For Producing A Double Pass Patents (Class 359/732)
  • Patent number: 10384152
    Abstract: Embodiments of the present invention include a backscatter reductant anamorphic beam sampler. The beam sampler can be implemented to measure a power of a reference beam generated by an electromagnetic radiation source in proportion to a power of a working beam. The beam sampler can provide astigmatic correction to a divergence of the working beam along one axis orthogonal to a direction of propagation. The beam sampler can further be implemented to prevent backscatter from impinging upon a photodetector of the beam sampler resulting in a reduction of error and instability in measurements taken by the beam sampler.
    Type: Grant
    Filed: June 7, 2016
    Date of Patent: August 20, 2019
    Inventor: Perry Palumbo
  • Patent number: 9804318
    Abstract: A lighting device includes an LED, a light guiding member, and a mask member. The light guiding member has a cut to provide a directivity to light emitted from the LED. The cut is provided at a position corresponding to the LED on an emission surface side of the light guiding member. The mask member is disposed on an emission surface side of the cut to block the light emitted from the LED.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: October 31, 2017
    Assignee: HONDA MOTOR CO., LTD.
    Inventor: Kohei Noguchi
  • Patent number: 9372328
    Abstract: A projection system includes: a relay system that focuses light having exited through a first image plane on a second image plane; and an enlarging system that enlarges and projects an image focused on the second image plane on a third image plane, wherein the relay system includes a first lens element on which the light having exited through the first image plane is incident, the first lens element having positive refracting power, a reflective member that reflects a light having passed through the first lens element, the reflective member having positive refracting power, and a second lens element on which a light reflected off the reflective member is incident and which focuses the light reflected off the reflective member on the second image plane, the second lens element having positive refracting power.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: June 21, 2016
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Eiji Morikuni
  • Patent number: 8913325
    Abstract: The invention provides a decentration optical system comprising at least five optical surfaces. The optical surfaces are each decentered with respect to an axial chief ray in the Y-Z plane in the XYZ coordinate space, and at least one surface is decentered in the X-Z plane orthogonal to the Y-Z plane. At least two of the multiple optical surfaces are rotationally asymmetric surfaces, and at least one of the at least two rotationally asymmetric surfaces is a rotationally asymmetric surface having an X odd-numbered degree term.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: December 16, 2014
    Assignee: Olympus Corporation
    Inventor: Koichi Takahashi
  • Publication number: 20140063324
    Abstract: There is provided a wide angle lens module including: a first lens having negative refractive power; a second lens having positive refractive power and at least one first reflection surface; and a third lens having the positive refractive power and at least one second reflection surface.
    Type: Application
    Filed: November 8, 2012
    Publication date: March 6, 2014
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Tae Young KIM, Bok Sun An
  • Patent number: 8665536
    Abstract: A catadioptric objective configured to inspect a specimen is provided. The catadioptric objective includes a Mangin element having one surface at a first axial location and an extension element positioned together with the Mangin element. The extension element provides a second surface at a second axial location. Certain light energy reflected from the specimen passes to the second surface of the extension element, the Mangin element, and through a plurality of lenses. An aspheric surface may be provided, and light energy may be provided to the specimen using diverting elements such as prisms or reflective surfaces.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: March 4, 2014
    Assignee: KLA-Tencor Corporation
    Inventor: J. Joseph Armstrong
  • Publication number: 20140051157
    Abstract: In a particle analyzing apparatus including a capillary for passing through a fluid containing particles to be analyzed, an optical system is employed to collect fluorescent light emitted from particles or substances labeled to the particles with improved collection efficiency preserving resolution of the instrument. The optical system may include a first collection lens attached to the capillary and a first reflection element arranged adjacent to the first collection lens configured to reflect fluorescent light of one or more wavelengths. The optical system may include a second collection lens attached to the capillary and a second reflection element arranged adjacent to the second collection lens configured to reflect fluorescent light of one or more wavelengths.
