Combined With Inductive Write Head In Piggyback/merged Configuration Patents (Class 360/317)
  • Patent number: 8407882
    Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: April 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota
  • Patent number: 8393074
    Abstract: A method of manufacturing a thermally-assisted magnetic recording head includes: providing a light source unit including a laser diode; providing a slider having a thermally-assisted magnetic recording head section thereon, the thermally-assisted magnetic recording head section including a magnetic pole, an optical waveguide, and a plasmon generator, the magnetic pole and the optical waveguide both extending toward an air bearing surface, the plasmon generator being located between the magnetic pole and the optical waveguide; driving the laser diode to allow a light beam to be emitted therefrom, the light beam including both a TE polarization component and a TM polarization component; performing an alignment between the light source unit and the thermally-assisted magnetic recording head section, based on a light intensity distribution of the TE polarization component in the light beam which has been emitted from the laser diode and then passed through the optical waveguide; and bonding the light source unit
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: March 12, 2013
    Assignees: TDK Corporation, Sae Magnetics (H.K) Ltd.
    Inventors: Seiichi Takayama, Koji Shimazawa, Shinji Hara, Yasuhiro Ito, Nobuyuki Mori, Ryo Hosoi, Kazuaki Takanuki, Youichi Ando, Chimoto Sugiyama
  • Patent number: 8381392
    Abstract: A method, including depositing a layer of material onto a base portion of a wafer, is disclosed. The layer of material has a first surface adjacent the base portion. The method also includes depositing a pattern of masking material onto a portion of a second surface of the layer. Material from the layer of material that is unprotected by the pattern of masking material is removed from the layer of material. By removing such material a portion of the layer of material is suspended from the base portion.
    Type: Grant
    Filed: May 11, 2010
    Date of Patent: February 26, 2013
    Assignee: Seagate Technology LLC
    Inventors: Jie Zou, Kaizhong Gao
  • Patent number: 8381391
    Abstract: A method for providing a magnetic recording transducer is described. The method includes providing a pinned layer for a magnetic element. In one aspect, a portion of a tunneling barrier layer for the magnetic element is provided. The magnetic recording transducer annealed is after the portion of the tunneling barrier layer is provided. The annealing is at a temperature higher than room temperature. A remaining portion of the tunneling barrier layer is provided after the annealing. In another aspect, the magnetic transducer is transferred to a high vacuum annealing apparatus before annealing the magnetic transducer. In this aspect, the magnetic transducer may be annealed before any portion of the tunneling barrier is provided or after at least a portion of the tunneling barrier is provided. The annealing is performed in the high vacuum annealing apparatus. A free layer for the magnetic element is also provided.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: February 26, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Chando Park, Qunwen Leng, Mahendra Pakala
  • Patent number: 8375564
    Abstract: A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: February 19, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Danning Yang, Weimin Si, Dujiang Wan, Yun-Fei Li, Lijie Guan, Ming Jiang
  • Patent number: 8371019
    Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: February 12, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Sue Siyang Zhang, Yi Zheng, Qiping Zhong, Honglin Zhu
  • Patent number: 8353098
    Abstract: A method of manufacturing a perpendicular magnetic recording head capable of easily and accurately forming a main magnetic-pole layer having a shape suitable for concentrating a magnetic flux is provided. A nonmagnetic layer having a recessed section (a first recessed section and a second recessed section) is formed, and then an additional nonmagnetic layer is formed on an inner surface of the recessed section. Then, a magnetic layer is formed in the recessed section formed with the additional nonmagnetic layer, and then the magnetic layer is cut to form an air bearing surface, so as to form the main magnetic-pole layer.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: January 15, 2013
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
  • Patent number: 8349195
    Abstract: A method and system provide a magnetoresistive structure from a magnetoresistive stack that includes a plurality of layers. The method and system include providing a mask that exposes a portion of the magnetoresistive stack. The mask has at least one side, a top, and a base at least as wide as the top. The method and system also include removing the portion of the magnetoresistive stack to define the magnetoresistive structure. The method and system further include providing an insulating layer. A portion of the insulating layer resides on the at least one side of the mask. The method and system further include removing the portion of the insulating layer on the at least one side of the mask and removing the mask.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: January 8, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Weimin Si, Liubo Hong, Honglin Zhu, Winnie Yu, Rowena Schmidt
  • Patent number: 8351162
