Abstract: Provided from the object side are a first lens group (11) having a positive refracting power and fixed to the image plane, a second lens group (12) having a negative refracting power and a magnification varying action exhibited when moving along the optical axis, a third lens group (13) fixed to the image plane and having a positive refracting power, and a fourth lens group (14) movable along the optical axis so as to maintain the image plane moving with the movements of the second lens group (12) and of the object in a fixed position from a reference plane. Hence the movement of the image due to camera shake is corrected by moving the whole third lens group (13) vertically to the optical axis. The size is reduced and the aberrations are small because the whole groups whose optical performance is united are decentered.

Abstract: An imaging lens includes at least a first positive lens group, a first negative lens group that moves during focusing, a second positive lens group that moves during focusing, a second negative lens group that can move in a direction substantially vertical to an optical axis, and a positive lens group, which are disposed in order from an object, wherein a condition of an expression, which is 2.0<(?f4)/d34<20.

Abstract: An optical system in which a maximum value of a height from an optical axis of a paraxial marginal ray closer to an expanded side than a point of intersection between an optical axis and a paraxial chief ray, includes a lens unit Lr including at least one refractive optical element Gn of a negative refractive power. In the optical system, ?d (Gn) as an Abbe number of a material of the refractive optical element Gn, ?gF (Gn) as a partial dispersion ratio regarding g and F-lines, FGn as a focal lengths of the refractive optical element Gn, and Fr as focal lengths of the lens unit Lr are set appropriately.

Abstract: An image-capture apparatus includes a variable magnification lens, imaging means for converting an image taken by the variable magnification lens into an electrical image signal, and imaging control means. By referring to a conversion coordinate coefficient, the image control means moves a point on the image and outputs the new image signal. In the variable magnification lens, in order from the object side, a first lens group having positive refractive power, a second lens group that has negative refractive power and performs a variable magnification action by shifting on an optical axis, a third lens group having positive refractive power, a fourth lens group that has negative refractive power and a fifth lens group having positive refractive power are arrayed.

Abstract: A zoom lens system having an image shake correcting capability has, from the object side to the image side: a first lens group having a positive optical power, a second lens group having a negative optical power, a third lens group having a positive optical power, a fourth lens group having a negative optical power, and a fifth lens group having a positive optical power. The third lens group includes a positive lens component and a cemented lens element having a positive optical power. The cemented lens element is moved in a direction perpendicular to the optical axis to correct image shake, and the conditional formula 1.7<nd3p is fulfilled, where nd3p represents the average index of refraction of one or more positive lens elements in the positive lens component.

Abstract: A zoom lens for forming an optical image of an object on a sensing surface of an image sensor at a variable magnification has first, second, third, fourth and fifth lens groups with positive-negative-positive-negative-positive zoom arrangement. Between the second lens group and the fourth lens group, an optical aperture stop is located. The fourth lens group is composed of one negative lens element having at least one aspherical surface and having a paraxial radius of curvature of an image side surface smaller than a paraxial radius of curvature of an object side surface, and satisfies conditional formula ?1.15<f4/?{square root over (fw·ft)}<?0.5 (where f4 represents a focal length of the fourth lens group, fw represents a focal length of an entire system at a wide-angle end, and ft represents a focal length of the entire system at a telephoto end).

Abstract: A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system has a light source emitting projection light and projection optics arranged between the mask and the image. Starting from the mask, the following are arranged in the beam path of the projection optics: a first group of optical components with an overall positive refractive power; a second group of optical components with an overall negative refractive power; a third group of optical components with an overall positive refractive power; a fourth group of optical components with an overall negative refractive power, and, a fifth group of optical components with an overall positive refractive power. At least three optical subgroups having at least one optical component can be displaced along the optical axis of the projection optics.

Abstract: A zoom lens system comprises, in order from an object side, a first lens unit having a positive refractive power; a second lens unit having a negative refractive power; a third lens unit having a positive refractive power; a fourth lens unit having a negative refractive power; and a fifth lens unit having a positive refractive power, and during magnification change from a wide-angle end to a telephoto end, each of the space between the respective lens units changes.