    Type: Application
    Filed: October 28, 2013
    Publication date: February 20, 2014
    Applicant: EMD MILLIPORE CORPORATION
    Inventor: Fedor Ilkov
  • Publication number: 20130208367
    Abstract: Optical systems configured to withstand operation in high acceleration and varying temperature environments, and methods of assembling the same. In one example, an imaging optical apparatus includes a primary minor made of an unreinforced polymer, a secondary mirror made of the unreinforced polymer and optically coupled to the primary minor, a field lens optically coupled to the secondary minor, and a strut having a plurality of cross-struts and mounting features configured to mount the primary minor, the secondary mirror and the field lens. In some examples, the imaging optical apparatus further includes an outer retainer disposed behind the primary minor and coupled to the strut, and an inner retainer disposed behind the field lens and coupled to the strut, the outer and inner retainers configured to structurally support the primary minor and the field lens and to accommodate deflections of the primary minor.
    Type: Application
    Filed: February 10, 2012
    Publication date: August 15, 2013
    Applicant: Raytheon Company
    Inventors: John A. Thomas, Thomas H. Lind, Ronald L. Roncone, Gary H. Johnson
  • Patent number: 8384999
    Abstract: An optical module for head mounted displays and other applications comprises: an optical substrate and optical superstrate having inter-engaging ridged surfaces. A reflective layer is formed on at least one of the surfaces. An index matching material may be located between the surfaces. A region that receives a projected image, from a projector, directs rays launched from the projector onto the ridged surfaces, so that in use a viewer perceives an augmented image. The augmented image comprising reflected rays from the projector and transmitted rays from an object located on an opposite side of the module to that of the viewer.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: February 26, 2013
    Assignee: Cerr Limited
    Inventors: David Nicholas Crosby, David Hayes, Philip Andrew Greenhalgh
  • Publication number: 20120140221
    Abstract: A device (FIG. 2) that uses light to detect particles in fluid is disclosed. The device incorporates a lens and reflector on a flow cell to increase the numerical aperture of a subsequent light collection system without any increase in spherical aberration.
    Type: Application
    Filed: July 12, 2006
    Publication date: June 7, 2012
    Inventor: Scott H. Salton
  • Patent number: 8113667
    Abstract: A projection optical system satisfies a conditional formula: 0.01<{(tan ?f1?tan ?f2)?(tan ?n1?tan ?n2)}·(?2/?1)<0.
    Type: Grant
    Filed: February 25, 2008
    Date of Patent: February 14, 2012
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Keiko Yamada, Kohtaro Hayashi, Soh Ohzawa, Masayuki Imaoka
  • Patent number: 7898750
    Abstract: An optical system having an optical axis OA and comprising: a light source; a reflector; a lens component situated therebetween; and a receiver. The light source and the receiver are separated, situated substantially symmetrically and decentered with respect to the OA. The lens component collimates the light beam from the light source. The reflector intercepts the collimated beam and to reflects it to the receiver through the lens, the collimated beam being at an angle to the optical axis. The lens component is structured to provide on the receiver an image of the light source characterized by (i) 0.05<astigmatism<0.1 waves RMS, when the lens component is not misaligned with respect to the average emission angle of the light source; and (ii) astigmatism<0.05 RMS when the lens component is tilted by of 2 to 5 degrees with respect to the average emission angle of the light source.
