Abstract: The present invention relates to a high numerical aperture exposure system having a wafer. The exposure system in the present invention includes a beam-splitter, a reticle, a reticle optical group, where the reticle optical group is placed between the reticle and the beam-splitter, a concave mirror, a concave mirror optical group, where the concave mirror optical group is placed between the concave mirror and the beam-splitter, a fold mirror, where the fold mirror is placed between the beam-splitter and the wafer, and a wafer optical group, where the wafer optical group is placed between the beam-splitter and the wafer. In the present invention, a beam of light is directed through the reticle and the reticle optical group to the beam-splitter, then it is reflected by the beam-splitter onto the concave mirror. Concave mirror reflects the light onto the fold mirror through the beam-splitter. Fold mirror reflects the light onto the wafer through the wafer optical group.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A catadioptric projection optical system for forming a reduced image of a first surface (R) on a second surface (W) is a relatively compact projection optical system having excellent imaging performance as well corrected for various aberrations, such as chromatic aberration and curvature of field, and being capable of securing a large effective image-side numerical aperture while suitably suppressing reflection loss on optical surfaces. The projection optical system comprises at least two reflecting mirrors (CM1, CM2), and a boundary lens (Lb) whose surface on the first surface side has a positive refracting power, and an optical path between the boundary lens and the second surface is filled with a medium (Lm) having a refractive index larger than 1.1.

Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group G1 including an even number of at least four mirrors M1–M6; and a second at least substantially dioptric optical group G2 imageward than the first optical group G1 including a number of lenses E4–E13. The first optical group G1 provides compensative axial aberrative correction for the second optical group G2 which forms an image with a numerical aperture of at least substantially 0.65, and preferably at least 0.70 or 0.75. Six mirror examples are shown.

Abstract: An image display device comprises an optical imaging arrangement for providing image information to illumination light and for transmitting the light as an optical image signal; a display for receiving the optical image signal and for displaying an image based on the image information; and a projecting optical arrangement including a reflecting part having a reflecting surface for reflecting the optical image signal, and a refracting optical part having a refracting surface for projecting the optical image signal onto the reflecting part. At least one of the reflecting surface and the refracting surface is aspherical.

Abstract: A wide-angle optical system (2, 40) having an objective (4, 42) and a mirror system, including a curved mirror (6, 46) for projecting a wide-angle image through the objective (4, 42) onto a detector (10, 44). At least one mirror (8, 46) of the mirror system is arranged movably relative to the objective (4, 42). It is possible to achieve a zoom function, a large elevation range and a selection of an enlarged section from the wide-angle image.

Abstract: The present invention is a catadioptric system having a reticle optical group, a beam splitter, an aspheric mirror, a baffle plate, a folding mirror and a semiconductor wafer optical group. The reticle optical group, the beam splitter and the semiconductor wafer optical group are placed on the same beam axis, different from aspheric mirror and folding mirror axis. The light passes through an image pattern on the reticle and is reflected by the beam splitter onto the aspheric mirror. The aspheric mirror reflects the light back through the beam splitter onto the folding mirror. The folding mirror reflects the light back to the beam splitter. The beam splitter reflects the light onto the semiconductor wafer optical group. A plurality of quarter wave plates can be placed in optical paths between optical elements of the present invention to change polarization of an incoming light.

Abstract: Systems configured to provide illumination of a specimen during inspection are provided. One system includes catoptric elements configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The catoptric elements include positive and negative elements configured such that pupil distortions of the positive and negative elements are substantially canceled. Another system includes a dioptric element and a catoptric element. The dioptric element and the catoptric element are configured to direct light from a light source to a line across the specimen at an oblique angle of incidence. The dioptric and catoptric elements are also configured such that pupil distortions of the dioptric and catoptric elements are substantially canceled.

Abstract: Imaging lens device has a zoom lens system and an image sensor. The zoom lens system has a first reflecting surface, a first movable lens unit, an aperture stop, a second reflecting surface, a second movable lens unit. A first reflecting surface bends a first optical axis which is an incident optical axis of the zoom lens system 90 degrees into a second optical axis. A second reflecting surface bends the second optical axis 90 degrees into a third optical axis. The first optical axis, the second optical axis and the third optical axis are mutually perpendicular. The first movable lens unit and the aperture stop are disposed on the second optical axis. The second movable lens unit is disposed on the third optical axis. During zooming, the first and second reflecting surfaces and the aperture stop are stationary; the first and second movable lens units are moved, respectively.

