Abstract: Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes a mirror position sensor associated with the movable MEMS mirror and that generates an analog output as a function of angular position of the movable MEMS mirror. An analog to digital converter converts the analog output from the mirror position sensor to a digital mirror sense signal. Failure detection circuitry calculates a difference between the digital mirror sense signal at a first instant in time and the digital mirror sense signal at a second instant in time, determines whether the difference exceeds a threshold, and indicates failure of the movable MEMS mirror as a function of the difference failing to exceed the threshold.

Abstract: Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.

Abstract: The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.

Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode. The first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an upper surface to a lower surface of the first electrode.

Abstract: The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.

Abstract: Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.

Abstract: According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.

Abstract: According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.

Abstract: A driving device for a piezoelectric actuator supplies charges and discharges the piezoelectric actuator through a charging switch and a discharging switch, respectively. The charging switch is repeatedly turned on and off thereby to charge and expand the piezoelectric actuator. The discharging switch is repeatedly turned on and off thereby to discharge and contract the piezoelectric actuator. The discharging switch is kept ON especially during a period from when the discharging switching control is terminated to when the charging switching control is started next. Thus, the piezoelectric voltage at the start of the next driving can be made substantially 0V.

Abstract: Disclosed are a method, device, and system for a microelectromechanical (MEM) device control system that can control the operation of a MEM device. The system can include a microelectromechanical device and a control circuit. The micromechanical device can include a moveable member coupled to an electrical terminal, a sensor, responsive to a movement of the moveable member, can output a sensor signal based on the movement of the moveable member, and an actuating electrode for receiving a control signal. The control circuit can be responsive to the signals output by the sensor and outputs the control signal to the actuating electrode.

Abstract: A piezoelectric actuator apparatus which is connectable to a power supply includes: a piezoelectric actuator which is provided with a plurality of piezoelectric elements each of which is sandwiched by two types of electrodes; a drive device which is connected to the power supply to drive each of the piezoelectric elements by changing a voltage between the two types of electrodes; a comparison section which compares a predetermined reference value with one of a supply voltage from the power supply to the drive device and an electric current flowing between the power supply and the drive device under the condition that the drive device applies the voltage to at least one piezoelectric element of the piezoelectric elements; and a judgement section which judges a degradation degree of dielectric strength voltage for the at least one piezoelectric element based on a comparison by the comparison section.

Abstract: A semiconductor device applies a hold voltage Vhold to an upper electrode of an electrostatic actuator and a ground voltage to a lower electrode. After the semiconductor device sets the voltage of the lower electrode to a test voltage Vtest, it eliminates the hold voltage Vhold from the upper electrode and places the voltage of the upper electrode in a high impedance state. The potential difference between the upper electrode and the lower electrode is set to Vhold?Vtest=Vmon. Thereafter, the voltage of the lower electrode is returned to the ground voltage. Whether the electrostatic actuator is placed in an open state or in a closed state is determined by measuring the capacitance between the electrodes based on the amount of drop of the voltage of the upper electrode due to capacitance coupling at the time.

Abstract: The invention relates to a high-frequency integrated circuit requiring ESD protection for a circuit node. One or more metallic layer is deposited within the integrated circuit and patterned to form a transmission line. The metallic layers are generally already present in the integrated circuit for signal routing. The transmission line is coupled between the circuit node and a terminal of an ESD protection device, with a transmission line return conductor coupled to a high-frequency ground. The transmission line is formed with an electrical length that transforms the impedance of the ESD protection device substantially into an open circuit at the circuit node at an operational frequency of the integrated circuit. The other terminal of the ESD protection device is coupled to the high-frequency ground.

