Membrane Mirror In Mechanical Contact Only At Its Edge Patents (Class 359/847)
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Patent number: 11175492Abstract: A system that includes a substrate for microelectromechanical system (MEMS) scanning mirror systems is provided. The MEMS scanning mirror system includes a substrate that includes a ceramic body. An actuator frame is mounted on the ceramic body of the substrate. The actuator frame includes at least one moveable member. At least one actuator is operatively connected to the at least one moveable member such that the actuator is configured to move the at least one moveable member. A scanning mirror assembly is mounted to the at least one moveable member such that movement of the at least one moveable member moves the scanning mirror assembly.Type: GrantFiled: August 12, 2019Date of Patent: November 16, 2021Assignee: Microsoft Technology Licensing, LLCInventors: Michael James Nystrom, Wyatt Owen Davis, Jincheng Wang
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Patent number: 10454410Abstract: A swivel and fanning drive for solar panels, including a base support, a swivel plate mounted pivotingly about a horizontal axis, and a plurality of solar panels that can be fanned in and out about a fan-out axis. The swivel plate can be pivoted by at least one crank and connecting rod. Pivotal movement of the swivel plate about a vertical axis can cause the solar panels to be fanned-in or fanned-out. A brake can resist movement of the solar panels about the fan-out axis.Type: GrantFiled: February 13, 2019Date of Patent: October 22, 2019Assignee: SFS Acquisition, LLCInventors: Elmar Stoger, Alexander Swatek, Gerald Zach
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Patent number: 10418993Abstract: An operating device, in particular for electronic household appliances, includes a cover plate with an operating portion, a transmitter for emitting electromagnetic radiation, a receiver for registering electromagnetic radiation, and control electronics for evaluating measurement signals produced by the receiver. The operating portion is at least partly elastically deformable and/or movable by an action of force from the direction of a user side of the cover plate and it at least partly reflects the radiation emitted by the transmitter. The receiver is disposed and/or configured in such a way that it facilitates a spatially resolved registration of the radiation reflected by the operating portion in such a way that the control electronics can detect an actuation of the operating portion in a manner dependent on a registration location of the reflected radiation. An electronic household appliance having at least one operating device is also provided.Type: GrantFiled: November 7, 2016Date of Patent: September 17, 2019Assignee: Diehl AKO Stiftung & Co. KGInventors: Andreas Maigler, Bruno Fuhge, Joachim Lyszus, Ralph Stohr, Thomas Frommelt
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Patent number: 10298173Abstract: The invention relates to a swivel and fanning drive for solar panels, comprising a base support, a rotary table, which is mounted on the base support pivotingly about a substantially vertical first axis, a swivel plate, which is mounted on the rotary table pivotingly about a substantially horizontal second axis, and a fanning shaft, which is mounted on the swivel plate pivotingly about a third axis and on which the solar panels can be mounted so as to be able to be fanned in and out about the aforesaid third axis, wherein the rotary table mounts one end of the swivel plate about the aforesaid second axis and, at a distance therefrom, mounts at least one crank, which is coupled by means of a connecting rod to the other end of the swivel plate to form a crank-rocker linkage.Type: GrantFiled: September 20, 2016Date of Patent: May 21, 2019Assignee: SFS Acquisition, LLCInventors: Elmar Stoger, Alexander Swatek, Gerald Zach
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Patent number: 10213869Abstract: A laser machining apparatus comprises a laser radiation source that generates laser radiation. A first and a second adaptive mirror are provided each having a pressure chamber connected to a pressure source and a mirror substrate that bounds the pressure chamber. An internal pressure in the pressure chamber can be changed with the aid of the pressure source in such a way that the mirror substrate deforms if the internal pressure in the pressure chamber changes. The mirror substrate of the first adaptive mirror has a thickness which varies at least within a region of the mirror substrate that bounds the pressure chamber. The mirror substrate of the second adaptive mirror has a thickness which is constant over the entire region over which the mirror substrate is deformable.Type: GrantFiled: May 20, 2014Date of Patent: February 26, 2019Assignee: LT-ULTRA PRECISION TECHNOLOGY GMBHInventor: Marius Jurca
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Patent number: 9678444Abstract: The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror, a detection unit configured to detect vibration generated in the base plate, and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range.Type: GrantFiled: April 29, 2015Date of Patent: June 13, 2017Assignee: CANON KABUSHIKI KAISHAInventor: Katsumi Asada