Abstract: An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.

Abstract: An image-taking optical system according to the present invention for forming an image of a two-dimensional object on an image-taking surface comprises a plurality of reflecting surfaces which reflect light from the two-dimensional object sequentially and guides the light to the image-taking surface, and a reference axis passing through the center of the pupil of the image-taking system and the center of the optical image formed on the image-taking surface is inclined with respect to the normal line of the two-dimensional object. The present invention provides an image-taking optical system which achieves a reduction in size, ensures a ratio of an amount of peripheral light, allows correction of trapezoidal distortion of a formed image, and is suitable for oblique image-taking.

Abstract: There is provided a compact, strong and high-performance catoptric optical system. This catoptric optical system has plural optical curved reflective surfaces. A gap between a pair of reflective surfaces, through which light incident upon said catoptric projection optical system passes, is the same gap between a pair of reflective surfaces, through which light exited from the catoptric projection optical system passes.

Abstract: A catadioptric projection optical system for projecting an image of an object onto an image plane through two intermediate image formations. The catadioptric projection optical system includes a first optical system, for receiving light from the object, including a plurality of lenses, a second optical system, for forming the image of the object on the image plane, including a plurality of lenses, and a third optical system disposed optically between the first optical system and the second optical system. The third optical system includes a first concave mirror and a second concave mirror. The light is reflected by the first concave mirror then by the second concave mirror to be directed to the second optical system along a z-shaped optical path, and the first, second and third optical systems have a common straight optical axis.

Abstract: A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally concentrically disposed relative to each other. The lens elements are arranged to produce an increased quantity of reflections and refractions within a lens optical path. The reflections and refractions reduce aberrations and control signal intercept angles relative to an image plane, thereby enabling the lens to match the performance of an optical signal carrier utilized with the lens. The lens element arrangement basically serves to provide an optical path with a quantity of reflections similar to that achieved with a lens having a greater quantity of elements or surfaces. The reflections and refractions enable the lens to cancel out or remove undesired characteristics (e.g., aberrations, etc.) from the resulting optical signals.

Abstract: A catadioptric optical system comprising a first imaging optical system for forming an intermediate image of a first plane surface, a second imaging optical system for forming a final image of the first plane surface onto a second plane surface which is substantially parallel to the first plane surface, and a catadioptric type optical system disposed in the optical path from the first plane surface to the second plane surface and including a first reflecting surface which reflects light coming from through the first plane surface and a second reflecting surface for directing the light reflected by the first reflecting surface toward the second plane surface. At least one of the first and second reflecting surfaces is a concave reflecting surface. All of the optical elements of the catadioptric optical system are disposed on a single linear optical axis.

Abstract: A projection optical system projects an image of an object onto an image plane, and includes a first imaging optical system for forming an image of the object, and a second imaging optical system for re-imaging the image upon the image plane, wherein the first and second imaging optical systems are disposed in an order from the object side and are disposed along a common straight optical axis. The first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, wherein one of the first and second imaging optical systems includes a second mirror for reflecting light from the first mirror to the image plane side, and wherein, with the second mirror, the abaxial light is caused to pass an outside of an effective diameter of the first mirror.

Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.

Abstract: The invention provides a telescope system for inputting an image and presenting the image to a user. The telescope system includes a first array of flat mirrors including a plurality of first mirrors, the image, being light information, incident upon and reflected by each of the first array of mirrors; a primary reflecting curved mirror, each of the first mirrors reflecting light information onto the primary reflecting curved mirror; and a light collection portion, the light collection portion collecting and combining light information, originating from each of the first mirrors, so as to present a viewable image.

Abstract: A projection optical system for projecting an image of an object onto an image plane. The projection optical system includes a first imaging optical system for forming an image of the object in which the first imaging optical system includes a first mirror for reflecting and collecting abaxial light from the object, a second imaging optical system for re-imaging the image upon the image plane, a second mirror for reflecting light from the first mirror to the image plane side, whereby the abaxial light is caused to pass outside of an effective diameter of the first mirror, and a field optical system including three lenses each having a positive refractive power. The abaxial light passed through the outside of the effective diameter of the first mirror is refracted by the three lenses toward a direction nearing an optical axis of the three lenses.

