Abstract: There is provided a bearing device including: a tubular sleeve; a shaft held inside the sleeve; and a first bearing, a second bearing, a third bearing, and a fourth bearing, rotatably holding the shaft with respect to the sleeve and arranged in this order in an axial direction. An outer circumferential surface of an outer ring of each of the first to fourth bearings is fixed to an inner circumferential surface of the sleeve, a gap is provided between inner circumferential surfaces of inner rings of the second and third bearings and the shaft, and a spring applying a constant pre-load is provided between the inner rings of the second and third bearings.

Abstract: Embodiments of disk drive head suspensions are described that include a spring metal layer. The spring metal layer includes a base region, support arms extending from the base region, and a slider mounting region. The slider mounting region includes a proximal portion, a distal portion, and a pair of motor openings. The motor openings are configured to receive motors such that the longitudinal axes of the motors are non-parallel with the longitudinal axis of the slider mounting region. The suspensions include traces that include a base portion on the base region of the spring metal layer, a spring metal-unsupported portion extending from the base region to the slider mounting region, and a slider mounting portion extending from the spring metal-unsupported portion onto the slider mounting region. And, the suspensions include an insulating layer between portions of the spring metal layer and the conductor layer.

Abstract: A driving apparatus (101) is provided with: a base part (110); a driven part (130) which is capable of rotating; an elastic part (120a, 120b) which connects the base part and the driven part and which has elasticity for allowing the driven part to rotate around a rotational axis which is an axis along one direction (Y axis); a coil part (140) which is disposed on the base part, wherein the driven part is disposed on an outside of a winding of the coil; and a magnetic field applying part (151, 152) which applies the magnet field to the coil part.

Abstract: Various embodiments concern a dual stage actuation flexure. The dual stage actuation flexure comprises a flexure having a gimbal. The gimbal comprising a pair of spring arms, a tongue between the spring arms, and a pair of linkages respectively connecting the pair of spring arms to the tongue. The dual stage actuation flexure further comprises a pair of motors mounted on the gimbal and a pair of stiffeners respectively mounted on the motors. The dual stage actuation flexure further comprises a slider mounting. Electrical activation of the motors bends the pair of linkages to move the slider mounting about a tracking axis while the stiffeners limit the degree of bending of the motors during the electrical activation.

Abstract: A data storage device is disclosed comprising a microactuator configured to actuate a head over a disk. A control signal applied to the microactuator is generated based on an input sequence u(k). A Preisach bit map bj is updated based on the input sequence u(k), wherein the Preisach bit map bj corresponds to a Preisach plane modeling a hysteretic response of the microactuator. A current compensation value yi is generated based on an update value generated based on: ? j ? h ? ( j ) ? b ^ j where hj represents a slice of the Preisach plane and {circumflex over (b)}j is an update bit map based on at least part of the Preisach bit map bj. The current input ui and the current compensation value yi are combined to generate the control signal applied to the microactuator.

Abstract: In an electrical component having at least one flexible carrier material, the connecting surfaces formed on conductive pathways thereof are joined to the connecting surfaces of individual metal bodies via individual bonded connections. At least one rail profile is conformed in the surface structure of each bonded connection; each bonded connection having at least one ultrasonic welding bond. In order to produce the electrical component, individual metal bodies are arranged on the conductive pathways of a flexible carrier material. Connecting surfaces of the individual metal bodies and connecting surfaces of the conductive pathways are materially bonded to each other. One of the connecting surfaces to be bonded is produced from a foil that is fully furnished with conductive pathways, and energy directors made from aluminum are integrated in the conductive pathway or the metal body.

Abstract: Various embodiments concern a dual stage actuation suspension that comprises a loadbeam having a load point projection. The suspension further comprises a gimbal assembly having a point of contact that is in contact with the load point projection such that the gimbal assembly can gimbal about the load point projection. The gimbal assembly is cantilevered from the loadbeam and has an axis of rotation aligned with the load point projection and the point of contact. The suspension further comprises a pair of motors mounted on the gimbal assembly and positioned proximal of the point of contact. The pair of motors is mounted between a tongue and a pair of spring arms to rotate the tongue about the point of contact and the load point projection. The loadbeam further comprises a void into which the pair of motors extends.

