Abstract: In a projection printing apparatus, illumination light from a lamp housing illuminates a photomask, and a diffracted light beam from the photomask is focused on an exposed substrate via a projection optical system to project a circuit pattern, the projection optical system including first and second halfmirrors and first and second concave mirrors. The first and second halfmirrors are arranged in symmetry or similar symmetry with respect to a normal to an optical axis of a diffracted light beam directed from the first halfmirror to the second halfmirror. Thus, a projection printing apparatus and a projection printing method are obtained in which unevenness in transmissivity in the projection optical system can be compensated for and steric hindrance or degradation of image characteristics is not caused.

Abstract: An all-refelctive optical system for a projection photolithography camera has a source of EUV radiation, a wafer and a mask to be imaged on the wafer. The optical system includes a first concave mirror, a second mirror, a third convex mirror, a fourth concave mirror, a fifth convex mirror and a sixth concave mirror. The system is configured such that five of the six mirrors receives a chief ray at an incidence angle less than substantially 12.degree., and each of the six mirrors receives a chief ray at an incidence angle of less than substantially 15.degree.. Four of the six reflecting surfaces have an aspheric departure of less than substantially 7 .mu.m. Five of the six reflecting surfaces have an aspheric departure of less than substantially 14 .mu.m. Each of the six refelecting surfaces has an aspheric departure of less than 16.0 .mu.m.

Abstract: A zoom lens comprises a plurality of optical elements each of which includes a transparent body having two refracting surfaces and a plurality of reflecting surfaces and is arranged so that a light beam enters the transparent body from one of the two refracting surfaces, repeatedly undergoes reflection, and exits from the other of the two refracting surfaces, and/or a plurality of optical elements on each of which a plurality of reflecting surfaces made from front surface mirrors are integrally formed, and each of which is arranged so that an entering light beam repeatedly undergoes reflection by the plurality of reflecting surfaces and exits from the optical element.

Abstract: A corrector mirror folds the optical path between the objective and relay portions of a three-mirror anastigmat. The corrector mirror is a non-powered mirror having a nominally flat but higher order aspheric surface. By placing the corrector mirror between the objective portion and an intermediate image formed by the objective portion, the field offset of the anastigmat can be significantly increased. A large field offset makes the off-axis anastigmat ideal for use with an on-axis dewar for infrared imaging applications.

Abstract: A variable magnification optical system comprises at least three optical units which are a first moving optical unit, a fixed optical unit and a second moving optical unit. The three optical units are arranged in that order in a propagation direction of light, and a variation of magnification is effected by a relative movement between the first moving optical unit and the second moving optical unit.

Abstract: An optical system compatible with short wavelength (extreme ultraviolet) An optical system compatible with short wavelength (extreme ultraviolet) radiation comprising four reflective elements for projecting a mask image onto a substrate. The four optical elements comprise, in order from object to image, convex, concave, convex and concave mirrors. The optical system is particularly suited for step and scan lithography methods. The invention enables the use of larger slit dimensions associated with ring field scanning optics, improves wafer throughput and allows higher semiconductor device density. The inventive optical system is characterized by reduced dynamic distortion because the static distortion is balanced across the slit width.

Abstract: An all reflective ring field projection optic system for use in scanning photolithography used in the manufacture of semiconductor wafers. The projection optics are designed for wavelengths in the extreme ultraviolet ranging from 11 to 13 nm to provide an arcuate image field for a reduction step and scan photolithography system. A sequence or configuration of mirrors from the long conjugate end to the short conjugate end consists of a convex, concave, convex, and concave mirror with an aperture stop being formed at or near the second convex mirror. This sequence of mirror powers provides a relatively large image field size while maintaining a relatively compact reticle wafer distance of less than 900 mm. The projection optics form an instantaneous annual field of up to 50 mm.times.2 mm at the wafer, permitting scanning to cover a field on a wafer of at least 50 mm.times.50 mm, greatly increasing throughput. The optical projection system can print features as small as 0.05 microns.

Abstract: A reflective optical system includes, in traveling order of light, a correction plate having an aspherical surface and a reflecting mirror for concentrating the light. An image is formed out of an optical path between the correction plate and the reflecting mirror.

Abstract: Catadioptric optical systems are disclosed that comprise, objectwise to imagewise, a positive first lens, a meniscus second lens having a convex face oriented objectwise, a meniscus third lens having a concave face oriented objectwise, and a concave spherical mirror having a concave face oriented objectwise. Light from an object passes through the first through third lenses and reflects from the concave mirror to form an image between the third lens and the concave mirror. The system satisfies the condition .vertline.f.sub.123 .vertline./f>10, where f.sub.123 is the aggregate focal length of the first through third lenses, and f is an overall focal length of the system. The first and second lenses are preferably made of a specified optical material, collectively have a positive refractive power, and fulfill the condition .vertline.f.sub.12 .vertline./.vertline.f'.sub.12 .vertline.>1, where f.sub.12 is the aggregate focal length of the first and second lenses, and f'.sub.