    Type: Grant
    Filed: February 26, 2009
    Date of Patent: March 1, 2011
    Assignee: Corning Incorporated
    Inventor: Jacques Gollier
  • Patent number: 7898749
    Abstract: A variety of lenses, lens assemblies, imaging devices, applications for such lenses, assemblies and devices, and related methods of operation and manufacturing are disclosed. At least some embodiments of the invention relate to a lens that includes first and second inward-facing surfaces that are each at least partly reflective. The lens further includes a first aperture that is positioned around at least a portion of an outer periphery of one of the first and second inward-facing surfaces, and a second aperture existing proximate a central region of the lens. The light proceeding within the lens between the first and second inward-facing surfaces is reflected at least twice on at least one of the first and second inward-facing surfaces as it travels between the first aperture and the second aperture.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: March 1, 2011
    Assignee: The Regents of the University of California
    Inventors: Joseph Ford, Eric Tremblay, Shaya Fainman
  • Patent number: 7777963
    Abstract: The invention relates to a method -for improving the imaging properties of a micro lithography projection objective (50), wherein the projection objective has a plurality of lenses (L1, L2, L3, L4, L5, L6, L7, L8) between an object plane and an image plane, a first lens of the plurality of lenses being assigned a first manipulator (ml, Mn) for actively deforming the lens, the first lens being deformed for at least partially correcting an aberration, at least one second lens of the plurality of lenses furthermore being assigned at least one second manipulator, and the second lens being deformed in addition to the first lens. Furthermore, a method is described for selecting at least one lens of a plurality of lenses of a projection objective as actively deformable element, and a projection objective.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: August 17, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Olaf Conradi, Heiko Feldmann, Gerald Richter, Sascha Bleidistel, Andreas Frommeyer, Toralf Gruner, Wolfgang Hummel
  • Publication number: 20100110565
    Abstract: An optical element that is made of a transparent medium L1 rotationally symmetric relative to the central axis 2 with a refractive index greater than 1, wherein the transparent medium L1 has a first transmissive surface 11, a first reflective surface 12, a second reflective surface 13 arranged at an opposite side to the image plane 5 relative to the first reflective surface 12 and a second transmissive surface 14 arranged at the image plane 5 side relative to the second reflective surface 13 and that the flux of light entering the transparent medium L1 goes into it by way of the first transmissive surface 11 so as to be reflected to the opposite side to the image plane 5 by the first reflective surface 12 and then to the image plane 5 side by the second reflective surface 13 to form an optical path before going out from the transparent medium L1 at the image plane 5 side by way of the second transmissive surface 14 in the order of forward ray tracing.
    Type: Application
    Filed: January 7, 2010
    Publication date: May 6, 2010
    Inventor: Takayoshi Togino
  • Patent number: 7564633
    Abstract: A catadioptric imaging system for micro-lithographic projection features a high numerical aperture objective where most of the focusing power is produced by reflection and refraction angles are limited to avoid additional aberration. A field correcting optic is appended to a Mangin mirror in an immersive configuration for raising the numerical aperture. The optical connection between the Mangin mirror and the field correcting optic is arranged to control refraction angles by limiting angles of incidence or refractive index differences. A radially symmetric polarizing effect is achieved in a pupil to improve image contrast.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: July 21, 2009
    Assignee: Corning Incorporated
    Inventor: James Edson Webb
  • Patent number: 7561346
    Abstract: One or more disc-shaped angular shear plates each include a region thereon having a thickness that varies with a nonlinear function. For the case of two such shear plates, they are positioned in a facing relationship and rotated relative to each other. Light passing through the variable thickness regions in the angular plates is refracted. By properly timing the relative rotation of the plates and by the use of an appropriate polynomial function for the thickness of the shear plate, light passing therethrough can be focused at variable positions.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: July 14, 2009
    Assignee: Applied Energetics, Inc
    Inventors: Mitchell C. Ruda, Alan W. Greynolds, Tilman W. Stuhlinger
  • Patent number: 7532414
    Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.
    Type: Grant
    Filed: August 2, 2007
    Date of Patent: May 12, 2009
    Assignee: Nova Measuring Instruments, Ltd.
    Inventors: David Scheiner, Michael Winik, Yakov Lyubchik
  • Publication number: 20090015899
    Abstract: An true time delay in optical signals using a Fourier cell is provided. One embodiment includes: an input array for inputting an array of light beams; at least a portion of a lens; a plurality of micromirrors located at a distance away from the lens that is approximately equal to the focal length of the lens; one or more mirrors located at a distance away from the lens that is approximately equal to the focal length of the lens; and one or more delay blocks, at least a portion of which are located at a distance away from the lens that is approximately equal to the focal length of the lens. The micromirrors may include a plurality of individually controllable pixels for directing one or more light beams in the array of light beams through the lens and onto either a mirror or a delay block.
