Abstract: An opto-electronic module may be provided with an internal thermoelectric cooler. Components to be cooled may be positioned over the thermoelectric cooler. Other components may be positioned aside the cooled components but raised, using a riser, to position them away from the cooled components.

Abstract: An apparatus for passively compensating for undesirable positional shifts in objects due to temperature changes. The apparatus is particularly suited for use in optical assemblies, where it is desired to compensate for thermal changes in the system to maintain an optical focus despite large changes in environmental temperature. A specially configured compensating member is placed between two objects whose spacing is to be regulated. The compensating member is composed of a material having a non-linear coefficient of thermal expansion, to permit the use of a compensating member also having a very high average coefficient of thermal expansion. The compensating member has multiple ramps or faces positioned at differing angles to permit thermal compensation to be predetermined and provided for selected temperatures, despite the non-linearity of the compensating member's coefficient of thermal expansion.

Abstract: An apparatus for passively compensating for undesirable positional shifts in objects due to temperature changes. The apparatus is particularly suited for use in optical assemblies, where it is desired to compensate for thermal changes in the system to maintain an optical focus despite large changes in environmental temperature. A specially configured compensating member is placed between two objects whose spacing is to be regulated. The compensating member is composed of a material having a non-linear coefficient of thermal expansion, to permit the use of a compensating member also having a very high average coefficient of thermal expansion. The compensating member has multiple ramps or faces positioned at differing angles to permit thermal compensation to be predetermined and provided for selected temperatures, despite the non-linearity of the compensating member's coefficient of thermal expansion.

Abstract: The present invention comprises a polarizer adhered on a flange plate at the top end of a L-shape base, an aslant surface on one side of the base, two sleeve screws protruded from the center of the aslant surface, an air duct defined between an upper base and a lower base of a Z-shape fixed base, two slots disposed on the lower base for receiving the sleeve screws, and two fixing bolts securing the washers onto the sleeve screw to limit the fixed base on the aslant surface of the base. A supporting surface is formed at a flange disposed downward at both ends of the upper base of the fixed base for gluing a half-wave plate. An adjusting mechanism protruded from the lower side of the fixed base extends into a recess at the lower end of the aslant surface; a screw hole is disposed on a side of the base and having an adjusting slot with its end propping one side of the adjusting mechanism; and an elastic member with its ends respectively fixed to a side of the base and a hole of the adjusting mechanism.

Abstract: There is provided an image recording device which is compact and free of waste materials, which has a completely dry system and a simplified exposure system, and which can carry out high speed image recording. The image recording device includes, within a housing of the image recording device, an accommodating section for accommodating a light and heat sensitive recording material; a light recording section for exposing the light and heat sensitive recording material, which is supplied from the accommodating section, with light to record a latent image; a heat developing section for developing the latent image by applying heat; a light fixing section for irradiating light to fix the developed image; and a discharging section for discharging the light and heat sensitive recording material having an image recorded thereon. Exposure is carried out by a plurality of LEDs provided at a light source section of an exposure unit of the light recording section.

Abstract: A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF2, while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.

Abstract: The invention relates to an optical lens system (39) which is suitable for use in an optical scanning device (15) for reading and/or writing an optically scannable record carrier (9). The lens system comprises a first lens or objective lens (45) and a second lens or auxiliary lens (47) which is small in comparison with the first lens and which, in operation, is positioned between the first lens and the record carrier. The lenses are arranged in a lens holder (61). According to the invention, the lens holder (61) and one of the two lenses (45, 47) are manufactured as one integrated part (63) from a transparent synthetic material by means of a moulding process, and the other lens is arranged in the integrated part as a separate component, with a chamber (85) enclosed by the lens holder and the two lenses communicating with the environment of the lens system via an air vent connection (93). The lens system thus comprises only two parts to be assembled, so that the assembling process is considerably simplified.

Abstract: In a laser diode module, a laser diode chip is disposed in a module casing. A heater heats the laser diode chip such that at least a temperature of the laser diode chip is kept constant. A temperature detector detects a temperature of the laser diode module. A temperature controller controls a calorific value of the heater in accordance with the detected temperature of the laser diode module. The temperature controller keeps the temperature of the laser diode module at a temperature higher than an operative temperature of a laser diode device incorporating the laser diode module.

