Abstract: A liquid-filled lens driver is disclosed. The liquid-filled lens includes an input/output interface unit, a system clock generation unit, a high voltage generation unit, a reference/bias voltage generation unit, a drive signal generation unit and a control unit. The input/output interface unit exchanges the lens driver control signal and the status information of the liquid-filled lens with the image signal processor. The high voltage generation unit generates high voltage using low voltage of a battery of a mobile information terminal. The voltage generation unit provides reference voltage and bias voltage for operating the liquid-filled lens driver. The drive signal generation unit generates a final drive signal for the liquid-filled lens.

Abstract: A lithographic projection apparatus is disclosed in which a liquid supply system provides a liquid between the projection system and the substrate. An active drying station is provided to actively remove the liquid from the substrate W or other objects after immersion of all or part of a surface of the substrate W or other objects.

Abstract: An objective optical system focuses light from a light source onto at least two different types of optical recording media having different substrate thicknesses in order to record or reproduce information on the optical recording media by using a variable refractive power element and an objective lens. The variable refractive power element may be a liquid crystal element with concentric zones that serves as a transparent plate having no convergence effect when no voltage is applied when selecting an AOD, DVD, or CD and as a converging lens when a voltage is applied when selecting a BD. Alternately, the variable refractive power element may electrically vary the refractive index of a nanoparticle dispersion or at least one liquid of a two-liquid lens element. A diffractive optical element may be used to assist in focusing light to four recording media. An optical pickup device includes the objective optical system.

Abstract: The present invention provides a discretely adjustable lens (300) that is controllable by means of electrostatic or electrowetting forces. The lens provides two accurately reproducible and freely designable lens states that are defined by interfaces between one out of two fluids (120,121) and at least one lens face (155). Changing place of the fluids by means of electrostatic or electrowetting forces provides for switching between the lens states. The lens may, for example, provide a macro lens option in a camera lens arrangement.

Abstract: A controllable optical lens system, comprises a chamber housing first and second fluids, the interface between the fluids defining a lens surface. An electrode arrangement controls the shape of the lens surface and has first and second electrodes. A parameter is determined by the system dependent on the electrical resistance through at least one of the lens fluids between the first and second electrodes. Thus, the series resistance through a lens fluid is used as a measure of meniscus position.

Abstract: A controllable electrowetting lens system has a feedback control loop for controlling the electrode arrangement drive signals to implement an autofocus function. The feedback control loop comprising an image analysis focus detection system and a variable gain element. The gain is adjusted based on the lens condition, for example as sensed by a capacitance sensing arrangement. The autofocus control loop can be optimized to the lens characteristics (because the lens characteristics change over time) and/or to external conditions such as temperature.

Abstract: A lens array capable of making the characteristics of lens elements uniform is provided. A lens array 10 according to the present invention includes first liquid 11 that is conductive, second liquid 12 that is insulative and that has a refractive index different from that of the first liquid, and a plurality of lens elements 13 forming lens surfaces 13A at an interface between the first liquid 11 and the second liquid 12. The lens surfaces 13A of the lens elements 13 reversibly vary in accordance with output control of an applied voltage. The lens array is structured such that the adjacent lens elements 13 liquidly communicate with each other, whereby differences in the amounts of the first liquid 11 and the second liquid 12 between the lens elements can be avoided and the lens characteristics can be made uniform.

Abstract: A lithographic projection apparatus is arranged to project a pattern from a patterning device onto a substrate using a projection system and has a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid. An element of the projection system through which the pattern is projected has, on a surface configured to be in contact with the liquid, a protective coating which is SiO2.

Abstract: There is provided an optical driving apparatus including: a cell housing housing polar and non-polar liquids, the cell housing including side walls; a first electrode formed on an outer surface of a first insulator formed on a portion of one of the side walls of the cell housing; a second electrode formed on an outer surface of a second insulator formed on a portion of the other side wall of the cell housing; a color filter formed on a top of the cell housing; and a third electrode formed on a bottom of the cell housing to be in contact with the polar liquid so that the third electrode generates a potential in the polar liquid together with one of the first and second electrodes, wherein light incident from a light source unit disposed below the third electrode is irradiated onto a predetermined area of the color filter.

