Multiple Component Lenses Patents (Class 359/733)
-
Publication number: 20120019800Abstract: A lithography projection objective for imaging a pattern to be arranged in an object plane of the projection objective onto a substrate to be arranged in an image plane of the projection objective comprises a multiplicity of optical elements that are arranged along an optical axis of the projection objective. The optical elements comprise a first group, following the object plane, of optical elements, and a last optical element, which follows the first group and is next to the image plane and which defines an exit surface of the projection objective and is arranged at a working distance from the image plane. The projection objective is tunable or tuned with respect to aberrations for the case that the volume between the last optical element and the image plane is filled by an immersion medium with a refractive index substantially greater than 1. The position of the last optical element is adjustable in the direction of the optical axis.Type: ApplicationFiled: September 26, 2011Publication date: January 26, 2012Applicant: CARL ZEISS SMT GMBHInventors: Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer, Norbert Wabra
-
Publication number: 20110286114Abstract: A lens barrel includes a fourth lens, a prism, and a sixth lens. The fourth lens receives a light flux incident along a first optical axis. The prism includes a reflecting surface reflecting the light flux passing through the fourth lens to a direction along a second optical axis intersecting with the first optical axis. The sixth lens receives the light flux reflected by the prism. A second group frame includes an opening portion, a prism retaining frame that is arranged in a more inner position than the opening portion and in which the prism is contained, and a plurality of adhesive pockets arranged on an area around the prism retaining frame and being open to the side of the opening portion. Adhesive agent is filled in the adhesive pockets.Type: ApplicationFiled: August 3, 2011Publication date: November 24, 2011Applicant: PANASONIC CORPORATIONInventors: Eiichi NAGAOKA, Keiji SAKAMOTO
-
Publication number: 20110286115Abstract: A lens barrel includes a fourth lens, a prism, and a sixth lens. The fourth lens receives a light flux incident along a first optical axis. The prism includes a reflecting surface reflecting the light flux passing through the fourth lens to a direction along a second optical axis intersecting with the first optical axis. The sixth lens receives the light flux reflected by the prism. A second group frame includes an opening portion, a prism retaining frame that is arranged in a more inner position than the opening portion and in which the prism is contained, and a plurality of adhesive pockets arranged on an area around the prism retaining frame and being open to the side of the opening portion. Adhesive agent is filled in the adhesive pockets.Type: ApplicationFiled: August 3, 2011Publication date: November 24, 2011Applicant: PANASONIC CORPORATIONInventors: Eiichi Nagaoka, Keiji Sakamoto, Yuji Adachi
-
Publication number: 20110286113Abstract: A lens barrel includes a fourth lens, a prism, and a sixth lens. The fourth lens receives a light flux incident along a first optical axis. The prism includes a reflecting surface reflecting the light flux passing through the fourth lens to a direction along a second optical axis intersecting with the first optical axis. The sixth lens receives the light flux reflected by the prism. A second group frame includes an opening portion, a prism retaining frame that is arranged in a more inner position than the opening portion and in which the prism is contained, and a plurality of adhesive pockets arranged on an area around the prism retaining frame and being open to the side of the opening portion. Adhesive agent is filled in the adhesive pockets.Type: ApplicationFiled: August 3, 2011Publication date: November 24, 2011Applicant: PANASONIC CORPORATIONInventors: Eiichi Nagaoka, Takayuki Hayashi, Keiji Sakamoto, Kenichi Hayashi, Daisuke Ito
-
Patent number: 8064148Abstract: Disclosed are high numerical (NA) catadioptric objectives without a central obscuration, and applications thereof. Such objectives can operate through a wide spectral bandwidth of radiation, including deep ultraviolet (DUV) radiation. Importantly, refractive elements in the catadioptric objectives can be manufactured from a single type of material (such as, for example, CaF2 and/or fused silica). In addition, the elements of such catadioptric objectives are rotationally symmetric about an optical axis. The catadioptric objectives eliminate the central obscuration by (1) using a polarized beamsplitter (which passes radiation of a first polarization and reflects radiation of a second polarization), and/or (2) using one or more folding mirrors to direct off-axis radiation into the pupil of the catadioptric objective. An example catadioptric objective is shown in FIG. 2.Type: GrantFiled: April 7, 2009Date of Patent: November 22, 2011Assignee: ASML Holding N.V.Inventors: Stanislav Y. Smirnov, Eric Brian Catey, Adel Joobeur
-
Publication number: 20110279913Abstract: An annular inclined surface is formed on an edge portion of a first plastic lens in such a manner that the inclined surface surrounds a concave surface formed in a second surface of the first plastic lens. The inclined surface reflects unwanted light reflected by the concave surface so as to prevent the unwanted light from passing through the non-shading portion of the edge portion outside the effective area of a lens portion and then being reflected on an imaging area. This can suppress ghosting and flare due to the reflection of the unwanted light on the imaging surface.Type: ApplicationFiled: May 9, 2011Publication date: November 17, 2011Applicant: KANTATSU CO., LTDInventor: Hiroshi Watanabe