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Patent number: 9575222Abstract: A rigid deformable reflector for heating a target, the rigid deformable reflector having a reflective surface capable of being rigidly deformed, a backing surface capable of supporting the reflective surface, and a concave shape. A method of deforming a rigid deformable reflector utilizing a deforming mechanism, wherein the rigid deformable reflector has a reflective surface and the deforming mechanism has a base and an actuator, the method having the steps of: placing a rigid deformable reflector onto the deforming mechanism, and activating the actuator thereby causing a first force to be applied to the rigid deformable reflector and deforming the shape of the rigid deformable reflector beyond its elastic limit.Type: GrantFiled: June 17, 2014Date of Patent: February 21, 2017Inventor: Karl von Kries
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Patent number: 9158334Abstract: An apparatus comprising: a flexible body comprising an arrangement for limiting flexing of the body, the arrangement comprising: a first part within the body; a second part within the body; a flexible interconnect extending at least between the first part and the second part wherein the arrangement is configured to change between a first configuration, in which a portion of the interconnect between the first part and the second part is of a variable length enabling more and less flexing of the interconnect, and a second configuration, in which the portion of the interconnect between the first part and the second part has a limited length that limits one or both of more flexing and less flexing.Type: GrantFiled: October 22, 2012Date of Patent: October 13, 2015Assignee: Nokia Technologies OyInventors: Anssi I. Vanska, Matti Kosonen, Antti Salo, Sami Myyrylainen
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Patent number: 9158371Abstract: An apparatus including a body configured for resilient contortion from a neutral equilibrium shape by a user, the body having an exterior surface that resiliently contorts in response to user actuation and defines at least part of an exterior surface of the apparatus; and electronic circuitry including at least a processor and a display, controlled by the processor on at least a portion of the exterior surface of the body.Type: GrantFiled: March 25, 2010Date of Patent: October 13, 2015Assignee: Nokia Technologies OyInventors: Piers Andrew, Teppo Tapani Jokinen, Lotta Maaria Partanen, Jarkko Tapio Saunamaki, Qifeng Yan, Mikko Anttilainen, Okan Ogeturk, Lassi Kaikkonen, Antti Salo
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Patent number: 8938881Abstract: System for manufacturing facets comprising a frame a series of mirrors and multiple securing parts in which said parts are the key to the invention and are formed by a rod and a circular metal sheet provided with a series of small circular perforations, where the rod and the circular sheet are attached by electric arc welding or any other equivalent fixation and the purpose of which is to secure a curved mirror to the rear structure or frame of a heliostat.Type: GrantFiled: July 13, 2010Date of Patent: January 27, 2015Assignee: Abengoa Solar New Technologies, S.A.Inventors: Francisco Ceron Garcia, Valerio Fernandez Quero, Antonio Esteban Garmendia
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Publication number: 20140368939Abstract: This invention is for a flexible telescope mirror. A mirrored film is stretched across a frame, and deformed into a rough parabola using a partial vacuum. The film is then deformed into a more perfect parabola using electric fields. In some embodiments, a feedback system based on a laser projector and a camera is used to fine tune the resulting parabola for optical performance. The invention allows the creation of large telescope mirrors for a substantially lower price than conventional ground glass mirrors, and allows the creation of substantially lighter mirrors, suitable for space-based applications.Type: ApplicationFiled: July 17, 2013Publication date: December 18, 2014Inventor: Rachel Andreasen
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Patent number: 8894227Abstract: A method and apparatus for correcting optical aberrations in an optical device using a deformable mirror. An actuator is provided which applies a deforming force to the deformable mirror. By selecting particular thickness profiles of the deformable mirror and force configurations of the actuator, the optical device can be configured to correct for different optical aberrations. The actuator may be configured to apply the deforming force peripherally, centrally, non-centrally or homogenously across the surface of the deformable mirror. The deformable mirror may be a flat disk mirror, a convex mirror, or a concave mirror, and may include a membrane having a variable flexibility. The optical device may be a wide-field microscope, an optical read/write device, laser tweezers, or any other optical device in which correction of optical aberrations is desirable.Type: GrantFiled: January 30, 2009Date of Patent: November 25, 2014Assignees: The Regents of the University of California, Yeda Research & Development Co. Ltd.Inventors: Peter Knor, David A. Agard, Zvi Kam, John W. Sedat
