By Charged Gas Irradiation Patents (Class 361/213)
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Patent number: 8460433Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.Type: GrantFiled: April 14, 2012Date of Patent: June 11, 2013Assignee: Illinois Tool Works Inc.Inventors: Peter Gefter, Aleksey Klochkov, John E. Menear, Lyle Dwight Nelsen
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Publication number: 20130114179Abstract: Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion of free electrons into negative ions without adding oxygen or another electronegative gas to the gas stream. The invention may be used with electronegative and/or electropositive or noble gas streams and may include the use of a closed loop corona discharge control system.Type: ApplicationFiled: December 30, 2012Publication date: May 9, 2013Applicant: ILLINOIS TOOL WORKS INC.Inventors: Peter GEFTER, Leslie W. PARTRIDGE, Lyle Dwight NELSON
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Patent number: 8432660Abstract: In an ion generating unit configured to control driving of a plurality of ion generating elements for generating ions by a controller, the controller drives the ion generating elements upon start up, and is configured to keep driving for a predetermined time period; thereby, the ion concentration of a space upon start up is quickly raised to a predetermined concentration. Further, the controller is configured to drive the ion generating elements intermittently and one after another in order after the predetermined time period has elapsed; the product life is elongated while maintaining the predetermined ion concentration and shortening the driving time of the ion generating elements.Type: GrantFiled: July 23, 2009Date of Patent: April 30, 2013Assignee: Sharp Kabushiki KaishaInventors: Miwa Kamii, Yasutaka Kataoka
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Patent number: 8416552Abstract: Self-balancing, corona discharge for the stable production of electrically balanced and ultra-clean ionized gas streams is disclosed. This result is achieved by promoting the electronic conversion of free electrons into negative ions without adding oxygen or another electronegative gas to the gas stream. The invention may be used with electronegative and/or electropositive or noble gas streams and may include the use of a closed loop corona discharge control system.Type: GrantFiled: October 20, 2010Date of Patent: April 9, 2013Assignee: Illinois Tool Works Inc.Inventors: Peter Gefter, Leslie Wayne Partridge, Lyle Dwight Nelsen
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Patent number: 8383219Abstract: A multilayer thermoplastic container for storing and transporting liquid contents, especially combustible or explosive contents, is made of at least three superimposed layers and includes at least one layer for discharging an electric charge. The innermost layer of the container in contact with the liquid content is made of virgin material and a second integrated inner layer which is covered by the innermost virgin material layer is electrically conductive as a result of incorporated additives, e.g. conductive carbon black and is covered on the outside by another electrically non-conductive layer. Electric charge carriers that accumulate on the surface of the thin inner layer due to the friction with the content are “suctioned through” large areas of the inner, electrically non-conductive layer by the second, electrically conductive layer and discharged.Type: GrantFiled: March 2, 2012Date of Patent: February 26, 2013Assignee: Mauser-Werke GmbHInventors: Klaus-Peter Schmidt, Frank Schüller, Reinhard Schubbach
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Patent number: 8373962Abstract: A system and method is provided for increasing interaction between seed particles in a seed cloud and target particles to be neutralized, detected or knocked down to the ground. This is achieved by applying a charge to the seed particles so that the seed cloud formed by release of the seed particles at altitude is highly charged, which in turn produces a strong electric field between the seed cloud and ground. The relatively strong electric field causes the seed particles to move downward (toward the ground) at a velocity sufficient to increase interaction (collisions) between the seed particles and the target particles.Type: GrantFiled: August 15, 2007Date of Patent: February 12, 2013Assignee: Exelis Inc.Inventor: Steve Ray Diehl
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Patent number: 8325456Abstract: A static eliminator comprises an electric discharge portion, and a case in which the discharge portion for emitting ions in front thereof is disposed. The case includes an ion emitting opening and an ozone, etc suction opening. The ozone, etc generated in the discharge portion is sucked through the ozone, etc suction opening resulting in sucking air from the ion emitting opening in a direction opposite to that of ion emission through the ion emitting opening.Type: GrantFiled: November 23, 2009Date of Patent: December 4, 2012Assignee: Trinc.OrgInventor: Makoto Takayanagi