-
Patent number: 7988306Abstract: A projection apparatus has a spatial light modulator to modulate illumination from a laser light source. A base projection lens has, from its long conjugate side to its short conjugate side, a first lens group with negative focal length and with a first lens element that has a negative focal length and a second lens element of positive focal length, a second lens group of negative focal length and spaced apart from the first lens group and having one or more cemented lens elements, and a third lens group spaced apart from the second lens group and having a lens with a positive focal length. The base projection lens has a first field of view and is telecentric in its short conjugate. An afocal attachment to the base projection lens alters the first field of view by the same amount in both of two orthogonal directions.Type: GrantFiled: October 2, 2008Date of Patent: August 2, 2011Assignee: Eastman Kodak CompanyInventors: Joseph R. Bietry, Barry D. Silverstein
-
Publication number: 20110141581Abstract: Provided is an imaging lens, the imaging lens including in an orderly way from an object side, a first lens including an incidence surface having a positive (+) refractive power and incident with light, a reflecting surface reflecting the incident light and an exit surface outputting the reflected light; a second lens having a negative (?) refractive power; a third lens having a positive (+) refractive power; a fourth lens having a positive (+) refractive power; a fifth lens having a negative (?) refractive power; a sixth lens having a positive (+) refractive power; and a seventh lens having a positive (+) refractive power, wherein the second lens through the seventh lens are disposed in an orderly way from an exit surface of the first lens.Type: ApplicationFiled: December 15, 2010Publication date: June 16, 2011Applicant: LG Innotek Co., Ltd.Inventor: Jungyul Lee
-
Patent number: 7961400Abstract: A projection image display device is disclosed in which a trapezoidal distortion and/or aberration are restrained when an image is enlarged and projected obliquely onto a screen. An image generator is connected to an optical system base in such a manner that at least an inclination thereof (on an axis parallel to X axis) with respect to a vertical line and a distance thereof in forward and backward direction (Z axis direction) can be adjusted by an adjusting mechanism. Further, a projecting lens 2 as a first optical system and a free-form curved surface mirror as a second optical system are fixed to the optical system base. The free-form curved surface mirror is rotatable (on an rotary axis parallel to X axis) with respect to the vertical line at a substantial center of the free-form curved surface mirror.Type: GrantFiled: August 5, 2009Date of Patent: June 14, 2011Assignee: Hitachi, Ltd.Inventors: Hiroki Yoshikawa, Takanori Hisada, Tetsu Ohishi, Koji Hirata, Naoyuki Ogura
-
Patent number: 7872806Abstract: The invention relates to an electronic image pickup system whose depth dimension is extremely reduced, taking advantage of an optical system type that can overcome conditions imposed on the movement of a zooming movable lens group while high specifications and performance are kept. The electronic image pickup system comprises an optical path-bending zoom optical system comprising, in order from its object side, a 1-1st lens group G1-1 comprising a negative lens group and a reflecting optical element P for bending an optical path, a 1-2nd lens group G1-2 comprising one positive lens and a second lens group G2 having positive refracting power. For zooming from the wide-angle end to the telephoto end, the second lens group G2 moves only toward the object side. The electronic image pickup system also comprises an electronic image pickup device I located on the image side of the zoom optical system.Type: GrantFiled: September 8, 2008Date of Patent: January 18, 2011Assignee: Olympus CorporationInventors: Shinichi Mihara, Hirokazu Konishi, Toyoharu Hanzawa, Masahito Watanabe, Atsujiro Ishii, Tetsuhide Takeyama, Ayami Imamura
-
Patent number: 7855843Abstract: A fingerprint navigation system with a folded air lens structure and a folded air lens. The system includes a light source, a folded air lens structure, a light reflector, and a navigation sensor. The folded air lens structure is aligned to direct light from the light source to an object surface. The folded air lens structure includes a first portion and a second portion. The light reflector is aligned to direct the light from the first portion of the folded air lens structure to the second portion of the folded air lens structure. The navigation sensor is calibrated to produce a navigation image corresponding to the light directed through the folded air lens structure and the folded air lens.Type: GrantFiled: February 7, 2008Date of Patent: December 21, 2010Assignee: Avago Technologies ECBU IP (Singapore) Pte. Ltd.Inventor: George Edward Smith
-