    Type: Application
    Filed: May 8, 2007
    Publication date: January 15, 2009
    Inventor: David J. Rabb
  • Patent number: 7463422
    Abstract: A method of determining materials of lenses contained in an optical system of a projection exposure apparatus is described. First, for each lens of a plurality of the lenses, a susceptibility factor KLT/LH is determined. This factor is a measure of the susceptibility of the respective lens to deteriorations caused by at least one of lifetime effects and lens heating effects. Then a birefringent fluoride crystal is selected as a material for each lens for which the susceptibility factor KLT/LH is above a predetermined threshold. Theses lenses are assigned to a first set of lenses. For these lenses, measures are determined for reducing adverse effects caused by birefringence inherent to the fluoride crystals.
    Type: Grant
    Filed: January 25, 2007
    Date of Patent: December 9, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Vladimir Kamenow, Daniel Kraehmer, Michael Totzeck, Toralf Gruner, Aurelian Dodoc, David Shafer, Wilhelm Ulrich, Rudolf von Buenau, Hans-Juergen Mann, Alexander Epple
  • Publication number: 20080158523
    Abstract: System and method for thin projection display systems. An embodiment comprises a light source, an array of light modulators optically coupled to the light source, a lensed mirror optically coupled to the array, and a controller electronically coupled to the array and to the light source. The array produces images on a display plane by modulating light from the light source based on image data and the controller provides light commands to the light source and load image data into the array. The lensed mirror reflects modulated light from the array onto the display plane, the lensed mirror comprising a refractive portion and a reflective portion. The refractive portion of the lensed mirror helps to increase the light bending capability to help reduce the overall thickness of a projection display system.
    Type: Application
    Filed: December 27, 2006
    Publication date: July 3, 2008
    Inventors: John David Jackson, Steven Edward Smith, Duane Scott Dewald
  • Patent number: 7391580
    Abstract: A mono-bloc catadioptric imaging lens comprising a solid body and a single-focal Maksutov type construction characterized by two refractive surfaces and two reflective surfaces wherein all surfaces are surfaces of revolution and wherein at least one surface is aspheric.
    Type: Grant
    Filed: October 10, 2006
    Date of Patent: June 24, 2008
    Inventor: Zeev Maresse
  • Publication number: 20080130138
    Abstract: A radar apparatus has a light receiver that includes a refractive body and a mirror on an opposite surface of the refractive body relative to an incidence surface of the refractive body for receiving an incident light from an outside of the radar apparatus. The refractive angle of the refractive body is configured to be smaller than an incident angle of the incident light, and the mirror is configured to reflect at least a portion of the incident light toward a first light receiving element that is disposed on the incidence surface with its light receiving face facing the incidence surface of the refractive body.
    Type: Application
    Filed: June 12, 2007
    Publication date: June 5, 2008
    Applicant: DENSON CORPORATION
    Inventors: Hisaya Katoh, Noriyuki Matsushita
  • Patent number: 7346261
    Abstract: There disclosed is an image display apparatus having a light source, a scanning member for deflecting a light from the light source to scan a predetermined surface with the light to form a two-dimensional image thereon, a first optical system for guiding a light deflected by the scanning member to the predetermined surface and a second optical system for guiding a light from the two-dimensional image formed onto the predetermined surface to an observer. There exists, in optical paths of the first optical system and the second optical system, a common optical element with a plurality of optical surfaces including refractive surfaces and reflective surfaces formed on a same medium and the first optical system and the second optical system share a part of optical surfaces of that optical element.
    Type: Grant
    Filed: December 28, 2005
    Date of Patent: March 18, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Akira Yamamoto, Shuichi Kobayashi
  • Publication number: 20080062538
    Abstract: A compact wide-angle imaging lens system includes, in order from the object side to the image side, a first lens (1) of negative refractive power, a free-form surface prism (2) of positive refractive power, a second lens (3) of positive refractive power and a third lens (7) of negative refractive power. The free-form surface prism has an incidence surface (S3), a reflection surface (S4) and an exit surface (S5). The first lens and the free-form surface prism are arranged in a juxtaposed manner, and the second and third lenses are disposed below the free-form surface prism and adjacent to the image side. The free-form surface prism functions equivalent to a right-angle prism with aspheric surfaces.