Abstract: The invention concerns a method for producing a transparent optical element (1) including filling cells (10) of the element with a substance having an optical property. It consists in moving an amount of the substance (20) radially on the cells, towards a peripheral edge of the optical element, such that the substance penetrates each cell. Optionally, the cells may be sealed with a film (30) fixed on the partition walls (11) of the cells. The filling and the sealing of the cells may be carried out in a single step of the process.

Abstract: The invention relates to a variable-focus lens comprising two opposing walls (21, 22) which are orthogonal to the axis of the lens and which define a space containing an isolating liquid (31) on the first wall (22) and a conductive liquid (32) which covers the isolating liquid and which comes into contact with the second wall (21). The surface (24) of the first wall (22) has high wettability for the isolating liquid and low wettability for the conductive liquid, while the surface (23) of the second wall (21) has high wettability for the conductive liquid and low wettability for the isolating liquid.

Abstract: An optical device includes a housing having first to fourth sidewalls and top and bottom plates; and (M?1) partitions between the first and second sidewalls, and has M lens chambers, each filled with first and second liquids forming a liquid lens. A first lens chamber is defined by the first, third, and fourth sidewalls, first partition, and top and bottom plates. The top plate, first sidewall, and first partition respectively have first to third electrodes. An (m+1)-th lens chamber is defined by an m-th partition, third sidewall, (m+1)-th partition, fourth sidewall, and top and bottom plates, m being 1, 2, . . . , or M?2. The top plate, m-th partition, and (m+1)-th partition respectively have first to third electrodes. An M-th lens chamber is defined by an (M?1)-th partition, second to fourth sidewalls, and top and bottom plates. The top plate, (M?1)-th partition, and second sidewall respectively have first to third electrodes.

Abstract: Beam manipulation member for use in an optical tweezers system, the beam manipulation member comprising at least one optical element, being controllably deformable in order to act on a laser beam in response to signals coming from the optical tweezers system. The beam manipulation member may be used to change the focal distance of the optical tweezers system and also to deflect the laser beam.

Abstract: A method for producing a membrane device by providing a substrate (24), adding a liquid (16) thereon, and covering the liquid (16) and at least one substrate portion bearing the liquid (16) with a homogenous continuous thin film (18) by means of a low-pressure deposition process. The liquid is made of a plastic material and forms a membrane.

Abstract: A rod lens comprises a tubular body having a first end, a second end, a length and a diameter, a first optically transparent closing element, tightly sealing the first end of the tubular body, a second optical transparent closing element, tightly sealing the second end of the body. The rod lens further comprises n further optical elements being positioned within the tubular body defining n+1 chambers in the tubular body, with n being an integer >0, and n+1 optical fluids being positioned in the n+1 chambers, with each of the n+1 optical fluids being positioned in one of the n+1 chambers, whereby at least one of the n+1 optical fluids having a refractive index different from the other n+1 optical fluids.

Abstract: The invention relates to a projection objective (6), in particular for applications in microlithography, serving to project an image of an object (3) arranged in an object plane (4) onto a substrate (18) arranged in an image plane (7). The projection objective (6) has an object-side-oriented part (10) which is arranged adjacent to the object plane (4) and includes a plurality of optical elements, and it also has an image-side-oriented part (11) of the objective which is arranged adjacent to the image plane (7) and includes a free space (16) serving to receive a fluid (13) and further includes at least a part of an optical end-position element (14) serving to delimit the free space (16) towards the object side. The projection objective (6) is operable in different modes of operation in which the free space (16) is filled with fluids (13) that differ in their respective indices of refraction.

Abstract: The invention relates to a variable focus lens (10), comprising a rigid ring (22), a flexible membrane (20) attached to the front surface of the ring, a rigid transparent front cover (40), attached to the flexible membrane (50), and a rigid rear cover (20) on the rear surface of the ring (22). A cavity (60) is formed between the flexible membrane (50) and the rear cover (20), and the cavity is filled with a liquid. The amount of liquid in the cavity can be varied to vary the curvature of the flexible membrane and so vary the optical characteristics of the lens. The rear cover can be integral with the ring, or formed separately. Further, a second flexible membrane can be positioned between the rear cover and the ring. The various parts of the lens can be held together by adhesive.