Abstract: This invention provides a catadioptric optical system for achieving excellent imaging performance to obtain a resolution of quartermicron order. The catadioptric optical system is an optical system for transferring a reduced image of a pattern on a first plane onto a second plane and includes a beam splitter, an input lens group for guiding a light beam having a predetermined wavelength from the first plane to the beam splitter, an output lens group for guiding the light beam from the beam splitter to the second plane, a first concave mirror having an enlargement magnification, and a second concave mirror having a reduction magnification. The first concave mirror is arranged in an optical path of the light beam incident from the input lens group on the beam splitter and passing through the beam splitter to cause the passing light beam to be incident on the beam splitter again.

Abstract: A solid catadioptric lens (10) includes substantially planar input surface (14), primary concave mirror 18, secondary convex mirror (22) and substantially spherical exit surface (24). The lens is composed of solid material (12) chosen according to the particular imaging application in which the lens is to be used. Radiation enters lens through input surface (14), travels through solid material (12) and is reflected off of primary mirror (18). Radiation subsequently passes internally through solid material (12) and is reflected off of secondary mirror (22). Subsequent to being reflected off of secondary mirror (22), radiation (30) passes through solid material (12) and out of lens (10) through spherical exit surface (24) and onto detector array (34) for imaging purposes.

Abstract: A system and method for wide angle imaging create a high resolution image using a convex primary mirror concentrically positioned relative to a concave secondary mirror and one or more detectors spherically juxtaposed. The radii of the primary and secondary mirrors are related by the square of the "golden ratio" to reduce low order aberrations. A fiber optic faceplate coupled to each detector corrects field curvature of the image which may then be detected with a conventional flat detector, such as a CCD camera.

Abstract: An inverted Galilean zoom view finder equipped with a framing mark projection feature comprises in order from the object side to the image side a positive power objective lens L.sub.1 which is a by-convex singlet having a strong curvature of object side surface, a negative power lens L.sub.2 which is a by-concave singlet having a strong curvature of image side surface, and a negative power eye piece lens L.sub.3 which is a meniscus singlet having a strong curvature of concave surface at the object side. The negative power lens L.sub.2 is movable relative to both positive power objective lens L.sub.1 and negative power eye piece lens L.sub.3 along the optical axis X to vary the magnitude of the finder lens system, and the eye piece lens is formed with a reflective surface around a half transparent surface at the image side for reflecting back an image of framing mark and directing the image into the view of the zoom view finder.

Abstract: There is provided an objective lens for focusing a subject light to form a real image on a predetermined focal plane, an eyepiece through which the real image is observed, and the first and second prism assemblies between the objective lens and the eyepiece for erecting an inverted image. The first and second prism assemblies are arranged at a predetermined distance away from each other such that the exit surface of the first prism assembly and the incident surface of the second prism assembly face each other across the focal plane. As a result, the dust on the whole surface of the prism assemblies and the like are made inconspicuous. Moreover, a visual field frame is provided on the focal plane, so that the visual field frame can be prevented from becoming out of focus and the border of the visual field can be seen clearly. Furthermore, a virtual image of a mark such as a target mark is formed in the Albada method.

Abstract: A lens system particularly suitable for low light, high speed applications has a primary mirror (31, 51) having a spherical reflecting surface and a secondary mirror (37, 52) having a spherical reflecting surface arranged to receive light reflected from the primary mirror. Both mirrors have the same center of curvature. The lens system includes image relay lens (47, 56) and a transfer lens (35, 55) arranged to image the center of curvature to a location at the center of the aperture stop (43, 57) of the image relay lens. This relay lens may include a spherical mirror located so that its center of curvature is coincident with the center of the aperture stop, thus creating a singular optical center of curvature for the whole lens system. The relay lens may include a meniscus corrector lens (33, 41, 42) which is located close to the aperture stop and which is also concentric with the common center of curvature.

Abstract: An optical assembly using a centrally-obscured catadioptric optical objece that provides two different focal planes using the same set of optics. Both optical paths share the same optic axis and common line-of-sight. One focal plane is optimized for use with a high performance GEN II image intensifier tube, and the other is used for either laser receiver or emitter devices.