    Abstract: Embodiments of the invention reduce the throat height of a single pole type head with high accuracy. In one embodiment, a head with an electro lapping guide for controlling a write head's throat height during air bearing surface processing is made. Air bearing surface processing is performed using the electro lapping guide. For a read head, processing is performed using the read head itself or an electro lapping guide for the read head so that both the throat height of write head and the element height of read head are controlled.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: January 8, 2013
    Assignee: HGST Netherlands BV
    Inventors: Kimitoshi Etoh, Hisashi Kimura, Isao Nunokawa, Tomohiro Okada
  • Patent number: 8347488
    Abstract: A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng
  • Patent number: 8347489
    Abstract: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng, Honglin Zhu
  • Patent number: 8341826
    Abstract: A method and system for fabricating magnetic transducer are described. The method and system include providing a main pole having a bottom, a top wider than the bottom, and a top bevel. A nonmagnetic gap covering the main pole is provided. A portion of the nonmagnetic gap resides on the top of the main pole. A first seed layer is provided. At least a portion of the first seed layer covers the portion of the nonmagnetic gap on top of the main pole. A portion of the nonmagnetic gap on the magnetic recording transducer is removed after the first seed layer is provided. A second seed layer is provided after the portion of the nonmagnetic gap is removed. The second seed layer covers at least the portion of the first seed layer. A wrap-around shield layer is provided on the second seed layer.
    Type: Grant
    Filed: April 12, 2010
    Date of Patent: January 1, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hai Jiang, Yunhe Huang, Jinwen Wang, Yun-Fei Li, Ying Hong
  • Patent number: 8341825
    Abstract: A thermally-assisted magnetic head includes a slider including an air bearing surface (ABS) and a waveguide with a core that extends from a light entering surface to the ABS, and a laser diode (LD) unit attached to the light entering surface. The LD unit faces the light entering surface, and a photo detector faces the ABS. A polarizer that only transmits light having a polarization component orthogonal to a polarization direction of linearly polarized laser light is disposed between the ABS and the photo detector. An LD of the LD unit is activated, and the linearly polarized laser light enters the core from the light entering surface. Light radiated from the ABS enters the polarizer, and an alignment of the slider and the LD unit is performed while the photo detector detects the light transmitted through the polarizer.
    Type: Grant
    Filed: November 16, 2010
    Date of Patent: January 1, 2013
    Assignee: TDK Corporation
    Inventors: Shinji Hara, Koji Shimazawa, Eiji Komura, Tsutomu Chou, Seiichi Takayama
  • Patent number: 8333008
    Abstract: A method and system for fabricating a perpendicular magnetic recording head, and the head so formed, are described. The method includes depositing an underlayer directly on an insulating layer. The underlayer preferably includes at least one of a nonferromagnetic metal, silicon oxide, and silicon nitride. A pole layer, which has a pole removal rate, is provided on the underlayer. The method and system further include forming a perpendicular magnetic recording pole from the pole layer. The perpendicular magnetic recording pole has a top and a bottom that is narrower than the top. The process of forming the perpendicular magnetic recording pole further includes removing a portion of the pole layer such that a pole removal rate for the pole layer is less than or substantially equal to a removal rate of the underlayer during the removing step.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: December 18, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Kyusik Sin, Lei Wang, Yingjian Chen
  • Patent number: 8322023
    Abstract: A method for fabricating a magnetic transducer is described. The magnetic transducer includes a pole having a pole tip and a flared region. The method Includes providing a first mask layer on the pole and providing a second mask layer on the first mask layer. The first mask layer is soluble in a predetermined solution and has a first thickness. The second mask layer has a second thickness greater than the first thickness. The method also includes forming a mask from the first mask layer and the second mask layer. The step of forming the mask layer includes using the predetermined solution. The mask has a pattern that exposes a portion of the pole tip and covers a portion of the flared region. The method also includes providing a wrap-around shield on at least the pole tip.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: December 4, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Xianzhong Zeng, Yunhe Huang, Ling Wang, Hai Sun
  • Patent number: 8322022
    Abstract: A method for providing energy assisted magnetic recording (EAMR) heads is described. The method comprises bonding a plurality of lasers to a first substrate. The plurality of lasers corresponds to the plurality of EAMR heads and is for providing energy to a plurality of EAMR transducers. The method further comprises fabricating the plurality of EAMR transducers for the plurality of EAMR heads on a second substrate, bonding the first substrate to the second substrate such that the plurality of EAMR transducers and the plurality of lasers reside between the first substrate and the second substrate, removing at least one of the first substrate and the second substrate, and separating a remaining substrate into the plurality of EAMR heads.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: December 4, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ge Yi, Hongxing Yuan, Ming Sun, Dujiang Wan
  • Patent number: 8323517
    Abstract: A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.