Abstract: Formed by modules (1) with bi-convex (2) configurations in the central modules (1) of the lens, becoming plano-convex and finally concavo-convex in its end modules (1), with a smooth transition (3), all ridges or grooves being minimized, and with the vertical face joining the upper and lower facets of the modules (1) being flat and inclined towards the optical axis, eliminating spherical aberration by incorporating in the modules (1) refracting fluids with different refraction index and very small volume, in a construction with a minimal thickness and weight.

Abstract: An optical lens is provided. The optical lens provides miniaturization and thin size, and reduces the cost and improves productivity by simplifying the structure and manufacturing process. The optical lens includes a light-transmitting substrate with a lens chamber and a fluidic chamber that are connected with each other. The optical lens also includes a light-transmitting elastic film which seals the lens chamber, a buffer elastic film which seals the fluidic chamber, and an actuator on the buffer elastic film which corresponds to the fluidic chamber, and varies the volume of the fluidic chamber to vary a pressure acting on the light-transmitting elastic film.

Abstract: A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.

Abstract: The invention concerns an electrowetting device comprising first and second immiscible fluids, the liquids being sealed within a structure comprising a cap portion, a base portion, a gasket formed of a first material positioned between a first contact surface on said cap portion and a second contact surface on said base portion, and a first film formed of a second material between said gasket and one of said first contact surface and said second contact surface.

Abstract: The invention relates to a lens housing with a wall, including a contact surface arranged for contact with a support, a first region for receiving an electrowetting optical device comprising a cavity containing first and second liquids, the curvature of an interface between said first and second liquids being controllable by electrowetting by application of a voltage between first and second electrodes of said device, and a second region for receiving one or more fixed lenses, the second region being positioned between said contact surface and said first region, wherein said lens housing further comprises first and second conducting tracks integrated with said wall, said conducting tracks extending between said contact surface and said first region and arranged to make electrical contact with said first and second electrodes, respectively.

Abstract: In this invention, to provide a compact zoom lens having a small number of optical element groups to be driven and a simple moving mechanism, at least one of a plurality of optical element groups arranged in the lens system includes a refractive power variable element of a transmission type which has a compensation function to correct focus movement caused by zooming and a focus function to correct focus movement caused by a variation in inter-object distance. The refractive power variable element is a liquid optical element including a first liquid having a conductivity or a polarity and a second liquid which is not mixed with the first liquid, the first liquid and the second liquid being enclosed in a container fluid-tight so as to define an interface therebetween having a predetermined shape, the liquid optical element being arranged such that a refractive power thereof is adjusted by changing a curvature of the interface.

Abstract: A mechanical lens includes a rigid chamber, a first transparent window located to close one end of the chamber, a flexible transparent membrane window located to close another end of the chamber, and a transparent fluid having an index of refraction. The flexible transparent membrane window is along an optical path of light received through said first transparent window. The chamber is filled with said fluid and a curvature of said flexible transparent membrane window is responsive to a pressure of said transparent fluid.

Abstract: An optical element comprises a base component (1) provided with a set of cells (10) open on a face of the component and a film (2) for sealing the cells. The film is adhesively bonded to ends (12) of separation walls (11) present between the cells. The adhesive bonding is carried out by applying a pressure adjusted so that the ends of the walls penetrate into a layer of adhesive material (3) positioned between the film and the set of cells. A refractive index value of the adhesive material is adjusted with respect to a value of the same index for the material of the ends of the walls m order to obtain an optical element which exhibits a high transparency.

Abstract: An autofocus unit is provided to an immersion lithography apparatus in which a fluid is disposed over a target surface of a workpiece and an image pattern is projected onto this target surface through the fluid. The autofocus unit has an optical element such as a projection lens disposed opposite and above the target surface. An autofocus light source is arranged to project a light beam obliquely at a specified angle such that this light beam passes through the fluid and is reflected by the target surface of the workpiece at a specified reflection position that is below the optical element. A receiver receives and analyzes the reflected light. Correction lenses may be disposed on the optical path of the light beam for correcting propagation of the light beam.