Abstract: An optical guide (10, 40, 50, 60) for horizontally aligning two vertically stacked images generated by one or two SLMs. The optical guide has a channel separator (10a) that directs both images along two different paths. A pair of aligning reflectors (10b and 10c) on each path vertically shift the images with respect to each other so that at least part of the images on the first path are aligned side-by-side with at least part of the images on the second path. The channel separator (10a) then redirects the images to the image plane 15. Along both paths, at least two of the reflecting surfaces of channel separator (10a) or aligning reflectors (10b and 10c) are optically powered so as to change the width or height of the images.

Abstract: An optical guide for horizontally aligning two vertically stacked images generated by one or two SLMs. The optical guide has a beam splitter that directs both images along two different paths. A first and a second aligning reflectors each disposed along each path for aligning the images. The beam splitter then redirects the images to the image plane 15. Along both paths, at least the aligning reflectors are optically powered so as to change the width or height of the images.

Abstract: A first partial optical system including a first group of lenses having a positive refractive power, a first concave reflection mirror and a second group of lenses having a positive refractive power, for forming a primary reduced image of an object, a second partial optical system including a second concave reelection mirror and a third group of lenses having a positive refractive power, for further reducing the primary reduced image and refocusing it, and a reflection mirror arranged between the first partial optical system and the second partial optical system, for deflecting a light path are arranged in a sequence as viewed from the object. A good image-forming ability as a projection optical system for fabricating a semiconductor device is attained with a simple construction.

Abstract: The telescope includes at least one primary concave mirror (MI) for receiving an incoming image and relay optics for enlarging the image reflected by the primary mirror. The relay optics comprise a secondary mirror (M2) and a tertiary mirror (M3), each having a central aperture (12, 13) and each being positioned coaxially with the primary mirror (M1). The secondary mirror (M2) receives the image reflected by the primary mirror (M1) through the central aperture (13) of the tertiary mirror (M3). The tertiary mirror (M3), positioned close to the focal plane of the primary mirror (M1), receives the image reflected by the secondary mirror (M2) and reflects that image through the central aperture of the secondary mirror (M2).

Abstract: A compact and lightweight visual display apparatus having high resolution and a large exit pupil diameter, which enables observation of an image that is flat and clear as far as the edges of the visual field at a wide viewing angle of 30.degree. or more using a planar two-dimensional image display device. The apparatus uses a concentric optical system which provides a flat image surface (4) as an ocular optical system. The concentric optical system has at least two semitransparent reflecting surfaces (2 and 3) which have respective centers of curvature disposed in the vicinity of a pupil (1) and which have respective concave surfaces directed toward the pupil. The semitransparent reflecting surfaces are disposed so that each semitransparent reflecting surface transmits light rays at least once and reflects them at least once.

Abstract: An optical system including at least one lens and erecting mirrors designed and arranged to give an inherent aperture and field greater in one direction than another direction. By using a low power eyepiece lens it is possible to arrange for a user's eye or eyes to be further behind the eyepiece lens so that the user can wear normal spectacles to correct for eye defects. When a pair of the optical systems is used in a pair of binoculars, it is possible for the exit pupils to be in a form of horizontal slots so the systems do not have to have adjustable spacing to allow for a particular user's eye separation.

Abstract: A catadioptric reduction system operating in the deep ultraviolet range projects a reduced image of a mask on a substrate. A reducing optic made of a material transmissive to deep ultraviolet light has a concave front face covered by a partially reflective surface and a convex back face covered by a concave reflective surface surrounding a central aperture. The partially reflective surface transmits a portion of the light passing through the mask to the concave reflecting surface, which returns a portion of the transmitted light to the partially reflective surface. A portion of the returned light is reflected by the partially reflective surface on a converging path through said central aperture for producing a reduced image of the mask on the substrate.

Abstract: A concentric optical system usable as either an imaging optical system or an ocular optical system, which enables a clear image to be obtained at a field angle of up to about 90.degree. and with a pupil diameter of up to about 10 millimeters with substantially no chromatic aberration. The concentric optical system includes a first optical component having a first semitransparent reflecting surface (2), and a second optical component having a second semitransparent reflecting surface (3). The first and second semitransparent reflecting surfaces (2 and 3) have respective centers of curvature disposed at approximately the same position (1). The first and second optical components are different in dispersion from each other.

Abstract: An all reflective telescope system generally includes two spherical mirrors, one mild aspheric mirror and one aspheric mirror all centered about a common telescope axis and imaging on a focal surface for easy manufacture, very long focal length, wide field of view, high resolution, compact volume and low weight particularly well suited for space observations, and in a detailed form includes a sectional concave hyberboloidal primary mirror, a circular mild convex ellipsoidal secondary mirror, a sectional concave spherical tertiary mirror and a sectional convex spherical quaternary mirror for focusing an extended distant object onto a concave cylindrical focal surface having a linear array of charge coupled detectors for high resolution imagery, the telescope having high performance operation near diffraction limits and operating at detector resolution limits.