Patent number: 7800829Abstract: A zoom lens composed of plural groups and adapted for changing group spacing or spacings, and includes, in a first group GR1 fixed during zooming operation, a reflection member M for bending or folding the optical axis substantially by 90 degrees and a negative group at the object side relative to the reflection member M. At the image side of the first group GR1, there are at least included a second group GR2 movable during zooming operation and having negative refractive power, and a light quantity adjustment member ST1 fixed during zooming operation. Angle of the reflection member M is changed at the time of sinking lens barrel so that the negative group of the first group GR1 is accommodated into a space thus defined.Type: GrantFiled: February 15, 2005Date of Patent: September 21, 2010Assignee: Sony CorporationInventor: Yoshito Iwasawa
-
Patent number: 7719772Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.Type: GrantFiled: July 2, 2008Date of Patent: May 18, 2010Assignee: Carl Zeiss SMT AGInventors: Han-Juergen Mann, Wilhelm Ulrich, Marco Pretorius
-
HIGH TRANSMISSION, HIGH APERTURE CATADIOPTRIC PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS
Publication number: 20100097592Abstract: The disclosure provides projection objectives which may be used in a microlithographic projection exposure apparatus to expose a radiation-sensitive substrate arranged in the region of an image surface of the projection objective with at least one image of a pattern of a mask arranged in the region of an object surface of the projection objective. The disclosure also provides projection exposure apparatus which include such projection objectives, as well as related components and methods.Type: ApplicationFiled: October 16, 2009Publication date: April 22, 2010Applicant: CARL ZEISS SMT AGInventors: Daniel Kraehmer, Ralf Mueller, Thomas Schicketanz, Wilhelm Ulrich, Alexander Epple -
Patent number: 7667900Abstract: Providing a zoom lens system excellently correcting various aberrations with accomplishing to be compact, lightweight, and slim upon being accommodated, and to provide an optical apparatus using the zoom lens system. The system consists of, in order from an object, a first group G1 having negative power, a second group G2 having positive power. Upon zooming from a wide-angle end W to a telephoto end T, a distance between the first group G1 and the second group G2 decreases. The first group G1 consists of, in order from the object, a first lens L1 having negative power and a second lens L2 having positive power. The second group G2 consists of, in order from the object, a third lens L3 having positive power, a fourth lens L4 having negative power, and a fifth lens L5 having positive power. Given conditions are satisfied.Type: GrantFiled: January 31, 2008Date of Patent: February 23, 2010Assignee: Nikon CorporationInventor: Mami Muratani
-
Publication number: 20090310231Abstract: An optical system having a novel imaging method of forming an image of a subject of projection in space the same as if the image were being reflected from a mirror where a mirror does not actually exist is provided, the optical system being provided with a light beam redirecting surface that functions to transmit light while refracting the light and form a real image at a plane-symmetric position, and a mirror surface arranged facing the light beam redirecting surface; in which, by transmitting light emitted from the subject of projection through the light beam redirecting surface, reflecting the transmitted light at the mirror surface, and again transmitting the reflected light through the light beam redirecting surface, an image of a subject of projection arranged at a position on an observation side opposite the mirror surface arranged on the other side across the light beam redirecting surface is formed at a position that is plane-symmetric to the mirror surface with respect to the light beam redirectingType: ApplicationFiled: December 19, 2007Publication date: December 17, 2009Applicant: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGYInventor: Satoshi Maekawa
-
Patent number: 7619828Abstract: A frame 18 with a first lens group 15 and a second lens group 17 of a projection lens system fixedly mounted thereto is supported by a support arm 43 so as to direct a mirror mounting aperture 27 of the frame 18 downward. The reflection mirror 16 for folding an optical axis of the projection lens system is held and placed within the mirror mounting aperture 27 of the frame 18 by a mirror support 46 so as thereby to provisionally complete the projection lens system. Then, while an image of a test pattern generated by a test pattern projection head 44 is projected onto a remote screen 47 by the provisionally complete the projection lens system, the reflection mirror 16 is adjusted in position by 45 by a mirror position adjusting unit 45.Type: GrantFiled: February 20, 2008Date of Patent: November 17, 2009Assignee: Fujinon CorporationInventor: Atsushi Nogami
-
Patent number: 7609460Abstract: A zoom lens configured by arranging a first lens group, a second lens group, a third lens group, a fourth lens group, and a fifth lens group in order from the object side to the image side, and further having an aperture diaphragm on the object side of the third lens group. In the first lens group, a first lens, a second lens, and a third lens are located in order from the object side to the image side. In the second lens group, a fourth lens, a fifth lens, and a sixth lens are located in order from the object side to the image side. The third lens group is made up of a seventh lens which is a convex lens, the fourth lens group is made up of at least two or more cemented lenses, the third lens group and the fourth lens group include at least one surface formed into an aspherical surface.Type: GrantFiled: November 18, 2008Date of Patent: October 27, 2009Assignee: Sony CorporationInventors: Mitsuhiro Suzaki, Yusuke Nanjo, Shinichi Arita
