Abstract: The invention relates to an adaptive mirror based on a ceramic substrate having a corresponding reflector and piezoelectric actuators, a cooling device being integrated in the substrate. The invention likewise relates to a method for the production of such mirrors. The mirrors according to the invention are used for the modulation or deformation of a laser wavefront of high power.

Abstract: A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.

Abstract: A mirror array apparatus includes a carrier configured to support a plurality of individually adjustable reflective elements. At least one actuator is associated with each reflective element, the actuator being configured to adjust the orientation or position of the associated reflective element. The apparatus further includes a liquid in contact with at least a portion of the reflective elements.

Abstract: A reflective optical element (10) for use in an EUV system is disclosed. The reflective optical element includes a base body, which is produced at least partly from a substrate material. At least one cooling channel through which a cooling medium can flow is arranged in the base body. A material having a thermal conductivity of greater than 50 W/mK is provided as substrate material. The reflective optical element also includes a polishing layer, which is applied on the substrate material. The polishing layer includes an amorphous material which can be processed via polishing.

Abstract: There is provided a collector system. The collector system includes a first collector mirror and a second collector mirror. The first collector mirror receives EUV light from a light source at a first aperture angle via a first beam path, and reflects the EUV light at a second aperture angle along a second beam path. The first aperture angle is larger than or substantially equal to the second aperture angle. The second mirror receives the EUV light from the first mirror at the second aperture angle. The collector is an oblique mirror type normal incidence mirror collector system.

Abstract: A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.

Abstract: A mirror assembly for a carbon dioxide (CO2) slab laser resonator includes a center section having a rectangular cross-section and a pair of thermal balancing bars. A concave reflecting surface formed on a front edge of a center section. The side-bars are attached to either side of the center section and extend forward of the reflective surface. Dimensions of the center section and side bars are selected to position the thermal neutral plane of the assembly close to the reflective surface. This minimizes changes the radius of curvature of the reflective surface due to heating by circulating radiation in the resonator.

Abstract: A radius of curvature controlled mirror for controlling precisely the focal point of a laser beam or other light beam. The radius of curvature controlled mirror provides nearly spherical distortion of the mirror in response to differential expansion between the front and rear surfaces of the mirror. The radius of curvature controlled mirror compensates for changes in other optical components due to heating or other physical changes. The radius of curvature controlled mirror includes an arrangement for adjusting the temperature of the front surface and separately adjusting the temperature of the rear surface to control the radius of curvature. The temperature adjustment arrangements can include cooling channels within the mirror body or convection of a gas upon the surface of the mirror. A control system controls the differential expansion between the front and rear surfaces to achieve the desired radius of curvature.

Abstract: Optical components and systems are disclosed that include an optical element and a base member. Multiple wells correspond to respective locations on a surface of the optical element. Liquid metal in the wells is coupled to the respective locations to apply respective hydrostatic pressures to the locations. At least one displacement device is coupled to at least one well to selectively change the respective hydrostatic pressure applied, relative to the base member, by the liquid metal in the well to the respective location. The “liquid metal” is any of several formulations of metal that are liquid under actual-use conditions (e.g., a liquid alloy of gallium). The liquid metal can be displaced through conduits to change the hydrostatic pressure being applied to the respective locations. The displacement, and hence the hydrostatic pressure, can be feedback controlled.

Abstract: As disclosed herein, a device may comprise an optic disposed in a near vacuum environment, the optic formed with a surface portion; a temperature controlled member formed with a surface portion conforming to the optic surface portion; and a liquid interposed between the optic surface portion and the member surface portion to conduct heat therebetween.

Abstract: Methods and apparatus for internally or directly cooling a mirror using a fluid with laminar flow properties are disclosed. According to one aspect of the present invention, an internally cooled mirror includes an optical surface that absorbs light, and at least one microchannel formed beneath the optical surface. The mirror also includes a port that supplied a fluid to the microchannel. The fluid is subjected to a laminar flow and absorbs heat associated with the absorbed light.

Abstract: Thermal-transfer devices (e.g., cooling devices) are disclosed for optical elements. An exemplary device includes a thermally conductive substrate having a surface. At least one mounting element extends from the surface to a reverse face of the optical element. The mounting element positions the optical element relative to the substrate with a gap between the surface and the reverse face. At least one gas-introduction port is situated relative to the gap. Also included is a gaseous thermal-conduction pathway across the gap between the optical element and the substrate. The thermal-conduction pathway includes flowing gas introduced (e.g., as a thin layer) into the gap by the gas-introduction port.