    Type: Grant
    Filed: April 2, 2010
    Date of Patent: December 4, 2012
    Assignee: TDK Corporation
    Inventors: Hisayoshi Watanabe, Hideyuki Yatsu, Masachika Hashino, Koichi Otani
  • Patent number: 8286333
    Abstract: A method of fabricating a recording head includes depositing an insulator material onto at least a portion of a first member, wherein the insulator material forms an insulator film having a film thickness. The method further includes depositing a writer pole material onto the insulator film, wherein the writer pole material forms a writer pole member, and wherein the insulator film is between the writer pole member and a contact layer. Further, in some embodiments, the film thickness determines the distance between the writer pole member and the first contact member and also determines the distance between the writer pole member and the second contact member.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: October 16, 2012
    Assignee: Seagate Technology LLC
    Inventors: Nurul Amin, Ibro Tabakovic, Eric S. Linville, Ming Sun
  • Patent number: 8286334
    Abstract: Various embodiments of the present invention pertain to manufacturing pre-sliders by annealing to saturation. According to one embodiment, pre-sliders are lapped to prepare for air bearing surfaces for the pre-sliders. The pre-sliders are annealed to saturation to level off the amount of overcoat expansion for the pre-sliders.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: October 16, 2012
    Assignee: Hitachi Global Storage Technologies, Netherlands B.V.
    Inventors: Damaris Davis, Hardayal S. Gill, Kenneth D. MacKay, Xiao Z. Wu
  • Patent number: 8276258
    Abstract: A method and system provide a magnetic transducer that includes an underlayer and a first nonmagnetic layer on the underlayer. The method and system include providing a first trench in the first nonmagnetic layer. The first trench has at least one edge corresponding to at least one side shield. The method and system also include providing a second nonmagnetic layer in the first trench and providing a second trench in the second nonmagnetic layer. The method and system include providing the main pole. At least part of the main pole resides in the second trench. The method and system further include removing at least a portion of the second nonmagnetic layer between the edge(s) and the main pole. The method and system also provide the side shield(s) in the first trench. The side shield(s) extend from at least an air-bearing surface location to not further than a coil front location.
    Type: Grant
    Filed: August 26, 2008
    Date of Patent: October 2, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai
  • Patent number: 8276257
    Abstract: A method and apparatus for providing a write head having well-defined, precise write head pole tips. A coplanar write head pole tip processing method provides a thin-film magnetic write head pole tip layer and defines first and second pole tips from the pole tip layer. When the pole tips are provided on a write head, a write gap can be defined using ion milling, E-beam lithography, FAB or can be deposited. The write head pole tips can be used in conjunction with read heads by merging a read head with a write head or a read head can be bonded to a write head in a piggybacked fashion.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: October 2, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Terence Tin-Lok Lam, Vladimir Nikitin, Changqing Shi, Samuel Yuan
  • Patent number: 8270122
    Abstract: A magnetic recording read head is provided capable of achieving high reproduction output, resolution, and SNR, even at a high linear density. There is also provided a magnetic recording and reproducing device capable of achieving sufficient error bit rate. The magnetic recording read head includes a differential read head and a write head. The differential read head has a multilayer structure formed by laminating a first magnetoresistive sensor having a first free layer, a differential gap layer, and a second magnetoresistive sensor having a second free layer. Outside the multilayer structure, a pair of electrodes and a pair of magnetic shields are provided respectively. A ratio (Gl/bl) of an inside distance (Gl) between the first and second free layers to a bit length (bl) is set to 0.6 or more and 1.6 or less.
