Micro Mirror Patents (Class 359/904)
  • Patent number: 9019475
    Abstract: Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation.
    Type: Grant
    Filed: April 17, 2014
    Date of Patent: April 28, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger, Damian Fiolka, Jan Horn, Markus Deguenther, Florian Bach, Michael Patra, Johannes Wangler, Michael Layh
  • Patent number: 9013684
    Abstract: Microlithographic illumination system includes individually drivable elements to variably illuminate a pupil surface of the system. Each element deviates an incident light beam based on a control signal applied to the element. The system also includes an instrument to provide a measurement signal, and a model-based state estimator configured to compute, for each element, an estimated state vector based on the measurement signal. The estimated state vector represents: a deviation of a light beam caused by the element; and a time derivative of the deviation. The illumination system further includes a regulator configured to receive, for each element: a) the estimated state vector; and b) target values for: i) the deviation of the light beam caused by the deviating element; and ii) the time derivative of the deviation.
    Type: Grant
    Filed: July 24, 2012
    Date of Patent: April 21, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger, Damian Fiolka, Jan Horn, Markus Deguenther, Florian Bach, Michael Patra, Johannes Wangler, Michael Layh
  • Patent number: 8922864
    Abstract: A MEMS apparatus is provided for scanning an optical beam. The MEMS apparatus is formed out of a pre-fabricated multi-layer device and comprises at least one tilting micro-mirror formed in a first active layer of that pre-fabricated multi-layer device and a support structure formed in a second layer of the pre-fabricated multi-layer device, and wherein the support structure is preferably formed by etching parts of the second layer to obtain a pre-determined shape of the supporting structure.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: December 30, 2014
    Assignee: STMicroelectronics International N.V.
    Inventors: Avigdor Huber, Moshe Medina
  • Patent number: 8917435
    Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: December 23, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8842353
    Abstract: A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: September 23, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventor: Takahisa Kato
  • Patent number: 8842352
    Abstract: A method for improving the alignment of the bi-directional scan lines of a resonant mirror imaging system is disclosed. The method includes sensing the position of the mirror and selecting a portion of each scan line, such as the exact middle 50% and the start points of the scan lines in both directions for displaying the image. Determine the specific number of pixels used to modulate the scan lines and the clocking rate at which the pixels are inserted on the light beam so that the pixels completely fill the selected portion of the scan lines. The clock rate is then adjusted to the determined rate.
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: September 23, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Eric Gregory Oettinger, James Eugene Noxon
  • Patent number: 8830551
    Abstract: An actuator is configured of a frame element, a pair of beam elements, a movable element rotatably supported by the frame element via the beam elements, a driver configured to rotate the movable element relative to the frame element around the beam elements as a rotary shaft; and damper elements provided on the rotary axis of the beam elements.
    Type: Grant
    Filed: October 25, 2011
    Date of Patent: September 9, 2014
    Assignee: Ricoh Company, Ltd.
    Inventors: Tomofumi Kitazawa, Goichi Akanuma, Mitsumi Fujii
  • Patent number: 8740394
    Abstract: In an illumination optical system for a DMD type projector, the TIR prism is configured such that a projection line, which is a normal to the total reflection surface vertically projected on the DMD surface, forms an angle other than 90° with a micromirror turning axis, an exit light projection line, which is a principal ray of light beam exits from the total reflection surface vertically projected on the DMD surface, forms an angle of 90° with the micromirror turning axis, and an incident light projection line, which is a principal ray of light beam incident on the total reflection surface vertically projected on the DMD surface, is located on the same side as the exit light projection line with respect to a straight line passing through an end point of the incident light projection line and extending parallel to a long side of the DMD.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: June 3, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Tomoyuki Baba
  • Patent number: 8717638
    Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: May 6, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8699112
    Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: April 15, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8681408
    Abstract: An optical scanning device includes a substrate, a frame, a torsion beam, and a cantilever. The substrate has a three-layer structure including an oxide film sandwiched between two silicon substrates. The torsion beam swingably supports a mirror portion which deflects a light beam projected from a light source. The cantilever is supported by the frame to connect to the torsion beam and applies torque to the torsion beam. The cantilever and the torsion beam are formed on the same silicon substrate. The cantilever has a thickness substantially thinner than the thickness of the torsion beam. An image forming apparatus includes the optical scanning device. An image projection device includes the optical scanning device.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: March 25, 2014
    Assignee: Ricoh Company, Limited
    Inventor: Eiji Mochizuki
  • Patent number: 8659811
    Abstract: An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: February 25, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Tomoaki Nakamura, Yasushi Mizoguchi
  • Patent number: 8643927
    Abstract: A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide silicon film. The polysilicon film partially bulges out of the protrusion formation hole toward a movable section to form a protruding section. In other words, the polysilicon film bulges out of the protrusion formation hole toward the movable section to form the protruding section. Thereby, a movable section included in MEMS can be prevented from sticking to other members.
