Abstract: An electrostatic discharge protection element is provided, which leads out the electrostatic discharge current between an internal circuit and an input/output terminal in the event of electrostatic discharge. The electrostatic discharge protection element includes an I/O pad, conductor, and a gap structure. The I/O pad is connected between the I/O terminal and the internal circuit, and the conductor is connected to a ground terminal. The gap structure is disposed between the I/O pad and the conductor, which is configured to establish a path from the I/O pad to the conductor connected to the ground terminal for conducting the electrostatic discharge current.

Abstract: A kit for discharging electrons from a mammal such as human comprise at least two electrically conductive acupuncture needles. The needles are adapted for creating an electrical connection with subcutaneous tissue of the mammal. There is an electrically conductive pad with electrically conductive pad wires, one for each needle for connection to the respective needle to the pad. Electrically conductive grounding wire is provided for electrically grounding the pad. Helical wires for placement around the acupuncture needles can be used to enhance electrically conductivity. The kit is designed, when assembled and used to treat a mammal, for withdrawing excess electrons from the mammals for improved health.

Abstract: A shaft grounding apparatus including a grounding rope in electrical contact with ground, and an adjustable rope guide configured to guide the grounding rope on an electrically conductive surface of a rotating shaft of an electric machine. The adjustable rope guide includes a plurality of articulating segments configured to provide the adjustable rope guide with a variable radius of curvature to closely follow a radius of curvature of the rotating shaft.

Abstract: Provided are an electric shock protection device and a mobile electronic apparatus including the same. The electric shock protection device is disposed between a human contactable conductor and an internal circuit unit of an electronic device, in order to pass static electricity without causing dielectric breakdown when the static electricity is introduced from the conductor, and block a leakage electric current of an external power source introduced from a ground of the circuit unit, the following formula is satisfied: Vbr>Vin where Vbr is a breakdown voltage of the electric shock protection device, and Vin is a rated voltage of an external power source of the electronic device.

Abstract: The present invention provides a key structure with electrostatic discharge protection, including a key cap; a metal support panel; a support element, connecting the key cap and the metal support panel and capable of guiding the key cap to move up and down relative to the metal support panel; and a membrane circuit board, disposed on the metal support panel. The membrane circuit board includes: a first membrane layer, having a first surface and a second surface; a second membrane layer, having a third surface and a fourth surface; and an electrostatic protection structure, including: a first conductive layer, formed on a first surface of the first membrane layer; a second conductive layer, formed between the second surface of the first membrane layer and the third surface of the second membrane layer; and a third conductive layer, formed on the fourth surface of the second membrane layer.

Abstract: An image display apparatus includes: a display unit which includes a display panel that displays an image on a front face, and a chassis disposed on a back face of the display panel and holding the display panel; and a first frame member disposed along at least a portion of a front periphery of the display panel, wherein the first frame member includes: a front portion disposed on the front face of the display panel; and a folding portion connected to the front portion, and having an end portion which is disposed at a back face side of the chassis by being bent, the end portion being a distal end portion relative to the front portion.

Abstract: The invention relates to a fingerprint sensing device comprising a sensing chip comprising an array of capacitive sensing elements. The sensing device comprises a coating material arranged in a layer on top of the array of sensing elements and comprising a plurality of cavities filled with a dielectric material. The dielectric material comprises reduced graphene oxide. Locations of the cavities correspond to locations of the sensing elements such that a cross-section area of a cavity covers at least a portion of an area of a corresponding sensing element. A dielectric constant of the dielectric material is higher than a dielectric constant of the coating material. The invention also relates to a sensing device where the dielectric coating layer containing reduced graphene oxide comprises trenches corresponding to areas between the sensing pixels filled with a fill material, where the dielectric coating layer has a higher dielectric constant than the fill material.

Abstract: An electro-static discharge protection structure adapted to be utilized in an electronic device is provided. The electronic device includes a housing, a printed circuit board, and a connector. The electro-static discharge protection structure includes a first discharge circuit and a discharge device. The first discharge circuit is electrically connected to the housing. The discharge device is connected to the first discharge circuit. The discharge device includes a discharge plate which includes a plurality of charge entry points and a plurality of charge exit points. The connector is disposed between the discharge device and the printed circuit board. An electronic device including the electro-static discharge protection structure is also provided.