    Type: Application
    Filed: September 7, 2007
    Publication date: March 13, 2008
    Applicant: Asia Optical Co., Inc.
    Inventor: Chen-Cheng Liao
  • Patent number: 7317571
    Abstract: A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.
    Type: Grant
    Filed: August 2, 2005
    Date of Patent: January 8, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takashi Kato, Chiaki Terasawa, Hirohiko Shinonaga
  • Patent number: 7253970
    Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.
    Type: Grant
    Filed: December 3, 2004
    Date of Patent: August 7, 2007
    Assignee: Nova Measuring Instruments Ltd.
    Inventors: David Scheiner, Michael Winik, Yakov Lyubchik
  • Patent number: 7170688
    Abstract: A retroreflective device comprising a substantially spherical graded refractive index lens, referred to as a GRIN-sphere lens (2), a reflective part for retroreflecting (6) a radiation beam (B) passing through the graded refractive index lens and, at least partially surrounding the lens, a transparent material (4) having a substantially uniform refractive index.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: January 30, 2007
    Assignee: BAE Systems PLC
    Inventors: Vincent Andrei Handerek, Leslie Charles Laycock
  • Patent number: 7088526
    Abstract: A lens collimator according to the present invention includes a plurality of lens elements bonded together. The lens elements, preferably three, each include spherical surfaces and are generally concentrically disposed relative to each other. The lens elements are arranged to produce an increased quantity of reflections and refractions within a lens optical path. The reflections and refractions reduce aberrations and control signal intercept angles relative to an image plane, thereby enabling the lens to match the performance of an optical signal carrier utilized with the lens. The lens element arrangement basically serves to provide an optical path with a quantity of reflections similar to that achieved with a lens having a greater quantity of elements or surfaces. The reflections and refractions enable the lens to cancel out or remove undesired characteristics (e.g., aberrations, etc.) from the resulting optical signals.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: August 8, 2006
    Assignee: ITT Manufactruing Enterprises, Inc.
    Inventor: Leroy O. Braun
  • Patent number: 7072102
    Abstract: An optical system includes multiple cubic crystalline optical elements and one or more uniaxial birefringent elements in which the crystal lattices of the cubic crystalline optical elements are oriented with respect to each other to reduce the effects of intrinsic birefringence and produce a system with reduced retardance. The net retardance of the system is reduced by the cancellation of retardance contributions from the multiple cubic crystalline optical elements and the uniaxial birefringent element. The optical system may be used in a photolithography tool to pattern substrates such as semiconductor substrates and thereby produce semiconductor devices.
    Type: Grant
    Filed: December 26, 2002
    Date of Patent: July 4, 2006
    Assignee: ASML Netherlands B.V.
    Inventor: James P. McGuire, Jr.
  • Patent number: 7046459
    Abstract: A catadioptric projection lens for imaging a pattern arranged in an object plane while creating a real intermediate image, having a catadioptric first lens section having a concave mirror and a beam-deflection device, as well as a dioptric second lens section that follows the catadioptric lens section, between its object plane and image plane. The beam-deflection device deflects radiation coming from the object plane to the concave mirror. Positive refractive power is arranged following the first reflective surface, between the latter and the concave mirror, within an optical near-field of the object plane, within which the height of the principal ray of the outermost field point of radiation coming from the object exceeds the marginal-ray height.