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Patent number: 8875457Abstract: The invention relates to a portable light manipulator including a frame and a manipulator cloth that is stretched or can be stretched on the frame, wherein the frame includes at least one tension bar, which has at least two moving sections that can be moved in the longitudinal direction of the tension bar and are connected to one another or can be connected to one another, said moving sections being spring-loaded so as to be capable of being forced apart from one another by spring force in the longitudinal direction of the tension bar.Type: GrantFiled: July 2, 2010Date of Patent: November 4, 2014Inventor: Wolfgang-Peter Geller
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Patent number: 8823702Abstract: An apparatus for generating volumetric images viewable without 3D eyewear. The apparatus includes an image display assembly displaying a first image at a first display time and a second image at a second display time (e.g., a number of planar or 2D images on a display screen/surface). The apparatus includes a flexible two-way mirror element (a varifocal beamsplitter). During operations, the first and second images from the display assembly are directed toward and then reflected from the back side of the mirror element. The apparatus also includes a hoop-shaped frame supporting a peripheral edge of the mirror element. A driver shakes the frame to resonate the mirror element between convex and concave shapes while it is used for reflecting the first and second images. The apparatus also includes a concave mirror positioned relative to the mirror element to receive the reflected first and second images.Type: GrantFiled: July 25, 2012Date of Patent: September 2, 2014Assignee: Disney Enterprises, Inc.Inventors: Quinn Smithwick, Lanny Smoot, Daniel Reetz
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Publication number: 20140125959Abstract: A thin film mirror, comprising: a mirror shell (605); a reflective film (601) stretched between forming structures (603) provided on said mirror shell and reflective film being arranged such that they form a chamber which is capable of being placed under at least partial vacuum; the mirror shell having an inner surface which forms an inner wail of said chamber, wherein the mirror shell is a moulded part where its inner surface is a controlled surface.Type: ApplicationFiled: May 4, 2012Publication date: May 8, 2014Applicant: THALES HOLDINGS UK PLCInventors: Graham Olive, Graham Barnes, Henry Nicholson-Cole
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Publication number: 20140104696Abstract: An optical device with a deformable membrane including an anchor area on a support entrapping a liquid or gas fluid, a central area reversibly deformable from a rest position, actuating means for moving the fluid biasing the membrane into an intermediate area between the anchor area and the central area, the actuating means include a piezoelectric continuous crown accommodating several actuators, this crown surrounding the central area, the actuating means being anchored to the membrane in the intermediate area, the actuating means and the membrane to which they are anchored, forming at least one piezoelectric bimorph, the actuating means radially contracting or extending upon actuation to generate a movement of said fluid from the intermediate area to the central area of the membrane or vice versa, aiming at deforming the central area with respect to its rest position.Type: ApplicationFiled: December 6, 2013Publication date: April 17, 2014Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALTInventors: Stephane MOREAU, Sebastien Bolis
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Publication number: 20140049850Abstract: Disclosed is a device for adjusting the curvature of a mirror comprising: a base block; a pair of rotating blocks which are connected to the base block by one or more elastic bodies, respectively, and rotate around the connection portions between the base block and the elastic bodies or elastically return to through the application or release of external forces; a pair of support blocks which are disposed at the pair of rotating blocks, respectively, to support both ends of the mirror and apply bending moments to the both ends of the mirror by the rotation of the pair of rotating blocks; and a driving part for rotating the pair of rotating blocks.Type: ApplicationFiled: February 22, 2012Publication date: February 20, 2014Applicant: POSTECH ACADEMY-INDUSTRY FOUNDATIONInventor: Kye Hwan Gil
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Patent number: 8441706Abstract: An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes.Type: GrantFiled: July 29, 2009Date of Patent: May 14, 2013Assignees: Fujitsu Limited, The University of TokyoInventors: Shinji Yamashita, Tsuyoshi Yamamoto, Masaaki Kawai, Hiroyuki Fujita