Abstract: Various embodiments concern a dual stage actuation suspension that comprises a loadbeam having a load point projection. The suspension further comprises a gimbal assembly having a point of contact that is in contact with the load point projection such that the gimbal assembly can gimbal about the load point projection. The gimbal assembly is cantilevered from the loadbeam and has an axis of rotation aligned with the load point projection and the point of contact. The suspension further comprises a pair of motors mounted on the gimbal assembly and positioned proximal of the point of contact. The pair of motors is mounted between a tongue and a pair of spring arms to rotate the tongue about the point of contact and the load point projection. The loadbeam further comprises a void into which the pair of motors extends.

Abstract: In certain embodiments, an apparatus includes a first piezoelectric (PZT) element poled in the same direction as a second PZT element. The first and second PZT elements are configured to be driven while simultaneously sensing motion. The apparatus further includes a circuit configured to add outputs of the first and second PZT elements, extract the sensed motion, and detect off-track motion from the extracted sensed motion.

Abstract: Various embodiments concern a gimbaled flexure having a dual stage actuation structure comprising flexure which comprises a gimbal. The gimbal comprises at least one spring arm and a tongue connected to the at least one spring arm. The dual stage actuation structure further comprises a motor mounted on the gimbal, the motor comprising a top side and a bottom side opposite the top side, the bottom side of the motor facing the flexure. The dual stage actuation structure further comprises a damper located between the motor and the flexure, the damper contacting the tongue and the bottom side of the motor. The damper comprises one or both of elastic and viscoelastic material. Various other features of a dual stage actuation structure are provided.

Abstract: Stable, low resistance conductive adhesive ground connections between motor contacts and a gold-plated contact area on a stainless steel component of a dual stage actuated suspension. The stainless steel component can be a baseplate, load beam, hinge, motor plate, add-on feature or flexure.

Abstract: A head suspension with a connecting structure for a plate material comprises a base plate attached to a carriage that rotates the base plate around an axis, a load beam including a rigid part and a resilient part, a base end of the load beam fixed to the base plate at a plurality of first welded points, a flexure including a read/write head and a wiring and fixed to the load beam at a plurality of second welded points, and a resin seat interposed between the load beam and the flexure so that the resin seat prevents the load beam and the flexure from hitting each other due to vibration of at least one of the load beam and the flexure.

Abstract: Various embodiments concern a suspension having a DSA structure on a gimbaled flexure. The suspension comprises a loadbeam and flexure attached thereto. The flexure comprises a pair of spring arms, a tongue located between the spring arms and structurally supported by the pair of spring arms, and a pair of struts. The struts are positioned respectively between the pair of spring arms and the tongue. The longitudinal axes of the struts are offset with respect to each other. The suspension further comprises a slider and a motor mounted on the flexure. The motor has a longitudinal axis that is parallel with the axes of the struts and perpendicular to a longitudinal axis of the loadbeam. Electrical activation of the motor bends the pair of struts to move the slider.

Abstract: A method of reworking a head suspension removes a slider from the head suspension by pressing a blade from a first side toward a second side in a longitudinal direction of the slider to solder ball bonding, stopping the second side of the slider in the longitudinal direction with a holding mechanism, and forcing the blade to bite and cut the solder ball bonding to remove the slider from the flexure. The solder ball bonding is cut without applying extra force to components of the head suspension except the slider. The method improves product yield.

Abstract: Various embodiments concern a suspension having a DSA structure on a gimbaled flexure. The suspension comprises a loadbeam and flexure attached thereto. The flexure comprises a pair of spring arms, a tongue located between the spring arms and structurally supported by the pair of spring arms, and a pair of struts. The struts are positioned respectively between the pair of spring arms and the tongue. The longitudinal axes of the struts are offset with respect to each other. The suspension further comprises a slider and a motor mounted on the flexure. The motor has a longitudinal axis that is parallel with the axes of the struts and perpendicular to a longitudinal axis of the loadbeam. Electrical activation of the motor bends the pair of struts to move the slider.

Abstract: Various embodiments concern a dual stage actuation suspension that comprises a loadbeam having a load point projection. The suspension further comprises a gimbal assembly having a point of contact that is in contact with the load point projection such that the gimbal assembly can gimbal about the load point projection. The gimbal assembly is cantilevered from the loadbeam and has an axis of rotation aligned with the load point projection and the point of contact. The suspension further comprises a pair of motors mounted on the gimbal assembly and positioned proximal of the point of contact. The pair of motors is mounted between a tongue and a pair of spring arms to rotate the tongue about the point of contact and the load point projection. The loadbeam further comprises a void into which the pair of motors extends.