    Type: Grant
    Filed: June 18, 2004
    Date of Patent: May 16, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: David R. Shafer, Alexander Epple
  • Patent number: 7019909
    Abstract: A small optical system that is capable of widening an angle of view is provided. This optical system is provided with a first surface having a reflecting action and a second surface that reflects a light beam reflected on this first surface toward the first surface again. Then, a principal ray at central angle of view that is made incident on the first surface again is reflected and travels to a side opposite to a side of the last time it was reflected from the first surface with respect to a normal line of a surface at a hit point thereof.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: March 28, 2006
    Assignee: Canon Kabushiki Kaisha
    Inventors: Shoichi Yamazaki, Hideki Morishima, Kazutaka Inoguchi, Akinari Takagi, Motomi Matsunaga
  • Patent number: 6985308
    Abstract: A demultiplexer for use in a wavelength-division multiplexed optical system including a first positive lens group, a negative lens group, and a second positive lens group in order from a dispersive element and a reflective element. In some embodiments the reflective element is a light modulator, such as an actuatable diffraction grating. In some embodiments the demultiplexer is a part of a dynamic channel equalizer. In embodiments having a light modulator, the modulation may occur during both a first pass and a second pass.
    Type: Grant
    Filed: May 28, 2003
    Date of Patent: January 10, 2006
    Assignee: Polychromix Corporation
    Inventors: Malcolm C. Smith, Michael A. Butler, William C. Sweatt
  • Patent number: 6919997
    Abstract: A compact device for imaging (10) a printing form (12), including a number of light sources (14) as well as imaging optics (18) for producing a number of image spots (16) of the light sources (14) on the printing form (12), the imaging optics (18) including at least one macro-optical system (20) of refractive optical components (32, 56, 58; 60, 62, 64), the imaging device having the feature that the optical path (22) from the light sources (14) to the image spots (16) passes through the macro-optics (20) twice. The installation-space saving imaging device (10) can be used in a printing unit (88) of a printing press (90).
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: July 19, 2005
    Assignee: Heidelberger Druckmaschinen AG
    Inventors: Martin Forrer, Axel Gebhardt, Eckhard Langenbach, Lars Paulsen, Thomas Rupp
  • Patent number: 6898025
    Abstract: A projection optical system, which is telecentric with respect to an object side and an image side, projects a pattern onto an image plane, which is substantially parallel with the pattern, at a substantial equi-magnification. The projecting optical system is provided with first and second condenser lenses having a common (first) optical axis which is perpendicular to the pattern and the image plane. The projection optical system further includes an imaging lens having a second optical axis that intersects with the first optical axis at an intermediate position between the first and second condenser lenses. A first mirror reflects a beam from the pattern and passed through the first condenser lens toward the imaging lens. A second mirror reflects the beam passed through the imaging lens to the imaging lens, and a third mirror reflects the beam passed through the imaging lens toward the second condenser lens.
    Type: Grant
    Filed: June 3, 2003
    Date of Patent: May 24, 2005
    Assignee: PENTAX Corporation
    Inventors: Shuichi Takeuchi, Yutaka Takakubo
  • Patent number: 6836379
    Abstract: A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a &lgr;/4 plate arranged between the mirror and the beam splitter.
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: December 28, 2004
    Assignee: Carl Zeiss SMT AG
    Inventors: Michael Gerhard, Hans-Jochen Paul
  • Patent number: 6829096
    Abstract: A bi-directional wavelength division multiplexing/demultiplexing device is disclosed. In an exemplary embodiment, the bi-directional wavelength division multiplexing/demultiplexing device comprises a diffraction grating for combining a plurality of monochromatic optical input beams into a multiplexed, polychromatic optical output beam, and for separating a multiplexed, polychromatic optical input beam into a plurality of monochromatic optical output beams; and a transmissive/reflective optical element for transmitting the plurality of monochromatic optical input beams on an optical path toward the diffraction grating, and for reflecting the plurality of monochromatic optical output beams received on an optical path from the diffraction grating.
    Type: Grant
    Filed: June 27, 2000
    Date of Patent: December 7, 2004
    Assignee: Confluent Photonics Corporation
    Inventor: Robert K. Wade
  • Patent number: 6807013
    Abstract: The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.