Abstract: A circuit board and a smart card module and a smart card employing the circuit board are provided. The circuit board includes a substrate and a pad region provided on the substrate. The pad region is configured for mounting an electronic component. The pad region comprises a plurality of pads spaced from each other and traces connected to their respective pads. At least one of the traces comprises an extension which extends along a perimeter of the pad region. The present invention provides a reliable adhesion between the chip and pad region.

Abstract: The invention relates to a fingerprint sensing device comprising a sensing chip comprising an array of capacitive sensing elements. The sensing device comprises a coating material arranged in a layer on top of the array of sensing elements, the coating material comprising a plurality of cavities filled with a mold material; wherein locations of the cavities correspond to locations of the sensing elements, such that a cross-section area of a cavity covers at least a portion of an area of a corresponding sensing element; and wherein a dielectric constant of the mold material is higher than a dielectric constant of the coating material. The invention also relates to a method for manufacturing such a device.

Abstract: Spun yarns, fabrics, and garments with a balance of high thermal and comfort properties are disclosed. Spun yarns made with an intimate blend of fibers including flame resistant fiber, hydrophilic fibers, and anti-static fibers are described. The unique combination of fibers in the spun yarn and fabrics made therefrom provide a balance of high thermal properties, including flame resistance and thermal shrinkage resistance, as well as moisture management properties to provide both protection and comfort to the wearer. In addition, a spun yarn and fabric made therefrom may be dye accepting and/or can be printed thereon. In one embodiment, printable or dye accepting aramid fiber, or producer dyed meta-aramid is utilized in the spun yarn. A fabric made with the spun yarn may have pre-wash softness that makes it comfortable to wear.

Abstract: Provided is an electric shock protection device disposed between a human body contactable conductor and an internal circuit unit of an electronic device. The electric shock protection device includes: a sintered body where a plurality of sheet layers stacked; an electric shock protection unit including at least one pair of inner electrodes disposed spaced a predetermined interval apart from each other inside the sintered body and a pore disposed between the inner electrodes; and at least one capacitor layer configured to pass communication signals flowing from the conductor.

Abstract: A capacitance detecting device for fingerprint identification and a fingerprint identification apparatus are provided. The device includes a conductive border; a detecting screen, comprising: a plurality of detecting units, in which each detecting unit includes: a first conductive layer, a second conductive layer, a third conductive layer and a fourth conductive layer; a detecting module, configured to charge a sensing capacitance between the first conductive layer and a finger in contact with the detecting screen and a feedback capacitance between the first conductive layer and the second conductive layer at a sampling stage, to control electric charges of the sensing capacitance and the feedback capacitance to transfer to an integrating capacitance between the third conductive layer and the fourth conductive layer at an integral stage, to measure a voltage variation of the integrating capacitance at the integral stage and to calculate the sensing capacitance according to the voltage variation.

Abstract: A portable cable assembly includes a first connection port, a second connection port, a cable, an absorptive element, a shell and a sleeve. The first connection port has a first base portion and a first mating portion, the first base portion defines a containing groove in an outer surface thereof. The second connection port has a second base portion and a second mating portion. Two ends of the cable are connected with the first base portion and the second base portion. the absorptive element is accommodated in the containing groove. The shell surrounds the first base portion and the absorptive element. The sleeve is capable of sliding to sleeve the first connection port and the second connection port therein, and the sleeve can be absorbed on the shell by the absorptive element.

Abstract: An object management system that includes at least one object identification device to be secured to an associated object. The object identification devices provide radio frequency signals containing object identification codes. The system includes at least one user identification device providing a radio frequency signal containing a user identification code and a control unit having a reader for receiving and reading the signals provided by the user identification devices and the object identification devices. One aspect provides a remote unit that communicates directly with the control unit to receive information associated with a condition of the object management system at a location remote from the control unit. The remote unit is further configured to be carried by a user and configured to communicate information and/or an alert to the user, wherein the information and/or the alert is associated with the condition of the object management system.

Abstract: A protective container for holding a reusable control part of a transcutaneous sensor system for detecting at least one analyte in a bodily fluid is disclosed. The control part includes at least one coupling, which has at least one sensor coupling for connection to at least one transcutaneous sensor. The protective container has at least one container housing. The control part can be held in the container housing. The container housing is adapted to shield the control part from environmental influences. The container housing also has at least one connector which can be connected to the coupling and seals the latter in a media-tight fashion.