Abstract: Disclosed is a suspension assembly for a disk drive that includes: a mounting plate having a through-hole extending from a top-side of the mounting plate to a bottom-side of the mounting plate; a microactuator mounting structure formed in the mounting plate; a microactuator mounted in the microactuator mounting structure; and a flexure attached to the bottom-side of the of mounting plate. The flexure includes: a metal layer; an insulator layer; a trace layer that includes a ground trace; and an opening, wherein the opening extends through the metal layer and the insulator layer to a gold-plated ground trace. A conductive epoxy is bonded to the microactuator and extends through the through-hole to bond to the flexure, wherein the epoxy extends through the opening of the flexure to the gold-plated ground trace of the flexure such that the microactuator is grounded to the flexure.

Abstract: In a hard disk drive, for the purpose of solving a problem that a mass of the tip of a VCM actuator increases, a primary resonance frequency lowers and a control band lowers in a case where a balance driving mechanism which damps a vibration during the driving of a microactuator is mounted, a damping unit using a displacement enlargement mechanism by resonance is disposed to obtain a sufficient damping effect with a small mass, thereby setting a resonance frequency of the damping unit to be higher than a frequency of a resonance peak of a damping object. The hard disk drive includes a micromotion actuator for micromotion displacement which drives a head-gimbal assembly, and a micromotion actuator for damping which drives the damping unit so that the micromotion displacement direction of a magnetic head and the displacement direction of a mount portion have opposite phases.

Abstract: A magnetic disc apparatus includes a micro actuator for two-stage actuator having a first stage and a second stage, and a slider mounted to the miro actuator and having a head element to perform recording and reproduction into/from a magnetic disc. A thermal actuator and a spring part are provided on a table, on which the slider is put. The thermal actuator is connected to the slider, and the thermal actuator includes a V-shaped thin film resistance.

Abstract: A high-aspect ratio motion limiter of a microactuator and a method for fabrication are disclosed. In one embodiment, at least one low-aspect ratio gap is created in a substrate of a microactuator of a hard disk drive. The low-aspect ratio gap is then utilized to facilitate the creation of a high-aspect ratio motion limiter in the substrate of the microactuator.

Abstract: Systems and methods for controlling the position of a magnetic head element and/or the magnetic head element to media spacing in a data storage device. At least one microactuator is embedded in a hard disk drive slider laterally displaced from the magnetic head element. Activation of the microactuator translates the magnetic head element in a lateral direction.

Abstract: A recording head for use in magnetic storage devices is disclosed. The recording head includes a transducer that is bi-directionally movable with respect to a surface of the magnetic storage medium, thereby enabling improved positioning of the transducer during recording head read and write operations. The recording head includes an interleaver assembly having a plurality of flexure assemblies. Electrostatic charges are employed in the flexure assemblies for selective actuation to provide a motional force to the transducer.

Abstract: This application discloses a hard disk drive, a head stack assembly, and a head gimbal assembly, each including a micro-actuator hinge configured to position a slider over a rotating disk surface with greater stroke sensitivity while reducing bending perpendicular to the disk surface. The micro-actuator hinge includes at least one micro-actuator, a hinge plate and at least one hinge plate cover, with the micro-actuator including a first region and a second region, each coupled between the hinge plate and the hinge plate cover.

Abstract: The present disclosure is directed to a micromachined rotary actuator constructed of a central portion and an outer portion at least partially surrounding the central portion and separated from the central portion by an in-plane gap. A plurality of arms are each connected at one end to the central portion and at another end to the outer portion so as to span the in-plane gap. The arms are constructed of a plurality of horizontally stacked materials positioned to enable the arms to bend in-plane when heated. Conductors are positioned within the actuator for heating the arms. Because of the rules governing abstracts, this abstract should not be used to construe the claims.

Abstract: A head gimbal assembly may comprise a slider, a micro-actuator attached to the slider, a flexure to mount the slider and the micro-actuator, and a suspension comprising a support region, a main portion, and a moving portion, wherein the flexure comprises a plurality of trace sets to electrically couple the micro-actuator and the slider, and wherein the plurality of trace sets are laminated generally parallel to each other.