Abstract: A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Abstract: Systems and methods for operating piezoelectric switches are disclosed. A piezoelectric switching system includes a first actuator, a second actuator, and a bias voltage source. The first actuator has a first body electrode, a first gate electrode, and a first contact region. The second actuator has a second body electrode, a second gate electrode, and a second contact region. The first and second contact regions are separated by a gap. The bias voltage source applies a bias voltage to the body electrodes. The bias voltage is lower in magnitude than an actuation voltage for the switch. The gate electrodes receive a switching voltage. The switching voltage causes at least one of the first and second actuators to bend, thereby closing the gap such that the second contact region electrically contacts the first contact region. The difference between the switching voltage and the bias voltage exceeds the actuation voltage of the switch.

Abstract: According to one embodiment, a programmable actuator includes a moving part with a first drive electrode, a second electrode which is placed opposite to the first electrode and which has first part and a second part, a first drive circuit which is available to operate the moving part one or more times in such a way that the first drive electrode is apart from the second part by generating a first electric potential difference between the first part and the first drive electrode, and a second drive circuit which is available to fix the moving part in such a way that the first drive electrode is in contact with the second part by generating a second electric potential difference between the second part and the first drive electrode.

Abstract: The invention relates to a microsystem comprising a deformable bridge, the ends of which are connected to a substrate. According to the invention, at least one actuation electrode, which is solidly connected to the bridge, is disposed between the center of the bridge and one of the ends next to a counter electrode which is solidly connected to the substrate. The electrodes are intended to deform the deformable bridge such that a lower face of the bridge comes into contact with a contact element formed on the substrate.

Abstract: A microsystem consists of at least one sensor and/or actuator, a signal processor and/or control mechanism linked therewith, a timer, and an electrical energy storage unit providing a current source for at least the signal processor and/or control mechanism. The signal processor and/or control mechanism has a mode switching mechanism, by means of which it can be set to an operating mode and a resting mode that consumes less current compared with the operating mode. The mode switching mechanism has at least one control signal input which is electrically connected to the timer for application of a mode switching signal. The timer is a mechanical timer, which has at least one micromechanical cantilever, which is coupled with at least one electrical element connected to the at least one control signal input of the signal processor and/or control mechanism in such a way that said electrical element is time-dependently set.

Abstract: A process control apparatus including an actuator configured to effect changes in an industrial process, a power supply, a plurality of current switches coupled between the actuator and the power supply and a controller coupled to the plurality of current switches. The controller is configured to selectively close one or more of the plurality of current switches so as to provide a selectable level of current from the power supply to the actuator. In variations, a plurality of discharge switches are coupled to the actuator and the controller is configured to selectively close the discharge switches so as to provide a selectable level of charge to discharge from the actuator.

Abstract: An architecture and method are provided for preventing snapdown in a voltage controlled MEMS device having a movable actuator with an actuator electrode coupled to a high voltage power supply (HVPS) through a drive circuit, the movable actuator suspended over a cavity electrode formed on a substrate and coupled to a common backplane supply (VssC). Generally, the circuit includes a number of first diodes coupled between the HVPS and the actuator electrode and/or the cavity electrode to provide a forward-biased path to transfer a positive charge to the HVPS when the accumulated charge exceeds a predetermined threshold. Preferably, the drive circuit further includes second diodes to provide a low impedance path to transfer a positives charge from the actuator electrode and/or the cavity electrode to a substrate ground when the accumulated charge results in or exceeds a predetermined threshold voltage. Other embodiments are also disclosed.

Abstract: A system that includes micro-electromechanical system switching circuitry, such as may be made up of a plurality of micro-electromechanical switches, is provided. The plurality of micro-electromechanical switches may generally operate in a closed switching condition during system operation. A controller is coupled to the electromechanical switching circuitry. The controller may be configured to actuate at least one of the micro-electromechanical switches to a temporary open switching condition while a remainder of micro-electromechanical switches remains in the closed switching condition to conduct a load current and avoid interrupting system operation. The temporary open switching condition of the switch is useful to avoid a tendency of switch contacts to stick to one another.