Abstract: A reflective scanning telescopic system comprises: a primary ellipsoidal mirror for collecting incoming light, a secondary hyperbolic mirror for reflecting the light collected by the primary mirror axially through the primary mirror, a tertiary ellipsoidal mirror, disposed behind the primary mirror for receiving the light from the secondary curved mirror, and a double bounce fold mirror for directing light reflected from the first fold mirror to the tertiary mirror and for reflecting light from the tertiary mirror past the first fold mirror to a light imaging system. Ideally, the telescopic system is mounted on a substantially rigid optical bench on a gimbal for supporting the optical bench and enabling the optical bench to scan in two dimensions by pivoting along roll and pitch axes.

Abstract: A new panoramic/fish-eye imaging system for projecting a 360 degree cylindrical field of view onto a two-dimensional annular format is described. It is rotationally symmetrical and comprises two groups of optics, each having very distinct functions. The front group of optics is basically a catoptric system employing a concave and convex mirror for converting the extreme field angles to a more manageable intermediate image. The rear group acts as a relay lens to transfer the intermediate image formed by the front group to some accessible location downstream. For improved overall performance, aberration compensation of the front group is included in the design of the relay optics. A further refinement to the design is the inclusion of an additional optical element in the form of refracting negative shell located in front of the entire arrangement. This increases the effective field of view and is useful when fields of view exceeding 180 degrees are required.

Abstract: An optics assembly for observing a panoramic scene. The optics assembly includes a plurality of optical elements. A first element redirects light from the panoramic scene. The optical power of the first element forms an imaginary pupil. The energy from the first element is redirected about 90 degrees, forming an annular path. A second element receives the redirected light and re-images the imaginary pupil to form a real pupil. This portion of the energy continues to be in an annular form. A third element includes an optical relay system having a group of reimaging optics. The third element receives light from the second element while relaying the real pupil into the reimaging optics. It also establishes the focal length of the optics assembly, corrects pupil aberrations produced at the real pupil, corrects field aberrations and produces an annular image on a flat focal plane. The optical relay system interfaces with the second element through the use of the real pupil.

Abstract: An optical guide for horizontally aligning two vertically stacked images generated by one or two SLMs. The optical guide has a channel separator that directs both images along two different paths. A pair of aligning reflectors on each path vertically shift the images with respect to each other so that at least part of the images on the first path are aligned side-by-side with at least part of the images on the second path. The channel separator then redirects the images to the image plane. Along both paths, at least two of the reflecting surfaces of channel separator or aligning reflectors are optically powered so as to change the width or height of the images.

Abstract: A confocal imaging system for use in conjunction with an optical microscope, in which a slit-shaped or bar-shaped beam of light is scanned over the specimen, descanned with a fixed mask and rescanned for viewing or recording, the focusing and scanning system being constituted by wholly reflective optical systems.

Abstract: A rear view system for a vehicle (10) includes in combination a light transmitting member (2) and a light reflective medium (16) spatially displaced from the member. The member has a first face (4) for light emergence from which in use light rays are directed towards the medium (16) and a second face (6) for light incidence, each face being disposed on a respective side of a median plane (8). The member (2) comprises a plurality of elemental prismatic sections, the prismatic angles of the elemental sections progressively changing along the length of the member whereby rays of refracted light emerging through the first face are in parallelism or substantial parallelism one with the other irrespective of the angles of incidence of the rays. The shape of the light transmitting member (2) is such as to afford a wide angular scope of view to the system thereby to enhance safety.

Abstract: A reduction projection system (10) characterized by large numerical aperture has an unobscured optical path without the need to resort to truncated lens elements. The system includes first and second reduction stages. The first reduction stage includes a first mirror group (20) and a first lens group (30). The second reduction stage includes a second mirror group (40) and a second lens group (50). Together, the first mirror group and the first lens group form an intermediate reduced image of the object at an intermediate image region (70). The second mirror group and the second lens group form a further reduced image at an image plane (15).

Abstract: In an infrared (IR) microscope for a Fourier transform (FT) infrared spectrometer with a Cassegrain mirror-lens with which an incident beam (15) can be focused via a convex mirror (16) and a concave mirror (17) onto a first point-shaped region (19) on the surface of a sample (20) under an angle of incidence .beta.<60.degree.