    Type: Grant
    Filed: February 4, 2009
    Date of Patent: September 18, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Masato Shiimoto, Takeshi Nakagawa, Hiroyuki Katada, Naoto Ito, Kenichi Meguro
  • Patent number: 8240024
    Abstract: In one general embodiment, a method for fabricating magnetic structures using post-deposition tilting includes forming a thin film magnetic transducer structure on a substantially planar portion of a substrate such that a plane of deposition of the thin film transducer structure is substantially parallel to a plane of the substrate. Additionally, the thin film transducer structure is caused to tilt at an angle relative to the plane of the substrate. The thin film transducer is fixed at the angle after being tilted.
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: August 14, 2012
    Assignee: International Business Machines Corporation
    Inventors: Robert Glenn Biskeborn, Laurent Dellmann, Michel Despont, Philipp Herget, Pierre-Olivier Jubert
  • Patent number: 8240025
    Abstract: Provided is a method and apparatus to manufacture a thermally-assisted magnetic recording head in which a light source unit including a light source and a slider including an optical system are joined. The method comprises steps of: adhering by suction the light source unit with a back holding jig; bringing the light into contact with a slider back surface; applying a load to a load application surface of the light source unit by a loading means to bring a joining surface of the light source unit into conformity with the slider back surface; positioning the light source unit apart from the slider, and then aligning the light source with the optical system; bringing again the light source unit into contact with the slider; and applying a load again to the load application surface.
    Type: Grant
    Filed: September 23, 2010
    Date of Patent: August 14, 2012
    Assignee: TDK Corporation
    Inventors: Koji Shimazawa, Seiichi Takayama, Nobuyuki Mori, Yoshihiro Tsuchiya, Shinji Hara
  • Patent number: 8230582
    Abstract: One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.
    Type: Grant
    Filed: January 11, 2010
    Date of Patent: July 31, 2012
    Assignee: HGST Netherlands B.V.
    Inventors: Christian Rene Bonhote, Jila Tabib, Dennis Richard Mckean, Daniel Wayne Bedell, Jyh-Shuey Lo, Heiu Lam, Kim Y Lee
  • Patent number: 8225486
    Abstract: In a manufacturing process of a head slider, a plurality of head elements are formed on a wafer, each head element comprising: a return pole, a coil, and a main pole. The wafer is cut into respective head elements so that individual head sliders are formed. A ratio of an amplitude of an electrical signal applied to the coil of the write head on the head slider to an amplitude of output from an independent magnetic field sensor not embedded in the head slider is calculated, where the independent magnetic field sensor is disposed near the main pole so as to be opposed to the main pole across the air bearing surface, and where the ratio is calculated while a displacement between the main pole and the magnetic field sensor is swept. A flare point height of the main pole is determined from the calculated amplitude ratio.
    Type: Grant
    Filed: June 18, 2009
    Date of Patent: July 24, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Toshio Takahashi, Akihiro Namba, Masafumi Mochizuki
  • Patent number: 8225488
    Abstract: A method for providing a PMR pole in a magnetic recording transducer comprises providing a mask on an intermediate layer, the mask including a line having at least one side, providing a hard mask on the mask, a first portion of the hard mask residing on the at least one side and a second portion residing on a surface of the intermediate layer, the hard mask including a dry-etchable layer and a high removal ratio layer on the dry-etchable layer, removing at least part of the first portion of the hard mask, at least a portion of the line being exposed, removing the line, thereby providing an aperture in the hard mask corresponding to the line, forming a trench in the intermediate layer under the aperture using a removal process, and providing the PMR pole, at least a portion of the PMR pole residing in the trench.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: July 24, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Yun-Fei Li, Ying Hong
  • Patent number: 8218405
    Abstract: Embodiments of the present invention provide a technique for projecting both a write element portion in writing and a read element portion in reading, and controlling a projecting distance of each write element and read element. According to one embodiment, a light absorbing member and a thermally expanding member are formed near a read element, and light is irradiated to the light absorbing member, thereby a read element is projected. Alternatively, light absorbing members, which absorb light having different wavelengths from each other, and thermally expanding members are formed near a write element and near the read element respectively, and a wavelength or intensity of light to be irradiated is changed, thereby a projecting distance of each of the write element and the read element is individually optionally controlled.
    Type: Grant
    Filed: April 14, 2009
    Date of Patent: July 10, 2012
    Assignee: HGST Netherlands B.V.