Abstract: A compact zoom lens includes a first lens unit disposed closest to an object side, an aperture, and a rear lens group. The first lens unit includes a first diffraction optical part having positive refractive power, and the rear lens group includes a second diffraction optical part having positive refractive power. The power relation between the two diffraction optical parts and the positions of the diffraction optical parts are set appropriately. The zoom lens can have a high zoom ratio wherein chromatic aberration is fully corrected, and an image pickup apparatus employing this zoom lens can be provided.

Abstract: A zoom lens includes first to fifth lens units arranged in sequence from an object side to an image side, and having positive, negative, positive, negative, and positive refractive powers in that order. The zoom lens performs zooming by moving the first to fifth lens units. The fourth lens unit includes a negative lens, which is moved in such a manner as to have a component in a direction orthogonal to an optical axis so as to shift an image formed with an entire system in the direction orthogonal to the optical axis. The zoom lens satisfies the condition, 0.50<|ft/f4|<1.50, where ft is a focal length of the entire system, and f4 is a focal length of the fourth lens unit, both at the telephoto end.

Abstract: A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system has a light source emitting projection light and projection optics arranged between the mask and the image. Starting from the mask, the following are arranged in the beam path of the projection optics: a first group of optical components with an overall positive refractive power; a second group of optical components with an overall negative refractive power; a third group of optical components with an overall positive refractive power; a fourth group of optical components with an overall negative refractive power, and, a fifth group of optical components with an overall positive refractive power. At least three optical subgroups having at least one optical component can be displaced along the optical axis of the projection optics.

Abstract: A zoom lens includes first to fifth lens units arranged in sequence from an object side to an image side, and having positive, negative, positive, negative, and positive refractive powers in that order. The zoom lens performs zooming by moving the first to fifth lens units. The fourth lens unit includes a negative lens, which is moved in such a manner as to have a component in a direction orthogonal to an optical axis so as to shift an image formed with an entire system in the direction orthogonal to the optical axis. The zoom lens satisfies the condition, 0.50<|ft/f4|<1.50, where ft is a focal length of the entire system, and f4 is a focal length of the fourth lens unit, both at the telephoto end.

Abstract: At least one exemplary embodiment is directed to an optical system which includes at least one first refractive optical element, which includes a solid material satisfying the following conditional expression (1), and at least one second refractive optical element, which includes a solid material satisfying the following conditional expression (2): ?1.33×10?3×?d+6.7×10?1<?gF ??(1) ?1.63×10?3×?d+6.2×10?1>?gF ??(2) where ?d and ?gF indicate the Abbe number and the partial dispersion ratio, respectively.

Abstract: Providing a zoom lens system that can excellently correct aberrations over entire range from a wide-angle end state W to a telephoto end state T in spite of having a high zoom ratio including, in order from an object, a first group G1 having positive power, a second group G2 having negative power, a third group G3 having positive power, a fourth group G4 having negative power, and a fifth group G5 having positive power. When zooming from the wide-angle end state W to the telephoto end state T, a distance between the first group G1 and the second group G2 increases, a distance between the second group G2 and the third group G3 decreases, a distance between the third group G3 and the fourth group G4 increases, and a distance between the fourth group G4 and the fifth group G5 decreases. Given conditions are satisfied.

Abstract: A zoom lens with a wide angle of view and a high zooming ratio and a camera employing the zoom lens. The zoom lens includes a first lens group having a positive refractive power, a second lens group having a negative refractive power, a third lens group having a positive refractive power, a fourth lens group having a negative refractive power, and a fifth lens group having a positive refractive power, wherein the first through fifth lens groups are sequentially arranged from an object side toward an image side. The first through fifth lens groups are moved during zooming between wide angle position to telephoto position in a manner that increases the distances between the first and second lens groups, between the third and fourth lens groups, and between the fourth and fifth lens groups and decreases a distance between the second and third lens groups.

Abstract: Providing an interchangeable lens capable of carrying out quick focus from infinity to a close object with a magnification of almost life size by a light-weight moving lens group, exhibiting excellent imaging performance across an entire focusing range, and obtaining excellent imaging performance by a vibration reduction lens and its drive system appropriately arranged even upon vibration reduction. The lens includes a first group having positive power, a second group having negative power, a third group having positive power, and a fourth group having negative power. The fourth group includes a front group having negative power and a rear group having positive power. When the lens is vibrated, the lens corrects image blur by shifting the front group almost perpendicularly to an optical axis. When focusing from infinity to a close object, the first and the front groups are fixed and at least the third group is moved toward the object side.