Abstract: A process control apparatus including an actuator configured to effect changes in an industrial process, a power supply, a plurality of current switches coupled between the actuator and the power supply and a controller coupled to the plurality of current switches. The controller is configured to selectively close one or more of the plurality of current switches so as to provide a selectable level of current from the power supply to the actuator. In variations, a plurality of discharge switches are coupled to the actuator and the controller is configured to selectively close the discharge switches so as to provide a selectable level of charge to discharge from the actuator.

Abstract: A first device includes a micrometer-scale or smaller geometry first conductor. A second device includes a micrometer-scale or smaller second conductor. An actuator the first and second devices relative to each other between first and second positions. Signals are substantially coupled between the first and second conductors in the first position and not in the second position.

Abstract: MEMS-based switching module, as may be electrically connected to other such modules in a series circuit, to achieve a desired voltage rating is provided. A switching array may be made up of a plurality of such switching modules (e.g., used as building blocks of the switching array) with circuitry configured so that any number of modules can be connected in series to achieve the desired voltage rating (e.g., voltage scalability).

Abstract: A thin film resistor device and method of manufacture includes a layer of a thin film conductor material and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material and enables the said thin film resistor to carry higher current densities with reduced shift in resistance. In one embodiment, the thin film resistor device includes a single CDEL layer formed on one side (atop or underneath) the thin film conductor material. In a second embodiment, two CDEL layers are formed on both sides (atop and underneath) of the thin film conductor material. The resistor device may be manufactured as part of both BEOL and FEOL processes.

Abstract: A charge control circuit includes a switch circuit having an input node configured to receive a reference voltage at a selected voltage level and configured to respond to a charge signal to pre-charge the input node with a pulse charge at the selected voltage level. The switch circuit further includes a single switch configured to respond to an enable signal having a duration shorter than a mechanical time constant of a micro-electro mechanical device (MEM device) having a variable capacitor with first and second plates and wherein the single switch is coupled to the MEM device to apply the selected voltage level across first and second plates of a variable capacitor of the MEM device for the duration to thereby cause the pulse charge to accumulate on the variable capacitor.

Abstract: A drive circuit and relay circuit using this drive circuit are provided, the drive circuit including: a first terminal connected to a drive electrode located at one side of a mechanical switch contact driven by static electricity; a second terminal connected to a drive electrode located at the other side of the switch contact; a photoelectromotive force element connected to the first terminal and the second terminal, optically coupled to a light emitting element, and including at least two photodiode arrays which are serially connected; and an electronic inductor circuit (bypass circuit) connected in parallel with at least one of the photodiode arrays in the photoelectromotive force element.

Abstract: An electrostatic actuator includes a movable piece provided on a substrate via supporting beams such that the movable piece can be displaced in the Y-axial direction. The movable piece is displaced by an electrostatic force between movable and stationary electrodes to drive a mirror, so that an optical path of an optical device is switched over. The electrode plates of the movable electrode have lengths in the Y-axial direction which are stepwise decreased in order from the electrode plate nearest to the movable piece to the electrode plate farthest from the movable piece. Thus, the total overlapping length of the electrode plates of the stationary and movable electrodes is reduced to a minimum smallest value. Therefore, even if the sizes of the electrode plates are varied, the movable piece is prevented from being displaced and inclined due to electrostatic forces in the X-axial direction. Thus, the movable piece is stably operated.

Abstract: A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.

Abstract: A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a leaf spring and cantilever that extend from the flexible portion of the torsion member. The switching assembly further comprises a first anchoring member mounting the torsion member to the stable structure, and a second anchoring member mounting the leaf spring to the stable structure. In this manner, the leaf spring has a flexible portion between the first and second anchors that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions. The leaf spring can exhibit a first stable geometry (e.g., a convex geometry) when flexed in one of the opposite directions, and a second stable geometry (e.g., a concave geometry) when flexed in another of the opposite directions.

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the “on” or “off” position. Embodiments of the invention have application in devices switches that employ mirrors that move between an “on” or “off” position, wherein they reflect light from an input fiber into an output fiber in the “on” position, and allow the light to pass in the “off” position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the “on” or “off” position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position.