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: February 4, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Chisaki Takubo, Heewon Jeong
  • Patent number: 8643926
    Abstract: There is provided an image forming apparatus that is configured so as to continuously display a plurality of images in a drawing area by scanning light for the drawing area formed on a display surface. The image forming apparatus includes a light emitting unit that emits the light, an optical scanning unit that two-dimensionally scans the light emitted from the light emitting unit for the drawing area, and a driving control unit that controls driving of the optical scanning unit such that the number of the images displayed in the drawing area in a unit of time is changed by changing a range in which the light is scanned on the drawing area at the time of displaying the images based on a shape and a size of each of the images, which are displayed in the drawing area, on the drawing area.
    Type: Grant
    Filed: May 11, 2011
    Date of Patent: February 4, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Shuichi Wakabayashi
  • Patent number: 8626468
    Abstract: A MEMS apparatus is provided for scanning an optical beam which comprises: a. at least one mirror operative to perform am oscillation motion to a pre-defined rotation angle around a mirror rotation axis; b. a sound sensing means; and c. a conversion means operative to convert sound vibrations detected by the sound sensing means into one or more electrical signals, and wherein the sound sensing means is located at the vicinity of the at least one mirror whereby the movement of the at least one mirror is sensed by the sound sensing means and converted by the conversion means into the one or more electrical signals characterizing the oscillating motion of the at least one mirror.
    Type: Grant
    Filed: June 21, 2009
    Date of Patent: January 7, 2014
    Assignee: STMicroelectronics International N.V.
    Inventors: Ido Luft, Nir Goren
  • Patent number: 8610986
    Abstract: Micromirrors and micromirror arrays described herein are useful, for example in maskless photolithography systems and methods and projection display devices and methods. According to one aspect, the micromirrors comprise a polymer structural layer and a reflective dielectric multilayer for selective reflection and/or redirection of incoming electromagnetic radiation. According to another aspect, incorporation of a reflective dielectric multilayer allows for use of polymer structural materials in micromirrors and prevents damage to such polymer materials due to excessive heating from absorption of electromagnetic radiation, as the reflective dielectric multilayers are highly reflective and minimize heating of the micromirror components. According to yet a further aspect, top down fabrication methods are described herein for making a micromirror comprising a polymer structural layer and a reflective dielectric multilayer.
    Type: Grant
    Filed: April 6, 2009
    Date of Patent: December 17, 2013
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Kanti Jain, Junghun Chae, Kevin Lin, Hyunjong Jin
  • Patent number: 8587853
    Abstract: A two-dimensional optical scanner and an image display apparatus are provided. The optical scanner includes: a movable portion having a mirror portion, and a first driving portion which is configured to oscillate the mirror portion around a first axis; a second driving portion which is configured to oscillate the movable portion around a second axis perpendicular to the first axis; and a driving controller which is configured to drive the first driving portion in a first driving method and is configured to drive the second driving portion in a second driving method different from the first driving method. While the first driving portion oscillates the mirror portion around the first axis, the second driving portion oscillates the movable portion around the second axis, so that the mirror portion reflects a beam of light incident to the mirror portion such that the two-dimensional optical scanner performs a two-dimensional scanning.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: November 19, 2013
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Hitoshi Takeda
  • Patent number: 8576468
    Abstract: A scanning projector includes a MEMS device with a scanning mirror that sweeps a beam in two dimensions. Actuating circuits receive scan angle information and provide signal stimulus to the MEMS device to control the amount of mirror deflection on two axes. The period of movement on one or both axes may be modified to effect changes in line density in a resultant display.
    Type: Grant
    Filed: September 22, 2010
    Date of Patent: November 5, 2013
    Assignee: Microvision, Inc.