    Type: Grant
    Filed: December 26, 2002
    Date of Patent: October 19, 2004
    Assignee: PENTAX Corporation
    Inventors: Yoshinori Kobayashi, Shigetomo Ishibashi, Masato Hara
  • Publication number: 20040201905
    Abstract: An apparatus includes a mixer, a combiner and first and second reflectors. The mixer has first and second inputs and has first and second outputs. The combiner includes first and second parts where the first output provides a mixed signal to the first part and the second part provides a combined signal to the second input. The first reflector receives a remaining signal from the first part and provides a reflected composite signal to the second part. The second reflector receives a split off pump signal from the first part and provides a reflected pump signal to the second part.
    Type: Application
    Filed: April 10, 2003
    Publication date: October 14, 2004
    Inventor: Gregory S. Lee
  • Patent number: 6801371
    Abstract: The present invention of a multi-functional dressing mirror is applied to a portable case body for containing a plane mirror inside, in addition, the outer covering, a convex mirror made from materials showing the effect of light transmission, can be used to magnify a user's reflection while s/he is staring at the plane mirror. Moreover, the present invention enables the user to directly use either the plane mirror or the convex mirror while the case lid is opened.
    Type: Grant
    Filed: March 24, 2003
    Date of Patent: October 5, 2004
    Assignee: Homecosy, Inc.
    Inventor: Tsai-Jung Liu
  • Publication number: 20040136094
    Abstract: A compact device for imaging (10) a printing form (12), including a number of light sources (14) as well as imaging optics (18) for producing a number of image spots (16) of the light sources (14) on the printing form (12), the imaging optics (18) including at least one macro-optical system (20) of refractive optical components (32, 56, 58; 60, 62, 64), the imaging device having the feature that the optical path (22) from the light sources (14) to the image spots (16) passes through the macro-optics (20) twice. The installation-space saving imaging device (10) can be used in a printing unit (88) of a printing press (90).
    Type: Application
    Filed: July 23, 2003
    Publication date: July 15, 2004
    Applicant: Heidelberger Druckmaschinen AG
    Inventors: Martin Forrer, Axel Gebhardt, Eckhard Langenbach, Lars Paulsen, Thomas Rupp
  • Patent number: 6683726
    Abstract: An image display apparatus has a reflective display element for displaying a two-dimensional image on a display plane, a light source for emitting illuminating light for illuminating said display plane, a magnifier optical system for magnifying and projecting said two-dimensional image, and an optical member which is composed of a medium having a refractive index greater than or equal to unity and has at least three optical planes of a first plane, a second plane, and a third plane. The magnifier optical system is substantially in concentricity with said display plane; the illuminating light from said light source passes through said first plane and then through said second plane, thereby illuminating said display plane; and the reflected light from said display plane passes through said second plane and is then reflected in said first plane, thereby passing through said third plane and being incident on said magnifier optical system.
    Type: Grant
    Filed: September 14, 2001
    Date of Patent: January 27, 2004
    Assignee: Minolta Co., Ltd.
    Inventors: Takeshi Endo, Yasushi Kobayashi, Yoshie Shimizu, Soh Ohzawa
  • Patent number: 6678056
    Abstract: A retroreflector has three mutually-orthogonal reflective surfaces arranged around an optical axis. The reflective surfaces stop short of the optical axis to provide a central region of the retroreflector which transmits incident light and a peripheral region of the retroreflector which retroreflects incident light. When the reflector is used in a Jamin-type interferometer with another reflector, this enables the interferometer to be used for measuring displacement between the reflectors. In the interferometer, a projected beam is disposed between a pair of return beams and/or one of the return beams is disposed between a pair of the projected beams. This enables a first contiguous area of a face of a beam splitter to be provided with a phase-shifting coating to produce a phase quadrature relationship between a pair of interferogram beams. This simplifies the masking required when applying the coating.
    Type: Grant
    Filed: July 23, 2001
    Date of Patent: January 13, 2004
    Inventor: Michael John Downs
  • Patent number: 6665126
    Abstract: A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.