Abstract: A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. These devices can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a flexible composite overlying the substrate, one or more composite contacts, and at least one insulator. The switch or relay device is provided overdrive potential through protrusions on the contact surface of the switch or relay contacts. In one embodiment the substrate contacts define protrusions on the contact surface that extend toward the flexible composite contacts. In another embodiment the flexible composite contacts define protrusions on the contact surface that extend toward the substrate contacts.

Abstract: A micro-opto-electro-mechanical transducer in which an optical element is angularly positioned by electrical field coupling. Movable electrodes of two orthogonally disposed, differential variable capacitors are coupled to the optical element constrained by structural means to angular displacement around two free-axes of rotation. Cooperating stationary capacitor electrodes with surface contoured regions facing the movable electrodes are affixed to the structural means. A thin dielectric layer of high permittivity material provides a region of fixed spacing between the capacitor electrodes. The surface contoured regions constrain the approach of the movable electrodes with angular displacement of the optical element. Both the open-loop gain and the equilibrium voltage-angle response of the transducer is largely independent of displacement. Electrostatic force feedback maintains the optical element at voltage programmed positions of static equilibrium over a wide angular range of tip and tilt.

Abstract: A microelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state. The relay includes a substrate having a trench formed therein, a first pair of contacts located in the trench and an actuator for controllably establishing electrical contact between the first pair of contacts. The actuator includes spaced apart supports on the substrate and a movable beam extending between the supports. A contact cross bar is located on the movable beam facing the first pair of contacts. A first electrode is located on the movable beam and a second electrode is located on the substrate. Electromagnetic force is used to deflect the movable beam towards the substrate and then electrostatic force is used to bring the contact cross bar in physical contact with the first pair of contacts.

Abstract: MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.

Abstract: Two sets of two relay switches, which charge a pump capacitor and a reservoir capacitor of a charge pump type voltage converter, are formed respectively by a set of plural piezo-electric relays, and both the capacitors are formed together with the piezo-electric relays on one substrate. Electrodes are provided respectively on both surfaced of a piezo-electric film, and operating sections are operated by applying a power-supply voltage thereto, and a movable terminal is brought into contact with a counter terminal plate due to deformation of the operating section so that the piezo-electric relays are turned on.

Abstract: A electrostatic device for controllable movement in a predetermined direction, including a electrostatic portion including a membrane and a electrode. The membrane is moveable along said predetermined direction for a predetermined distance. The electrostatic portion has a snap down voltage that corresponds to a position, which is a portion of said predetermined distance. A control device controls the membrane such that said membrane can have controlled movement beyond said snap down voltage.

Abstract: An electrostatic microrelay is disclosed. The electrostatic microrelay includes a fixed substrate having a fixed electrode and a fixed terminal on its upper surface and a moveable substrate having a moveable electrode and a moveable terminal on its lower surface. The moveable substrate is elastically supported by a support member that is disposed between the fixed substrate and the moveable substrate in a manner that the lower surface of the moveable substrate faces the upper surface of the fixed substrate at a certain distance. A protrusion is provided on the upper surface of the fixed substrate or the lower surface of the moveable substrate. The protrusion has a certain height.

Abstract: A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. This device can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a moveable composite overlying the substrate, one or more composite contacts, and at least one insulator. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied.

Abstract: The integrated microactuator has a stator and a rotor having a circular extension with radial arms which support electrodes extending in a substantially circumferential direction and interleaved with one another. For the manufacture, first a sacrificial region is formed on a silicon substrate; an epitaxial layer is then grown; the circuitry electronic components and the biasing conductive regions are formed; subsequently a portion of substrate beneath the sacrificial region is removed, forming an aperture extending through the entire substrate; the epitaxial layer is excavated to define and separate from one another the rotor and the stator, and finally the sacrificial region is removed to release the mobile structures from the remainder of the chip.