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Patent number: 8345951Abstract: A binarizing method for binarizing an original image of an electrode pad on a substrate. The method includes the steps of processing an electrode image to generate a binary image of the electrode by binarzing the original image with a first threshold value, calculating a contact trace area to calculate the contact trace area including a portion that is predicted to be a trace of an object that contacted the electrode from the binary image of the electrode, processing a contact trace image to generate the contact trace area binary image by binarizing the original image of the area extracted by the contact trace area extracting unit with a second threshold value different from the first threshold value, and synthesizing the images to synthesize the binary image of the electrode and the contact trace area binary image by taking a logical sum on a corresponding pixel to pixel basis.Type: GrantFiled: May 16, 2007Date of Patent: January 1, 2013Assignee: Tokyo Electron LimitedInventor: Junya Sato
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Publication number: 20120320468Abstract: An improved solar reflector utilizing a tensioned reflective membrane. The reflector structure includes a membrane attached on the outer surface of a metal strap that is positioned on an end form by means of a curved-face tensioning block.Type: ApplicationFiled: February 2, 2012Publication date: December 20, 2012Inventors: Allen I. Bronstein, Howard Harrenstien
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Patent number: 8307820Abstract: A solar reflector assembly is provided for generating energy from solar radiation. The solar reflector assembly is configured to be deployed on a supporting body of liquid and to reflect solar radiation to a solar collector. A solar reflector assembly comprises an inflatable elongated tube having an upper portion formed at least partially of flexible material and a lower ballast portion formed at least partially of flexible material. A reflective sheet is coupled to a wall of the tube to reflect solar radiation. The elongated tube has an axis of rotation oriented generally parallel to a surface of a supporting body of liquid.Type: GrantFiled: August 3, 2010Date of Patent: November 13, 2012Assignee: Combined Power LLCInventors: John D. H. King, Thomas E. Oliver, Nicholas A. Kramer, Keeney D. Willis
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Patent number: 8270056Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.Type: GrantFiled: March 23, 2009Date of Patent: September 18, 2012Assignee: QUALCOMM MEMS Technologies, Inc.Inventors: Yi Tao, Fan Zhong, Marc Mignard
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Publication number: 20120227789Abstract: Embodiments of the present invention utilize inflation air to impart an appropriate shape to a reflective concentrator of a solar collector device. An optical receiver or a secondary optic in communication with an optical receiver may be positioned outside the concentrator's internal inflation space in a plane containing a substantially circular pattern of concentrated reflected illumination. In certain embodiments, the inflation space may be defined between the reflective film having a concave shape, and an optically transparent thin film adopting a convex shape in response to the inflation pressure. In some embodiments the inflation space may be defined between the concave reflective film, and an optically transparent disk having a thickness resisting internal inflation pressure to adopt a planar or only slightly convex profile.Type: ApplicationFiled: September 7, 2011Publication date: September 13, 2012Applicant: COOLEARTH SOLARInventors: Robert L. Lamkin, David S. Finley
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Patent number: 8235035Abstract: An inflatable solar energy collector. The device uses two elongated and pressure-stabilized air chambers with a trough-shaped reflecting surface in between. The curvature of the reflecting surface is adjusted by adjusting the differential pressure between the two air chambers. The device can be configured to provide a focal point outside the air chambers or inside the air chambers. For the version using the external focal point an external energy receiver is appropriately positioned. For the version using the internal focal point, the receiver is mounted inside one of the air chambers.Type: GrantFiled: April 16, 2009Date of Patent: August 7, 2012Assignee: Florida State University Research FoundationInventors: Ian L. Winger, Sean A. Barton
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Publication number: 20120174911Abstract: The solar collector according to the invention has a membrane arrangement 41 comprising zones 70, 71, 72 having different spherical curvature in such a manner that their concentrator membrane 42 which is covered with a reflecting layer is optimally approximated to a parabolic shape and therefore has an optimally small focal point or focal line region.Type: ApplicationFiled: September 29, 2009Publication date: July 12, 2012Inventor: Andrea Pedretti
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Patent number: 8162494Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.Type: GrantFiled: November 21, 2003Date of Patent: April 24, 2012Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNOInventors: Roger Franciscus Mattheus Maria Hamelinck, Petrus Carolus Johannes Nicolaas Rosielle, Jakobus Pieter Kappelhof