-
Publication number: 20090244498Abstract: A projection apparatus includes a first optical system, an aperture disposed on the light exiting-side of the first optical system, a second optical system disposed on the light exiting-side of the aperture, and a reflector disposed on the optical path between the first optical system and the second optical system, the reflector having a reflection surface that reflects the light having exited from the first optical system toward the second optical system. The optical axis of the second optical system is disposed along the optical axis of the first optical system. The reflection surface of the reflector is disposed along the optical axis of the first optical system. At least part of the first and second optical systems that is on the side opposite the reflection surface of the reflector is cut off.Type: ApplicationFiled: February 24, 2009Publication date: October 1, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Takayuki Matsubara, Masatoshi Yonekubo, Hidefumi Sakata
-
Publication number: 20090153985Abstract: A lens barrel includes a fourth lens, a prism, and a sixth lens. The fourth lens receives a light flux incident along a first optical axis. The prism includes a reflecting surface reflecting the light flux passing through the fourth lens to a direction along a second optical axis intersecting with the first optical axis. The sixth lens receives the light flux reflected by the prism. A second group frame includes an opening portion, a prism retaining frame that is arranged in a more inner position than the opening portion and in which the prism is contained, and a plurality of adhesive pockets arranged on an area around the prism retaining frame and being open to the side of the opening portion. Adhesive agent is filled in the adhesive pockets.Type: ApplicationFiled: January 15, 2009Publication date: June 18, 2009Applicant: PANASONIC CORPORATIONInventors: Eiichi Nagaoka, Takayuki Hayashi, Keiji Sakamoto, Kenichi Hayashi, Daisuke Ito, Yuji Adachi
-
Publication number: 20090116124Abstract: A projection type image display device comprising: a projection optical system having a first refracting optical section having a plurality of lenses, a reflecting optical section having at least one concave reflecting surfacer and a second refracting optical section in order from a reduction side; and an image forming optical section disposed on an anterior stage of a light path as the reduction side of the projection optical system, wherein the second refracting optical section has an exit lens having either: (1) a roughly constant thickness and disposed in a posterior stage of the light path from an exit pupil position at which a principal ray reflected by the reflecting surface and proceeding towards the maximum field angle and the optical axis of the reflecting optical section intersect with each other, and an optical surface of a magnification side of the exit lens has a shape convex towards the magnification side; or (2) a roughly constant thickness and disposed between the reflecting optical sectionType: ApplicationFiled: October 7, 2008Publication date: May 7, 2009Applicant: SEIKO EPSON CORPORATIONInventor: Nobutaka MINEFUJI
-
Publication number: 20090115986Abstract: Microlithography projection objectives for imaging into an image plane a pattern arranged in an object plane are described with respect to suppressing false light in such projection objectives.Type: ApplicationFiled: May 23, 2006Publication date: May 7, 2009Applicant: Carl Zeiss SMT AGInventors: Heiko Feldmann, Daniel Kraehmer, Jean-Claude Perrin, Julian Kaller, Aurelian Dodoc, Vladimir Kamenov, Olaf Conradi, Toralf Gruner, Thomas Okon, Alexander Epple
-
Publication number: 20090021713Abstract: The disclosure relates an illumination system configured to guide illumination light from a radiation source to an object plane and to provide defined illumination of an object field in the object plane, wherein illumination light is supplied to the object field by a bundle-guiding optical pupil component which is disposed in a pupil plane of the projection objective, and wherein at least another bundle-guiding component is disposed upstream of the pupil component in the beam path of the illumination light. The disclosure further concerns a projection exposure apparatus that includes such an illumination system of this type, a method of fabricating a microstructured component using such a projection exposure apparatus, and a microstructured component fabricated using such a method.Type: ApplicationFiled: July 11, 2008Publication date: January 22, 2009Applicant: CARL ZEISS SMT AGInventors: Johannes Zellner, Hans-Juergen Mann
-
Publication number: 20080291543Abstract: An imaging unit including an image sensor, an incident-side prism, an exit-side prism, and an intermediate optical system positioned therebetween, wherein light incident on the incident-side prism passes through the incident-side prism, the intermediate optical system and the exit-side prism to be incident on the image sensor, the imaging unit includes a housing supporting the incident-side prism, the exit-side prism and the intermediate optical system such that incident and exit optical axes of the incident-side prism, an optical axis of the intermediate optical system, and incident and exit optical axes of the exit-side prism all lie on a common plane; and a cover board, on which the image sensor is mounted, fixed to the housing so that the image sensor faces an exit surface of the exit-side prism, the cover board closing an opening of the housing.Type: ApplicationFiled: February 25, 2008Publication date: November 27, 2008Applicant: PENTAX CorporationInventors: Hiroshi NOMURA, Isao OKUDA, Eijiroh TADA, Atsumi KANEKO