Abstract: The invention relates to an earthing element for the filler pipe of a motor vehicle, and also to a mouthpiece on a filler pipe of a motor vehicle. The earthing element is in the form of an earthing strap (7) which is composed of an electrically conductive polymer.

Abstract: A board assembly includes: a circuit board; a shield member coupled to the circuit board to face the circuit board; and at least one socket for a storage medium which is mounted on the circuit board. The shield member includes an opening that exposes the entirety of the socket to the outside. The board assembly forms an opening in a dual recess structure to accommodate the socket. Thus, the board assembly may contribute to the reduction of the thickness of an electronic device while being stacked with a battery. Further, the entire socket is exposed to the outside of the shield member, the storage medium may be easily removed.

Abstract: A fingerprint sensing device comprises a sensing chip comprising an array of capacitive sensing elements. The sensing device comprises a coating material arranged in a layer on top of the array of sensing elements, the coating material comprising a plurality of cavities filled with an adhesive; wherein locations of the cavities correspond to locations of the sensing elements, such that a cross-section area of a cavity covers at least a portion of an area of a corresponding sensing element; and wherein a dielectric constant of the adhesive is higher than a dielectric constant of the coating material; and a protective plate attached to the sensing chip by means of the adhesive. Another sensing device is disclosed, where the coating layer comprises trenches filled with an adhesive, and where the coating has a higher dielectric constant than the adhesive. Associated methods of manufacturing are also disclosed.

Abstract: Provided is an ESD protection device that can suppress degradation of discharge characteristics caused by repeated discharge. The ESD protection device comprises (a) a ceramic multilayer substrate 12 in which a plurality of ceramic layers are stacked, (b) a cavity 13 formed inside the ceramic multilayer substrate 12, (c) at least one pair of discharge electrodes 14, 15 including opposing portions 14t, 15t that are formed along an inner surface of the cavity 13 and that face each other with a spacing held therebetween, and (d) outer electrodes formed on a surface of the ceramic multilayer substrate 12 and connected to the discharge electrodes 14, 15. At least one of the opposing portions 14t, 15t of the discharge electrodes 14, 15 is connected to one end portion of a via conductor 22, 23 penetrating through the ceramic layer of the ceramic multilayer substrate 12.

Abstract: The invention is an apparatus and a process, the apparatus of the invention is an intelligent system configured to test the efficacy of electrostatic discharge devices that includes a touch screen display, a microcomputer, and resident persistent non-volatile memory. Preferred embodiments use the persistent resident memory to store a plurality of test data from a plurality of tests correlated as a data base. The apparatus of the invention in certain embodiments operates as a WEB host wherein remote users may view ESD test data in various ways. The process of the invention relates to the configuration of the apparatus of the invention to at least display test data from a plurality of electrostatic dissipation device tests. The process of the invention may also include the configuration of test settings, or email notification metrics.

Abstract: An electrostatic discharge device is provided for a removable electronic element. The removable electronic element is suitable for being inserted into a recess of a reading terminal for the removable electronic element. The discharge device includes a means for insertion into the reading recess subsequent to mounting of the reading terminal.

Abstract: The present disclosure provides a touch liquid crystal display device, a liquid crystal display panel, an array substrate and a color film substrate, and belongs to the field of liquid crystal display. The touch liquid crystal display panel includes an array substrate and a color film substrate, on said array substrate is formed a GOA circuit, and at the outer side of said color film substrate is formed a touch signal transmission line. The touch liquid crystal display panel further comprises a shielding electrode located between said GOA circuit and said touch signal transmission line, said shielding electrode being used for shielding the interference caused by the clock signal of said GOA circuit to the touch sensing signal on said touch signal transmission line. The present disclosure can reduce the interference caused by the clock signal of said GOA circuit to the touch sensing signal on said touch signal transmission line.

Abstract: A discharge circuit for an electromagnetic interference (EMI) filter is provided. The discharge circuit includes a switch circuit, a control circuit, and a detection circuit. The switch circuit is coupled to an X-capacitor of the EMI filter. The control circuit is coupled to the switch circuit and configured to turn on the switch circuit in a predetermined period to provide a discharge path. The detection circuit is coupled to the discharge path. In the predetermined period, the detection circuit detects whether a cross point occurs between a discharge voltage signal on the discharge path and a reference voltage signal to generate a detection signal which is provided to the control circuit. When the detection circuit detects that the cross point does not occur, the control circuit continuously turns on the switch circuit according to the detection signal after the predetermined period has elapsed.