Abstract: There is provided a microstructure comprising a substrate, support members, a lever and an electrode formed on the lever is characterized in that said support members support said substrate and said beam and/or the electrode section with a void interposed therebetween and an electrode is formed on the lower surface of said beam. There are also provided a method of forming such a microstructure and an electrostatic actuator having a beam that is displaced by applying a voltage to the electrodes of the actuator.

Abstract: In an input protection circuit, a bipolar protection device is constituted of a semiconductor substrate of a first conductivity type, a first diffused layer of a second conductivity type formed in the substrate and connected to an input signal pad, a second diffused layer of the second conductivity type formed in the substrate to extend in parallel to the first diffused layer but separately from the first diffused layer by a first space, and a third diffused layer of a high impurity concentration and of the first conductivity type formed in the first space in the substrate to extend in parallel to the first and second diffused layers, in junction with the second diffused layer but separately from the first diffused layer. When a backward biasing voltage is applied, the thickness of a depletion layer formed is made large, so that generation of hot carriers is minimized.

Abstract: A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in the form of a tongue, is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53). The piezo-layer (60) acts as a bending transducer and forms a supplemental actuator for a quick response time. When a voltage is applied to the electrodes of the armature (53), base substrate (51) and piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56).

Abstract: An electrostatic relay comprises at least one fixed base having a fixed electrode and an actuator frame having a movable electrode. The fixed base carries a pair of fixed contacts insulated from the fixed electrode. The movable electrode carries a movable contact insulated from the movable electrode. The movable electrode extends along the fixed electrode and is pivotally supported at its one longitudinal end relative to the fixed base so as to pivot between two contacting positions of closing and opening the movable contact to and from the fixed contacts. The movable contact is formed at the other longitudinal end of the movable electrode. A control voltage source is connected across the fixed electrode and the movable electrode to generate a potential difference therebetween for developing an electrostatic force by which the movable electrode is attracted toward said fixed electrode to move into one of the two contacting positions.

Abstract: An electrostatic relay essentially comprises a fixed electrode with a fixed contact insulated therefrom, a movable electrode plate with a movable contact insulated therefrom, and a fixed pair of oppositely charged electrets. The movable electrode plate is pivotally supported at a pivot in a cantilever fashion or a seesaw fashion, and also to move about the pivot axis relative to the fixed electrode between two rest positions of closing and opening the contacts. A control voltage source is connected across the fixed electrode and the movable electrode plate to generate a potential difference therebetween. The electrets are disposed adjacent the movable electrode plate to generate electrostatic forces attracting and repelling the movable electrode plate, respectively, when the movable electrode plate is charged to a given polarity. That is, the attracting and repelling forces are cooperative to produce a torque for moving the movable electrode plate in one direction from one of the rest positions to the other.

Abstract: A drive circuit of a two-laminated electrostriction element, wherein a common junction of two sheets of electric distortion elements is connected to one of the driving power source through a first switching means, and the other terminal of the one electrostriction element is connected to the other of said driving power source, with the other terminal of the other electrostriction element being connected to a second switching means, thereby to rotate the other electrostriction element by the voltage charged in the one electrostriction element.

Abstract: A piezoelectric relay module having a plurality of relays of different load ratings is disclosed. Each relay is constructed from a portion of a single bimorph structure by cutting the bimorph structure to form bimorph actuators. The widths of the various bimorph actuators is varied to provide the different load ratings.

Abstract: Zero crossing synchronous AC switching circuits are provided which employ piezoelectric ceramic bender-type switching devices for use in supplying loads of a resistive, inductive or capacitive nature. The circuits include zero crossing sensing sub-circuits for sensing the passage through zero value of a supply source of alternating current voltage and/or current and for deriving zero crossing timing signals representative of the occurrance of the zero crossings. The zero crossing timing signals are employed to control operation of a bender energizing potential control sub-circuit for selectively controlling application or removal of a bender energizing potential across the piezoelectric bender member of the bender-type switching devices.