-
Patent number: 7436599Abstract: The invention relates to an electronic image pickup system whose depth dimension is extremely reduced, taking advantage of an optical system type that can overcome conditions imposed on the movement of a zooming movable lens group while high specifications and performance are kept. The electronic image pickup system comprises an optical path-bending zoom optical system comprising, in order from its object side, a 1-1st lens group G1-1 comprising a negative lens group and a reflecting optical element P for bending an optical path, a 1-2nd lens group G1-2 comprising one positive lens and a second lens group G2 having positive refracting power. For zooming from the wide-angle end to the telephoto end, the second lens group G2 moves only toward the object side. The electronic image pickup system also comprises an electronic image pickup device I located on the image side of the zoom optical system.Type: GrantFiled: May 10, 2002Date of Patent: October 14, 2008Assignee: Olympus CorporationInventors: Shinichi Mihara, Hirokazu Konishi, Toyoharu Hanzawa, Masahito Watanabe, Atsujiro Ishii, Tetsuhide Takeyama, Ayami Imamura
-
Patent number: 7414781Abstract: In general, in a first aspect, the invention features a system that includes a microlithography projection optical system. The microlithography projection optical system includes a plurality of elements arranged so that during operation the plurality of elements image radiation at a wavelength ? from an object plane to an image plane. At least one of the elements is a reflective element that has a rotationally-asymmetric surface positioned in a path of the radiation. The rotationally-asymmetric surface deviates from a rotationally-symmetric reference surface by a distance of about ? or more at one or more locations of the rotationally-asymmetric surface.Type: GrantFiled: September 13, 2006Date of Patent: August 19, 2008Assignee: Carl Zeiss SMT AGInventors: Hans-Juergen Mann, Wilhelm Ulrich, Marco Pretorius
-
Patent number: 7385769Abstract: An image forming optical system comprising, in order from an object side: a negative lens unit having one or two negative lenses without including any positive lens; a reflecting member; an aperture stop; and a positive lens unit having one or two positive lenses without including any negative lens.Type: GrantFiled: August 31, 2006Date of Patent: June 10, 2008Assignee: Olympus Imaging Corp.Inventor: Yuji Kamo
-
Patent number: 7365910Abstract: The invention relates to an electronic image pickup system whose depth dimension is extremely reduced, taking advantage of an optical system type that can overcome conditions imposed on the movement of a zooming movable lens group while high specifications and performance are kept. The electronic image pickup system comprises an optical path-bending zoom optical system comprising, in order from its object side, a 1-1st lens group G1-1 comprising a negative lens group and a reflecting optical element P for bending an optical path, a 1-2nd lens group G1-2 comprising one positive lens and a second lens group G2 having positive refracting power. For zooming from the wide-angle end to the telephoto end, the second lens group G2 moves only toward the object side. The electronic image pickup system also comprises an electronic image pickup device I located on the image side of the zoom optical system.Type: GrantFiled: January 20, 2004Date of Patent: April 29, 2008Assignee: Olympus CorporationInventors: Atsujiro Ishii, Toyoharu Hanzawa
-
Patent number: 7315423Abstract: A zoom lens that is designed to enable a thinner image pickup device includes, in order from the object side, a first lens group having positive refractive power and a reflecting surface for folding the optical axis of the zoom lens approximately ninety degrees, a second lens group having negative refractive power, a third lens group having positive refractive power with a stop at its image side, and a fourth lens group having positive refractive power. The second lens group and the fourth lens group move along the optical axis during zooming, and the fourth lens group moves along the optical axis during focusing. The four lens groups have particular constructions and the zoom lens satisfies specified conditions related to the focal lengths of specified lens groups, the focal length of the zoom lens at the telephoto end, and the Abbe number of a specified lens element.Type: GrantFiled: February 2, 2006Date of Patent: January 1, 2008Assignee: Fujinon CorporationInventor: Kenichi Sato
-