Abstract: An arrangement for fixing an optical component part in position in a device housing, comprising a holder which is connected to a housing and which presses the component part into a cutout in the housing accompanied by pretensioning. The holder is fashioned in one piece from elastic material and is provided with clamps that are formed integral with it, at least one of which clamps presses the component part against a reference plane in direction of one of the coordinates X, Y, Z accompanied by pretensioning, and fastening elements are formed integral with the holder for securing it to the housing.

Abstract: Reliable and economical passive thermal compensation in both focus (parallel to the optical axis) and lateral position (perpendicular to the optical axis) is disclosed for optical apparatus, including spectrographs. In the preferred embodiment, to maintain the position of the lens along the optical axis, two or more polymer spacers are used between the lens mount and a floating flange to which the lens is attached. The polymer spacers have a thermal coefficient of expansion such that when the temperature increases the lens is moved toward the detector array by the spacers to compensate for the normal increase of the lens-detector spacing with temperature. Flexure mounts, which bend by a predetermined amount in a known direction when the temperature changes, are preferably used to connect the lens mount to the floating plate, thereby moving the lens in a direction lateral to the optical axis.

Abstract: A strain-isolated mirror is made from a substrate having first and second body portions. First and second connecting portions extend across a gap between the first body portion and the second body portion. A first flexural hinge on the first second connecting portion couples the second connecting portion to the first body portion.

Abstract: An optical pickup device-holding container, which is formed from a resin composition comprising a poly(arylene sulfide) (A) and an inorganic filler (B) and having a thermal conductivity of at least 1 W/mK; and an optical pickup device in which at least a light source, an objective lens and a light-receiving part are held in the holding container.

Abstract: A holder (2) of projector lens (1) is provided with openings through which springs (3) pass. The shorter arm (4) of said spring (3) presses said lens (1) against said holder (2), the longer arm (5) is pressed to the circumferential mantle of said holder (2) and secured in this position by a bent cutout (7).

Abstract: A support member (311) for supporting liquid crystal panels (441R, 441G, 441B) is disposed parallel to a cooling air flow channel formed between a light-incident end of a cross dichroic prism (45) and the respective liquid crystal panels and is constructed by a pair of components for supporting a neighborhood of the ends of the respective liquid crystal panels, so that the gap between the light-incident end of the cross dichroic prism and the respective liquid crystal panels facing the cooling air flow channel can be enlarged, thereby flowing cooling air sufficient for cooling a polarizer (446) and the respective liquid crystal panels in a direction of the cooling air flow channel for efficiently cooling them.

Abstract: A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels, each having an optical axis that is parallel to the other, and a transverse lens barrel connecting the first lens barrel to the second lens barrel. The catadioptric lens barrel structure may be used in semiconductor fabrication by placing a reticle in front of the entrance of the first lens barrels and a wafer in front of the exit of the second lens barrel. The first and second lens barrels comprise a plurality of sub-barrels serially aligned along the corresponding optical axis. There is physical separation between each sub-barrel in the series to isolate each sub-barrel from thermal and vibrational effects propagated by the other sub-barrels in the series. A support structure is provided to support each of the plurality of sub-barrels and is made of a material having a low coefficient of thermal expansion. The support structure comprises a plurality of support platforms.

Abstract: An optical apparatus (10, 310) includes a housing (12) having a lens support (51, 321) moveably supported therein. An athermalization part (121, 341) is coupled at one end to the housing and at the other end to the lens support, in order to effect movement of the lens support relative to the housing in response to a temperature variation. This coupling includes coupling structure (148, 348) on the athermalization part which engages coupling structure (27, 327) on the housing or lens support, and these coupling structures are resiliently urged into engagement with each other in a manner that facilitates a zero backlash condition.

Abstract: A thermal imaging instrument and method is disclosed for viewing hot spots within a normally enclosed cabinet, for example, a high voltage electrical power distribution cabinet. Large and expensive thermal viewing windows normally required for thermal examination of these cabinets utilizing standard thermal imaging cameras is obviated by the use of an accessory lens assembly. The unique combination and methodology of using the lens assembly, standard thermal imaging camera and small access opening in the cabinet face allows for the retention of the safety rating of the cabinet. Further adding to the accuracy, convenience and safety of the approach, an infrared view port, together with cap and ring chain assembly, is permanently affixed to the cabinet face in relation to the small access hole.