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Publication number: 20120293906Abstract: A method of removing electrostatic charges from the tray (1, 1?) consists in supplying pressurized ionized air, first along the bottom (12, 12?) of the already turned over tray (1, 1?), and then, when unloading the tray (1, 1?), along its side walls (15, 15?) or the inner walls (14) of a compartment (13). The tray (1, 1?), made of dielectric material, protected against negative action of the electrostatic field, is provided inside with an insert (22, 22?) of conducting material, whereas the insert (22, 22?) may have different shapes. The device for unloading compartment trays (1) made of dielectric material is provided with an ionizer (10) disposed horizontally along the linear transporter (5), in the zone of feeding of the trays (1), whereas its nozzles (11) are turned in the direction of the inside of the bottom (12).Type: ApplicationFiled: January 19, 2011Publication date: November 22, 2012Applicant: INTERNATIONAL TOBACCO MACHINERY POLAND SP. Z.O.O.Inventors: Adam Gielniewski, Radoslaw Owczarek
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Publication number: 20120212874Abstract: A static electricity removing apparatus for removing static electricity of a charged object comprises a discharge electrode which generates an ionized air having a polarity opposite to that of the object by discharge, an auxiliary electrode which is provided with openings for the ionized air generated by the discharge electrode to pass through, and an electric field forming means which forms an electric field in a space between the auxiliary electrode and the object. The electric field forming means generates the electric field between the auxiliary electrode and the object by allowing a potential having a polarity opposite to that of the object to occur in the auxiliary electrode at the start of the static electricity removal and decreases the electric field between the auxiliary electrode and the object when an absolute value of the potential of the object is equal to or less than a predetermined value.Type: ApplicationFiled: February 6, 2012Publication date: August 23, 2012Applicant: KOGANEI CORPORATIONInventor: Yoshinari FUKADA
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Publication number: 20120200982Abstract: A solution for static charge neutralization that includes providing at least one pulse train pair to an emitter of an ionizer is disclosed. The pulse train pair is disposed to include a positive pulse train and a negative pulse train that alternate in sequence. The positive pulse train includes an ionizing positive voltage waveform, while the negative pulse train includes an ionizing negative voltage waveform. These ionizing positive and negative voltage waveforms alternately create voltage gradients across the emitter and a reference electrode of the ionizer, generating by corona discharge an ion cloud that includes positive and negative ions.Type: ApplicationFiled: February 8, 2011Publication date: August 9, 2012Applicant: ILLINOIS TOOL WORKS INC.Inventor: Leslie Wayne PARTRIDGE
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Publication number: 20120162848Abstract: In an embodiment of the present invention, an ionizer and an electrostatic charge eliminating system are provided in which optional functions can be operated without increasing a current consumption when a timing of operating the optional functions is shifted in a case where a plurality of ionizers having optional functions such as a cleaning function are simultaneously used or an ionizer having a plurality of optional functions is used. According to an embodiment of the present invention, an ionizer includes: control portion 7; cleaning portion 10 operated when a command is given from control portion 7; first timer 5 for measuring a waiting time from a time at which a power source is turned on to a time at which cleaning portion 10 executes an operation at a first time; and second timer 6 for measuring a cycle time so that cleaning portion 10 can repeatedly execute the operation at a second time or later by a predetermined cycle time.Type: ApplicationFiled: May 26, 2010Publication date: June 28, 2012Inventors: Masahiko Ito, Yoshiaki Sato
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Patent number: 8167985Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.Type: GrantFiled: October 26, 2011Date of Patent: May 1, 2012Inventors: Peter Gefter, Aleksey Klochkov, John E. Menear, Lyle Dwight Nelsen
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Publication number: 20120092804Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.Type: ApplicationFiled: April 11, 2011Publication date: April 19, 2012Applicant: Illinois Tool Works Inc.Inventors: William S. Richie, JR., Richard D. Rodrigo, Philip R. Hall
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Patent number: 8149561Abstract: An ion generator is capable of efficiently generating ions and includes a case accommodating an ion-generating element that generates ions by discharging electricity from a discharging needle electrode and a cover having openings for ion discharge. Resistive elements are disposed at peripheral portions of the openings, and the resistive elements are grounded. Since the resistive elements are grounded, the peripheral portions of the openings are prevented from being electrostatically charged. As a result, retention of ions at the openings is suppressed, and ions are efficiently generated and discharged.Type: GrantFiled: July 20, 2009Date of Patent: April 3, 2012Assignee: Murata Manufacturing Co., Ltd.Inventor: Yasuhiko Shimanaka