Abstract: An ESD protection device having high insulation reliability and good discharge properties is provided. In producing an ESD protection device that includes a first discharge electrode and a second discharge electrode arranged to oppose each other, a discharge supporting electrode formed so as to span between the first and second discharge electrodes, and an insulator substrate that retains the first and second discharge electrodes and the discharge supporting electrode, a paste for forming a discharge supporting electrode is used and this paste contains, in addition to a powder of an alkali metal compound and/or an alkaline earth metal compound, a metal powder with a network-forming oxide adhered to particle surfaces, a metal powder and a semiconductor powder with a network-forming oxide adhered to particle surfaces, or a metal powder with a network-forming oxide adhered to particle surfaces and a semiconductor powder with a network-forming oxide adhered to particle surfaces.

Abstract: A portable electronic apparatus includes a housing having a first face and first and second side faces, the first and second side faces rising from the first face, and at least a concave portion is configured by the first side face, the first face and the second side face; a display, at least a part of the display being accommodated in the concave portion; a touch panel that is positioned on the display and is capable of detecting at least a distance to an indicator; first and second sheet metal members respectively disposed on the first and second side faces, at least a part of the first and second sheet metal members facing a side face of the display; a third sheet metal member disposed on the first face; and a cover glass that covers at least the display, the first sheet metal member, and the second sheet metal member.

Abstract: Various embodiments provide a capacitive touch input element that is formed of a recess in a substrate. The size and shape of the recess are chosen such that a finger of a user will not contact the bottom or minima point of the recess, thereby, requiring pressure to be applied by the finger in order to make contact. Beneath the substrate is a capacitive sensing electrode designed to concentrate an electric field toward the minima point of the recess such that the finger must make contact with the minima point to effect a change in capacitance causing the capacitive touch element to provide input to an appropriate application.

Abstract: The invention provides a method of forming an electric field gap device, such as a lateral field emission ESD protection structure, in which a cathode layer is formed between dielectric layers. Anode channels are formed and they are lined with a sacrificial dielectric layer. Conductive anode pillars are formed in the anode channels, and then the sacrificial dielectric layer is etched away in the vicinity of the anode pillars. The etching leaves a suspended portion of the cathode layer which defines a lateral gap to an adjacent anode pillar. This portion has a sharp end face defined by the corners of the cathode layer and the lateral gap can be defined accurately as it corresponds to the thickness of the sacrificial dielectric layer.

Abstract: A shaft grounding apparatus including a grounding rope in electrical contact with ground, and an adjustable rope guide configured to guide the grounding rope on an electrically conductive surface of a rotating shaft of an electric machine. The adjustable rope guide includes a plurality of articulating segments configured to provide the adjustable rope guide with a variable radius of curvature to closely follow a radius of curvature of the rotating shaft.

Abstract: A lighting strike protection device for applying automatically to a fiber composite component. The protection device includes a reinforcement structure having a width that is less than a width of the metal strip. The fiber composite component having an integrated lighting strike protection.

Abstract: An electrostatic charge dissipation system including an electrostatic discharge assembly configured to connect to a conductive article, the electrostatic discharge assembly including a conductor, an insulator positioned between the conductor and the conductive article, and an indicator electrically connected to the conductor and the conductive article, the indicator being configured to indicate a discharge of an electrostatic charge.

Abstract: A device and a method of reducing high-frequency currents between the tip of the soldering iron and the circuit board are described. In one embodiment, a special EMI filter and a method of it implementation in soldering process is described. This device and this method of implementation provide significant reduction of high-frequency current to the sensitive components. Another embodiment describes an implementation of EMI-reducing filter inside the soldering iron. Yet other embodiments include implementation of EMI-reducing filter as a part of the solder station, of the vise holding the circuit board, of the solder spool holder and as a stand-alone device.

Abstract: An independent bleeding integrated circuit device is provided to replace the bleeding resistor for an EMI filter capacitor, to establish a discharge path between the two terminals of the EMI filter capacitor when the EMI filter capacitor is disconnected from an AC power source, for discharging the EMI filter capacitor. When the EMI filter capacitor is connected with an AC power source, the discharge path is cut off to avoid power loss.

Abstract: An IO port usable with an electronic apparatus to allow an external device to be connected thereto includes a plurality of signal pins disposed to exchange signals between the external device and the electronic apparatus, and at least one discharge pin disposed to be electrically connected to the external device ahead of the plurality of signal pins when the external device is connected to the IO port, and to discharge at least a portion of static electricity accumulated in the external device.