Abstract: A dual-stage actuator disk drive suspension load beam has a recessed cavity formed in it into which the microactuator motor is partially or completely placed. The cavity may be formed by partially etching the load beam during the same etching process that creates the load beam from a sheet of stainless steel material. The partially etched load beam having a cavity for the microactuator motor has the advantages of a lower profile, improved inertial balancing of the suspension, and increased sway resonant frequency.

Abstract: Disclosed is a suspension assembly for a disk drive that includes: a mounting plate having a through-hole extending from a top-side of the mounting plate to a bottom-side of the mounting plate; a microactuator mounting structure formed in the mounting plate; a microactuator mounted in the microactuator mounting structure; and a flexure attached to the bottom-side of the of mounting plate. The flexure includes: a metal layer; an insulator layer; a trace layer that includes a ground trace; and an opening, wherein the opening extends through the metal layer and the insulator layer to a gold-plated ground trace. A conductive epoxy is bonded to the microactuator and extends through the through-hole to bond to the flexure, wherein the epoxy extends through the opening of the flexure to the gold-plated ground trace of the flexure such that the microactuator is grounded to the flexure.

Abstract: Disclosed is a suspension assembly for a disk drive that includes: a mounting plate having a top-side and a bottom-side; a microactuator mounting structure formed in the mounting plate; a microactuator mounted in the microactuator mounting structure in which the microactuator has a top-side and a bottom-side; and a flexure attached to the bottom-side of the of mounting plate and the microactuator. The flexure includes a pad layer and a through-hole, in which the through-hole extends through the pad layer. An epoxy on the pad layer bonds widely to the microactuator and extends through the through-hole.

Abstract: A microactuator element as an example of an electrical component is disposed on a metallic, electrically conductive plate member. A conductive resin member is disposed on a current-carrying part of the conductive plate member and a conduction part of the microactuator element. A thin porous plating layer of thickness 100 nm or less includes a large number of gold particles is formed in a region of a surface of the conductive plate member which covers the current-carrying part. The conductive resin member is secured to the conductive plate member through the thin porous gold plating layer and electrically connected to the conductive plate member.

Abstract: Devices for reading or writing electromagnetic information include a wafer substrate piece disposed between an electromagnetic transducer and an electrostrictive or piezoelectric actuator. The substrate piece is shaped as a rigid body adjoining the transducer and as a flexible element connecting the body and the actuator. To fabricate, at least one electrostrictive layer and many transducers are formed on opposite sides of a wafer that is then cut into rows containing plural transducers. The rows are processed from directions generally normal to the wafer surface upon which the transducers were formed, by removing material to form a head, flexures and a media-facing surface on the head. Conductive leads are formed on a back surface of flexures connecting the transducer with drive electronics. The flexures are aligned with forces arising from interaction with the media surface and from seeking various tracks, reducing torque and dynamic instabilities and increasing actuator access time.

Abstract: A suspension is provided for improving reliability in reading/writing of data by improving stiffness in a longitudinal direction of a flexure while realizing low pitch/roll stiffness of a tongue part. The suspension includes: a flexure, including two branched outrigger parts extending to the tip side of the flexure, and a tongue part for mounting a magnetic head slider, located between the outrigger parts and linked to the tip sides of the outrigger parts; a trace formed on the flexure; and a fixed part in which at least a part of a bent part formed in the trace is fixed to the tongue part.

Abstract: A high stroke sensitivity microactuated disk drive suspension includes a microactuator, a laminate of first and second outer layers and a plastic inner layer that define a base portion, a spring portion and a beam portion. The base portion has proximate and distal regions coupled by a segment of an outer layer and fixed to the microactuator for relative shifting of the beam portion to the base portion. The segment has a part that is locally arcuate and readily bendable during said shifting for low resistance to shifting giving the suspension high stroke sensitivity.

Abstract: A slider having a slider body is provided. An electrical connection is coupled to the slider body. A first actuator is coupled to the electrical connection and adapted to displace a first portion of the slider body. Additionally, a second heater is coupled to the electrical connection and adapted to displace a second portion of the slider body.

Abstract: A suspension for a HGA includes a base plate, a flexure having a suspension tongue for holding a slider, a load beam, and a hinge that are assembled together; wherein a strengthening plate is formed on the suspension tongue to increase stiffness of the suspension tongue. So the invention enable the use of the suspension with lower pitch and roll stiffness while preventing the suspension deformation. This ensures the slider mounted on the suspension have a good flying performance. The invention also discloses a HGA with such a suspension and a disk drive unit having such an HGA.