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Patent number: 8134821Abstract: There is provided a static eliminator capable of weakening an electric field between a discharge electrode and a ground electrode, to generate a strong electric field between the discharge electrode and a workpiece, in which a first-stage circumferential chamber, a second-stage circumferential chamber and a first gas pool are arrayed in series along the longitudinal direction of a discharge electrode, the first gas pool is disposed in the mode of diametrically overlapping a gas outflow channel for shielding located on the inner circumferential side of the first gas pool, a gas is supplied to the first gas pool through the chambers disposed at multi-stages by means of the circumferentially spaced multi-stage orifices (the first and second chases), a ground electrode plate member in plate shape is buried in an insulating resin member on the bottom surface side of the half base in a position as high as where the first gas pool is located, and the ground electrode plate member includes a circular ring section conType: GrantFiled: November 26, 2008Date of Patent: March 13, 2012Assignee: Keyence CorporationInventors: Koji Fukai, Teppei Imataka
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Publication number: 20120000421Abstract: A control apparatus for plasma immersion ion implantation of a dielectric substrate which includes an electrode disposed above a generated plasma in a plasma chamber. The electrode is biased with negative voltage pulses at a potential that is higher than a potential of a substrate or cathode configured to receive ion implantation. The electrode is more negative to give the electrons generated as secondary electrons from the electrode sufficient energy to overcome the negative voltage of the high voltage sheath around the substrate thereby reaching the substrate. These electrons are accelerated toward the substrate to neutralize charge build-up on the substrate.Type: ApplicationFiled: July 2, 2010Publication date: January 5, 2012Applicant: Varian Semicondutor Equipment Associates, Inc.Inventors: Timothy Miller, Vikram Singh, Ludo Godet, Christopher J. Leavitt
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Publication number: 20110299214Abstract: A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s).Type: ApplicationFiled: August 15, 2011Publication date: December 8, 2011Inventors: Peter Gefter, Lawrence Levit, Leslie Partridge, Scott Gehlke
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Patent number: 8072731Abstract: There is provided a static eliminator capable of improving a sheath effect exerted by shielding a leading end of a discharge electrode by a clean gas so as to prevent the leading end of the discharge electrode from being contaminated, in which a first-stage circumferential chamber, a second-stage circumferential chamber and a first gas pool are arrayed in series along the longitudinal direction of a discharge electrode, the first gas pool is disposed in the mode of diametrically overlapping a gas outflow channel for shielding located on the inner circumferential side of the first gas pool, and a clean gas is supplied to the first gas pool through the chambers disposed at multi-stages by means of the circumferentially spaced multi-stage orifices (the first and second chases).Type: GrantFiled: November 26, 2008Date of Patent: December 6, 2011Assignee: Keyence CorporationInventors: Tomonori Shimada, Kazunori Kobayashi
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Publication number: 20110292559Abstract: An in-line gas ionizer has a gas inlet, an ionizing chamber, and a gas outlet, wherein at least one of the gas outlet and the ionizing chamber comprises static dissipative material which may be connected to ground.Type: ApplicationFiled: May 26, 2010Publication date: December 1, 2011Applicant: ILLINOIS TOOL WORKS INC.Inventors: John Gorczyca, King K. Miller, Roger J. Peirce
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Patent number: 8059383Abstract: Embodiments of electrostatic blower system for use in computer systems or other electronic device, e.g., in inkjet printers for cooling or drying operations, are disclosed. An exemplary method may include arranging a plurality of electrostatic blowers together to increase output pressure. The method may also include positioning the arranged electrostatic blowers directly adjacent a point of use in a printer device. The method may also include directing and accelerating airflow using a corona discharge in each of the plurality of electrostatic blowers for cooling or drying operations in the printer device.Type: GrantFiled: December 20, 2008Date of Patent: November 15, 2011Assignee: Hewlett-Packard Development Company, L.P.Inventors: Alvin Marion Post, Bradley B. Branham
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Patent number: 8048200Abstract: Clean corona gas ionization by separating contaminant byproducts from corona generated ions includes establishing a non-ionized gas stream having a pressure and flowing in a downstream direction, establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent at least a substantial portion of the byproducts from migrating into the non-ionized gas stream, and applying an electric field to the plasma region sufficient to induce at least a substantial portion of the ions to migrate into the non-ionized gas stream.Type: GrantFiled: April 23, 2010Date of Patent: November 1, 2011Inventors: Peter Gefter, Aleksey Klochkov, John E. Menear, Lyle Dwight Nelsen