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Patent number: 8157468Abstract: A pivot connection comprising a substantially cylindrical head (14) to be pivotally located into a socket, at least one first surface on the socket that engages one side of the outer surface of the cylindrical head (14), and second surfaces that engage the ends of the cylindrical head (14) on a side substantially opposite to the at least one first surface to thereby retain the cylindrical head (14) within the socket.Type: GrantFiled: October 31, 2005Date of Patent: April 17, 2012Inventors: Tim Lynn, Graham Davies, Daniel Flynn
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Publication number: 20120087027Abstract: There is provided a high-performance mirror which is capable of being varied between a plane mirror and a concave mirror. The mirror comprises a base (1), a mirror holder (2), a mirror surface sheet (12) and a back sheet (13) both capable of varying their curvature and retained in a spaced-apart relation by the mirror holder (2) to define an air-tight space between the sheets, the back sheet (13) being deformed from its center to reduce the pressure in the space, the mirror surface sheet being deformed into a concave spherical surface by a difference between the reduced pressure and the atmospheric pressure thereby to vary the curvature thereof.Type: ApplicationFiled: March 3, 2010Publication date: April 12, 2012Inventor: Kenji Okayasu
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Patent number: 8148874Abstract: A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.Type: GrantFiled: April 13, 2006Date of Patent: April 3, 2012Assignee: University of Florida Research Foundation, Inc.Inventors: Huikai Xie, Shane T. Todd
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Patent number: 7999213Abstract: Provided is a compact, high-speed deformable mirror for use with an adaptive optic. The mirror or wavefront correction device corrects and/or compensates for wavefront aberrations present in a wavefront received by the optics. The mirror includes a deformable membrane which may be made of a semiconductive, metallic or insulating material. Positioned in close proximity to a front surface of the membrane is a transparent conductor, which may be covered by a window having an anti-reflective coating. A plurality of electrostatic actuators is located in close proximity to a back surface of the membrane, the conductor and actuators separated by a gap of approximately 10 ?m. In operation, a bias voltage is applied to the transparent conductor and an actuator voltage is applied to the plurality of actuators. The resultant voltage differential across the membrane defines the amount of membrane deformation, which in turn compensates for distortions in a subsequently reflected wavefront.Type: GrantFiled: September 30, 2008Date of Patent: August 16, 2011Assignee: Teledyne Scientific & Imaging, LLCInventors: Bruce K. Winker, Yu-Hua K Lin, Sridhar Narayanaswamy, Bing Wen
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Publication number: 20110162637Abstract: Disclosed is a Lightweight low-cost solar concentrator comprising two sheets which are connected or sealed to each other on their outer periphery to define a gasproof chamber which is inflated with air or gas (5) in order to form the inflated mirror. One sheet is transparent (1) for sunlight (3) and the other sheet has a reflecting mirror-like surface (2). The periphery of the two connected sheets is fixed to a rigid support or envelopes it. The rigid support, such as a support frame (6), which is further fixed to a mirror support structure (7), defines the outline of the inflatable mirror and provides stability. For a defined adjustment of the pressure in the air or gas (5) which is enclosed in the gasproof chamber means for inflating or deflating the mirror (4) and a device for the generation of a defined pressure in the air or gas (72) are provided.Type: ApplicationFiled: September 3, 2009Publication date: July 7, 2011Inventor: Harry Hahn
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Publication number: 20110134552Abstract: A method and apparatus for correcting optical aberrations in an optical device using a deformable mirror. An actuator is provided which applies a deforming force to the deformable mirror. By selecting particular thickness profiles of the deformable mirror and force configurations of the actuator, the optical device can be configured to correct for different optical aberrations. The actuator may be configured to apply the deforming force peripherally, centrally, non-centrally or homogenously across the surface of the deformable mirror. The deformable mirror may be a flat disk mirror, a convex mirror, or a concave mirror, and may include a membrane having a variable flexibility. The optical device may be a wide-field microscope, an optical read/write device, laser tweezers, or any other optical device in which correction of optical aberrations is desirable.Type: ApplicationFiled: January 30, 2009Publication date: June 9, 2011Inventors: Peter Kner, David A. Agard, Zvi Kam, John W. Sedat