Abstract: An etalon includes a tuning plate in the air-gap between the etalon mirrors. The method of tuning includes selecting a tuning plate that makes the optical length of the etalon slightly less than required for ITU and then rotating the tuning plate through a small angle until tuning is complete. The tuning plate material is selected to provide dispersion compensation and to compensate for thermal expansion of the mirror spacers.

Abstract: A lens assembly especially adapted for mounting in an environment subject to variable temperatures, such as a projection television set, including an automatic thermal focus adjustment. A lens mount is formed from a material having a first coefficient of thermal expansion and carries at least one lens. A focus mount is coupled to the lens mount and is formed from a material having a second coefficient of thermal expansion different from the first coefficient of thermal expansion. Adjustment and locking structure couples the lens mount to the focus mount and allows the lens mount to be axially adjusted relative to the focus mount and then locked in position. In use, the relative axial positions of the lens mount and focus mount automatically change to move the lens in response to a temperature change in the environment of use and after being locked in position with the adjustment and locking structure.

Abstract: A temperature stabilized optical mirror is disclosed. A rotatable mirror for switching optical light signals between optical fibers is mounted on a support structure. One or more PTC (Positional Temperature Coefficient) resistors are mounted to the support structure to provide heat to the combination support structure and mirror so as to maintain the mirror and support structure above a lower limit of a selected temperature range. The PTC resistor is selected to have a switching temperature substantially equal to the lower limit of the select temperature range.

Abstract: A laser diode collimating system comprises a collimating lens for receiving a laser beam from a laser diode LD. First and second orthogonally arranged cylindrical lenses are provided through which the laser beam passes. The cylindrical lenses are positioned so as to have a substantially common focal plane and operate substantially independently on the divergence and/or convergence of the laser beam in its fast axis and slow axis directions respectively. A convex lens, through which the beam passes, has a focus lying in the said common focal plane.

Abstract: An optical lens unit comprises an optical lens for focusing a light beam, a hollow cylindrical lens holder having, on an inner circumferential surface, a support section contacting one surface of the optical lens and supporting a circumferential part thereof, an elastic member interposed between the support section and the optical lens, and a lens fastener movable along an optical axis of the optical lens, clamping the optical lens jointly with the lens holder, and contacting, at one end, the other surface of the optical lens. The lens fastener pushes the circumferential part of the optical lens, thereby to deform the elastic member to adjust the position of a focal point of the optical lens.

Abstract: An optical element comprises a solid material in an optical path of the optical element, wherein the solid material comprises a first material and a second material, and the first and second materials have first and second temperature coefficients of refractive index, respectively, wherein the first temperature coefficient of refractive index has a sign which is opposite that of the second temperature coefficient of refractive index.

Abstract: A kinematic alignment structure is provided for use as an attachment to a lens barrel. This kinematic alignment structure is well suited for controlling perpendicular orientation of a pair of mirrors carried in a lens barrel that is transversely connecting two parallel lens barrels. The transverse lens barrel carries the mirrors on each end of the transverse lens barrel. The mirrors have a substantially perpendicular orientation from each other. The alignment structure microscopically adjusts the perpendicular alignment of the couple of mirrors. The alignment structure comprises a set of three positioning knobs distributed on each end face of the lens barrel. The mirrors are positioned in direct contact with the lens barrel via the set of three positioning knobs. The positioning knobs comprise a platform, and have raised tubular bodies and spherical top surfaces. The spherical top surfaces may be polished to microscopically adjust the perpendicular orientation between the two mirrors.

Abstract: An athermalization compensation device (26, 126, 226) includes a frustoconical outer ring (51, 251), with opposite edge portions (53, 54, 253) offset radially and axially, and with a relatively low coefficient of thermal expansion. An inner ring (52, 252) has a relatively high coefficient of thermal expansion. In response to a temperature change, the inner ring exerts on the radially inner edge of the outer ring a force which flexes the outer ring so that the inner edge moves radially and axially in relation to the outer edge, in a manner which changes an axial dimension of the device. In an alternative embodiment, the outer ring has circumferentially spaced slots (264) extending into it from its radially inner edge, and the inner ring has a respective portion (281) disposed in each slot.

Abstract: An optical module of the present invention can stabilize e.g. the temperature of a wavelength monitor portion so that the oscillating wavelength of a laser diode is stabilized. The laser diode and the wavelength monitor portion for monitoring the wavelength of the laser diode are included in a package, and are mounted onto a thermo module. The wavelength monitor portion comprise at least an optical filter positioned to receive and filter at least a component of the laser beam and a light receiving device to receive the filtered light through the optical filter and monitor a wavelength of the laser beam. A heat shield member for reducing heat transmission from the package to the wavelength monitor portion is arranged in at least one portion of a peripheral area of the wavelength monitor portion.