    Inventors: Masayuki Kurita, Toshiya Shiramatsu, Irizo Naniwa
  • Patent number: 8209847
    Abstract: A method of fabricating a magnetic head is provided. The method of fabricating the magnetic head includes forming a writing head on a writing head area, forming an insulating layer having an inclined surface, forming a reading head on the inclined surface of the insulating layer, and forming an air bearing surface by polishing the surfaces of the writing head. Forming the reading head includes forming a first shield layer, a reading sensor, and a second shield layer.
    Type: Grant
    Filed: April 3, 2008
    Date of Patent: July 3, 2012
    Assignee: Seagate Technology International
    Inventor: Kyusik Sin
  • Patent number: 8208214
    Abstract: A magnetic sensing section is constituted by a magneto-resistive device in which a fixed magnetization layer, a non-magnetic layer, and a magnetization-free layer are deposited in that order on a first buffer layer that is deposited on a magnetic layer. A second buffer layer sandwiches the magnetic sensing section, and a biasing layer which covers right and left sides of the magnetic sensing section. The second buffer layer is deposited on the magnetic layer with a nonconductor layer interposed therebetween. A near field light generation section constituted by a second magnetic layer, a dielectric layer, and a metal layer is formed on a surface of the second buffer layer not adjacent to the nonconductor layer. The resultant magnetic sensor device can efficiently perform photo-assisted reproduction of information from a magnetic recording medium using a magnetic reproduction head or a magnetic reproducer.
    Type: Grant
    Filed: March 27, 2007
    Date of Patent: June 26, 2012
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Noboru Iwata, Shintaro Miyanishi, Tomoki Ono, Yoshiteru Murakami
  • Patent number: 8201320
    Abstract: A method for manufacturing a magnetic write head having a leading magnetic shield and a trailing magnetic shield that are arranged to prevent the lost of magnetic write field to the trailing magnetic shield. The write head includes a non-magnetic step layer that provides additional spacing between the trailing magnetic shield and the write pole at a region removed from the air bearing surface.
    Type: Grant
    Filed: December 17, 2009
    Date of Patent: June 19, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Donald G. Allen, Yingjian Chen, Andrew Chiu, Liubo Hong, Wen-Chien D. Hsiao, Edward H. P. Lee, Fenglin Liu, Katalin Pentek, Kyusik Shin, Yi Zheng, Qiping Zhong, Honglin Zhu
  • Patent number: 8201321
    Abstract: Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part; forming a non-magnetic layer so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.
    Type: Grant
    Filed: December 10, 2010
    Date of Patent: June 19, 2012
    Assignees: TDK Corporation, SAE Magnetics (H.K.) Ltd.
    Inventors: Naoto Matono, Tatsuya Harada
  • Patent number: 8191238
    Abstract: A magnetic writer comprises a write pole, a substrate and a non-magnetic, oxygen-free buffer material. The write pole has a leading edge, a trailing edge, a first side and second side. The substrate is at the leading edge of the write pole. The non-magnetic, oxygen-free buffer material is located between the write pole and the substrate.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: June 5, 2012
    Assignee: Seagate Technology LLC
    Inventors: Alexandre Vasilievish Demtchouk, Thomas Roy Boonstra, Michael Christopher Kautzky
  • Patent number: 8191237
    Abstract: A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.