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Patent number: 7937983Abstract: A curved surface forming apparatus includes a first member to be curved; a second member which is placed with a distance from the first member and holds the first member; and a pressurizing mechanism which pressurizes the first member and the second member to curve at least a part of the first member toward at least the second member.Type: GrantFiled: April 30, 2008Date of Patent: May 10, 2011Assignee: Ricoh Company, Ltd.Inventors: Kenichi Yoshimura, Kouji Terasawa
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Patent number: 7907338Abstract: A microfabricated optical wave plate comprises a reflective polarizer and a mirror separated by a fixed or variable distance. The wave plate imparts a relative phase delay on polarization components of incident light, thereby transforming the overall polarization of the light.Type: GrantFiled: March 21, 2008Date of Patent: March 15, 2011Assignee: Alces Technology, Inc.Inventor: David M. Bloom
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Patent number: 7837341Abstract: A deformable mirror device includes a flexible member formed so as to be deformable and having a mirror surface formed on its front surface, and a pressure generating section configured so that a direction of generation of a pressure to be applied to the flexible member is variable.Type: GrantFiled: May 2, 2007Date of Patent: November 23, 2010Assignee: Sony CorporationInventors: Sunao Aoki, Masahiro Yamada
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Patent number: 7771065Abstract: An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.Type: GrantFiled: April 12, 2006Date of Patent: August 10, 2010Assignee: Canon Kabushiki KaishaInventors: Choshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
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Patent number: 7744220Abstract: A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.Type: GrantFiled: August 5, 2008Date of Patent: June 29, 2010Assignees: Kabushiki Kaisha Toshiba, Kabushiki Kaisha TopconInventors: Kei Masunishi, Akihiro Koga, Ryo Furukawa, Osamu Nishimura, Akio Kobayashi, Hiroyuki Kawashima
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Patent number: 7740357Abstract: A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening; and a plurality of through holes passing through the reflection film and the deformable electrode film and disposed so as to overlap the opening.Type: GrantFiled: August 7, 2008Date of Patent: June 22, 2010Assignees: Kabushiki Kaisha Toshiba, Kabushiki Kaisha TopconInventors: Kei Masunishi, Akihiro Koga, Ryo Furukawa, Osamu Nishimura, Akio Kobayashi, Hiroyuki Kawashima
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Patent number: 7740363Abstract: This invention relates to a deformable-mirror holder for holding a mirror in a desired position, to within accepted tolerances, even whilst the mirror is deforming or in a deformed state. In particular, this invention relates to a holder for a bimorph mirror. A deformable-mirror holder is provided comprising a body with a central aperture for receiving a deformable mirror, the central aperture being defined by a plurality of flexible beams, with each flexible beam having an end shaped to provide a supporting surface and a flexible portion that connects the beam's end to the holder's body.Type: GrantFiled: December 18, 2003Date of Patent: June 22, 2010Assignee: BAE Systems plcInventors: Michael S Griffith, Nicholas J Archer, Leslie C Laycock
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Patent number: 7682030Abstract: It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.Type: GrantFiled: February 18, 2008Date of Patent: March 23, 2010Assignees: Kabushiki Kaisha Toshiba, Kabushiki Kaisha TopconInventors: Kei Masunishi, Akihiro Koga, Ryo Furukawa, Tetsuya Kugimiya, Akio Kobayashi, Hiroyuki Kawashima
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Publication number: 20100027143Abstract: Described is a magnetic membrane mirror having a flexible membrane comprising a magnetic material and having a high reflectance. The flexible membrane is secured over a frame to enclose a volume between the frame and membrane. A transmembrane pressure is established to achieve a desired mirror shape or curvature. Curvature can be changed by modifying the transmembrane pressure by increasing or decreasing the pressure in the enclosed volume. An array of electromagnetic actuators generates individually-controlled magnetic fields to cause localized displacements of the mirror surface. The magnetic membrane mirror can be constructed with inexpensive components and can be used as a dynamic component in an adaptive optical system.Type: ApplicationFiled: February 27, 2007Publication date: February 4, 2010Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGYInventor: Matthew M. Angel
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Publication number: 20090260620Abstract: An inflatable solar energy collector. The device uses two elongated and pressure-stabilized air chambers with a trough-shaped reflecting surface in between. The curvature of the reflecting surface is adjusted by adjusting the differential pressure between the two air chambers. The device can be configured to provide a focal point outside the air chambers or inside the air chambers. For the version using the external focal point an external energy receiver is appropriately positioned. For the version using the internal focal point, the receiver is mounted inside one of the air chambers.Type: ApplicationFiled: April 16, 2009Publication date: October 22, 2009Inventors: Ian L. Winger, Sean A. Barton