Abstract: The present invention discloses a mirror device that comprises 1) a mirror element for modulating incident light emitted from a light source and for controlling the reflecting direction of incident light, and 2) a coolant flow channel for containing and flowing a liquid coolant through the flow channel to carry away heat generated in the mirror device.

Abstract: A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.

Abstract: The invention provides a process for producing a high-precision reflector and its coating. A reflector is produced from a solid material using a material-removing process and is coated with a cold-light mirror layer.

Abstract: A reflection mirror apparatus, used in a reflection optical system of an exposure apparatus which performs exposure processing by guiding exposure light by reflection, has a mirror having a reflection surface to reflect the exposure light, and radiation plates for radiation-cooling provided in positions away from an outer surface of the mirror. The radiation plates are provided so as to ensure a passage area for the exposure light incident on and reflected from the reflection surface of the mirror. Further, the respective radiation plates are temperature-controlled by cooling liquid flowing through cooling pipes. Thus the temperature rise of the mirror used in the reflection optical system of the exposure apparatus can be suppressed, and the accuracy of surface form of the mirror reflection surface can be maintained.

Abstract: The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a collector mirror for focusing short-wavelength radiation generated from a plasma which allows an efficient thermal connection to be produced between the optically active mirror surface and a thermostat system without the disadvantages relating to space requirements or high-precision manufacture of the collector mirror. This object is met, according to the invention, in that the collector mirror has a solid, rotationally symmetric substrate which comprises a material with high thermal conductivity of more than 50 W/mK and in which channels for cooling and temperature management are incorporated in the substrate so that a heat transport medium can flow through directly and for rapidly stabilizing the temperature of the optically active mirror surface.

Abstract: A cooling apparatus for use with an optical element having a concave part includes a cooling mechanism, located in the concave part of the optical element, for cooling the optical element through radiation in a non-contact manner.

Abstract: This invention relates to a cooled deformable-mirror and its mount. A deformable mirror is provided comprising a reflective element provided on a substrate that is secured to a deformable element, wherein the substrate comprises at least one channel having a pair of ports both located around the peripheral edge of the substrate. In addition, a deformable-mirror mount and the deformable mirror described above are provided, wherein the mount has a body with a central aperture defined by a supporting surface sized and shaped to support the mirror when installed, and wherein the mount is provided with at least a pair of channels that terminate to face the ports in the mirror when the mirror is installed, the channels of the mirror and the mount being connected via flexible seals.

Abstract: A controlled radius of curvature mirror assembly comprising: a distortable mirror having a reflective surface and a rear surface; and in descending order from the rear surface; a counter-distortion plate; a flow diverter having a flow diverter aperture at the center thereof; a flow return plate having a flow return aperture at the center thereof; a thermal isolation plate having a thermal isolation plate aperture at the center thereof and a flexible heater having a rear surface and a flexible heater aperture at the center thereof; a double walled tube defining a coolant feed chamber and a coolant return chamber; said coolant feed chamber extending to and through the flow diverter aperture and terminating at the counter-distortion plate and the coolant return chamber extending to and through the thermal isolation backplate and terminating at the flow diverter; and a coolant feed and a coolant return exit at the rear of said flexible heater.

Abstract: A mirror, in particular an adaptive mirror configured as a laser beam guidance component. The mirror comprises a housing, to which a mirror element that is optionally deformable is allocated. The aim of the invention is to construct the mirror element with an oval, in particular elliptical shape.

Abstract: A transverse electrodisplacive actuator array for controlling the optical phasing of a reflective surface includes a support structure; a plurality of electrodisplacive actuator elements extending from a proximate end at the support structure to a distal end; each actuator element including at least one addressable electrode and one common electrode spaced from the addressable electrode and extending along the direction of said proximate and distal ends along the transverse d31 strain axis; a reflective member having a reflective surface and a mounting surface mounted on the actuator elements; and a plurality of addressable contacts and at least one common contact for applying voltage to the addressable and common electrodes to induce a transverse strain in addressed actuator elements to effect an optical phase change in the reflective surface at the addressed actuator elements.

Abstract: A high concentration central receiver system and method provides improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a tower structure at a predetermined height above ground for reflecting solar radiation. A plurality of concentrators are disposed between the reflectors and the ground such that the concentrators receive reflective solar radiation from the reflectors. The central receiver system further includes a heat removal system for removing heat from the reflectors and an area immediately adjacent the concentrators. Each reflector includes a mirror, a facet, and an adhesive compound. The adhesive compound is disposed between the mirror and the facet such that the mirror is fixed to the facet under a compressive stress.