    Type: Grant
    Filed: December 27, 2000
    Date of Patent: December 16, 2003
    Assignee: Carl-Zeiss-Stiftung
    Inventors: David R. Shafer, Wilhelm Ulrich, Helmut Beierl
  • Patent number: 6636349
    Abstract: An imaging optical system includes a polarization beam splitter, a quarter waveplate, a reflection mirror and polarization state changing unit. The beam from an object plane is projected by way of the polarization beam splitter and the quarter waveplate to reflection mirror. The projected beam is reflected by the reflection mirror and is projected through the quarter waveplate and by way of the polarization beam splitter to an image plane, and the polarization state changing unit is disposed between the polarization beam splitter and the image plane to change the state of polarization of the beam projected by way of the polarization beam splitter. The polarization state changing unit includes a half waveplate effective to transform the beam projected by way of the polarization beam splitter into a rectilinearly polarized beam, being polarized in a desired direction.
    Type: Grant
    Filed: March 20, 2001
    Date of Patent: October 21, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuhiro Takahashi, Masato Muraki
  • Patent number: 6590718
    Abstract: A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam splitter cube (3) is provided which superposes the illuminating beam path (100) and the imaging beam path (200). In order to obtain an almost telecentric entry at the reticle, optical elements (71) are provided between beam splitter cube (3) and the reflective reticle (5). Advantageously, the reduction objective is a catadioptric objective having a beam splitter cube (3) whose fourth unused side can be used for coupling in light. The illuminating beam path (100) can also be coupled in with a non-parallel beam splitter plate. The illuminating beam path is refractively corrected in passthrough to compensate for aberrations via the special configuration of the rear side of the beam splitter plate.
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: July 8, 2003
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Gerd Fürter, Christian Wagner, Uwe Gödecke, Henriette Müller
  • Patent number: 6577453
    Abstract: An image reading apparatus includes a laser source, a stage on which an image carrier can be placed, a light detector for detecting light released from the image carrier, and an optical head for condensing the laser beam emitted from the laser source onto the image carrier and condensing light released from the image carrier to lead it to the light detector and being two-dimensionally movable parallel to the stage, and a perforated mirror formed with a hole at a center portion thereof, and fixed in a path of the laser beam so that the laser beam can pass through the hole and light released from the image carrier and condensed by the optical head can be reflected thereby in such a manner that a path of the light is branched off from the path of the laser beam.
    Type: Grant
    Filed: April 25, 2001
    Date of Patent: June 10, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Toshihito Kimura
  • Patent number: RE39024
    Abstract: To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plant. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.
    Type: Grant
    Filed: September 15, 2000
    Date of Patent: March 21, 2006
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: RE39296
    Abstract: Catadioptric projection systems are disclosed for projecting an illuminated region of a reticle onto a corresponding region on a substrate. The systems are preferably used with ultraviolet light sources (e.g., 193 nm). The systems comprise a first imaging system, a concave mirror, and a second imaging system. The first imaging system comprises a single-pass lens group and a double-pass lens group. The single-pass lens group comprises a first negative subgroup, a positive subgroup, and a second negative subgroup. Light from the illuminated region of the reticle passes through the single-pass lens group and the double-pass lens group, and reflects from the concave mirror to pass back through the double-pass lens group to form an intermediate image of the illuminated region of the reticle. The light is then directed to the second imaging system that re-images the illuminated region of the reticle on the substrate.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: September 19, 2006
    Assignee: Nikon Corporation
    Inventor: Tomowaki Takahashi
  • Patent number: RE40743
    Abstract: A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam splitter cube (3) is provided which superposes the illuminating beam path (100) and the imaging beam path (200). In order to obtain an almost telecentric entry at the reticle, optical elements (71) are provided between beam splitter cube (3) and the reflective reticle (5). Advantageously, the reduction objective is a catadioptric objective having a beam splitter cube (3) whose fourth unused side can be used for coupling in light. The illuminating beam path (100) can also be coupled in with a non-parallel beam splitter plate. The illuminating beam path is refractively corrected in passthrough to compensate for aberrations via the special configuration of the rear side of the beam splitter plate.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: June 16, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Gerhard Fuerter, Christian Wagner, Uwe Goedecke, Henriette Mueller