaces will diffusely reflect electromagnetic radiation because of the profile of the randomized structure beneath. The absorptive grating will absorb the electromagnetic radiation. The grating thus becomes a specialized Ronchi ruling that may be used for wavefront evaluation and other optical diagnostics in extremely short wavelength reflective lithography systems, such as EUV lithography systems.Type: GrantFiled: July 19, 2005Date of Patent: January 16, 2007Assignee: ASML Holding N.V.Inventors: Walter H. Augustyn, Richard A. Gontin
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Patent number: 7154672Abstract: An optical film composed by laminating a light scattering film 1 scattering and transmitting light and comprising at least two phases or more different in refractive index and a reflective polarizer 2 selectively P/S converting the light. It is preferred that at least one phase of the light scattering film larger in the refractive index has a columnar structure extending in the thickness direction of the film and the transmittance of the film in the normal direction is 4% or more. The optical film is excellent in visibility, is small in light loss in order to provide an excellently visible and bright image, and has an excellent light collecting property when used in a liquid crystal display device or the like.Type: GrantFiled: October 17, 2003Date of Patent: December 26, 2006Assignee: Tomoegawa Co., Ltd.Inventor: Takamasa Harada
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Patent number: 7136227Abstract: A dynamically variable, amplitude grating based diffractive optic including: a substantially transmissive, elastic substrate; a substantially opaque, elastic material formed in a predetermined pattern on the first surface of the elastic substrate; and a substrate mount coupled to the elastic substrate to hold it under tension. The predetermined pattern of the substantially opaque, elastic material substrate forms an amplitude grating on the elastic substrate. The substrate mount includes a variable tensioner to stretch the elastic substrate and the substantially opaque, elastic material, thereby allowing at least one optical property of the amplitude grating to be dynamically varied. Alternatively, the elastic substrate may include at least one substantially transparent portion and at least one substantially opaque portion, the substantially opaque portion(s) arranged in a predetermined pattern to form the amplitude grating within the elastic substrate rather than on its surface.Type: GrantFiled: August 6, 2004Date of Patent: November 14, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Ming Li
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Patent number: 7123413Abstract: Novel methods are disclosed for designing and constructing miniature optical systems and devices employing light diffractive optical elements (DOEs) for modifying the size and shape of laser beams produced from a commercial-grade laser diodes, over an extended range hitherto unachievable using conventional techniques. The systems and devices of the present invention have uses in a wide range of applications, including laser scanning, optical-based information storage, medical and analytical instrumentation, and the like. In the illustrative embodiments, various techniques are disclosed for implementing the DOEs as holographic optical elements (HOEs), computer-generated holograms (CGHs), as well as other diffractive optical elements.Type: GrantFiled: July 17, 2001Date of Patent: October 17, 2006Assignee: Metrologic Instruments, Inc.Inventors: LeRoy Dickson, Timothy A. Good, John Groot, Thomas C. Amundsen, C. Harry Knowles, Thomas Carullo
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Patent number: 7114820Abstract: The invention relates to a new light pipe (313) for providing backlighting (312) of a flat-panel display (311) by means of at least one light source so that the light pipe has at least one surface which comprises patterns. The patterns have diffraction properties for conducting the light in the direction of the display, and the patterns comprise uniform, mutually different areas having a certain distribution on the surface of the light pipe. The local outcoupling efficiency of the light pipe depends on the characteristic properties of the patterns, which are dependent on the distance to the light source or its wavelength.Type: GrantFiled: December 29, 1999Date of Patent: October 3, 2006Assignee: Nokia Mobile Phones, Ltd.Inventors: Marko Parikka, Markku Kuittinen, Jari Turunen
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Patent number: 7099084Abstract: A zone plate modulator modulates an incident wave by changing the relative distance between a pair of complementary reflective zone plates. The modulator acts to reflect the incident wave as a plane mirror in a first configuration, and to diffract the incident wave into a series of focal points along the axis of the modulator as a phase zone plate in a second configuration. A force applied to the zone plates changes the zone plate modulator between the first and second configurations, therefore modulating the incident wave. The force can be an electrostatic force generated by a voltage source. An array of zone plate modulator elements is a compact spot array generator performing both the modulating and focusing functions. An achromatic zone plate modulator provides a both wavelength and polarization independent modulation of the incident wave. A variable optical attenuator comprises achromatic zone plate modulators.Type: GrantFiled: December 1, 2003Date of Patent: August 29, 2006Inventor: Baokang Bi
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Patent number: 7085062Abstract: The invention relates to an apparatus for shaping a light beam, having at least two optically functional boundary surfaces that are arranged one behind another in the propagation direction (z) of the light beam to be shaped, such that the light beam can pass through the at least two optically functional boundary surfaces one after another, and two groups of refractive or diffractive imaging elements that are arranged on at least one of the optically functional boundary surfaces, at least two of the imaging elements having different properties within at least one of the groups.Type: GrantFiled: June 10, 2004Date of Patent: August 1, 2006Assignee: Hentz-Lissotschenko Patentverwaltungs GmbH & Co. KGInventor: Dirk Hauschild
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Patent number: 7085055Abstract: The invention relates to a diffractive optical system having a two-dimensional structure, which can be used as a phase shift mask for the fabrication of an optical element having a two-dimensional fine periodic structure, and a two-dimensional light beam splitter. The diffractive optical system 10 comprises a transparent substrate surface 1 that is divided in alignment with orthogonal two directions into minuscule square cell groups 2, 3 of the same shape in a checked pattern. The square cells that give a phase 2p? and a phase {(2q+1)?±??} where 0???0.25 and p and q are each an integer with respect to reference-wavelength light striking vertically on the transparent substrate surface 1 are alternately arranged in each direction, and the phase 2p?-giving square cells and the phase {(2q+1)?±??}-giving square cells are located in such a way as to be in alignment with 45° diagonal directions of said two directions.Type: GrantFiled: September 3, 2004Date of Patent: August 1, 2006Assignee: Dai Nippon Printing Co., Ltd.Inventors: Kimio Ito, Mitsuru Kitamura
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Patent number: RE41455Abstract: A compound objective lens is composed of a hologram lens or transmitting a part of incident light without any diffraction to form a beam of transmitted light and diffracting a remaining part of the incident light to form a beam of first-order diffracted light, and an objective lens for converging the transmitted light to form a first converging spot on a front surface of a thin type of first information medium and converging the diffracted light to form a second converging spot on a front surface of a thick type of second information medium. Because the hologram selectively functions as a concave lens for the diffracted light, a curvature of the transmitted light differs from that of the diffracted light.Type: GrantFiled: March 10, 2005Date of Patent: July 27, 2010Assignee: Panasonic CorporationInventors: Yoshiaki Komma, Sadao Mizuno, Seiji Nishino