Patent number: 7242529Abstract: A zoom lens includes: a first lens group having a positive refractive power and statically positioned along an optical axis when a power of the zoom lens is varied or the zoom lens is focused; a second lens group having a negative refractive power; a third lens group having a positive refractive power; a fourth lens group having a positive refractive power; a fifth lens group. The second and fourth lens groups are moved for varying the power of the zoom lens and the fourth lens group is further moved for focusing the zoom lens. The first lens group includes a reflective optical element for bending an optical path. The second lens group includes a cemented lens including a positive lens and a negative lens. The fourth lens group includes two positive lenses, and the fifth lens group includes one positive lens having at least one aspherical surface.Type: GrantFiled: September 12, 2005Date of Patent: July 10, 2007Assignee: Konica Minolta Opto, Inc.Inventors: Hiroshi Sato, Takumi Matsui
-
Patent number: 7130131Abstract: A zoom optical system includes followings: a plurality of lens units for magnification, the plurality of lens unit for zooming including in order from a reduction conjugate side to a magnification conjugate side, a first lens unit having a positive optical power, a second lens unit having a negative optical power and a third lens unit having a positive optical power, wherein during zooming, respective intervals between the above described first, second and third lens unit vary, and across the entire zooming range, a magnification-side conjugate position with respect to a reduction-side conjugate position and a position of a pupil of the above described zoom optical system with respect to a reduction-side conjugate position are substantially immobile respectively.Type: GrantFiled: September 8, 2005Date of Patent: October 31, 2006Assignee: Canon Kabushiki KaishaInventors: Manabu Hakko, Koshi Hatakeyama
-
Patent number: 7119966Abstract: A projection lens system that projects projection light from a light modulator onto a screen and which is telecentric on an input side is provided. The projection lens system comprises a first meniscus lens that is disposed closest to the screen, is convex on a screen side, and has negative refractive power; and a second meniscus lens that is disposed next closest to the screen, is convex on a screen side, and has negative refractive power. The first meniscus lens is made of plastic and at least one out of two curved surfaces thereof is aspherical, and a refractive power of the first meniscus lens is lower than a refractive power of the second meniscus lens. In the projection lens system, far superior aberration-correcting performance can be achieved and a drop in aberration-correcting performance due to thermal deformation can be prevented.Type: GrantFiled: March 23, 2005Date of Patent: October 10, 2006Assignee: Nittoh Kogaku K. K.Inventor: Akira Yamagishi
-
Patent number: 7073542Abstract: The invention automates determination of the quantity of a index matching liquid.Type: GrantFiled: March 24, 2003Date of Patent: July 11, 2006Assignee: Seiko Epson CorporationInventor: Chiharu Iriguchi
-
Patent number: 6989936Abstract: The optical system disclosed in this specification is a variable power optical system for enlarging and projecting a reduction side object onto an enlargement side image plane, or reducing and projecting an enlargement side object onto a reduction side image plane. This variable power optical system includes a first optical component having a reflecting curved surface, and a second optical component disposed more toward the reduction side than the first optical component. The second optical component has a plurality of movable lens units, and the variable power optical system effects a variable power operation by movement of the plurality of lens units. If ray was traced from the reduction side toward the enlargement side, the second optical component forms an image of a reduction side conjugate point on the enlargement side than an optical surface of the first optical component that is most adjacent to the reduction side.Type: GrantFiled: March 4, 2004Date of Patent: January 24, 2006Assignee: Canon Kabushiki KaishaInventor: Koshi Hatakeyama
-
Patent number: 6903881Abstract: Small projection optical systems and projection-type image display apparatuses use a plurality of prisms with internally reflecting surfaces with optical power, an incident light refracting surface, and an exit light refracting surface in order to project an image of an image display element on a nearby screen. The ratio of the distance to the screen from the exit light refracting surface of the projection optical system and the distance to the image display apparatus from the incident light refracting surface of the projection optical system satisfies a condition that the ratio be less than twenty. A diaphragm that serves as an aperture stop is placed between two of the prisms. The internally reflecting surfaces may be free-form surfaces or simpler rotationally symmetric aspheric surfaces. Six internally reflecting surfaces of free-form shape are disclosed in a preferred embodiment.Type: GrantFiled: June 27, 2003Date of Patent: June 7, 2005Assignee: Fujinon CorporationInventor: Tomoyuki Baba
-
Patent number: 6876501Abstract: An objective lens for recording and/or reproducing an optical information recording medium, comprises a first lens having a positive refractive power; and a second lens having a positive refractive power; wherein the first lens and the second lens are aligned in this order from a light source side of the objective lens; first lens and the second lens are respectfully made of material having a specific gravity of 2.0 of less and the objective lens satisfies the following conditional formula: NA?0.70, where NA: a predetermined image side numerical aperture necessary for recording and/or reproducing of the optical information recording medium.Type: GrantFiled: October 15, 2001Date of Patent: April 5, 2005Assignee: Konica CorporationInventors: Tohru Kimura, Nobuyoshi Mori