Abstract: The present invention is a catadioptric system having a reticle optical group, a beam splitter, an aspheric mirror, a baffle plate, a folding mirror and a semiconductor wafer optical group. The reticle optical group, the beam splitter and the semiconductor wafer optical group are placed on the same beam axis, different from aspheric mirror and folding mirror axis. The light passes through an image pattern on the reticle and is reflected by the beam splitter onto the aspheric mirror. The aspheric mirror reflects the light back through the beam splitter onto the folding mirror. The folding mirror reflects the light back to the beam splitter. The beam splitter reflects the light onto the semiconductor wafer optical group. A plurality of quarter wave plates can be placed in optical paths between optical elements of the present invention to change polarization of an incoming light.

Abstract: An optical head assembly, method, and procedure which generates and then precisely positions multiple light beams onto a target. The system diffracts an input light source into a multiple light beam pattern, or initially generates a multiple light beam pattern, in which individual beams of the multiple light beam pattern are precisely spaced, corrected, focused and directed through a two axis plane to the target with minimal movement of any components of the optical head assembly. Such individual beams can also be individually modulated.

Abstract: An optical gimbal apparatus has a housing having a first reflector fixed with respect to the housing and having an aperture for transmission or reception of optical energy, and a gimbal having a second reflector arranged along an axis of rotation of the gimbal assembly arranged to rotate the second reflector about the axis of rotation. The second reflector is angled with respect to the axis of rotation and establishing an optical path along the axis of rotation. Additional lenses can be arranged between the first reflector and the second reflector, and between the first reflector and the aperture.

Abstract: A 1X projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.

Abstract: The invention comprises an afocal lens and mirror assembly comprising an objective lens which gathers light from an object and a field lens which transmits light to a driver's eye to provide an image having sufficient brightness, clarity, and accuracy. The light passing between the objective lens and the field lens is conditioned through an assembly of lenses and reflective elements to produce the image.

Abstract: A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

Abstract: An optical device for routing a plurality of optical signals between a first port and a second port is disclosed. The optical device includes a mirror array having a plurality of reflective elements. Each optical input signal is directed by a reflective element in a direction designated by a control signal. The optical device further includes a curved mirror for receiving each directed optical signal from the respective reflective element, and for reflecting each directed optical signal to the first or second port.

Abstract: A projection optical system includes at least one lens, at least one concave mirror, at least one diffractive optical element, a first imaging optical system that includes the at least one lens and the at least one concave mirror, for imaging an intermediate image of an object, a second imaging optical system, having the at least one lens and the at least one diffractive optical element, for projecting the intermediate image onto an image plane, and a field optical system disposed between the first and second imaging optical systems.

Abstract: An oblique projection optical system is compact as compared with the size of the image it presents, offers high imaging performance, produces satisfactorily small distortion, and has a small f-number. The oblique projection optical system is composed of a plurality of powered reflection surfaces, of which the one closest to the projection surface is positively powered and the one second closest thereto is negatively powered. At least one of these two reflection surfaces is a free-form surface, and the one closest to the projection surface has a size larger than half the size of the projection surface.

Abstract: An optical element includes first and second members. The first member has a first surface including a first concave portion. The second member has a second surface including a second concave portion and transmits incoming light therethrough. The first and second members are disposed so that the first and second surfaces are opposed to each other. First and second reflective regions have been formed on the first and second concave portions, respectively. At least part of the incoming light that has been transmitted through the second member is reflected from at least one of the first and second reflective regions.

Abstract: The invention provides a small-sized projection optical apparatus which uses a decentered prism as a projection optical system and in which some contrivances are provided to how to introduce illumination light into a reflection type display device. The projection optical apparatus comprises a reflection type display device 1, a projection optical system 2 for providing projection of an image displayed thereon and an illumination light source for illuminating a display surface. The projection optical system 2 comprises a catadioptric optical element 10 having two rotationally asymmetric curved reflecting surfaces 12, 13 having positive power.

Abstract: A dispersion compensator is formed by an angular dispersion element, a diffracting optical element, and a reflecting mirror. By forming a reflecting surface in free-formed surfaces which are different between Y-Z plane and X-Z plane and shifting a reflecting position on a reflecting surface per wavelengths, dispersion and dispersion slope are compensated by having an optical path length difference per wavelengths. By doing this, it is possible to realize a dispersion compensator which can compensate dispersion and dispersion slope simultaneously with low loss.