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Patent number: 8038775Abstract: Clean corona ionization bars separate contaminant byproducts from corona generated ions by establishing a non-ionized gas stream having a pressure and directed toward an attractive non-ionizing electric field of a charge neutralization target, by establishing a plasma region of ions and contaminant byproducts in which the pressure is sufficiently lower than the pressure of the non-ionized gas stream to prevent byproducts from migrating into the non-ionized gas stream. The ionization bar(s) may be located sufficiently close to the charged neutralization target that a non-ionizing electric field of the target induces at least a substantial portion of the ions to migrate into the non-ionized gas stream and to the neutralization target as a clean ionized gas stream.Type: GrantFiled: February 4, 2011Date of Patent: October 18, 2011Inventor: Peter Gefter
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Patent number: 8018710Abstract: The ionizer includes a nozzle having a discharge electrode for inducing corona discharge by application of high voltage to eject ions, an emission port for emitting supplied gas together with the ejected ions, and a gas channel for guiding supplied gas to the emission port. Herein, a velocity of flow of the gas immediately after emission from the emission port exceeds a velocity of sound, and a gas pressure at the emission port is not less than an atmospheric pressure. The gas channel has a throat part for narrowing the gas channel such that a channel area gradually decreases, and a ratio of the atmospheric pressure to a gas pressure at a position where the channel area does not vary, the position being located forward of the throat part, is not more than 0.528.Type: GrantFiled: July 14, 2009Date of Patent: September 13, 2011Assignee: Keyence CorporationInventors: Tsukasa Fujita, Yuuki Tokita
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Patent number: 8009405Abstract: A low maintenance AC gas-flow driven static neutralizer, comprising at least one emitter and at least one reference electrode; a power supply having an output electrically coupled to the emitter(s) and a reference terminal electrically coupled to the reference electrode(s) with the power supply disposed to produce an output waveform that creates ions by corona discharge and to produce an electrical field when this output waveform is applied to the emitter(s); a gas flow source disposed to produce a gas flow across a first region that includes these generated ions and the emitter(s), the gas flow including a flow velocity; and wherein, during a first time duration, the output waveform decreases an electrical force created by the electrical field, enabling the gas flow to carry away from the emitter(s) a contamination particle that may be located within a second region surrounding the emitter(s), and to minimize a likelihood of the contamination particle from accumulating on the emitter(s).Type: GrantFiled: March 16, 2008Date of Patent: August 30, 2011Assignee: Ion Systems, Inc.Inventors: Peter Gefter, Lawrence Levit, Leslie Partridge, Scott Gehlke
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Patent number: 7973283Abstract: A method for regulating sample surface charge has been proposed in this invention. The processes of applying a charged particle beam to a first area and applying a flood energized beam gun with gaseous molecules to a second area are executed in the method when the sample is in both continuous and Leap & Scan movements. The second area is located at a predetermined distance from the first area behind or ahead of the first area being scanned with respect to the movement of the sample. Thus, the surface of the sample may be regulated.Type: GrantFiled: September 25, 2008Date of Patent: July 5, 2011Assignee: Hermes Microvision, Inc.Inventors: Joe Wang, Jack Jau
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Patent number: 7973292Abstract: A neutralizer 1 includes: a power supply circuit 11; an output controlling circuit 12 configured to convert a DC voltage generated by the power supply circuit 11 to a high-frequency voltage with frequency equal to or higher than an audible frequency, and thus to output the resultant high-frequency voltage alternately to two output lines at regular intervals; a transforming circuit 13 configured to raise the high-frequency voltage; a discharger 20 including 2n (n is an integer equal to one or more) discharge needles configured to output positive ions in response to application of a positive polarity voltage, and to output negative ions in response to application of a negative polarity voltage, the discharge needles being disposed while being divided into first and second groups each including n discharge needles; a polarity reversing circuit 14 configured to convert the high-frequency high voltage outputted from the transforming circuit 13, to two rectangular-wave DC high voltages with different polarities durType: GrantFiled: December 18, 2007Date of Patent: July 5, 2011Assignee: Midori Anzen Co., Ltd.Inventors: Tomonori Tsumori, Naoki Sugita
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Patent number: 7965487Abstract: A neutralization apparatus comprising an ion generation element employing a novel, high efficiency discharge system capable of generating high concentration ions with a low ozone concentration. In the neutralization apparatus, the ion generation element is a minute electrode ion generation element consisting of a discharge electrode and an induction electrode having minute protrusions arranged in one direction on a plane, and a thin dielectric film sandwiched between them.Type: GrantFiled: March 3, 2006Date of Patent: June 21, 2011Assignees: FISA Corporation, National Institute of Advanced Industrial Science and TechnologyInventors: Takafumi Seto, Makoto Hirasawa, Masaaki Tsuji, Akira Okuyama, Susumu Saito