Abstract: A micro-actuator frame for a head gimbal assembly includes a bottom support adapted to be connected to a suspension of the head gimbal assembly, a top support adapted to support a slider of the head gimbal assembly, a pair of side arms that interconnect the bottom support and the top support, and a micro-actuator mounting structure provided to the bottom support. The micro-actuator mounting structure is constructed and arranged to maintain a substantially constant gap between the top support and the suspension of the head gimbal assembly in use.

Abstract: A head gimbal assembly includes a suspension including a suspension flexure. The suspension flexure includes a step plate mechanically formed in the suspension flexure. A micro-actuator is mounted to the step plate of the suspension flexure. The step plate is constructed and arranged to support the micro-actuator such that a substantially constant gap is maintained between a top support of the micro-actuator and the suspension flexure in use.

Abstract: A head assembly having a sensor element on the head assembly. Embodiments of the sensor element are configured to detect non-contact induced head-media interface instability, “onset of contact” or low level interference. The non-contact head-media instability or interference is detected based upon sensor feedback relating to excitation of the air bearing resonance modes of the slider body. In embodiments of the present invention, the sensor head assembly includes a microactuator which is energizable to microactuate the head or transducer elements on the head assembly.

Abstract: A HGA of the invention includes a micro-actuator, a slider and a suspension to support the micro-actuator and the slider. The suspension comprises a flexure for mounting the micro-actuator thereon, a suspension tongue connected to the flexure and an independent spacer sandwiched between the suspension tongue and the flexure to form a parallel gap between the suspension tongue and the micro-actuator. Also disclosed is a disk drive unit having the HGA.

Abstract: A dual stage, head stack assembly (15) for a disk drive (10) having a storage disk (32) is provided herein. The head stack assembly (15) includes an actuator arm (18), a coarse positioner (22), a transducer assembly (20), a base plate (26) and a fine positioner (24). The coarse positioner (22) moves the actuator arm (18). The transducer assembly (20) includes a load beam (50), a flexure (52) and a data transducer (54). The base plate (26) includes at least one positioner cavity (66) which receives the fine positioner (24). A control system (17) directs current to the coarse positioner (22) to move the actuator arm (18) to position the data transducer (54) at or near a target track (36) on a storage disk (32). The control system (17) also directs current to the fine positioner (24) to precisely position and maintain the data transducer on the target track (36). Because the fine positioner (24) independently moves only the transducer assembly (20), a higher system band-width is achieved.

Abstract: A head gimbal assembly (HGA) for a disk drive unit that includes a micro-actuator, a slider and a suspension to load the slider and the micro-actuator. The micro-actuator is provided with a vibration canceller that counteracts forces generated by activation of the micro-actuator when making fine head position adjustments. The vibration canceller incorporates PZT elements that generate counteracting forces in the bottom plate of the micro-actuator to cancel the vibration generated by the micro-actuator, thereby providing improved resonance performance for a disk drive unit.

Abstract: A direct-acting actuator is provided comprising a stator section (16), an attachment section (6) secured to the stator section, micro-beams (8, 10) extending from the attachment section, a rotor section (12) supported for swing motion by the micro-beams, a permanent magnet (18) disposed in the stator section, and a coil (4) disposed in the rotor section. Electric current is conducted through the coil in the magnetic field created by the permanent magnet for causing the micro-beams to be displaced for inducing swing motion of the rotor section. The actuator can be assembled to a small size, typically a width of 1-10 mm, a length of 1-10 mm, and a height of 0.1-5 mm.

Abstract: A head gimbal assembly includes a slider, a rotatable micro-actuator and a suspension to load the slider and the rotatable micro-actuator. The rotatable micro-actuator horizontally rotates the slider with a central portion of the slider as an axis, which includes a bottom plate to be connected with the suspension, two arm plates symmetrically disposed on the bottom plate with a central portion of the bottom plate as symmetry point and at least one piezoelectric pieces to be connected with the arm plates. Selectively, the amount of the arm plates can be four and four piezoelectric pieces to be connected with the four arm plates, respectively.