Abstract: A tilt projection optical system, that performs enlarged projection from the primary image plane on the reduction side to the second image plane on the enlargement side without forming an intermediate real image while being located at an angled position, has, sequentially from the primary image plane side: a refractive lens group including an aperture; a bending mirror that rotates the optical axis for the optical system after said bending mirror by approximately 90 degrees; and an optical group including at least one reflective surface that has a negative power; wherein the construction is such that the radius of the circle that encompasses all the light rays involved in the image formation on the second image plane and that is parallel to the surfaces of each lens of the refracting lens group enlarges once and then converges in terms of its radius on the enlargement side from the aperture of the refracting lens group, and wherein a predetermined condition is met.

Abstract: An optical system capable of providing a magnification which can be varied comprises a pair of ellipsoidal mirrors [(20, 21)]which are so mounted and arranged that the focus for radiation reflected from one mirror corresponds substantially with the input focus for the other mirror. The mirrors are preferably mounted so that they are pivotable.

Abstract: A compact telescope having a modified Gregorian design comprising three reflecting surfaces. The first reflecting surface is concave and is defined by an outer perimeter and an inner perimeter. The curvature of the first reflecting surface defines a focal plane of the first reflecting surface. The second reflecting surface is optically coupled to the first reflecting surface and is disposed between the first reflecting surface and the focal plane defined by the first reflecting surface. The third reflecting surface is concave and is disposed within the inner perimeter of the first reflecting surface. The curvature of the third reflecting surface is greater than the curvature of the first reflecting surface. The third reflecting surface is optically coupled to the first reflecting surface by the second reflecting surface. An aperture is disposed within the third reflecting surface. Thus light incident upon the first reflecting surface is directed through the aperture.

Abstract: The object of the present invention is to provide a catadioptric imaging system, or the like, which is capable of obtaining a desired image-side NA and an image circle without increasing the size of a reflecting mirror with a smaller number of lenses. This catadioptric imaging system comprises a first imaging optical system and a second imaging optical system, wherein the first imaging optical system is provided with a positive first lens group, an aperture stop, and a positive second lens group in the order from the object side, and the second imaging optical system is provided with a primary mirror comprising a concave first reflecting surface having a first radiation transmitting portion at the center thereof, and a secondary mirror comprising a second reflecting surface having a second radiation transmitting portion at the center thereof.

Abstract: An image reading apparatus includes a laser source, a stage on which an image carrier can be placed, a light detector for detecting light released from the image carrier, and an optical head for condensing the laser beam emitted from the laser source onto the image carrier and condensing light released from the image carrier to lead it to the light detector and being two-dimensionally movable parallel to the stage, and a perforated mirror formed with a hole at a center portion thereof, and fixed in a path of the laser beam so that the laser beam can pass through the hole and light released from the image carrier and condensed by the optical head can be reflected thereby in such a manner that a path of the light is branched off from the path of the laser beam.

Abstract: An optical element of a transparent body has two refracting surfaces formed in surfaces of the transparent body, and a plurality of reflecting surfaces formed in surfaces of the transparent body. Light incident through one refracting surface into the transparent body is reflected successively by the plurality of reflecting surfaces to be guided to the other refracting surface. At least one of the two refracting surfaces and reflecting surfaces has an optical low pass filter.

Abstract: The invention relates to a multi-mirror-system for an illumination system, especially for lithography with wavelengths ≦193 nm comprising am imaging system, wherein said imaging system comprises at least a first mirror and a second mirror, an object plane, an image plane, wherein the imaging system forms an image of the object, an arc-shaped field in said image plane, whereby the radial direction of in the middle the arc-shaped field defines a scanning direction. The multi-mirror-system is characterized in that at least said first mirror and said second mirror of said imaging system are arranged in the optical path of the imaging system in such a position and having such a shape, that the edge sharpness of the arc-shaped field in the image plane is smaller than 5 mm, preferably 2 mm, most preferably 1 mm in scanning direction.

Abstract: The invention discloses a projection optical system for projecting an original image onto a projection surface. The projection optical system comprises a plurality of aspherical curved mirrors, which reflects image light from the original image in sequence and then forms an image on the projection surface. The projection optical system forms a projected image on the projection surface at an aspect ratio different from that of the original image by a combination of reflective actions of the image light on the aspherical surfaces of the plurality of aspherical curved mirrors. Even in a projection optical system having a wide angle of view and a short distance of projection, it is possible to implement a projection optical system that is capable of suppressing distortion and performing an optical aspect conversion.