Abstract: A mirror for laser application and a method for manufacturing the mirror is disclosed herein. The mirror comprises several layers including a top layer used as the mirror surface. A cooling structure including a plurality of cooler layers are providing between the top layer, several intermediate layers and a bottom layer. Connections are provided for allowing a coolant to flow within the mirror. The mirror is constructed by stacking the layers on top of one another and connecting adjacent layers together by direct copper bonding or active soldering.

Abstract: A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.

Abstract: A mirror device having an optical system of an exposure apparatus for transferring a reticle pattern onto a wafer includes a mirror, a mirror holding portion, a temperature adjustment unit, a control management database, and a timing control unit. The mirror reflects exposure light, and the mirror holding portion holds the mirror. The temperature adjustment unit adjusts a temperature of the mirror and the mirror holding portion. The control management database stores data corresponding to a controlling rule of the temperature adjustment unit necessary to keep the mirror figure constant for an incidence condition of the reflected exposure light. The timing control unit controls the temperature adjustment unit corresponding to the incidence condition of the exposure light. The timing control unit controls the temperature adjustment unit based on the stored data of the control management database to keep the mirror figure constant.

Abstract: An optical sheet that accepts light transmitted at or within a specific entrance cone angle that then redirects and transmits the light within an exit cone that is substantially normal to the sheet's plane. The intensity of the light within the exit cone is substantially uniform for any light source entering the sheet within the sheet's acceptance angle. The optical sheet is made of transparent material with microlens arrays formed on its opposite front and back surfaces. The thickness of the optical sheet is sufficient so that the microlens on the opposite surfaces are separated a distance equal to the microlens focal length, with each microlens on the front and back surfaces having substantially similar size and shape, with centers transversely aligned. When used with one or more light sources located on one surface, the transmitted light through the optical sheet is uniform in intensity across a second surface.

Abstract: A universally oriented liquid mirror. A liquid and a penetrable unit are operatively connected to provide a mirror that can be universally oriented.

Abstract: A method and high concentration central receiver system provide improved reflectors and a unique heat removal system. The central receiver has a plurality of interconnected reflectors coupled to a tower structure at a predetermined height above ground for reflecting solar radiation. A plurality of concentrators are disposed between the reflectors and the ground such that the concentrators receive reflective solar radiation from the reflectors. The central receiver system further includes a heat removal system for removing heat from the reflectors and an area immediately adjacent the concentrators. Each reflector includes a mirror, a facet, and an adhesive compound. The adhesive compound is disposed between the mirror and the facet such that the mirror is fixed to the facet under compressive stresses.

Abstract: Devices are disclosed that cool optical elements with which the devices are associated, most advantageously reflective optical elements such as mirrors and reflective reticles. The devices have especial utility for reducing deformation and other undesired thermal changes of the respective optical elements, such as optical elements used in extremely demanding optical systems such as used in microlithography systems, most notably EUVL systems. Many of the subject devices typically include a heat-receiving plate or analogous feature that receives heat radiated from the optical element across a gap between the optical element and the heat-receiving plate. Some devices include a plate-cooling device for removing heat from the heat-receiving plate. Other devices employ conduction of heat away from the optical element. Yet other devices employ a flowing heat-transfer medium for removing heat from the optical element.

Abstract: A cooling apparatus for cooling an optical element provided in a vacuum atmosphere includes a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer, and a controller for controlling temperature of the radiation cooling part.

Abstract: An infrared beam is directed to the surface of a Mylar mirror, and the mirror reflects that beam. The reflected beam is detected, and data gleaned from the reflected beam is used to determine whether the optics of the mirror must be adjusted. The optics of the mirror are adjusted by varying voltage applied to electrostatic actuators on the frame of the mirror, or varying the pressure in chambers formed by the mirror frame and mirror surface.

Abstract: The invention relates to a new type of reflective optical element made of a reflective metallic layer comprising reflecting nanoparticles deposited on a liquid surface. Metallic or non-metallic nanometer-sized particles are coated with a ligand. The coated particles are concentrated and deposited on the surface of a liquid where they self-assemble to give optical-quality high-reflectivity optical surfaces. Coating liquid surfaces with reflective layers allows one to make inexpensive and versatile high-quality mirrors. The surfaces of liquids can be shaped by a variety of techniques.