Abstract: A zoom lens includes a most object-side lens unit remaining fixed on the optical axis when the magnification of the zoom lens is changed and a focusing operation is performed; a most image-side lens unit remaining fixed when the focusing operation is performed; and a plurality of moving lens units lying between the most object-side lens unit and the most image-side lens unit, moved along the optical axis when the magnification is changed. The most object-side lens unit includes, in order from the object side, a negative lens component, a reflective optical component having a reflecting surface for bending the optical path, and a positive lens component. The most image-side lens unit has at least one aspherical surface. An electronic imaging device includes an electronic image sensor located on the image side of the zoom lens.

Abstract: A zoom lens includes, in order from an object side to an image side: a first lens unit having positive optical power; a second lens unit having negative optical power; a third lens unit having positive optical power and an aperture stop; a fourth lens unit having negative optical power; and a fifth lens unit having positive optical power, in which, during zooming from a wide-angle end to a telephoto end, the first lens unit stays, the second lens unit moves toward the image side, and the third lens unit moves together with the aperture stop.

Abstract: A zoom lens includes a most object-side lens unit remaining fixed on the optical axis when the magnification of the zoom lens is changed and a focusing operation is performed; a most image-side lens unit remaining fixed when the focusing operation is performed; and a plurality of moving lens units lying between the most object-side lens unit and the most image-side lens unit, moved along the optical axis when the magnification is changed. The most object-side lens unit includes, in order from the object side, a negative lens component, a reflective optical component having a reflecting surface for bending the optical path, and a positive lens component. The most image-side lens unit has at least one aspherical surface. An electronic imaging device includes an electronic image sensor located on the image side of the zoom lens.

Abstract: A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G1) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L101 to L103; L201, L202) of the first lens group (G1) is less than the number of lenses of positive refractive power (L116 to L119; L215 to L217) which are mounted forward of the diaphragm of the further lens group (G5).

Abstract: A projection optical system comprises a first lens group with positive power, a second lens group with negative power, a third lens group with positive power, a fourth lens group with negative power, and a fifth lens group with positive power. At least one of the first, second, and third lens group has an aspherical surface. A lens arrangement of one embodiment has a plurality of waists of lenses, with aspherical surface before and after a first waist.

Abstract: An image stabilizing optical objective lens system comprising, in the order from the side of the system closest to an object, a first lens unit having a positive refractive power, a second lens unit having a negative refractive power, a third lens unit having a positive refractive power, a fourth lens unit having a negative refractive power, and a fifth lens unit having a positive refractive power. The objective lens system performs focusing by moving the second lens unit in the direction of the optical axis of the system for focusing and corrects image blur by moving the fourth lens unit in the direction perpendicular to the optical axis.

Abstract: An optical projection lens system comprising one lens with an aspherical surface and comprising a first bulge followed by a first waist followed by a second bulge, wherein the diameter of the second bulge is smaller than the diameter of the first bulge.

Abstract: A projection exposure system, intended in particular for microlithography, is used for generating, in an image plane, an image of a mask arranged in an object plane. The projection exposure system has a light source emitting projection light and projection optics arranged between the mask and the image. Starting from the mask, the following are arranged in the beam path of the projection optics: a first group of optical components with an overall positive refractive power; a second group of optical components with an overall negative refractive power; a third group of optical components with an overall positive refractive power; a fourth group of optical components with an overall negative refractive power, and, a fifth group of optical components with an overall positive refractive power. At least three optical subgroups having at least one optical component can be displaced along the optical axis of the projection optics.

Abstract: An object of the present invention is to provide a projection optical system having a large numerical aperture in which the maximum effective diameter of lens of the optical system is satisfactorily small.

Abstract: A projection optical system is disclosed that includes six lens groups, four of which are positioned in pairs symmetrically about a stop. The second and fifth lens groups, in order from the object side, may be positioned symmetrically about the stop but are also adjustable asymetrically about the stop in order to adjust the magnification of the projection optical system. The first and sixth lens groups, in order from the object side, function to make the projection optical system substantially telecentric on both the object side and the image side, respectively. Also disclosed is a projection and light exposure apparatus that uses the projection optical system of the present invention. The projection and light exposure apparatus automatically detects the image magnification and, based on the detection result, adjusts the positions of the second and fifth lens groups G2 and G5 as a unit so as to maintain a specified magnification.