Abstract: A separate connection device (40) intended to be inserted between a metal frame (3), of an electrical component (1), and a metal supporting structure (20) in order to connect, electrically and separately, the frame to the supporting structure. The connection device (40) comprises a metal blade manufactured from spring steel which comprises two self-connecting end areas (45, 46) arranged in separate planes and comprising a set of sharp teeth (47) arranged in order to be embedded within the metal material and formed on a folded section of the metal blade so that the sets of teeth (37, 47) extend in opposite directions and in planes intended to intersect the planes of the frame (3) and of the supporting structure (20) when the connection device is mounted.

Abstract: To provide an antistatic device having a low capacitance, good discharge characteristics, and small variations in the discharge characteristics. In a so-called gap-type antistatic device in which a space between a pair of opposing electrodes is filled with an electrostatic protection material, a discharge inducing portion has protrusions protruding from interfaces between the opposing electrodes and the insulation substrates toward the insulation substrates and has a shape protruding on both sides of the insulation substrates. The relationship among the gap distance between the electrodes, the thicknesses of the opposing electrodes, and the protrusions of the discharge inducing portion is controlled under specific conditions.

Abstract: An ESD protection device 1 includes a ceramic insulating material 10, first and second discharge electrodes 21 and 22, and a discharge auxiliary section 51. The discharge auxiliary section 51 is an electrode configured to reduce a discharge starting voltage between the first discharge electrode 21 and the second discharge electrode 22. The discharge auxiliary section 51 comprises a sintered body including conductive particles and at least one of semiconductor particles and insulating particles. At least the discharge auxiliary section 51 comprises at least one of an alkaline metal component and a boron component. The content of at least one of the alkaline metal component and the boron component in the discharge auxiliary section 51 is larger than the content of at least one of the alkaline metal component and the boron component in the ceramic insulating material 10.

Abstract: A wire fence fingerprint sensor package includes a substrate, a fingerprint sensor mounted to the substrate, and a wire fence mounted to the substrate adjacent the fingerprint sensor. During use, the wire fence is electrically connected to a reference voltage source, e.g., ground. Thus, the wire fence discharges electrostatic discharge (ESD) from a finger contacting the wire fence fingerprint sensor package. The wire fence is formed of low cost wire loops that are fabricated, for example, using a standard and inexpensive wire bonding apparatus. Accordingly, the wire fence fingerprint sensor package is fabricated at a minimal cost.

Abstract: A discharge apparatus for a wind turbine is disclosed that enables electric charge to be discharged between a first and a second part of the wind turbine that are rotatable relative to each other. The discharge apparatus includes a charge transfer unit electrically connected to the first part, and an electrically conductive slideway electrically connected to the second part. The charge transfer unit includes an electrically insulative sliding member that maintains mechanical contact with the slideway, and a spark-gap electrode electrically connected to the first part and that moves in unison with the sliding member over the slideway. The spark-gap electrode and slideway form a spark gap having a spark-gap width controlled by the sliding member. The first and second parts are electrically isolated from each other in the absence of a spark, and discharge occurs by sparks bridging the spark gap.

Abstract: A static eliminator includes a plurality of static eliminating needles, a holder including a retaining surface on which the plurality of static eliminating needles is held, a plurality of partitions, and a restriction member including a first end portion having a restriction surface at a static eliminating needle side to contact the static eliminating needles. A length of the plurality of static eliminating needles from the first end portion of the restriction member as an origin to a leading end of the plurality of static eliminating needles is shorter than a distance from the origin to an end surface of the plurality of partitions within the range of movement of the plurality of static eliminating needles from the retaining surface up to a position five degrees (5°) below the restriction surface in an angle between the retaining surface and an imaginary plane including the restriction surface.

Abstract: There is provided a static-protective component including: an insulating substrate; first and second electrodes disposed on the insulating substrate, having a gap of a predetermined interval therebetween; and a turn-on voltage controlling unit disposed at the gap and containing conductive particles and non-conductive particles each having a particle diameter of 120 nm to 1000 nm.

Abstract: A tapping fitting, particularly a flap or ball cock, with a fitting housing made from plastic for connection to a drain spigot of a plastic container for liquids, particularly an interior container of a transport and storage container, wherein the fitting housing is provided with a conductive device at least part of which is made from electrically conductive plastic for dissipating an electrostatic charge, wherein the conductive device is the conductive device has an integrally conformed earthing conductor for the electrically conductive connection of the conductive device to a ground potential and is also connected integrally with the fitting housing.