Abstract: Laser material is pumped and its stored energy is extracted in a heat capacity laser mode at a high duty factor. When the laser material reaches a maximum temperature, it is removed from the lasing region and a subsequent volume of laser material is positioned into the lasing region to repeat the lasing process. The heated laser material is cooled passively or actively outside the lasing region.

Abstract: Thermally compensated wavelength division demultiplexers and multiplexers are disclosed. In one aspect, thermally compensated optical systems for use in an optical network are disclosed. The systems include a diffraction grating coupled to a grating mount having a temperature coefficient. The systems further include an optical fiber coupled to a fiber mount having a temperature coefficient and a lens assembly coupled to a lens mount. The lens mount is operable to position the lens assembly between the fiber mount and the grating mount and includes a substantially similar temperature coefficient to the fiber mount.

Abstract: A controlled-expansion structure has a controlled thermal expansion along a control axis extending between two marker locations over a temperature range. The controlled-expansion structure includes a first expansion element having a first marker location and a first contact surface, the first expansion element having a first coefficient of thermal expansion; and a second expansion element having a second marker location and a second contact surface. The second expansion element has a second coefficient of thermal expansion different from the first coefficient of thermal expansion. The controlled-expansion structure further includes a freely movable interface formed by a contact between the first contact surface and the second contact surface. The interface is oriented at an interface angle relative to the control axis of greater than 0 but less than 90 degrees.

Abstract: The invention provides a reference assembly that is mounted coaxially with an axis of a projection unit used in lithographic equipment to form semiconductor devices and LCDs. The reference assembly is made of a material having a low coefficient of thermal expansion, and the reference assembly has one or more reference features such as a mirror or off-axis alignment system that represent the axis of the projection unit. The reference assembly is attached to a housing of the projection unit by expansion joints such as flexures, which absorb the thermal expansion and contraction of the housing without significantly affecting the relationship of the reference features to the axis of the projection unit. The invention also provides a projection unit incorporating a reference assembly as well as a method of providing reference features and a method of making a semiconductor device.

Abstract: An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. A refractive optical element, e.g. a lens (2), is heated by the rotationally non-symmetrical radiated impingement (3) of a light source. At least one electric heating element is coupled to the optical element. Said heating element comprises a resistance heating coating carried by the optical element. In the region of the surface (3) of the optical element acted upon by the radiation of the light source the resistance heating coating is substantially optically transparent. It comprises a plurality of parallel, electrically mutually insulated coating strips (5 to 10). A heating current source (17 to 19) is additionally part of the heating element.

Abstract: An optical communication device which has an optical module including an optical element and a lens system optically coupled through a space and housed in a package, a supporting member for supporting the optical module, and a fixing member directly placed over the optical module for removably fixing the optical module on the supporting member, wherein the optical module is securely sandwiched between the supporting member and the fixing member, and a method of fixing the optical module for use in the optical communication device.

Abstract: An optical arrangement, in particular a microlithographic projection printing installation, has in particular a slot-shaped image field or rotationally non-symmetrical illumination. An optical element (1) is therefore acted upon in a rotationally non-symmetrical manner by the radiation of the light source. A compensating light supply device (11, 14 to 19) is optically coupled via the peripheral surface (13) of the optical element (1) to the latter. It supplies compensating light (16, 12) to the optical element (1) in such a way that the temperature distribution in the optical element (1), which arises as a result of cumulative heating of the optical element (1) with projection light (2) and compensating light (12), is at least partially homogenized. In said manner image defects induced by the projection light are corrected.

Abstract: The invention relates to an optical system comprising at least one first and second optical element, whereby the optical elements are arranged at a predetermined distance from one another, using a mounting. The mounting comprises compensation elements for modifying the predetermined distance between a first optical element and a second optical element, according to the temperature. The optical system is a telescope and the distance between the primary mirror and the secondary mirror is modified according to the temperature.

Abstract: A wavelength division multiplexer (WDM) including a support structure that is coupled to at least one optical component. A diffraction grating is optically coupled to at least one optical component coupled to the at least one optical component. A frame is coupled to the diffraction grating. Pins may be coupled between the support structure and the frame to substantially thermally isolate the support structure from the frame. The pins may be substantially geometrically equally spaced and have approximately the same exposed length extending from the lens barrel. The pins may have the same coefficient of thermal expansion as the support structure.