Abstract: A taking lens device has a zoom lens system having an optical system that is comprised of a plurality of lens units and that achieves zooming by varying the unit-to-unit distances and an image sensor that converts an optical image formed by the zoom lens system into an electric signal. The zoom lens system is comprised of, from the object side, a first lens unit having a positive optical power, a second lens unit having a negative optical power, a third lens unit having a positive optical power, and a fourth lens unit having a negative optical power. At least one of the following conditional formula is fulfilled: 1.1<f1/fT<2.5, where f1 represents the focal length of the first lens unit, and fT represents the focal length of the entirety optical system at the telephoto end, and 0.3<D34W/D34T<2.5 where D34W and D34T represent axial distance between the third lens unit and the fourth lens unit at wide-angle end and telephoto end, respectively.

Abstract: An afocal, wide converter lens is provided in order to shorten the focal length of a main lens, thereby shortening the projection distance that is needed to fully illuminate a given screen size when the wide converter lens is attached to the enlarging side of a main lens which functions as a projection lens of a projection apparatus. The wide converter lens is formed of, in sequential order in the direction from enlarging side to the reducing side of the main lens, a lens element of positive refractive power, at least one lens element of negative refractive power, a positive meniscus lens element having its convex surface on the enlarging side, a negative meniscus lens element having its concave surface on the enlarging side, and a cemented lens of overall positive refractive power. Various conditions are satisfied in order that the wide converter lens does not degrade the optical performance of the main lens.

Abstract: A microlithographic projection objective with a lens arrangement, has a a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power. The system diaphragm (AS) is situated in the fifth lens group, and at least two lenses of this lens group are situated before the system diaphragm (AS). The numerical aperture on the image side is greater than 0.65 (in examples, up to 0.8), or this lens group has at least 13 lenses, or the system diaphragm (AS) is arranged in the region of the lens at which the pencil of rays assumes the greatest diameter, and its two adjacent lenses.

Abstract: An optical projection lens system comprising one lens with an aspherical surface and comprising

Abstract: An exposure apparatus and method and a high-performance projection optical system incorporated into the exposure apparatus. The projection optical system can be made doubly telecentric, while ensuring a large numerical aperture and large exposure field. The numerical aperture can vary via a variable aperture stop, and the aberrations are well-corrected over the range of numerical apertures. The projection optical system comprises, objectwise to imagewise, a first lens group G1 having positive refractive power and a subgroup G1p, second lens group G2 having negative refractive power and a subgroup G2n, a third lens group G3 having positive refracting power and at least one negative lens, a fourth lens group G4 having negative refracting power and a subgroup G4n, and fifth lens group G5 having positive refracting power and a subgroup G5p. Fifth lens group G5 includes a variable aperture stop AS which determines the image-side numerical aperture.

Abstract: An optical projection lens system comprising one lens with an aspherical surface and comprising a first bulge followed by a first waist followed by a second bulge, wherein the diameter of the second bulge is smaller than the diameter of the first bulge.

Abstract: A projection optical system (20), exposure apparatus (10) incorporating same, and methods pertaining to same, for manufacturing devices and elements, such as integrated circuits, crystal displays, detectors, MR (magneto-resistive) heads, and the like. The projection optical system includes a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having positive refractive power, a fourth lens group (G4) having negative refractive power and a least a first aspherical surface (ASP1), and a fifth lens group (G5) having positive refractive power and an aperture stop (AS). The projection optical system is designed such that paraxial rays traveling parallel to optical axis (A) imagewise to objectwise intersect the optical axis at a location (Q) between the fourth lens group and the fifth lens group.

Abstract: Projection optical systems are provided for use in an exposure apparatus that have a numerical aperture greater than 0.63, a reduced field curvature of pupil at the aperture stop and are able to maintain imaging performance. Further, the present invention avoids degradation in the imaging performance when the numerical aperture is changed.