Abstract: The present invention discloses an optical device comprising a container having an inner wall, said container enclosing a first liquid (A) and an electrically susceptible second liquid (B), said liquids (A; B) being immiscible and being in contact with each other via an interface (14), said interface (14) having a contact angle with the inner wall; and an electrode arrangement (2; 12) for controlling the shape of the interface (14) by means of a voltage; the optical device having an operational range in between a first value of the contact angle and a second value of the contact angle, the first value being in a range of 50-110° and the second value being in a range of 70°-130°, the second value being larger than the first value. It has been discovered that the response speed of the interface (14) to a change in position is a function of the contact angle (?), with a response speed reaching a maximum value around (?)=90° and at least 75% of this maximum value in the given interval.

Abstract: To provide an optical apparatus which controls an interface state to change a focal length by using an optical element having a container sealing first liquid that is conductive or polarized and second liquid that does not mutually mix with the first liquid with their interface in a predetermined form and electrodes provided in the container and of which optical characteristics change according to change of interface form due to application of voltage to the electrodes, and in particular an optical apparatus that controls a duty ratio of alternating current voltage applied to said electrodes for changing said interface form.

Abstract: A lens holder for supporting a lens is put so as to slide on a side surface of a lens barrel in which an image sensor having a light receiving portion is arranged at the bottom, and the lens barrel and the lens holder are connected together by a connecting material. A fluid is filled in a space formed by the container composed of the substrate and the lens barrel, and the lens holder, and then a position of the lens with respect to the light receiving portion is controlled by controlling a volume of the fluid in the space to thereby move a position of the lens holder with respect to the lens barrel. Positioning of the lens is easily performed even when it is a compact configuration.

Abstract: An automatic analysis apparatus and an automatic analysis method analysis that includes an optical convergence point adjusting unit in order to variably adjust an optical convergence point of irradiation light or an optical convergence point of detection light to or from a reaction cuvette in accordance with at least one of analysis conditions of a kind of reaction of a mixed solution contained in the reaction cuvette, a liquid volume of the mixed solution or a measurement wave length. The optical convergence point adjusting unit is provided in front the reaction cuvette, in back of the reaction cuvette, or both in order to variably control the position of an optical convergence point so as to maximize the irradiation light based on the volume of the mixed solution in the reaction cuvette.

Abstract: A tunable micro-aspherical lens is disclosed, which employs two potential differences provided by two sets of electrodes to dynamically change the bottom area and the central height of the liquid polymer lens. The tunable micro-aspherical lens includes a tunable lens, a lower electrode plate, a hydrophobic pattern, an insulation layer and an upper transparent electrode plate. Also, a manufacturing method of a tunable micro-aspherical lens is disclosed, which includes forming a lower electrode plate, forming an insulation layer, determining a position of the tunable lens, controlling the bottom area and the central height of the tunable lens. The tunable micro-aspherical lens of the present invention eliminates spherical aberration and improves the focus spot resolution to shrink the focus spot and thus to provide better optical quality.

Abstract: The present invention discloses an optical device comprising a container enclosing an insulating liquid (A) and a liquid responsive to an electric field (B), the insulating liquid (A) and the liquid responsive to an electric field (B) being immiscible and being in contact with each other via an interface (14), at least one of the liquids (A; B) being at least partially placed in a light path through the container. The optical device further comprises an electrode arrangement (2; 12) for controlling the shape of the interface (14) by means of a voltage; and means (100) for preventing the interface from an exposure to an external electric field. Consequently, the build-up of electrostatic charge on a surface of the optical device is avoided, which prevents the unwanted distortion of the interface (14) caused by the interaction of the liquid responsive to an electric field (B) and the electrostatic charge.

Abstract: An optical device includes: a sealed container having edge walls facing each other in a thickness direction of the container and a side wall connecting both of the edge walls; a first liquid with polarity or electrical conductivity and sealed within the container; a second liquid that is sealed within the container and does not mixed with the first liquid; and a voltage applying unit for applying a voltage across the first liquid. The first and second liquid have equal specific gravity, and transmissivity of the first liquid is lower than the transmissivity of the second liquid. An interface between the first liquid and the second liquid changes shape in response to a voltage applied by the voltage applying unit. The first liquid is formed so as to have equal specific gravity to the second liquid by mixing three or more kinds of liquids each having a different specific gravity.