    Inventors: Mark O. Freeman, Joshua O. Miller
  • Patent number: 8576469
    Abstract: There are provided a light screening apparatus and a manufacturing method thereof. The light screening apparatus includes a substrate, a transparent electrode, a plurality of roll-up actuators and a plurality of light screening patterns. The substrate includes a light-transmitting region and the transparent electrode is formed on one surface of the substrate. Each roll-up actuator, which has opaque characteristics, is fixed on the circumference portion of the light-transmitting region and includes a fixing end and a moving part which extends from the fixing end. Gaps are formed between adjacent roll-up actuators, and the light screening patterns are formed on the substrate at locations corresponding to the gaps. The light-screening patterns prevent light incident through the gaps from being transmitted to the light-transmitting region.
    Type: Grant
    Filed: January 22, 2010
    Date of Patent: November 5, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Che-heung Kim, Seog-woo Hong
  • Patent number: 8570633
    Abstract: Disclosed are several embodiments of a micro-electro-mechanical systems (MEMS) mirror and a mirror scanner employing the same. An optical scanning unit employing such mirror scanner and an image forming apparatus including the optical scanning unit are also disclosed. The MEMS mirror may include a movable unit, which may in turn include a mirror portion and a magnet frame portion. The mirror portion may have mirror surfaces on the face surface(s) thereof. The magnet frame portion may include an opening into which a magnet is received. The MEMS mirror may also include a first fixing end and a second fixing end, to which the moving unit may be elastically supported by one or more elastic members that allows oscillating or pivoting movement of the moving unit.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: October 29, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hee-Moon Jeong, Jin-Ho Lee, Jun-O Kim, Jong-Chul Choi
  • Patent number: 8562149
    Abstract: A digital micromirror device module includes a flexible connection device, a digital micromirror device and a connecting interface. The flexible connection device includes a plurality of conducting wires and an external insulation layer, wherein the conducting wires are discretely arranged and encapsulated by the external insulation layer. The digital micromirror device unit is disposed on the external insulation layer of the flexible connection device and electrically connected with the conducting wires of the flexible connection device. The connecting interface is arranged at a lateral end of the flexible connection device and connected with the conducting wires.
    Type: Grant
    Filed: May 13, 2011
    Date of Patent: October 22, 2013
    Assignee: Delta Electronics, Inc.
    Inventors: Chia-Chen Hu, Yuan-Ming Hsu
  • Patent number: 8553308
    Abstract: A method for monitoring movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based upon capacitance changes over time in the MEMS device. The method comprises the steps of: if the at least one moving mirror is an in-plain mirror, then: a. providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of that at least one moving mirror; b. measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and c. monitoring the movement of the at least one moving mirror based on the measured current. If the at least one moving mirror is a staggered mirror, then: d. measuring a current associated with the movement of the at least one moving mirror; e. identifying a plurality of ripples associated with capacitance changes in the MEMS device over time, in the measured current; and f.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: October 8, 2013
    Assignee: STMicroelectronics International N.V.
    Inventors: Nir Goren, Ido Luft, Sason Sourani
  • Patent number: 8553304
    Abstract: A piezoelectric actuator corrects for imperfections in printed material caused by the vertical rotation of a photosensitive image forming surface, such as a photoconductive drum. The piezoelectric actuator may be mounted to the base of a reflective surface holder, such as a mirror holder, that holds a mirror. The reflective surface holder may be operable to horizontally rotate the mirror as the mirror reflects a laser onto the photosensitive image forming surface. A power supply in communication with the piezoelectric actuator applies a voltage to the piezoelectric actuator. The resulting voltage allows the piezoelectric actuator to tilt the mirror in a vertical direction. A memory storage device may store tilt adjustment data usable by a microprocessor or controller to control the amount of voltage the power supply supplies to the piezoelectric actuator.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: October 8, 2013
    Assignee: Marvell International Ltd.
    Inventor: Douglas G. Keithley
  • Patent number: 8553306
    Abstract: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: October 8, 2013
    Assignees: Ricoh Company, Ltd., Stanley Electric Co., Ltd.