-
Publication number: 20040103950Abstract: [Object] To automate determination of the quantity of a index matching liquid.Type: ApplicationFiled: March 24, 2003Publication date: June 3, 2004Applicant: SEIKO EPSON CORPORATIONInventor: Chiharu Iriguchi
-
Patent number: 6717746Abstract: A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric first section (5) having a concave mirror (6) and a beam-deflection device (7), and a dioptric second section (8) that commences after the beam-deflection device. The system is configured such that the intermediate image follows the first lens (17) of the dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflection device helps to avoid imaging aberrations.Type: GrantFiled: May 22, 2002Date of Patent: April 6, 2004Assignee: Carl Zeiss Semiconductor Manufacturing Technologies AGInventors: Alexander Epple, Helmut Beierl
-
Publication number: 20030197899Abstract: A paper-separating plate is adapted for a paper-separating mechanism having a paper-separating roller. The paper-separating plate placed around a side of the paper-separating roller comprises a main body and a cushion. The main body has a surface and a plurality of grooves and the grooves are positioned on the surface. The cushion is positioned on the surface of the main body and covers the grooves. The cushion positioned over the partial grooves is elastically pressed onto the paper-separating roller. The grooves are linear and the direction of extending the linear grooves is substantially parallel with the axis of the paper-separating roller, the linear grooves neighboring one another or each other. Besides, the cushion is made of flexible material and the main body is made of rigid material.Type: ApplicationFiled: April 23, 2002Publication date: October 23, 2003Inventors: Jen-Shou Tseng, Chih-Wen Huang, Chuan-Yu Hsu
-
Patent number: 6636350Abstract: A photolithographic reduction projection catadioptric objective includes a first optical group having an even number of at least four mirrors and having a positive overall magnifying power, and a second substantially refractive optical group more image forward than the first optical group having a number of lenses. The second optical group has a negative overall magnifying power for providing image reduction. The first optical group provides compensative aberrative correction for the second optical group. The objective forms an image with a numerical aperture of at least substantially 0.65, and preferably greater than 0.70 or still more preferably greater than 0.75.Type: GrantFiled: January 16, 2001Date of Patent: October 21, 2003Assignee: Carl-Zeiss-StiftungInventors: David R. Shafer, Russell Hudyma, Wilhelm Ulrich
-
Patent number: 6604436Abstract: A multi-faceted concentrator apparatus for providing ultra-accelerated natural sunlight exposure testing for sample materials under controlled weathering conditions comprising: facets that receive incident natural sunlight, transmits VIS/NIR and reflects UV/VIS to deliver a uniform flux of UV/VIS onto a sample exposure plane located near a center of a facet array in chamber means that provide concurrent levels of temperature and/or relative humidity at high levels of up to 100× of natural sunlight that allow sample materials to be subjected to accelerated irradiance exposure factors for a significant period of time of about 3 to 10 days to provide a corresponding time of about at least a years worth representative weathering of sample materials.Type: GrantFiled: March 9, 2000Date of Patent: August 12, 2003Assignee: Midwest Research InstituteInventors: Allan A. Lewandowski, Gary J. Jorgensen
-
Patent number: 6577454Abstract: An objective lens assembly for use in an image intensifier over the 0.6 to 0.9 micron spectral bandwidth resulting in a F# within a range of 1.0 to 1.5 and a field of view within the range of 35 to 45 degrees. The assembly includes an air-spaced doublet, a right angle fold prism for bending the optical axis 90 degrees to a reoriented optical axis, two lens subassemblies, and a field flattening lens.Type: GrantFiled: June 14, 2001Date of Patent: June 10, 2003Inventor: John M. Hall
-
Patent number: 6549342Abstract: A finder optical system for a single lens reflex camera is provided with a photographing optical system, a beam splitter for splitting light passed through the photographing optical system. First light deflected by the beam splitter forms a primary image at a position downstream from the beam splitter. Second light passed through the beam splitter is incident on a CCD. A relaying optical system is arranged on an optical path of the light deflected by the optical element to relay the primary image to form a secondary image. A reflection surface is arranged between the relaying optical system and an eyepiece optical system. The reflection surface deflects light, which is directed from the relaying optical system, toward the eyepiece optical system, to proceed in a direction parallel with an optical axis of the photographing optical system. The secondary image is formed between the reflection surface and the eyepiece optical system.Type: GrantFiled: December 6, 2000Date of Patent: April 15, 2003Assignee: Pentax CorporationInventors: Kiyoshi Kawano, Moriyasu Kanai
-