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Patent number: 7604353Abstract: It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film.Type: GrantFiled: December 18, 2007Date of Patent: October 20, 2009Assignees: Kabushiki Kaisha Toshiba, Kabushiki Kaisha TopconInventors: Akihiro Koga, Masayuki Sekimura, Kei Masunishi, Akio Kobayashi, Hiroyuki Kawashima, Hirotake Maruyama
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Publication number: 20090180203Abstract: An improved solar reflector utilizing a tensioned reflective membrane. The reflector structure includes a membrane attached on the outer surface of a metal strap that is positioned on an end form by means of a curved-face tensioning block.Type: ApplicationFiled: January 13, 2009Publication date: July 16, 2009Applicant: FOCAL POINT ENERGY, INC.Inventors: Allen I. Bronstein, Howard Harrenstien
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Patent number: 7553035Abstract: A coordinate system defines the length of the curve of a parabola used in constructing a parabolic trough reflector. The origin (0,0) of the coordinate system is at the bottom center of the coordinate system. The two upper points of the coordinate system define the width, height of the parabola. These points are defined as (X1,Y1)=(?width,height), and (X2,Y2)=(width,height). The equation defining the parabola is f(x)=a·x2, where a=height/width2. The plot of this equation produces a parabola that fits into the coordinate system. Two small blocks are used as anchor points for the ends of the parabola. The length of the curve of the parabola is defined in the equation: length(x)=a·[x·(x?{square root over (x2+b2)})+b2·ln(x+?{square root over (x2+b2)})] where b=½·a. An inexpensive trough reflector is constructed out of flexible material. It is used to build a much more complicated six reflector system to concentrate parallel radiation like sunlight much like a magnifying glass.Type: GrantFiled: June 21, 2005Date of Patent: June 30, 2009Inventor: Greg J. Wright
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Patent number: 7554711Abstract: An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.Type: GrantFiled: July 24, 2006Date of Patent: June 30, 2009Assignee: IDC, LLC.Inventor: Mark W. Miles
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Patent number: 7549759Abstract: A system and method for increasing contrast in displays using micromechanical light modulators. Contrast is enhanced by an optical system that uses polarization to discriminate unmodulated light. Contrast obtained from polarization sensitive components of an optical system has a multiplicative effect on contrast already available.Type: GrantFiled: August 28, 2006Date of Patent: June 23, 2009Assignee: Alces Technology, Inc.Inventor: David M. Bloom
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Publication number: 20090109560Abstract: This invention concerns the fabrication of deformable mirrors that can be used for adaptive optics applications to correct wavefront aberrations. The deformable mirror uses a polyimide substrate with a PZT layer, which is cut by laser to produce a structure with a free end attached to the polyimide substrate at one corner. The deformable mirror has an aperture less than 10 cm and is cost-effective to produce. The deformable mirror is driven piezoelectrically as a bimorph or monomorph and can achieve a stroke of 15 microns and a bandwidth of 1 kHz for less than 20 volts. The deformable mirror uses a continuous sheet, which is anchored at only one point, which corresponds to the point of arbitrary zero phase, and is free everywhere else to conform to the wavefront. This cannot be achieved with silicon micromachined mirrors, which are electrostatically actuated because surface micromachining produces delicate films which must be anchored periodically for support.Type: ApplicationFiled: October 3, 2007Publication date: April 30, 2009Inventor: John Farah
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Patent number: 7473878Abstract: A laser beam correction system and related methods of use and manufacture are provided. In one example, a laser beam correction system includes a mirror having a first surface and a second surface. An actuator comprising a piezoelectric ceramic disk and a plurality of conductive electrodes on substantially opposing sides of the disk is bonded to the second surface of the mirror. The actuator includes an aperture in a center portion. A wave-front sensor is adapted to measure optical wave-front characteristics of a laser beam received by the mirror and provide electronic signals corresponding to the wave-front characteristics.Type: GrantFiled: June 8, 2007Date of Patent: January 6, 2009Assignee: The Boeing CompanyInventors: Karl N. Schrader, Steven F. Griffin, David J. Bossert, Garry R. Marions
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Patent number: RE46099Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.Type: GrantFiled: March 19, 2015Date of Patent: August 9, 2016Assignee: ASML Holding N.V.Inventors: Pradeep K. Govil, Andrew Guzman