    Type: Grant
    Filed: May 21, 2009
    Date of Patent: June 5, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Ge Yi, Dujiang Wan, Lei Wang, Xiaohai Xiang, Ming Jiang
  • Patent number: 8186040
    Abstract: A method in one embodiment includes forming a resist structure above an upper surface of a substrate, wherein a portion of the upper surface of the substrate is a shaping layer, wherein the resist structure has an undercut; depositing a layer of magnetic material above exposed regions of the substrate, wherein a portion of the layer of magnetic material tapers towards the substrate as it approaches the undercut; removing the resist structure; and forming a write pole above the layer of magnetic material. Additional methods are disclosed.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: May 29, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Amanda Baer, Wen-Chien David Hsiao, Vladimir Nikitin, Trevor W. Olson, Yuan Yao
  • Patent number: 8171618
    Abstract: A method of forming a write pole for a magnetic recording device is provided. The method comprises providing a layer of magnetic material covered with a secondary hard mask layer and a patterned primary hard mask, milling at a first milling angle to transfer a pattern from the patterned primary hard mask to the secondary hard mask, and milling at a second milling angle to transfer the pattern from the secondary hard mask to the layer of magnetic material to form the write pole. The second milling angle is greater than the first milling angle. The method further comprises milling at a third milling angle to adjust a side wall angle of the write pole to about a desired side wall angle, and milling at a fourth milling angle to reduce a track width of the write pole to a desired track width.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: May 8, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lei Wang, Ge Yi
  • Patent number: 8166632
    Abstract: A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: May 1, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Liubo Hong, Yong Shen, Donghong Li
  • Patent number: 8166631
    Abstract: A method provides a magnetic transducer that includes an underlayer and a nonmagnetic layer on the underlayer. The method includes providing a plurality of trenches in the nonmagnetic layer. A first trench of corresponds to a main pole, while at least one side trench corresponds to at least one side shield. The method also includes providing mask covering the side trench(es) and providing the main pole. At least a portion of the main pole resides in the first trench. The method also includes removing at least a portion of the nonmagnetic layer residing between the side trench(es) and the main pole. The method also includes providing at least one side shield. The shield(s) extend from at least an air-bearing surface location to not further than a coil front location.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: May 1, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai, Kevin K. Lin
  • Patent number: 8161627
    Abstract: A method in one embodiment includes forming an electric lapping guide layer; forming a write pole; forming a first gap layer over the write pole; masking a portion of the first gap layer for defining a window over the write pole and at least a portion of the electric lapping guide layer; and forming a bump over the write pole in the window. Additional methods and systems are presented.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: April 24, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Christian Rene Bonhote, Jeffrey S. Lille, Vladimir Nikitin, Aron Pentek, Neil Leslie Robertson
  • Patent number: 8146236
    Abstract: A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: April 3, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Liubo Hong, Honglin Zhu, Yun-Fei Li, Yingjian Chen
  • Patent number: 8141235
    Abstract: A method for manufacturing a perpendicular magnetic recording transducer is described. A metallic underlayer, an insulator on the metallic underlayer, and a metal mask on the insulator are provided. The metal mask has an aperture therein. A trench is formed in the insulator. The trench's bottom is narrower than its top and includes part of the metallic underlayer. The top has a width of not more than 0.28 micron. A nonmagnetic seed layer that substantially covers at least the trench bottom and sides and that has a thickness of at least five hundred Angstroms is provided. A perpendicular magnetic pole material is plated on at least part of the seed layer. A CMP is performed, removing part of the perpendicular magnetic pole material. A remaining portion of the perpendicular magnetic pole material forms a perpendicular magnetic recording pole. The nonmagnetic seed layer is a stop layer for the CMP.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: March 27, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventor: Lei Larry Zhang
  • Patent number: 8139322
    Abstract: A magnetic recording head includes: a main magnetic pole; a laminated body; and a pair of electrodes operable to pass a current through the laminated body. The laminated body includes a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer. A lamination direction of the laminated body is substantially parallel to a medium moving direction. In a first direction parallel to an air bearing surface and perpendicular to the lamination direction, the laminated body has a protruding portion that protrudes beyond an end of a surface of the main magnetic pole facing the laminated body.
    Type: Grant
    Filed: May 20, 2008
    Date of Patent: March 20, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenichiro Yamada, Hitoshi Iwasaki, Junichi Akiyama, Masayuki Takagishi, Tomomi Funayama, Masahiro Takashita, Mariko Shimizu
  • Patent number: 8136228
    Abstract: A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: March 20, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Aron Pentek, Sue Siyang Zhang, Yi Zheng
  • Patent number: 8117736
    Abstract: A method of lapping a magnetic head slider includes a step of lapping a lapping surface of a row bar provided with a plurality of MR read head elements arranged along at least one line, a step of obtaining at least one output signal from at least one of the plurality of MR read head elements of the row bar during lapping, the at least one output signal corresponding to element resistance, a step of detecting at least one peak value of the obtained at least one output signal, and a step of controlling an amount of lapping of the row bar depending upon the detected at least one peak value.