Abstract: A lightweight telescopic lens of monolithic construction is revealed that corporates additional refractive and reflective curved surfaces to produce all the optical functions performed by an ordinary telescope. A pair of such lenses may be mounted in an eyeglass frame to yield a telescope that can be worn like a pair of eyeglasses, thus affording superior image stability as well as free the user's hands. Minor modifications involving the use of several menisci of a different index of refraction from that of the core lens can be made to achieve achromatism of emergent light from achromatic input light. The entire core lens can also be shaped into a meniscus to take advantage of the principle of total internal reflection, thereby increasing the light-gathering aperture while at the same time rendering the lens even more compact and lightweight.

Abstract: To develop a design form for a Cassegrain-type telescope with spherical primary and secondary mirrors, which is well-corrected for chromatic aberration as well as for geometrical aberrations including spherical aberration, coma and astigmatism, the designer begins with a "starting design form" for a conventional Cassegrain-type telescope with spherical primary and secondary mirrors, and then modifies the "starting design form" by:(a) positioning lens elements of a corrector lens group along an optic axis inside the front focal plane of the spherical primary mirror, where the lens elements of the corrector lens group are made of optical materials that enable a desired degree of correction for chromatic aberration to be achieved;(b) providing a reflective coating on a central portion of the back surface of the rear-most lens element of the corrector lens group, which replaces the secondary mirror of the "starting design form" and becomes the secondary mirror of the telescope;(c) locating the entrance pupil of t

Abstract: A confocal imaging system for use in conjunction with an optical microscope, in which a silt-shaped or bar-shaped beam of light is scanned over the specimen, descanned with a fixed mask and rescanned for viewing or recording, the focussing and scanning system being constituted by wholly reflective optical systems.

Abstract: A laser retroreflector array is provided having an array of cat-eye retroreflectors each with an image forming objective through which the laser beam passes and a partial mirror at the focal plane of the image forming objective. By using the cat-eye retroreflectors to reflect the laser beam, the field of view can be angularly limited so that only one retroreflector in the array at a time reflects the laser beam.

Abstract: An antivibration reflex lens provided with an antivibration correcting optical system is of a two-group construction having a first lens group which is a substantially afocal system having a forward unit of positive refractive power and a rearward unit of negative refractive power, and a second lens group of positive refractive power. The forward unit in the first lens group has, in order of light incidence, a concave reflecting surface and a convex reflecting surface. The rearward unit is a lens unit having negative refractive power, and focusing is effected by this lens unit. Further, the whole or part of the second lens group is displaceable across the optical axis to thereby effect antivibration correction.

Abstract: A compound prism including a plurality of unit prisms which have reflective interfaces defined by outer and/or inner surfaces thereof and which are arranged so that light is reflected by an inner surface of the interface of one of the unit prisms and by an outer surface of the interface of another unit prism.

Abstract: The present invention is directed to a light transmitting lens for transmitting substantially all of the light emitted by a light source, such as a light emitting diode. The light transmitting lens includes a light transmitting structure having an outer surface disposed between first and second sides. Located on the first side is a tubular concave surface, preferably terminated by a hemispherical convex lens. Located on the second side is an opening, preferably a spherical surface. Located within the opening, preferably at the center of the spherical surface, is the light source, preferably a light emitting diode. Some of the light emitted by the light source is captured by the convex lens and transmitted thereby. The light emitted by the light source but not captured by the convex lens is reflected off the outer surface of the structure and thereby transmitted.

Abstract: An optical system (10) for producing dual fields of view simultaneously. The system (10) includes a first optical system (12) for producing a first field of view image and a second optical system (36) for producing a second field of view image where the angular displacement of the second field of view is different from that of the first field of view. A dichroic beamsplitter (22) is disposed in the present invention so as to reflect light from the first optical system (12). The dichroic beamsplitter (22) is also disposed so as to simultaneously transmit light from the second optical system (36). As a result, the reflected light (20) is primarily composed of light of a first wavelength band and the transmitted light is primarily composed of a second wavelength band. The light from the two different fields of view are then directed to a dual filter (32) which passes the first wavelength band in one portion and passes the second wavelength band in another portion.

Abstract: The present invention relates to an optical element and catadioptric optical systems using the optical element. The optical element has a spherical surface with a reflective layer formed on at least a portion of the surface, and is formed of a radiant energy transmitting material having a radial gradient index of refraction. The catadioptric optical systems include at least two optical elements at least one of which is refractive, and at least one of which has a gradient index therein. One optical system includes first and second optical elements disposed sequentially along a longitudinal axis of the system. The second optical element is the optical element with the gradient index. The first optical element is formed of a homogeneous light transmitting material and includes a spherical surface, and a reflective layer formed on a central portion of one of the spherical surface.