Abstract: An infra-red camera apparatus having a primary mirror assembly formed in a first molded plastic housing; and, a secondary mirror assembly formed in a second molded plastic housing and disposed in front of and in optical alignment with the primary mirror assembly for collecting an image. The first and second housings snap together for assembly of the camera. A focal plane array is disposed in optical alignment with the primary and secondary mirrors for receiving an image focused thereon by the secondary mirror. A substrate is added for supporting the focal plane array and system electronics, which are responsive to images formed on the focal plane array.

Abstract: The invention relates to an optical device for a system for presenting collimated images including an off-axis spherical mirror. The device has an additional aspherical mirror whose surface forms, in the plane of symmetry of the unfolded optical system, a curve whose radius of curvature is variable. The surface provides for correction of the image of a pupil of an eye given by the spherical mirror and the pupil image is rectified on the optical axis. The surface may be a paraboloid, an ellipsoid and it may exhibit symmetry of revolution.

Abstract: An optical element of a transparent body has two refracting surfaces formed in surfaces of the transparent body, and a plurality of reflecting surfaces formed in surfaces of the transparent body. Light incident through one refracting surface into the transparent body is reflected successively by the plurality of reflecting surfaces to be guided to the other refracting surface. At least one of the two refracting surfaces and reflecting surfaces has an optical low pass filter.

Abstract: This invention comprises a method and apparatus for displaying full color, high resolution dynamically generated real images and allowing the user to have direct interaction with the image. This input/output device provides an intuitive computer/video interface that permits the operator to grab, translate and manipulate a real image. The apparatus comprises a pair of coaxially positioned parabolic mirrors and a video imaging device allowing for 360 degree viewing. The real image, that appears floating within the opening of a viewport, is completely interactive by means of a detection system that tracks the operator, allowing the user to place his/her hand or finger through the image and engage it. Applications for this device are wide ranging, and include, for example, computer-aided design (CAD) and the entertainment/gaming industry by abandoning the conventional keyboard and mouse and allowing the user to have direct contact with the image.

Abstract: The present invention relates to providing enhanced panoramic images with an improved panoramic mirror. A panoramic mirror is provided with a controlled vertical field of view. The controlled vertical field of view improves the resolution of a viewable panoramic image by eliminating portions of unwanted images from the viewable panoramic image.

Abstract: The object of the present invention is to provide a catadioptric imaging system, or the like, which is capable of obtaining a desired image-side NA and an image circle without increasing the size of a reflecting mirror with a smaller number of lenses. This catadioptric imaging system comprises a first imaging optical system and a second imaging optical system, wherein the first imaging optical system is provided with a positive first lens group, an aperture stop, and a positive second lens group in the order from the object side, and the second imaging optical system is provided with a primary mirror comprising a concave first reflecting surface having a first radiation transmitting portion at the center thereof, and a secondary mirror comprising a second reflecting surface having a second radiation transmitting portion at the center thereof.

Abstract: The present invention provides a reflective projection lens set for a digital light processing projector having a digital mirror device transmitting rays of intended and unintended light. The lens set comprises a first and a second mirror. The first mirror has a reflective surface positioned to receive and therefore reflect the rays of intended light. The second mirror has a reflective surface positioned to receive and therefore reflect the rays of intended light reflected from the first mirror, and an opaque surface on the backside positioned to prevent the rays of unintended light from intruding into the path of the rays of intended light.

Abstract: A system for imaging is disclosed herein. The system has a numerical aperture (NA) preferably greater than 0.9, but greater than 0.65, and uses unique illumination entrances to collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical. The high NA catadioptric system can also have a relayed pupil plane, used to select different imaging modes, providing simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

Abstract: An optical element includes an incidence surface, one or more reflecting surfaces reflecting light from the incident surface, an emergence surface, and off-axial curved surfaces causing the light to emerge from the emergence surface. At least one of the incidence surface, the emergence surface and the one or more reflecting surfaces is a surface having diffracting action. The surface having the diffracting action is a curved surface.

Abstract: A mirror projection system for use in a step-and-scan lithographic projection apparatus in which a mask pattern (15) is repetitively scan-imaged on a number of areas of a substrate (20) by means of a beam (b) of EUV radiation having a circular segment-shaped cross-section. This system, which is easier to manufacture at lower cost than a projection system with six or more imaging mirrors, has only five imaging mirrors (5-9) with a good numerical aperture and an acceptable image-ringfield width. An EUV lithographic projection apparatus provided with the new projection system has a wafer throughput which is approximately 50% higher than that of an apparatus provided with a six-mirror projection system. Moreover, it has a compact construction.