Abstract: The present invention relates to an exposure apparatus having a high-performance projection optical system having a relatively large numerical aperture and achieving bitelecentricity and superior correction of aberrations, particularly distortion, in a very wide exposure area. Particularly, the protection optical system according to the present invention is composed of a first lens group G.sub.1 with a positive refracting power, a second lens group G.sub.2 with a negative refracting power, a third lens group G.sub.3 with a positive refracting power, a fourth lens group G.sub.4 with a negative refracting power, and a fifth lens group G.sub.5 with a positive refracting power in order from the side of a first object R. The present invention is directed to finding of suitable ranges of focal lengths for the first to fifth lens groups G.sub.1 -G.sub.5, based on the above arrangement.

Abstract: A zoom lens system with an anti-vibration function, which is provided with, in order from the object end: a first lens group having a positive refractive power, a second lens group having a negative refractive power, a third lens group having a positive refractive power, a fourth lens group having a negative refractive power, and a fifth lens group having a positive refractive power, and whose focal length at the wide-angle end is shorter than the diagonal width of the image plane of the zoom lens system, at least one lens group selected from the first lens group and the fifth lens group moves toward the object end and all of the distances between each of the lens groups are changed when zooming from the wide-angle end to the telephoto end. At least one lens group selected from the second, third, and fourth lens groups moves in a direction substantially perpendicular to the optical axis of the zoom lens system when preventing vibration.

Abstract: A projection lens system that is used to transfer a pattern from a reticle onto a wafer, incorporates a projection optical system that is capable of maintaining the same, or increased performance, as the current projection lens systems, and that achieves excellent aberration correction, has a numerical aperture of at least 0.6, an exposure field area of at least 18.7.times.18.7 mm or at least 26.45 mm diameter at the wafer plane, and has a total lens thickness to length ratio less than 0.64 and uses 5 or less aspherical lens surfaces.

Abstract: A projection optical system is provided which forms an image of a first object onto a second object and includes, in order from the first object side:a first positive lens group G1 with a subgroup G-1p having at least two positives lenses;a second negative lens group G2 with a subgroup G-2n having at least three negative lenses;a third lens group G3 with a subgroup G-3p having at least three positives lenses and one negative lens;a four negative lens group G4 with a subgroup G-4n having at least three negative lenses;a fifth positive lens group G5 with a subgroup G-5p having at least five positives lenses and having a positive lens G-5g arranged closer to the second object side than the subgroup G-5p and having a concave surface facing the second object side. The projection optical system provides an optimal range for the focal length and the preferable range of the radius of curvature for the concave surface R5g of the positive lens G-5g.

Abstract: A projection exposure system, which is used to transfer a pattern from a reticle or mask onto a substrate, incorporates a projection optical system that is capable of maintaining the same performance as that which can be found in an ideal environment, even when the actual use environment (e.g. atmospheric pressure and temperature) is not ideal. In addition, the projection optical system is able to recover the same performance as in an ideal environment through relatively minor adjustment of its projection optical system even when atmospheric pressure significantly changes due to, e.g., a change in location and altitude where the system is used.

Abstract: A high-performance taking lens system suitable for a lens shutter type camera, which is capable of displaying superior optical performance as far as the edges of film image field with minimal deterioration of the performance despite a simple arrangement. The taking lens system has a front lens unit including at least one positive lens (G1) and at least one negative lens (G2) whose image-side surface has a higher curvature than that of the object-side surface thereof, and a rear lens unit disposed behind the front lens unit and including a doublet (G3) which consists of one positive lens and one negative lens and which has a positive refractive power, and a positive lens (G4). The lens surface of the doublet (G3) that is the closest to the image side is concave toward the image side. The intermediate lens surface of the doublet (G3) is convex toward the image side. The negative lens (G2) is preferably a meniscus negative lens having a concave surface directed toward the image side.

Abstract: A zoom lens includes a first lens group having a positive refracting power, a second lens group having a negative refracting power, a third lens group having a positive refracting power, a fourth lens group having a negative refracting power, and a fifth lens group having a positive refracting power in this order from the object side in order to perform zooming by varying the distance between the lens groups, the fifth lens having at least one positive lens and a cemented lens which has a negative refractive index as a whole, its positive lens being cemented to its negative lens, and the cemented surface being convex on the image side.