Abstract: A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.

Abstract: A lightweight mirror structure is formed from a unitary body of mirror blank material by using an abrasive water jet cutting apparatus to cut a plurality of cylindrical channels in the blank between and extending parallel to the mirror surface and the back surface of the mirror structure. The process may be employed to quickly produce inexpensive lightweight mirror structures.

Abstract: A mounting apparatus for a deformable mirror that has a peripheral mounting portion with oppositely facing and parallel mounting surfaces. A base member and a mounting ring have juxtaposed peripheral flange portions with rubber o-rings for engaging the parallel mounting surfaces of the mirror. A plurality of set screws are provided in the base member and the mounting ring in the peripheral flange portions and engage the o-rings for applying and adjusting a mounting force to the mounting surfaces of the mirror. The base member is also provided with set screws in the perimeter for engaging and centering the mirror.

Abstract: An interceptor missile including an infrared radiation detection subsystem and a window assembly in the hull of the missile optically coupled to the infrared radiation detection subsystem. The window assembly includes an inner window, an outer window, and a support subsystem between the inner and the outer windows defining a plurality of infrared transparent fluid flow cooling channels between the inner and outer windows. A source of fluid coupled to the cooling channels for cooling the outer window without adversely affecting the optical properties of either window.

Abstract: In the case of a deformable mirror (11) with a mirror plate (13) which is in glass form in particular for high laser frequencies and an axial actuator (20) which concentrically engages the rear side of the mirror surface (17)—with a reduced actuator stroke movement for the same dome-like configuration height—the dome configuration of the convex curvature of the mirror surface (17) is now of larger area and at the same time better approximated to the desirable sphere if, instead of the central application of force, the arrangement provides for decentral application of force at diametrally opposite locations. For that purpose the actuator (20) operates on a ring (25) which is disposed behind the mirror plate 13 and which is preferably integral with the mirror plate (13).

Abstract: A durable large stroke deformable mirror. In the illustrative embodiment, the mirror (10') includes a faceplate (12') constructed of a first material, and a backplate (14') constructed of a second material different from the first material. The faceplate (12') is connected to the backplate (14') at an interface (16'), and the backplate (14') is connected to a set of actuators (20') capable of inducing large mirror (10') deflections. In a specific embodiment, the first material is chosen for its excellent optical qualities and the second material is chosen for its flexibility and durability, allowing for large mirror (10') deflections. To ensure the durability of the connection at the interface (16'), the faceplate (12') and the backplate (14') have matching coefficients of thermal expansion. In addition, the interface (16') is placed at the neutral axis of the mirror (10') for reducing stresses at the interface (16').

Abstract: Radiant energy sensor is protected from severe environments with a radiant energy sensor assembly that off-sets the sensor from the environment. The sensor assembly includes a radiant energy sensor, a pair of reflective walls facing one another, one of the walls having a transmissive aperture for receiving radiant energy over a wide angle of incidence, an entry, the other wall having a transmissive aperture for passing energy from behind the wall to the sensor, an exit, with the walls having the reflection characteristics such that the radiant energy entering the entry aperture at any angle is always reflected to the exit aperture. The reflective walls may be paraboloids or Fresnel surfaces in geometry.

Abstract: A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the reflection member and the base member are adhered to each other with one of the bottom surface of the reflection member and the base surface of the base member being made to follow the other to cause deformation of the spherical shape, whereby the reflection surface is formed into an aspherical shape.

Abstract: A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion disposed at one end of the actuator and a rear end adaptor with a prestressing screw at the other end of the actuator for operatively acting on the mirror plate. The materials of the jacket tube and the housing as well as the materials of the pressure portion and the rear end adaptor are so selected on the basis of their linear coefficients of thermal expansion, such that a temperature change will cause essentially similar overall linear expansion.

Abstract: A mirror arrangement with a deformable mirror element, and which includes a housing which is provided for the retention of the mirror element, and whereby a cooling installation is provided for the conducting off of excess heat or thermal energy from the mirror arrangement. The cooling installation possesses a cooling chamber or space provided in the housing which is streamed through by a flow of a cooling medium and which, through an inherently stable separator element constituted from a good heat-conductive material, is spatially separated from a heat-conductive filled outer chamber which is located directly behind the base plate of the mirror.