    Inventors: Tetsurou Saitoh, Eiji Mochizuki, Yukito Sato, Yoshiaki Yasuda, Masahiro Akamatsu, Masanao Tani
  • Patent number: 8553303
    Abstract: An optical scanner includes: a light reflecting section having a light reflecting surface; a supporting section supporting the light reflecting section; a movable section supporting the supporting section; at least a pair of movable beams extending from the movable section and disposed in such a way that the movable beams face each other; a displacement section connected to the movable beam; two drive beams each extending from the displacement section; and a supporting frame supporting the drive beams, wherein the movable beams each include a bending section which is bent and deformed in a thickness direction of the supporting frame, and an end on the side of the movable section of the supporting section is fixed in a position more distant from the light reflecting section than an end face on the side of the light reflecting section of the movable section.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: October 8, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Mizoguchi, Yukio Miyamoto
  • Patent number: 8547619
    Abstract: A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: October 1, 2013
    Assignee: JDS Uniphase Corporation
    Inventor: Abdul Jaleel K. Moidu
  • Patent number: 8508717
    Abstract: An illumination optical system for illuminating an irradiated plane M with illumination light provided from a light source includes a spatial light modulator, which is arranged in an optical path of the illumination optical system and forms a desired light intensity distribution at a pupil position of the illumination optical system or a position optically conjugated with the pupil position, and a diffuser, which is arranged at an incidence side of the spatial light modulator through which the illumination light enters.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: August 13, 2013
    Assignee: Nikon Corporation
    Inventor: Hirohisa Tanaka
  • Patent number: 8508826
    Abstract: A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
    Type: Grant
    Filed: April 23, 2009
    Date of Patent: August 13, 2013
    Assignee: Panasonic Corporation
    Inventors: Jirou Terada, Shinsuke Nakazono, Kazuki Komaki, Kiyomi Furukawa
  • Patent number: 8488224
    Abstract: Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: July 16, 2013
    Assignee: Microvision, Inc.
    Inventor: Dean R. Brown
  • Patent number: 8472100
    Abstract: A deformable element for use in microelectromechanical systems comprises a core layer and a protective layer. The protective layer is capable of deterring combinations of undesired chemical components in operational environments with the core layer of the deformable element.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: June 25, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: Patrick Ian Oden, Larry Joseph Hornbeck, Simon Joshua Jacobs
  • Patent number: 8462414
    Abstract: A micromechanical component includes: a mirror element with a reflective surface on a first outer side of the mirror element, which is designed in such a way that a first potential is applied to a first electrode surface on a second outer side of the mirror element opposite from the first outer side; a counterelectrode situated adjacent to the second outer side of the mirror element and which is designed in such a way that a second potential is applied to a second electrode surface of the counterelectrode; and a voltage control unit configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: June 11, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Reinhold Fiess, Joerg Muchow
  • Patent number: 8437065
    Abstract: Briefly, in accordance with one or more embodiments, a scanning platform to scan a beam as a projected image comprises a frame and a scanning mirror supported by a flexure coupled to the frame of the scanning platform. The flexure has an asymmetric structure comprising a longer flexure arm and a shorter flexure arm to locate the scanning mirror at a position offset from a center of the frame. The resonant frequency of oscillation of the scanning mirror may be maintained or otherwise determined by selecting an appropriate cross-sectional area of the longer flexure arm or the shorter flexure arm, or combinations thereof.
    Type: Grant
    Filed: October 18, 2010
    Date of Patent: May 7, 2013
    Assignee: Microvision, Inc.
    Inventors: Dean R. Brown, Wyatt O. Davis
  • Patent number: 8427728
    Abstract: A pair of substrate portions each being tabular-shaped has side portions located closer to a mirror portion and connected, at both ends thereof in the oscillation axis direction, by a pair of supporting beam portions, and also has outer side portions fixed to a fixing member. An excitation device is formed on at least one substrate portion. The pair of substrate portions is disposed symmetrically in the direction perpendicular to the oscillation axis. A pair of torsion beam portions extends outward from two opposite sides of the mirror portion on the oscillation axis, and each is connected to the center of each supporting beam portion in a longitudinal direction. An edge of the piezoelectric element on an outer side thereof in the direction perpendicular to the oscillation axis is spaced from an outer side portion of the at least one substrate portion in a direction closer to the mirror portion.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: April 23, 2013
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Hitoshi Takeda
  • Patent number: 8422109
    Abstract: An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: April 16, 2013
    Assignee: Panasonic Corporation
    Inventors: Jirou Terada, Shinsuke Nakazono, Shigeo Furukawa, Kazuki Komaki
  • Patent number: 8390912
    Abstract: An actuator, includes: a movable plate; a supporter to support the movable plate; a pair of linking portions to link the movable plate and the supporter so as to allow the movable plate to rotate relative to the supporter; and a piezoelectric element to rotate the movable plate. The piezoelectric element elongated and contracted by an energization twists the pair of linking portions to rotate the movable plate, and each of the pair of the linking portions includes an axial member extending from the movable plate and a returned portion that links the axial member and the supporter and is formed so as to return to a side adjacent to the movable plate.