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Patent number: 7924544Abstract: An ionization system for a predefined area includes a plurality of emitter modules spaced around the area, a system controller for individually addressing and monitoring the emitter modules and communication lines for electrically connecting the plurality of emitter modules with the system controller. Each emitter module has an individual address and including at least one electrical ionizer.Type: GrantFiled: June 10, 2008Date of Patent: April 12, 2011Assignee: Illinois Tool Works Inc.Inventors: William S. Richie, Richard D. Rodrigo, Philip R. Hall
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Patent number: 7855868Abstract: An aerosol charge neutralizing device simple in structure and easy to maintain, comprising an aerosol passing container that has a conductive material-made tube body constituting an aerosol passing path permitting aerosol to flow therethrough and has an opening pair consisting of openings in pair disposed oppositely across the center line of the tube body and penetrating through the wall surface of the tube body, and insulation tube that has an insulation material-made tube, has a window pair consisting of windows in pair disposed oppositely across the center line of the tube and penetrating through the wall surface of the tube, and is fitted concentrically over the outer surface of the aerosol passing container with the windows coinciding with the openings, a bipolar ionizing element that has a discharge electrode on a dielectric film and is attached to the insulation tube with the windows closed and the discharge electrode exposed to the aerosol passing path, and an outer tube that includes air-tightly theType: GrantFiled: November 21, 2006Date of Patent: December 21, 2010Assignees: Tsukasa Sokken Co., Ltd., National Institute of Advanced Industrial Science and TechnologyInventors: Tsuyoshi Taishi, Tetsuji Koyama, Soon Bark Kwon, Takafumi Seto, Hiromu Sakurai
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Patent number: 7843678Abstract: The photoelectron generating plate includes on a substrate a photoelectron emission layer for emitting photoelectrons by the illumination of the light and having a barrier property. A diffusion of a material of an underlying base member into the photoelectron emission layer is blocked by the barrier layer and thus the surface of the photoelectron emission layer is prevented from being coated by the material of the base member. As a result, temporal reduction in the number of generated negative ions can be considerably ameliorated. In other words, the charge removing device attains a good durability for a long time.Type: GrantFiled: January 14, 2004Date of Patent: November 30, 2010Assignee: Panasonic CorporationInventors: Kunikazu Kuchino, Takaiki Nomura, Junichi Nawama, Yoshifumi Moriya
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Patent number: 7822355Abstract: The present invention is related to preventing dust agglomeration on a sharp electrode which is used for generating corona. According to certain aspects, the invention includes a dust shroud which decreases or prevents dust accumulation on the sharp electrodes. The dust shroud changes the gas flow path so as to reduce the amount of gas passing near the sharp electrode. An advantage of the shroud is that it prevents dust from building up on the electrodes. The shroud is a simple, passive addition to the electrostatic pump, such that the pump is otherwise able to operate normally throughout its life. In embodiments, the shroud can be used to protect a corona electrode used in heat sink applications especially in electronics cooling. It can also be used in electrostatic precipitators for cleaning dust or chemical or microbe particles from air.Type: GrantFiled: January 23, 2008Date of Patent: October 26, 2010Assignee: Ventiva, Inc.Inventor: Daniel J. Schlitz
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Patent number: 7821762Abstract: With a piezoelectric transformer formed of a ferroelectric element which generates a high voltage in a secondary section upon application of an AC voltage to a primary section, ground electrodes are attached to upper and lower surfaces of the secondary section of the piezoelectric transformer via a dielectric sheet for insulation in tight contact therewith such that a dielectric barrier discharge occurs around the ground electrodes to generate positive and negative ions, and an air flow is injected from an air nozzle to flow toward a neutralized subject across the ground electrodes.Type: GrantFiled: November 6, 2008Date of Patent: October 26, 2010Assignee: SMC CorporationInventors: Koichi Yasuoka, Yuki Shibata, Nobuhiro Fujiwara, Satoshi Suzuki, Toshio Sato
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Patent number: 7813102Abstract: An apparatus and method for minimizing contamination buildup on corona emitters that are employed in an ionizer. Contamination buildup control is accomplished with solely electronic means. High voltage is applied to the emitters with waveforms that serve to push contaminants away from the emitter, rather than attracting contaminants toward the emitters. The results are fewer cleaning cycles, more time between cleaning cycles, and more stable ionizer operation.Type: GrantFiled: March 14, 2008Date of Patent: October 12, 2010Assignee: Illinois Tool Works Inc.Inventors: Peter Gefter, Scott Gehlke, Lawrence Levit