Abstract: A variable focus lens comprises a container enclosing an insulating liquid (A) and a conducting liquid (B), the insulating liquid (A) and the conducting liquid (B) being immiscible, having different refractive indices and being in contact with each other via an interface (14), the liquids (A, B) being at least partially placed in a light path through the container. The variable focus lens further comprises an electrode arrangement (2, 12) for controlling the shape of the interface (14) by means of an applied voltage. The container further comprises a transparent end portion (4) in the light path, a part (4) the transparent end portion (4) defining the shape of a part of the interface (14) at a predefined value of the voltage. Consequently, a variable focus lens with a reduced building height (H) is achieved that suffers less from the gradual formation of is small droplets of the conducting liquid (B) on the inner surface of the end portion (4).

Abstract: According to one aspect of the present invention, there is provided a photomask inspection apparatus which observes a pattern provided on a mask substrate of a mask to inspect the mask including an object lens, and a liquid that is present between a last lens in the side closer to the mask of the object lens and the mask.

Abstract: A variable-focus lens assembly is provided. The lens assembly includes a microfluidic device that defines a chamber for receiving a fluid therein. A slip having an aperture therethrough is disposed in the chamber. A first fluid is disposed on the first side of the slip and a second fluid is disposed on the second side of the slip. A lens is formed from the interface of the first and second fluids. The outer periphery is pinned to the slip about the aperture. A turning structure fabricated from a hydrogel material engages the slip and tunes the focal length of the lens in response to a predetermined stimulus.

Abstract: The invention concerns variable focus spectacles in which the electro-wetting effect is utilized to provide a manually or automatically variable focal length. The variable focus spectacles (200) comprise a spectacle frame (210) and at least one variable power lens (100A, 100B). The lens (100) comprises a transparent rear wall (110), a transparent front wall (120), a cavity (140) formed between the transparent front wall (120) and the transparent rear wall (110), first and second immiscible fluids of differing refractive index contained within said cavity, and electrodes (150, 160) for applying an electric field to said fluids to change a contact angle between an interface layer (M) of the two fluids and the front wall of the lens.

Abstract: Described herein are silicone fluids and silicone materials that posses high glass transition temperatures (Tgs) when compared to conventional silicone materials. In one embodiment, an increased Tg allows the formation of objects and materials by cryogenic lathing. The fluids and materials can be formed by curing silicone fluid with a cross-linker mixture comprising a cross-linker and a monofunctional hydride compound. Upon formation, the silicone materials can be extracted over long periods of time without loss of optical quality. The silicone materials can be sufficiently soft allowing folding and insertion through small incisions in the eye. Additionally, methods of forming optical silicone materials, lenses and silicone materials in general are also disclosed. In one embodiment, the method of forming a silicone based lens using cryogenic lathing techniques is described.

Abstract: Silicone oil used for an insulating solution for a liquid lens is disclosed which satisfies all of the requirements, i.e., density, viscosity, surface tension and refractive index, required as an insulating liquid for a liquid lens. The silicone oil includes at least one selected from compounds represented by Formulas 1 to 3 below: wherein R1 to R6 are same or different each other; and are independently selected from the group consisting of phenyl being replaced by alkyl or halo in ortho, meta or para position, silanol, alkyl and alkoxy each having a molecular weight of 200 or less.

Abstract: A retractable lens assembly with a variable-volume lens is provided. The retractable lens assembly includes an optical lens, a variable-volume lens, a fluid pump, a communication tube, and a storage tank. The variable-volume lens includes a lens film, an accommodation space wrapped by the lens film, and a transparent fluid within the accommodation space. Therefore, when the transparent fluid is pumped from the accommodation space to the storage tank by the fluid pump, the variable-volume lens is folded because of atmospheric pressure, such that the overall thickness and volume are reduced. When the variable-volume lens is folded, the thickness of the retractable lens assembly is as small as possible. When the variable-volume lens is stretched out because of being filled with the transparent fluid, the variable-volume lens and the optical lens are of a coaxial configuration, forming a photographic optical system.