    Type: Grant
    Filed: January 4, 2008
    Date of Patent: March 5, 2013
    Assignee: Seiko Epson Corporation
    Inventors: Tomoaki Nakamura, Yasushi Mizoguchi
  • Patent number: 8373916
    Abstract: An optical scanner, including a frame member; a pair of connection members near a coupling end with the frame member; a pair of elastic members connected with the frame member by the connection members; a mirror substrate supported by the pair of elastic members, the mirror substrate having a bending rigidity outward from the rotational axis for each area in accordance with a bending moment caused by oscillation, the mirror substrate having a slit at both connection ends with the pair of elastic members; and a piezoelectric element provided on each of the connection members, the piezoelectric element generating a torque for driving the mirror substrate oscillatable back and forth around the pair of elastic members as a torsion rotational axis.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: February 12, 2013
    Assignee: Ricoh Company, Ltd.
    Inventors: Mitsumi Fujii, Tetsurou Saitoh, Eiji Mochizuki, Kohki Sasaki
  • Patent number: 8345339
    Abstract: The optical deflector includes a deflector, a vibration detector, a driving signal generator, a modulation timing signal generator, and a deflection detector. The deflector has a vibrational system having a movable body with a light deflecting member, and deflects light from a light source by the movable body. The vibration detector detects the vibration condition of the vibrational system of the deflector. The driving signal generator generates a driving signal for driving the vibrational system of the deflector. The modulation timing signal generator generates a modulation timing signal as the reference time for regulating the amount of light from the light source. The deflection detector detects the deflection condition of light deflected by the deflector.
    Type: Grant
    Filed: June 12, 2008
    Date of Patent: January 1, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Atsushi Kandori, Masao Majima, Kazunari Fujii
  • Patent number: 8339577
    Abstract: An illumination system of a microlithographic projection exposure apparatus has a pupil surface and an essentially flat arrangement of desirably individually drivable beam deviating elements for variable illumination of the pupil surface. Each beam deviating element allows deviation of a projection light beam incident on it to be achieved as a function of a control signal applied to the beam deviating element. A measurement illumination instrument directs a measurement light beam, independent of the projection light beams, onto a beam deviating element. A detector instrument records the measurement light beam after deviation by the beam deviating element. An evaluation unit determines the deviation of the projection light beam from measurement signals provided by the detector instrument.
    Type: Grant
    Filed: July 21, 2009
    Date of Patent: December 25, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger, Damian Fiolka, Jan Horn, Markus Deguenther, Florian Bach, Michael Patra, Johannes Wangler, Michael Layh
  • Patent number: 8305674
    Abstract: A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the
    Type: Grant
    Filed: October 28, 2008
    Date of Patent: November 6, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Suguru Miyagawa, Takahiro Akiyama, Kazutoshi Torashima, Takahisa Kato, Kazunari Fujii
  • Patent number: 8289599
    Abstract: A piezoelectric actuator corrects for imperfections in printed material caused by the vertical rotation of a photosensitive image forming surface, such as a photoconductive drum. The piezoelectric actuator may be mounted to the base of a reflective surface holder, such as a mirror holder, that holds a mirror. The reflective surface holder may be operable to horizontally rotate the mirror as the mirror reflects a laser onto the photosensitive image forming surface. A power supply in communication with the piezoelectric actuator applies a voltage to the piezoelectric actuator. The resulting voltage allows the piezoelectric actuator to tilt the mirror in a vertical direction. A memory storage device may store tilt adjustment data usable by a microprocessor or controller to control the amount of voltage the power supply supplies to the piezoelectric actuator.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: October 16, 2012
    Assignee: Marvell International Ltd.