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Publication number: 20100214712Abstract: A substrate processing apparatus includes a chamber; and a mounting table having an electrostatic attraction portion for electrostatically attracting a target substrate; a heat transfer gas supply system for injecting a heat transfer gas from the electrostatic attraction portion to the target substrate; and a separating unit by which the target substrate is separated from the electrostatic attraction portion. A method for charge-neutralizing a target substrate in the apparatus includes: supplying an ionized gas from the heat transfer gas supply system to the target substrate. The apparatus includes an irradiation unit for irradiating a soft X-ray or an UV beam toward the chamber. In the supplying of the ionized gas, the target substrate is separated from the electrostatic attraction portion by the separating unit, and a soft X-ray or an UV beam is irradiated from the irradiation unit toward a space between the target substrate and the electrostatic attraction portion.Type: ApplicationFiled: February 23, 2010Publication date: August 26, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Jun YAMAWAKU, Junji Oikawa, Hiroyuki Nakayama
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Publication number: 20100202093Abstract: A transfer chamber is provided between a processing unit for performing a predetermined process on a target substrate to be processed in a depressurized environment and an atmospheric maintaining unit for maintaining the target substrate in an atmospheric environment to transfer the target substrate therebetween. The transfer chamber includes a chamber main body for accommodating the target substrate, a gas exhaust unit for exhausting the chamber main body to set the chamber main body to the depressurized environment, and a gas supply unit for supplying a predetermined gas to the chamber main body to set the chamber main body in the atmospheric environment. Further, in the transfer chamber, an ionization unit is provided outside the chamber main body, for ionizing the predetermined gas and an ionized gas supply unit is provided to supply the ionized gas generated by the ionization unit to the chamber main body.Type: ApplicationFiled: February 5, 2010Publication date: August 12, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Jun YAMAWAKU, Junji Oikawa, Hiroyuki Nakayama
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Publication number: 20100128408Abstract: A static eliminator comprises an electric discharge portion, and a case in which the discharge portion for emitting ions in front thereof is disposed. The case includes an ion emitting opening and an ozone, etc suction opening. The ozone, etc generated in the discharge portion is sucked through the ozone, etc suction opening resulting in sucking air from the ion emitting opening in a direction opposite to that of ion emission through the ion emitting opening.Type: ApplicationFiled: November 23, 2009Publication date: May 27, 2010Inventor: Makoto TAKAYANAGI
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Patent number: 7716772Abstract: A cleaning apparatus comprises a housing, a driving mechanism and a plurality of cleaning elements. The driving mechanism is disposed in the housing. The cleaning elements are connected to the driving mechanism. The driving mechanism rotates the cleaning elements to clean the emitters.Type: GrantFiled: March 6, 2006Date of Patent: May 18, 2010Assignee: AU Optronics Corp.Inventors: Jui-Pin Shih, Yi-Ming Lin, Chih-Chiang Chen
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Patent number: 7710707Abstract: A flexible ionizer uses soft X-ray and has a head unit generating soft X-ray whose wavelength is 1.2˜1.5 ?, a soft X-ray protect unit shielding the leak of the soft X-ray from the head unit, and a power control unit supplying a control signal and control voltage to the head unit. The head unit is positioned outside of the soft X-ray protect unit with the flexible ionizer further having a flexible tube protecting a high voltage cable that connects the head unit and power control unit from external impact or vibration and letting the user bend the head of the head unit at an arbitrary angle toward a charged body if necessary, a connecting device letting the ions generated at the window positioned inside of the body of the ionizer emit toward the charged body by connecting one end of the flexible tube and the head unit, and a connecting device connecting the other end of the flexible tube and the body of the ionizer.Type: GrantFiled: October 18, 2005Date of Patent: May 4, 2010Assignee: Sunje Hitek., Ltd.Inventors: Yong-Chul Jung, Byung-Soo Lee, Min-Ho Jung, Chung-Han Shim
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Patent number: 7697258Abstract: At least one orifice is added to an AC ionizer with nozzles and ionizing electrodes that are used to remove static charge. The orifice is placed in a location where electrostatic forces are weak and where gas ions can be easily extracted from the ionizer. Ionizer effectiveness is enhanced by recovering gas ions that are normally trapped between the nozzles and under a portion of the ionizer from which the nozzles project. Without the orifice properly positioned, the trapped gas ions are lost by recombination or grounding. With the orifice positioned in an area of weak electrostatic forces, more gas ions are available for discharging the charged object. The combined air consumption of nozzles plus at least one orifice is the same or less than nozzles alone would consume for a given discharge time.Type: GrantFiled: October 6, 2006Date of Patent: April 13, 2010Assignee: MKS Instruments, Inc.Inventors: Grigoriy N. Vernitskiy, Peter Gefter, Lawrence Levit