Abstract: An auto-focusing camera module (100) includes a base (110), a first lens barrel (120) mounted on the base, a second lens barrel (130) threadedly engaged with the first lens barrel, a first lens (140) arranged in the second lens barrel, an image pickup module (150) mounted on the base, and a lens assembly (170). The image pickup module is coaxially aligned with the lens. The lens assembly is arranged in the second barrel. The lens assembly has a mounting plate (171) and a plurality of second lenses (172) mounted on the mounting plate. The second lenses each have a distinct effective focal length, and the mounting plate is movable in a manner such that each of the second lenses is selectively aligned with the first lens.

Abstract: A method for centering a drop of liquid on a given point on a surface. The inventive method consists in forming a bell-mouthed recess, whereby said recess has a curvature at any point at the limit of contact between the drop and the recess that is lower than or opposite to the curvature of a circle (TC) that is tangent to the surface of the recess to said point and at a symmetrical point (CP2) of said surface.

Abstract: A liquid optical lens which changes a focus due to a change in a shape of a translucent elastic membrane according to a change in a fluid pressure of a lens chamber and a manufacturing method thereof are provided. The liquid optical lens forms a dampproof coating membrane on the translucent elastic membrane to prevent a fluid from permeating through the translucent elastic membrane and a swelling phenomenon of the translucent elastic membrane.

Abstract: A liquid lens group includes two liquid lens portions and a light-pervious separator. The light pervious separator includes a first contact surface and an opposite second contact surface, which are in contact with the two liquid lens portions respectively. The liquid lens group has a wide focus range and highly compacted volume.

Abstract: In one embodiment, an optical probe includes a housing, and an optical system provided within the housing, the optical system having a dynamically adjustable focal length such that the optical system can be focused at different points spaced a variety of distances from the housing while the probe is in use.

Abstract: A liquid lens for adjusting a focal length by electro-wetting. A body houses a non-conductive fluid and a conductive fluid therein. A cover is capped on the body. A first adhesive bonds the body to the cover, the first adhesive curing rapidly. Also, a second adhesive bonds an outer periphery of the body to an outer periphery of the cover. The glass cover and the body are bonded across a large area by two types of adhesives with different compositions. This allows the lens manufactured to greatly withstand temperature and heat impact and stay durable in a high-temperature humid environment, thereby significantly elevating a quality of the final product.

Abstract: An optical device includes: a sealed container having edge walls facing each other in a thickness direction of the container and a side wall connecting both of the edge walls; a first liquid with polarity or electrical conductivity and sealed within the container; a second liquid that is sealed within the container and does not mix with the first liquid; and a voltage applying unit for applying a voltage across the first liquid. The first liquid and the second liquid have equal specific gravity, and transmissivity of the first liquid is lower than the transmissivity of the second liquid. An interface between the first liquid and the second liquid changes shape in response to a voltage applied by the voltage applying unit. A light transmission path that passes through the edge walls and extends in a direction of the thickness of the container is formed.

Abstract: An optical element (1) for correcting refractive index related aberrations comprises a fluid chamber (5) which is provided with an electrode configuration (2,12) and includes a first, electrically conducting, fluid (B) and a second, non-conducting, fluid (A), and an interface (14) between the fluids, the fluids having different Abbc numbers. By applying a voltage (VO to the electrode configuration electrowetting forces are generated, which deform the shape of the interface (14,14?) and determine the corrective power.

Abstract: Systems and methods are disclosed herein to provide zoom and/or autofocus lenses. For example, in accordance with an embodiment of the present invention, a lens is provided with at least one tunable lens. The focal length and/or focus of the lens may be varied without mechanically moving or changing the separation between one or more lens components.

Abstract: A tunable-shape prism comprises: a fluid chamber including a first fluid and a second fluid. The first fluid is electrically conducted and the second fluid is electrically insulated. The first fluid and the second fluid have different refractive indexes and the first fluid and the second fluid are non-miscible to each other. A meniscus is formed between the first fluid and the second fluid. A plurality of first electrodes are contacted with the first fluid and a plurality of second electrodes are even-annularly arranged around the first and the second fluids. The plurality of the second electrodes are coated by an insulator; and the plurality of the second electrodes and the corresponding first electrode together constitute a plurality of electrode pairs.