Abstract: An optical semiconductor device includes a package body, a laser diode accommodated in the package body, a temperature regulation block connected thermally to the laser diode, an optical filter connected thermally to the temperature regulation block, a photodetector receiving the laser beam from the laser diode via the optical filter, a feeder feeding a driving power to the laser diode, and a thermal conducting body provided separately to the feeder, wherein the thermal conducting body transmits the temperature of the package body to the laser diode.

Abstract: An imaging optical instrument causes light emitted from a plurality of light sources arranged adjacent an object to image on recording surfaces of a photosensitive or thermosensitive material. The optical instrument includes a two-sided telecentric optical system having a first lens disposed adjacent an entrance end of a lens barrel, and a second lens disposed adjacent an exit end of the lens barrel, and an aperture stop disposed adjacent a meeting point of a rearward focus of the first lens and a forward focus of the second lens. The aperture stop has an aperture formed centrally thereof for allowing passage of beams that should contribute to image formation, and a refracting portion surrounding the aperture for refracting beams that should be intercepted and causing these beams to leave the lens barrel from the exit end thereof.

Abstract: An optical arrangement, in particular a projection exposure system for microlithography, has, in particular, a slit-shaped image field or a non-rotational-symmetric illumination. As a result, an optical element (101) is exposed in a non-rotational-symmetric manner to the radiation of the light source (110, 111, 112). The optical element (101) has an absorbing coating (104, 105). The absorption of the coating (104, 105) is distributed in such a manner that it is non-rotation-symmetrical in a manner that is at least approximately complementary to the intensity distribution of the exposure to the radiation (107, 108, 109) of the light source (110, 111, 112). As a result of the energy absorbed in the coating (104, 105), an additional heating of the optical element (101) takes place that results in a better non-rotational-symmetric temperature distribution and, consequently, a compensation for light-induced imaging errors.

Abstract: An optical arrangement, in particular a projection exposure system for microlithography, has, in particular, a slit-shaped image field or a non-rotational-symmetric illumination. As a result, an optical element (101) is exposed in a non-rotational-symmetric manner to the radiation of the light source (110, 111, 112). The optical element (101) has an absorbing coating (104, 105). The absorption of the coating (104, 105) is distributed in such a manner that it is non-rotation-symmetrical in a manner that is at least approximately complementary to the intensity distribution of the exposure to the radiation (107, 108, 109) of the light source (110, 111, 112). As a result of the energy absorbed in the coating (104, 105), an additional heating of the optical element (101) takes place that results in a better non-rotational-symmetric temperature distribution and, consequently, a compensation for light-induced imaging errors.

Abstract: An exposure apparatus comprises a preliminary chamber which accommodates a mask on which a pellicle is attached, an exhaust device which exhausts a gas from the preliminary chamber, a deformation measuring device which measures the deformation of the pellicle, and a control section which regulates the amount of a gas to be exhausted from the preliminary chamber. At the time of replacing a gas in a space by exhausting the gas from the preliminary chamber, the control section adjusts the exhaust amount of the gas from the preliminary chamber based on the result of the measurement made by the deformation measuring device so that the deformation of the pellicle is within a predetermined range. This can ensure stable gas replacement while preventing the pellicle from being damaged.

Abstract: An optical scanning apparatus for optically scanning a surface to be scanned at a constant velocity includes a light source for emitting a light flux, a first optical lens system for coupling the light flux emitted by the light source to a subsequent optical lens system, a second optical lens system for forming the light flux received from the first optical lens system into a line image extending in a direction corresponding to a main scanning direction for the surface to be scanned, an optical deflector for deflecting the light flux formed as the line image via a deflecting reflective plane thereof, which is located near where the line image is formed, and a third optical lens system for condensing the deflected light flux as an optical beam spot on the surface to be scanned.

Abstract: A projection television lens cell and system including a tubular optic support structure having an interior with a longitudinal central axis. A first annular support surface extends around the longitudinal central axis for receiving a first optic having an outer circumferential edge. The first annular support surface includes at least a first resilient member configured to contact the outer circumferential edge of the first optic and to be moved in a radially outward direction by the first optic relative to the longitudinal central axis. The resilient member assists in preventing substantial movement of remaining portions of the tubular optic support structure, for example, during assembly and any heat induced thermal expansion of the optic in use.