Abstract: A HGA includes a slider, a micro-actuator horizontally rotating the slider with a central portion of the slider as a rotation center, and a suspension to load the slider and the micro-actuator; wherein the micro-actuator comprises a support frame having a base, a moving plate, and a leading beam to connect the base and the moving plate; and at least one piezoelectric pieces to be connected with the base and the moving plate; wherein the leading beam has a pivot part to assist the horizontal swing of the slider. The pivot part has a narrower width than that of the leading beam. The suspension also includes a support means to support the base of the support frame on a suspension tongue portion. The invention also discloses a disk drive unit having the HGA.

Abstract: A transducer-level microactuator selectively positions a transducer portion of a slider radially with respect to circumferential data tracks of a rotatable disc. The slider includes a slider body having a leading edge and a trailing edge, a transducer body and a flexure body. The transducer body is spaced from the trailing edge of the sliding body and includes at least one transducer element. The flexure body extends from the trailing edge of the slider body and includes a first anchor point connected to the slider body and a second anchor point connected to the transducer body. The basecoat layer is deposited on the trailing edge of the slider body and substantially surrounds the flexure body wherein a gap separates the flexure body from the basecoat. A first actuation assembly is formed on the basecoat and a second actuation assembly is formed on the transducer body adjacent the slider body.

Abstract: A dual-stage actuator disk drive has both a rotary primary actuator and a rotary secondary actuator. When the primary actuator initiates a seek there are two torque components acting on the center of mass of the secondary actuator's moving portion. The center of rotation of the moving portion is located at an optimal location relative to the center of mass of the moving portion, which results in cancellation of the two torque components and a secondary actuator that has essentially no resonant frequency in response to a seek by the primary actuator. If the optimal location can not be achieved because of assembly tolerances, then the center of rotation is placed at a distance at least as great as the assembly tolerance from the optimal location.

Abstract: A head suspension for supporting a head slider over a disk in a dynamic storage device and providing precise movement of the head slider relative to tracks on the disk. The head suspension includes a load beam, a flexure having a slider mounting region, and a dimple interface transmitting a load beam force to the slider mounting region. The head suspension further includes a microactuator mounted to the load beam. Movement of the microactuator is transmitted through the dimple interface by action of frictional forces at the dimple interface so as to cause movement of the slider mounting region transverse to tracks on the disk. A method of precisely moving a head slider supported by a head suspension includes providing and driving a microactuator configured to transmit movement of the microactuator to a slider mounting region through a dimple interface by action of frictional forces at the dimple interface.

Abstract: A recording head for use in magnetic storage devices is disclosed. The recording head includes a transducer that is bi-directionally movable with respect to a magnetic medium surface of the magnetic storage medium, thereby enabling improved positioning of the transducer during read and write operations of the transducer. The recording head further includes a slider body and an interleaver assembly that is interposed between the transducer and the slider body. The interleaver assembly includes a flexure assembly having a plurality of resilient flexure beams. A motor assembly incorporated into the recording head can be selectively actuated to cause movement of the flexure assembly and corresponding movement of a portion of the interleaver assembly and the transducer body. The flexure assembly is configured to constrain motion of the transducer in vertical and horizontal directions with respect to the magnetic medium surface to allow for enhanced transducer positioning.

Abstract: A moving mechanism using a piezoelectric actuator is attached by an adhesive with adhesive parts of a constant area between a piezoelectric element and a slider and between the piezoelectric element and a suspension. A movable part, serving as the slider, is moved by the piezoelectric actuator. A support part, serving as a gimbal part of a suspension, supports the piezoelectric actuator. At least one of the movable part and the support part is fixed to the piezoelectric element. At least one of the piezoelectric element, the movable part and the support part has a bonding surface that is defined by a level difference.

Abstract: A micro-actuator assembly, which includes a first micro-actuator. The first micro-actuator includes: Two pivot spring pairs coupling to first stator and second stator. Two flexure spring pairs and pitch spring pair coupling to central movable section, which includes signal pair paths coupling to read-write head of a slider. The central movable section positions read-write head and conducts read-write head signaling. First micro-actuator electrical stimulus is through some of its springs. Micro-actuator assembly may include second micro-actuator with third stator and fourth stator interacting with central movable section. The second micro-actuator may also provide motion sensing, possibly indicating collision with the rotating disk surface being accessed. The invention includes head gimbal assemblies, actuator arms, actuator assemblies, voice coil assemblies and hard disk drives containing various embodiments of these micro-actuator assemblies.

Abstract: A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.