Abstract: External connection conductors are arranged on a back surface of a base material, and wiring conductors are arranged on a front surface. An insulating layer is provided on surfaces of the wiring conductors. Component mounting conductors are provided on a surface of the insulating layer. The component mounting conductor and the wiring conductor are electrically coupled to each other, and the component mounting conductor and the wiring conductor are electrically coupled to each other. The wiring conductor and the external connection conductor are electrically coupled by a conductor film on an inner wall surface of a hole provided between forming areas of the component mounting conductors. The wiring conductor and the external connection conductor are electrically coupled by a conductor film on an inner wall surface of a hole provided between the forming areas of the component mounting conductors.

Abstract: In one embodiment a conductive assembly may include a casing having a compressed portion and a cylinder. A fiber may be positioned within the casing and the relative position of the fiber with respect to the casing may be secured via engagement between the casing and the fiber at the compressed portion. The compressed portion may be configured as a plurality of alternating vertices and tables and the fiber may extend outward from the casing.

Abstract: A very small form factor consumer electronic product includes at least a single piece housing having an integral front and side walls that cooperate to form a cavity in cooperation with a front opening where an edge of the side walls define a rear opening and at least some of the edges have flanges. The consumer electronic product also includes an user input assembly having a size and shape in accordance with the front opening and a clip assembly having a size and shape in accordance with the rear opening and having an external user actionable clip, a plurality of internal hooking features, and a plurality of internal latching features. The clip assembly is secured by engaging at least some of the hooking features and the flanges on the edges of the housing and engaging the latching features and corresponding attachment features on the internal support plate.

Abstract: A device for a controlled electrostatic discharge in persons consists of two electrically non-conductive elements mutually spaced by at least one spring and arranged in a housing. At least one element is arranged in the housing in a way to come closer parallel to a second element when force is exerted on it from the outside. Electric pins are arranged on adjacent surfaces of both elements and arranged on each surface at a mutual distance and the two surfaces are arranged at a mutual distance and simultaneously the rows of pins on one and the second element are offset, so that the pins of one row lie in the middle of the distance and both rows of pins are spaced from each other by a different distance.

Abstract: A grounding rope assembly for electrically grounding a rotatable conductive shaft of a dynamo-electric machine. The assembly includes a grounding rope member including a plurality of conductive wires extending along the length of the grounding rope member and one or more discrete fixation points intermediate the first and second ends of the grounding rope member. Two or more of the plurality of conductive wires are affixed together at each of the discrete fixation points.

Abstract: An electrostatic discharge (ESD) blocking component is set forth for a computing device. The computing device can include a housing formed of non-conducting material and an overlaying display assembly supported by the housing. The display assembly can further include a plurality of display elements such as thin film transistors (TFTs) interconnected by corresponding metallic traces. The ESD block is used to block static charges associated with an ESD event so that essentially no ESD event related static charge is accumulated on the metallic traces thereby preventing ESD related damage to the plurality of TFTs.

Abstract: An ESD protection device is manufactured such that its ESD characteristics are easily adjusted and stabilized. The ESD protection device includes an insulating substrate, a cavity provided in the insulating substrate, at least one pair of discharge electrodes each including a portion exposed in the cavity, the exposed portions being arranged to face each other, and external electrodes provided on a surface of the insulating substrate and connected to the at least one pair of discharge electrodes. A particulate supporting electrode material having conductivity is dispersed between the exposed portions of the at least one pair of discharge electrodes in the cavity.

Abstract: A substrate processing apparatus includes an electrostatic chuck enclosing an electrostatic electrode plate and a chamber having a ground potential and housing the electrostatic chuck. DC discharge is generated between a wafer and the chamber by setting the potential of the electrostatic electrode plate of the electrostatic chuck which is maintained at a first predetermined potential during a plasma etching process to a ground potential after the plasma etching process to increase the absolute value of the potential difference between the wafer and the chamber. DC discharge is then re-generated by applying, to the electrostatic electrode plate, DC voltage having the same potential as a second predetermined potential which is generated at the wafer after the DC discharge is generated, and by increasing the absolute value of the potential difference between the wafer and the chamber. The wafer is then easily removed from the electrostatic chuck.