    Type: Grant
    Filed: December 11, 2008
    Date of Patent: February 21, 2012
    Assignee: TDK Corporation
    Inventors: Naoki Ohta, Takeo Kagami
  • Patent number: 8117738
    Abstract: A perpendicular magnetic recording (PMR) head is fabricated with a self-aligned pole tip shielded laterally by a separated pair of side shields and shielded from above by an upper shield. The side shields are formed from a shield layer by a RIE process characterized by a mask and gases producing a variety of etch rates. The differential in etch rates maintains the opening dimension within the mask and allows the formation of a wedge-shaped trench within the shield layer that then separates the layer into two shields. The pole tip is then plated within the trench and an upper shield is formed above the side shields and pole.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: February 21, 2012
    Assignee: Headway Technologies, Inc.
    Inventors: Cherng-Chyi Han, Min Li, Fenglin Liu, Jiun-Ting Lee
  • Patent number: 8117737
    Abstract: A manufacturing method for a magnetic head includes the steps of: forming a structure on a lower shield, the structure including a lower gap, a main magnetic pole and first and second side gaps; forming first and second side shields; forming an upper gap; and forming an upper shield. In the step of forming the structure, an initial lower gap layer is formed on the lower shield, the initial lower gap layer including a pre-lower-gap portion, and two to-be-removed portions that are located on opposite sides of the pre-lower-gap portion. Then, a protrusion including the main magnetic pole and the first and second side gaps is formed on the pre-lower-gap portion. With the top surface of the protrusion covered with a mask, the initial lower gap layer is etched in part to thereby form the lower gap.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: February 21, 2012
    Assignee: TDK Corporation
    Inventors: Hisayoshi Watanabe, Masachika Hashino, Michitoshi Tsuchiya, Koichi Otani, Tatsuhiro Nojima, Tsutomu Nishinaga, Hideyuki Ukita
  • Patent number: 8108985
    Abstract: A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.
    Type: Grant
    Filed: November 2, 2007
    Date of Patent: February 7, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Yi Zheng, Yimin Hsu, Wen-Chien David Hsiao, Ming Jiang, Aron Pentek, Sue Siyang Zhang, Edward Hin Pong Lee, Hung-Chin Guthrie, Ning Shi, Vladimir Nikitin, Prabodh Ratnaparkhi, Yinshi Liu
  • Patent number: 8108986
    Abstract: A method for manufacturing a magnetic write head for perpendicular magnetic recording, the write head having a write pole with an increased bevel (taper) angle. The write pole is constructed by forming a mask structure over a magnetic write pole material, and then performing a combination of sweeping or rotation with static (non-rotating, non-sweeping) ion milling at an angle relative to normal. The ion milling is performed while moving the wafer laterally within the ion milling tool to ensure that the ion milling is performed uniformly across the wafer during static milling.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: February 7, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventor: Yinshi Liu
  • Patent number: 8099855
    Abstract: Methods of recording head fabrication are provided to fabricate a region of separation material between a write pole and a shield of a write head that forms a controlled spacing between the write pole and the shield of the write head. The method comprises forming a mask structure having an opening exposing a write pole of the write head and forming separation material above the portions of the write pole exposed by the opening. The method further comprises removing the mask structure and forming a shield of the write head above the separation material. The separation material forms a spacing between the write pole and the shield, which controls the amount of flux from the write pole absorbed by a shield (e.g., a wrap around shield) of the write head.
    Type: Grant
    Filed: December 16, 2007
    Date of Patent: January 24, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
    Inventor: Quang Le
  • Patent number: 8091209
    Abstract: A magnetic sensor includes a sensor stack having a first magnetic portion, a second magnetic portion, and a barrier layer between the first magnetic portion and the second magnetic portion. The first magnetic portion and/or the second magnetic portion comprises a multilayer structure including a first magnetic layer having a positive magnetostriction adjacent to the barrier layer, a second magnetic layer, and an intermediate layer between the first magnetic layer and the second magnetic layer. The magnetic sensor exhibits a magnetoresistive ratio of at least about 62% with a resistance-area (RA) product of about 0.45 ?ยท?m2.
    Type: Grant
    Filed: October 3, 2007
    Date of Patent: January 10, 2012
    Assignee: Seagate Technology LLC
    Inventors: Zheng Gao, Dimitar V. Dimitrov, Song S. Xue