Publication number: 20030043475Abstract: One surface of the substrate constituting a diffraction type lens is formed with a zone plate exhibiting a smaller converging action with respect to a first wavelength &lgr;1 of light and a greater converging action with respect to a second wavelength &lgr;2 of light, whereas the other surface is formed with a zone plate exhibiting a smaller converging action with respect to the second wavelength &lgr;2 of light and a greater converging action with respect to the first wavelength &lgr;1 of light. The substrate is transparent to the first and second wavelengths &lgr;1 and &lgr;2 of light. Each of the zone plates comprises concentric gratings having a stepped cross section.Type: ApplicationFiled: March 14, 2001Publication date: March 6, 2003Applicant: Fuji Photo Optical Co., Ltd.Inventor: Toshiaki Katsuma
-
Patent number: 6522484Abstract: A projection objective, particularly for microlithography at 248 nm or 193 nm has, after two bulges and two waists, a pronounced lens arrangement that preferably contains a further waist and the system diaphragm (AS). This is markedly set back from the negative lens group containing the second waist, and is surrounded by important correction devices. The highest numerical aperture (0.65-0.80) is attained with the smallest lens diameters and by paying heed to the further qualities required for such a microlithography projection objective.Type: GrantFiled: November 19, 1999Date of Patent: February 18, 2003Assignee: Carl-Zeiss-StiftungInventor: Karl-Heinz Schuster
-
Patent number: 6522475Abstract: A zoom optical system comprises a plurality of optical elements. The plurality of optical elements include a first optical element having two refracting surfaces and a plurality of reflecting surfaces formed in a transparent body, being arranged such that a light beam enters an inside of the transparent body from one of the two refracting surfaces and, after being successively reflected from the plurality of reflecting surfaces, exits from the other of the two refracting surfaces, and/or a second optical element having a plurality of surface mirrors integrally formed and decentered relative to one another, being arranged such that an incident light beam exits therefrom after being successively reflected from reflecting surfaces of the plurality of surface mirrors, and a third optical element composed of a plurality of coaxial refracting surfaces.Type: GrantFiled: February 11, 1997Date of Patent: February 18, 2003Assignee: Canon Kabushiki KaishaInventors: Takeshi Akiyama, Norihiro Nanba
-
Publication number: 20020122164Abstract: A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G1) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L101 to L103; L201, L202) of the first lens group (G1) is less than the number of lenses of positive refractive power (L116 to L119; L215 to L217) which are mounted forward of the diaphragm of the further lens group (G5).Type: ApplicationFiled: December 26, 2001Publication date: September 5, 2002Inventors: Karl-Heinz Schuster, Alexander Epple
-
Patent number: 6441972Abstract: An optical assembly divides a single image into a plurality of images which are simultaneously projected onto a single sensor array. The optical assembly is arranged so that each of the plurality of images can be made to pass through a filter of a different type. For example a polarizing filter of a different orientation, or a filter which passes a different spectral band. In this way a single digital camera having a single chip sensor array can simultaneously receive multiple substantially identical images which have been acted on by different filters. This allows data capture from a single frame of a single camera to be used to perform stress analysis, or spectral analysis. This is particularly useful when high speed image capture is desired which contains stress or spectral data, because each frame captured from the sensor array contains multiple images which can be processed to obtain stress or spectral data.Type: GrantFiled: June 13, 2000Date of Patent: August 27, 2002Inventors: Jon R. Lesniak, Eann Alexander Patterson
-
Patent number: 6373640Abstract: Optical systems for use in digital cameras are provided. The systems can be switched between three optical paths (1,2,3): a first path (1) for through-the-lens (TTL) viewing; a second path (2) for recalling previously taken pictures from a microdisplay (16); and a third path (3) in which pictures are taken using an electronic sensor (15), e.g., a CMOS sensor. The optical systems employ a zoom objective lens unit (10), e.g., a 3:1 zoom, an erector lens unit (12), and an eye lens unit (13). They can also employ an image size adjusting lens unit (11) for equalizing the TTL and recalled images presented to the user.Type: GrantFiled: January 28, 2000Date of Patent: April 16, 2002Assignee: Concord Camera Corp.Inventors: Ellis I. Betensky, Alex Raschke, Klaus G. Raschke
-
Publication number: 20020018305Abstract: A lens system has the first and second lens elements from the object side. The first lens element has a negative optical power. The second lens element has a positive optical power. The lens system fulfills the conditions: 0.0<PRL/Y′<0.5, 0.5<Pf/f<1.0. In the conditions, PRL represents a distance in a direction perpendicular to the optical axis between the optical axis and an incident position where a lower ray of a most off-axial rays enters said second lens element, Y′ represents a largest image height, f represents a focal length of the entire lens system, and Pf represents a focal length of said second lens element.Type: ApplicationFiled: October 15, 1999Publication date: February 14, 2002Applicant: MINOLTA CO., LTD.Inventor: TETSUO KOHNO