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Patent number: 7660097Abstract: A remover of electrostatic charges comprises a head part, a soft X-ray protecting part, and a power controlling part. The head part neutralizes and weakens electrostatic charges of bodies that are objects of removal of electrostatic charges by generating soft X-ray having wavelengths in the range of 1.2 ?˜1.5 ? with high energy from a soft X-ray tube, and ionizes gas molecules directly and also removes electrostatic charges in atmosphere of inert gases (N2, Ar). The soft X-ray protecting part wraps the head part and prevents that soft X-ray is leaked from said head part. The power controlling part is connected to the head part and the soft X-ray protecting part electrically and provides target voltage to control the ion generation of filament voltage of a soft X-ray tube and soft X-ray tube with the soft X-ray tube.Type: GrantFiled: October 2, 2003Date of Patent: February 9, 2010Assignee: Sunje Hitek Co., Ltd.Inventor: Dong-Hoon Lee
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Patent number: 7656642Abstract: The invention relates to a means for preventing build-up of electrostatic potential in a fluid container during filling and/or discharging. The fluid container comprises electrical insulating materials and a valve means through which filling and/or discharging occurs. Means for reducing and/or eliminating electrical and/or electrostatic potential build-up during filling or discharging of the container is arranged in conjunction with the container walls. Such means may for example be arranged in conjunction with the valve means, reducing and/or changing the flow velocity of the fluid and/or the flow direction of the fluid during the filling operation.Type: GrantFiled: March 14, 2005Date of Patent: February 2, 2010Assignee: Ragasco ASInventors: Rune Ulekleiv, Arild Hansen
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Patent number: 7649728Abstract: The present invention relates to suppressing wear and contamination of the electrode needle as well as effectively removing the electricity from a charged body. An electricity removal mode in which the electrode needle is applied with a high voltage to produce ions and a halt mode in which the electrode needle is halted are provided, that are alternatively selected based on a selection of a user. The halt mode includes a halt period during which the high voltage is not basically applied on the electrode needle. When a self discharge occurs by approach of a charged body in this halt period and an absolute value of current that flows through the resistance exceeds the first threshold value, the electricity removal operation is initiated in which the high voltage is applied on the electrode needle to produce ions. Subsequently, after a predetermined time period passes, for example, the electricity removal operation is terminated and the halt period is resumed.Type: GrantFiled: December 19, 2007Date of Patent: January 19, 2010Assignee: Keyence CorporationInventors: Tsukasa Fujita, Tadashi Hashimoto
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Publication number: 20100008010Abstract: An ionizer includes a fan for blowing air, the fan being provided in an air blowing port which opens in a case, and a plurality of discharge electrodes for generating positive and negative ions by corona discharge, the discharge electrodes being provided in the case at positions facing the air blowing port. The ionizer also includes a plurality of discharge electrode pairs each constituted by two discharge electrodes for generating ions of different polarities. When a tip-center distance denotes a distance from the electrode tip to the center of the air blowing port, the tip-center distances of the two discharge electrodes in the discharge electrode pairs are different from each other.Type: ApplicationFiled: June 4, 2009Publication date: January 14, 2010Applicant: SMC CorporationInventors: Masayuki ORIHARA, Takayuki TOSHIDA, Akira TADANO
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Patent number: 7644511Abstract: A heating and blowing apparatus includes a main body housing having an inlet port and a discharge port. An air flow path extends from the inlet pod to the discharge port. A rotatingly driven fan and a heating unit are arranged on the air flow path. A bypass flow path branches off from the air flow path and leads to an ion emission port. An ion generator including a discharge electrode and an opposing electrode is arranged in the bypass flow path Further, the apparatus includes a cover arranged at the ion emission port and having an opening through which ions pass. One or more protrusions are provided on a rear surface of the cover. The protrusions make contact with the opposing electrode such that the cover is grounded through the opposing electrode.Type: GrantFiled: June 27, 2007Date of Patent: January 12, 2010Assignee: Matsushita Electric Works, Ltd.Inventors: Tomoya Ishikawa, Hideki Tanaka, Kenji Kamada, Kazumi Okawa, Fumio Mihara