    Inventor: Douglas G. Keithley
  • Patent number: 8270057
    Abstract: An oscillator device including an oscillation system with oscillators and torsion springs, a driving member for driving the oscillation system, and a drive control member for supplying a driving signal to the driving member, the oscillation system having at least a first oscillation mode and a second oscillation mode, the second oscillation mode having an angular frequency approximately n-fold the angular frequency of the first oscillation mode where n is an integer, the driving member driving the oscillation system so that it simultaneously oscillates in the first and second oscillation modes, wherein a natural angular frequency calculating member calculates the natural angular frequency of the second oscillation mode based on an output signal from a photodetector, being outputted at a timing whereat the reflection light passes over the photodetector.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: September 18, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazunari Fujii, Suguru Miyagawa
  • Patent number: 8254006
    Abstract: An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a damper member for applying a damping function to the oscillatory motion of the movable element, the damper member being provided along at least a portion of a locus plane defined by an edge of the movable element during oscillatory motion thereof, so that, based on a viscosity of a fluid which is present between the edge of the movable element and a portion of the damper member opposed to the edge of the movable element, the damping function is applied to applied to the oscillatory motion of the movable element.
    Type: Grant
    Filed: July 7, 2008
    Date of Patent: August 28, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Suguru Miyagawa, Koichi Hara
  • Patent number: 8254005
    Abstract: The invention relates to arrangements of micromechanical elements, preferably microoptical elements, which are each held by means of spring elements. In this respect, they can be pivoted or also deflected in translation around a rotational axis by the effect of electrostatic forces. It is the object of the invention to provide an arrangement having micromechanical elements which can be operated over a long time period without drift without any frequent recalibration being necessary. The arrangement in accordance with the invention having micromechanical elements is made in this connection such that electrodes are likewise arranged beneath micromechanical elements, that is, on the side onto which no electromagnetic radiation can be directly incident. In this respect, a respective electrode is arranged and made such that it is associated with at least two micromechanical elements. It can in this connection effect a deflection of the micromechanical elements associated with it by electrostatic force effect.
    Type: Grant
    Filed: June 3, 2006
    Date of Patent: August 28, 2012
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
    Inventors: Ingo Wullinger, Peter Dürr
  • Patent number: 8218216
    Abstract: An object of the present invention is to provide an image projector capable of projecting a high-quality image while realizing small size. In the image projector, a light flux is deflected two-dimensionally by turning a reflector for reflecting a light flux emitted from a light source around a second axis almost orthogonal to a first axis as a center by resonant drive while turning the reflector around the first axis as a center by non-resonant drive. Shape of one or more optical surfaces of a projection optical system for projecting an image onto a projection plane by guiding light onto the projection plane includes a shape for performing a correction for maintaining scanning speed of the light flux along one scan direction on the projection plane almost constant and a shape for performing a correction for suppressing a distortion in an image along the other scan direction almost orthogonal to the one scan direction on the projection plane.
    Type: Grant
    Filed: March 27, 2008
    Date of Patent: July 10, 2012
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Kenji Konno, Kenji Mizumoto
  • Patent number: 8162494
    Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.
    Type: Grant
    Filed: November 21, 2003
    Date of Patent: April 24, 2012
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
    Inventors: Roger Franciscus Mattheus Maria Hamelinck, Petrus Carolus Johannes Nicolaas Rosielle, Jakobus Pieter Kappelhof
  • Patent number: 8144380
    Abstract: A drive mechanism @is comprised with a set comprising a plurality of magnetic bodies, means for supplying a frequency signal to said set, and means for producing movement caused by the attraction/repulsion between the magnetic bodies. The movement is the driving source of the drive mechanism.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: March 27, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Kesatoshi Takeuchi
  • Patent number: 7841727
    Abstract: A projection optical system includes a digital micro-mirror device and a light blocker disposed along the light path of the digital micro-mirror device. The digital micro-mirror device includes a base having a plurality of outer pads, a micro-mirror array disposed on the base, and a plurality of bonding wires. The bonding wires are electrically connecting the outer pads with the corresponding micro-mirror array. The light blocker is configured for blocking the light incident to the bonding wires and the light reflected by the bonding wires.
    Type: Grant
    Filed: February 29, 2008
    Date of Patent: November 30, 2010
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventors: Ming-Te Lin, Wen-Pin Yeh
  • Patent number: 7828448
    Abstract: An illumination unit and an image projection apparatus employing the same. The illumination unit includes: a first reflective surface reflecting light incident thereon; a light-emitting device generating and emitting illuminating light; and a second reflective surface reflecting light emitted from the light-emitting device to a light source surface that includes the light-emitting device.
    Type: Grant
    Filed: March 30, 2006
    Date of Patent: November 9, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-hoi Kim, Won-yong Lee, Young-chol Lee, Kye-hoon Lee