Abstract: Thermally compensated wavelength division demultiplexers and multiplexers are disclosed. In one aspect, thermally compensated optical systems for use in an optical network are disclosed. The systems include a diffraction grating coupled to a grating mount having a temperature coefficient. The systems further include an optical fiber coupled to a fiber mount having a temperature coefficient and a lens assembly coupled to a lens mount. The lens mount is operable to position the lens assembly between the fiber mount and the grating mount and includes a substantially similar temperature coefficient to the fiber mount.

Abstract: A lens assembly especially adapted for mounting in an environment subject to variable temperatures, such as a projection television set, including an automatic thermal focus adjustment. A lens mount is formed from a material having a first coefficient of thermal expansion and carries at least one lens. A focus mount is coupled to the lens mount and is formed from a material having a second coefficient of thermal expansion different from the first coefficient of thermal expansion. Adjustment and locking structure couples the lens mount to the focus mount and allows the lens mount to be axially adjusted relative to the focus mount and then locked in position. In use, the relative axial positions of the lens mount and focus mount automatically change to move the lens in response to a temperature change in the environment of use and after being locked in position with the adjustment and locking structure.

Abstract: A centrally-obscured reflective telescope having a semi-active focus and thermal compensation system. The telescope has a housing having an input window, a primary mirror, a secondary mirror suspended between the input window and the primary mirror by support struts, an optional tertiary mirror, and an optional fold mirror. The system includes one or more heating elements respectively disposed on each of the support struts. A first temperature sensor (disposed on the primary mirror) generates a reference temperature, a second temperature sensor is disposed on the secondary mirror, and one or more third temperature sensors are disposed on each of the support struts. A temperature compensation controller is coupled to the heating elements and temperature sensors and controls the heat output of the plurality of heating elements to heat the support struts and control the position of the secondary mirror relative to the primary mirror.

Abstract: An assembly is provided with a mount (1)and an optical element (7). The optical element (7) is connected via elastic connecting elements directly or via one or more intermediate elements to the mount (1). The connecting elements have at least one membrane-like joining element (4), which is connected in the outer region to the mount (1) or to the intermediate element and in the inner region is connected via a rigid, moment-transferring connection (12) to the optical element (7).

Abstract: A flexure-ring is provided for centering a lens in a bore of a housing with 3N lens contacting stubs, where N is an integer equal to or greater than one. The stubs are formed by increasing the inside diameter of the ring made to fit tightly around a lens except at 3N locations for the aforesaid stubs, and said ring having an outside diameter made to fit tightly inside the housing bore locations. Behind each stub, a segment of the ring is removed down to a chord perpendicular to a ring diameter passing through the center of each stub. That chord is selected to have a length greater than the lens contacting surface of the stub, thereby to produce a reduced cross section of the ring on both sides of the stub to serve as flexures in relieving stresses due to different coefficients of thermal expansion of the three parts involved due to changes in temperature while in use.

Abstract: An optical scanning apparatus for optically scanning a surface to be scanned at a constant velocity includes a light source for emitting a light flux, a first optical lens system for coupling the light flux emitted by the light source to a subsequent optical lens system, a second optical lens system for forming the light flux received from the first optical lens system into a line image extending in a direction corresponding to a main scanning direction for the surface to be scanned, an optical deflector for deflecting the light flux formed as the line image via a deflecting reflective plane thereof, which is located near where the line image is formed, and a third optical lens system for condensing the deflected light flux as an optical beam spot on the surface to be scanned.

Abstract: The present invention relates to a projector apparatus which can handle high light intensities without dust or foreign matter penetrating to the inside of the apparatus and thus deteriorating the quality of the image projected.

Abstract: A projection optical system of a projection exposure apparatus according to the present invention has a plurality of optical members made of glass materials at least one of which has a temperature characteristic of index of refraction different from that of the other glass material. Further, a temperature control device for controlling a temperature of at least one of the optical members is provided. An imaging characteristic of the projection optical system is controlled. The imaging characteristic to be controlled is a non-linear magnification or curvature of field. The temperature control device sets the temperature to be controlled to a variable target temperature determined in accordance with the imaging characteristic of the projection optical system. An exposing operation for transferring a mask pattern to a photosensitive substrate is started after the temperature of the optical member to be controlled reaches a predetermined allowable range of the target temperature.