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Publication number: 20090236008Abstract: An apparatus for reducing static electricity includes an ionizer that generates ions for neutralizing static electricity, a blower that produces a current of air for moving the ions to a desired location, and a motion detector operatively connected to the blower. Upon detecting motion, the motion detector activates the blower, which disperses ions to reduce static electricity at the desired location. The apparatus can include a heater for heating the current of ionized air. In addition, the motion detector can be operatively linked to the ionizer and heater so that they are also activated upon detection of motion. The blower can be linked to a timer such that it runs for a predetermined amount of time upon activation by the motion detector, or the blower can run continuously until the motion detector no longer detects any motion. The apparatus is particularly useful for reducing static electricity around fuel dispensers.Type: ApplicationFiled: June 2, 2009Publication date: September 24, 2009Inventors: Kent J. George, Keith J. George, D. Duane Gillian
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Publication number: 20090168288Abstract: There is provided a static eliminator for accurately detecting a contamination condition of a discharge electrode, in which a target value as a target frame ground current value is changed from, for example, zero as a reference alternately to the plus side and the minus side to such a degree as not to affect the ion balance of a workpiece, and the follow-up time, namely a phase delay, with respect to the change in target value differs depending on the contamination condition of the discharge electrode, and becomes longer with the progress of the contamination, and by use of this characteristic, a plurality of thresholds are prepared and compared with a detected frame ground current value, so as to detect the contamination condition of the discharge electrode.Type: ApplicationFiled: November 26, 2008Publication date: July 2, 2009Inventor: Tadashi HASHIMOTO
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Publication number: 20090168289Abstract: There is provided a static eliminator capable of improving a sheath effect exerted by shielding a leading end of a discharge electrode by a clean gas so as to prevent the leading end of the discharge electrode from being contaminated, in which a first-stage circumferential chamber, a second-stage circumferential chamber and a first gas pool are arrayed in series along the longitudinal direction of a discharge electrode, the first gas pool is disposed in the mode of diametrically overlapping a gas outflow channel for shielding located on the inner circumferential side of the first gas pool, and a clean gas is supplied to the first gas pool through the chambers disposed at multi-stages by means of the circumferentially spaced multi-stage orifices (the first and second chases).Type: ApplicationFiled: November 26, 2008Publication date: July 2, 2009Inventors: Tomonori Shimada, Kazunori Kobayashi
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Publication number: 20090168287Abstract: There is provided a static eliminator capable of weakening an electric field between a discharge electrode and a ground electrode, to generate a strong electric field between the discharge electrode and a workpiece, in which a first-stage circumferential chamber, a second-stage circumferential chamber and a first gas pool are arrayed in series along the longitudinal direction of a discharge electrode, the first gas pool is disposed in the mode of diametrically overlapping a gas outflow channel for shielding located on the inner circumferential side of the first gas pool, a gas is supplied to the first gas pool through the chambers disposed at multi-stages by means of the circumferentially spaced multi-stage orifices (the first and second chases), a ground electrode plate member in plate shape is buried in an insulating resin member on the bottom surface side of the half base in a position as high as where the first gas pool is located, and the ground electrode plate member includes a circular ring section conType: ApplicationFiled: November 26, 2008Publication date: July 2, 2009Inventors: Koji FUKAI, Teppei Imataka
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Publication number: 20090135538Abstract: With a piezoelectric transformer formed of a ferroelectric element which generates a high voltage in a secondary section upon application of an AC voltage to a primary section, ground electrodes are attached to upper and lower surfaces of the secondary section of the piezoelectric transformer via a dielectric sheet for insulation in tight contact therewith such that a dielectric barrier discharge occurs around the ground electrodes to generate positive and negative ions, and an air flow is injected from an air nozzle to flow toward a neutralized subject across the ground electrodes.Type: ApplicationFiled: November 6, 2008Publication date: May 28, 2009Applicant: SMC CorporationInventors: Koichi YASUOKA, Yuki Shibata, Nobuhiro Fujiwara, Satoshi Suzuki, Toshio Sato
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Publication number: 20090135537Abstract: An ionizer includes positive and negative wire electrodes each formed of a conductive wire with a circular cross section. The wire electrodes are arranged in parallel with each other, each having circumferential surfaces serving as a discharge surface on which a corona discharge occurs upon application of positive and negative high voltages for discharging positive and negative ions.Type: ApplicationFiled: November 6, 2008Publication date: May 28, 2009Applicant: SMC CorporationInventors: Koichi Yasuoka, Youhei Miyata, Nobuhiro Fujiwara, Satoshi Suzuki, Toshio Sato