Abstract: A monochromator for radiant X-rays is composed of a first crystal which has a first surface of incidence having a concave letter V-shaped groove and cooling means for flowing a cooling material behind the first surface of incidence along the letter V-shaped groove, and a second crystal which has a second surface of incidence having a letter V-shaped convex. A parallel pencil of X-rays which impinges on the first surface of incidence elongates to a half-ellipse on the first surface of incidence and reflects in parallel therefrom to the second surface of incidence. Then, a pencil of emissive X-rays having the same size as the initial parallel pencil of X-rays exits the second surface of incidence to become useful light. The monochromator for radiant X-rays which has a high cooling efficiency, is easy to adjust, provides a pencil of emissive X-rays stably and highly accurately. The monochromator is easy to use and economical, and allows easy maintenance.

Abstract: An improved cooled high power laser mirror system is described which uses a ilicon mirror face with an attached silicon nitride based heat exchanger assembly. The silicon nitride provides a high strength, high toughness, and stiff backup assembly. The particular silicon nitride system is microstructurally engineered to provide a thermal expansion match to silicon designed to insure high quality bonding and minimum mirror distortion.

Abstract: A cooled reflective mirror apparatus is provided, in which a reflective mirror body is so constructed as to make the cooling fluid spread in a plane covering the outer wall surface of the reflective mirror body to improve the cooling effect and in which the thickness of the reflective mirror body is made large enough to prevent excess heat from the inner side of the body from reaching the outer wall surface thereby minimizing the temperature rise in the cooling liquid to permit long hours of cooling. The curved inner surface portion is plated to form a reflection mirror surface. The cooling tank is placed in contact with the outer side of the reflective mirror body through the matching flat surface portions of the mirror body and the cooling tank. The cooling tank is fitted with cooling liquid supply and discharge pipes so that the cooling liquid supplied temporarily stays in and circulates through the tank to absorb heat from the outer surface of the reflective mirror body.

Abstract: In a deflection mirror housing for laser material-machining systems and a beam separating filter with such a deflection mirror housing, the housing is composed of two parts comprising a housing upper part (2) supporting a deflection mirror (6) and a housing lower part (1) in the form of a spherical cup, an inlet or outlet opening for the laser beam is provided in the housing lower part (1) formed as a spherical cup and in the housing upper part (2), the deflection mirror (6) is arranged in the housing upper part (2) to be removable from the outside without changing its adjustment, the center of the spherical cup lies in the mirror plane, and the deflection mirror (6) is adjustable by pivoting the housing upper part (2) with respect to the housing lower part (1).

Abstract: A condensation-free shower mirror includes a housing (11) holding a mirror (10) and a urethane water container (18). The water container, which is substantially the same size and shape as the mirror, is fitted against the back side of the mirror. The water container is fitted with a filling-cap assembly (12) to allow a water-tight seal. Two suction cups (14) extending from the back side of the housing allows the shower mirror to be easily mounted against a shower stall or a wall mirror. When the container is filled with hot water, it heats the mirror above the dew point of water, so that the mirror will remain condensation-free in a steamy environment. Because the shower mirror can be filled with hot tap water, it is portable so that it can be conveniently used in any bathroom.

Abstract: The reflection mirror of this invention is considered an improvement over the conventional art in that it has a plating means that smoothes the inner surface of the reflection mirror body and a means for intercepting the heat of the light and that the mirror can be assembled into a desired size. The feature of this improvement is that the simplified polishing work that smoothes the inner surface of the reflection mirror body does not degrade but rather improves the quality of the mirror, uniformity of illumination directivity, and productivity. Since the heat absorbing layer absorbs heat rays, any deterioration of an object being illuminated can be prevented. Another advantage is that it is possible to prevent loss of freshness of food, and discoloration and deformation of products that might otherwise be caused by heat rays.

Abstract: A laser oscillator comprising a laser resonator having a plurality of mirrors for directing the laser energy from source to exit apertures, the mirrors being constructed and mounted adjustably for reducing parasitic oscillations. The mirrors are mounted in adjusting members that have channels therein for coolant and are provided with heat insulating members that minimize heat gradients and unwanted heat transfers that may result in the distortion of the reflecting surfaces. In addition, the mirrors are angled so that light paths are defined that present a Z-shaped turning pattern. Apertures proximate to the mirrors through which the light beams are directed are offset from a common plane so that a reflective surface is not within the aperture of the opposing reflective surface. One or more of the apertures can be so offset to reduce the possibility of parasitic oscillations. Further, the reflectors can be angled and the apertures sized so as to eliminate parasitic oscillations.