Abstract: A radiation system for controlling bursts of pulses of radiation comprises: an optical element; a controller; an actuator; and a sensor. The optical element is configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, the characteristic of the pulses of radiation being dependent on a configuration of the optical element. The controller is operable to generate a control signal. The actuator is configured to receive the control signal from the controller and to control a configuration of the optical element in dependence on the control signal. The sensor is operable to determine the characteristic of pulses having interacted with the optical element. The control signal for a given pulse in a given burst is dependent on the determined characteristic of a corresponding pulse from a previous burst.

Abstract: Embodiments relate to reading signals from a stimulus file produced by an emulator into a data store. A method includes executing, by a set of one or more worker processes, reading tasks. Each reading task is executable independent of other reading tasks. Each reading task includes reading a time slice of a signal from a stimulus file produced by a hardware emulator, and pushing a partial waveform corresponding to the time slice to a data store. The partial waveform includes a head and a tail that each has a smaller data size than an entirety of the partial waveform. The method further includes executing stitching tasks. The stitching tasks include pulling the heads and tails of the partial waveform from the data store, modifying the heads and tails to indicate a temporal order of the partial waveforms, and pushing the modified heads and tails back to the data store.

Abstract: A recording head includes a channel waveguide that delivers light to a media-facing surface. A near-field transducer (NFT) is at an end of the channel waveguide and proximate to the media-facing surface. A laser including an active region has a longitudinal axis corresponding to a propagation direction of the channel waveguide. The active region includes a back facet and a front facet proximate the NFT. The front facet has a surface shape configured to suppress back reflection of the light.

Abstract: A luminaire module includes light-emitting elements (LEEs) arranged to provide light; a light guide including a receiving end and an opposing end, the receiving end arranged to receive light provided by the LEEs, a core including a first transparent material with a first refractive index, the core having a pair of opposing side surfaces extending along a length of the light guide between the receiving and opposing ends, and a cladding including a second material having a second smaller refractive index, the cladding extending across and being in contact with at least a portion of the opposing side surfaces forming a cladding-core interface. The cladding-core interface is optically smooth. Additionally, the luminaire module includes an optical extractor arranged to receive guided light from the opposing end of the light guide and configured to output into the ambient environment at least some of the received guided light.

Abstract: A laser generation apparatus includes a light source making oscillate a laser having a frequency based on the amount of current applied thereto, a splitter ramifying a laser incident thereon at a preset ratio, an interference system receiving the ramified laser, generating an interference signal by ramifying a laser incident thereon, and measuring the phase of a laser oscillated, a temperature adjustment unit uniformly maintaining a temperature of a part of the interference system, an error integrator receiving a signal that has undergone the interference system and accumulating a phase error occurred, a phase error detection unit detecting a phase difference between the signal of the error integrator and an offset current value, a driving driver applying a current to the light source, and a control unit controlling an operation of each component and controlling the driving driver based on results of the detection of the phase error detection unit.

Abstract: An optical sampling signal holding method for a photonic analog-to-digital conversion system, based on frequency response principles of sampling and holding, controls photoelectric conversion processes after photonic sampling to be equivalent to the signal holding effect in switch sampling, and converts sampled optical pulses into a special holding waveform, directly eliminating the time mismatch between back-end electronic analog-to-digital converters and optical pulses. The photoelectric conversion frequency responses in the invention do not lead to additional expenses on active devices and software, which greatly improves performances of the photonic analog-to-digital conversion system. The method is not limited by the number of channels, and can provide more reliable technical solutions for realizing a photonic analog-to-digital conversion system with high sampling rate in the future.

Abstract: A MEMS includes a substrate with a substrate extension that rises above a substrate plane. The MEMS includes a movable structural element, a first spring element that mechanically connects the movable structural element to the substrate extension, and a second spring element that mechanically connects the movable structural element to the substrate extension. The first spring element and the second spring element form a parallelogram guide of the movable structural element in relation to the substrate extension.

Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.

Abstract: A method (600) for tuning a tunable laser (310) includes delivering a bias current (IDBR) to an anode of a distributed Bragg reflector (DBR) section diode (D2) disposed on a shared substrate of the tunable laser and receiving a burst mode signal (440) indicative of a burst-on state or a burst-off state. When the burst mode signal is indicative of the burst-off state, the method includes offsetting the bias current at the anode of the DBR section diode by one of sourcing a push current with the bias current to the anode of the DBR section diode or sinking a pull current away from the bias current at the anode of the DBR section diode. When the burst mode signal is indicative of the burst-on state, the method also includes ceasing any offsetting of the bias current at the anode of the DBR section diode.

Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.

Abstract: An optical subassembly for non-reciprocal coupling of light from a planar optical waveguide output outside the optical subassembly to an optical fiber includes a carrier configured to support the optical subassembly, an optical fiber fixed to the optical subassembly, a focusing optical system consisting two foci with one focus coincident with the input of optical fiber, an optical isolator to transmit light unidirectionally between two foci, an input boundary provided by the carrier to align the optical subassembly with the planar optical waveguide output. In particular, the optical subassembly is operably configured to provide a low transmission loss for light traveling from the planar optical waveguide output to the optical fiber.

Abstract: A thermally tunable waveguide including an optical waveguide and a heater is provided. The optical waveguide includes a phase shifter. The heater is disposed over the optical waveguide. The heater includes a heating portion, pad portions and tapered portions. The heating portion overlaps with the phase shifter of the optical waveguide. The pad portions are disposed aside of the heating portion. Each of the pad portions is connected to the heating portion through one of the tapered portions respectively.

Abstract: An optical coherence tomographic imager for contributing reduction of the number of man-hours for evaluation to obtain a wavelength sweeping operation of continuous, linear, and monotonic change while utilizing a wavelength-tunable laser having a structure that is less susceptible to mechanical disturbance. The optical coherence tomographic imager includes a wavelength-tunable light source, a branching means, an irradiation means, a photoelectric conversion measuring means, and a processor. The wavelength-tunable light source outputs light whose wavelength is determined by a plurality of light source drive parameters. The branching means branches output light of the wavelength-tunable light source into object light and reference light. The irradiation means irradiates an object to be measured with the object light.

Abstract: A test device and method for testing a distributed feedback laser diode (DFB-LD) device for an optical transceiver of a radio over fiber (RoF) system examines the DFB-LD device based on an absolute limiting rating, an operating case environment, and a functional specification, in which the absolute limiting rating is a rating at which there is no fatal damage to the DFB-LD device during a short period of time when each limiting parameter is isolated and all other parameters are in a normal performance parameter, the operating case environment includes an operating temperature, and the functional specification includes parameters to be tested according to an operating condition for the functional specification.

Abstract: A light source employed in a coherent Raman scattering (CRS) spectroscopic apparatus or a CRS microscope includes a chromium forsterite laser (CrFL), a variable delay optical path configured to delay one optical pulse of branched optical pulses obtained by dividing an optical pulse from the CrFL according to a power, a highly nonlinear waveguide into which the other optical pulse of the branched optical pulses is input, a first wavelength filter connected to an output of the highly nonlinear waveguide, an ytterbium-doped glass fiber optical amplifier (YbFA) connected to an output of the wavelength filter, and a second wavelength filter connected to an output of the YbFA.

Abstract: An electro-optical system has a laser drive electronic circuit, a laser light source and an optical interferometer, forming a closed loop. The laser drive electronic circuit is arranged to receive a reference frequency as input, and a beat frequency as feedback. The laser drive electronic circuit generates a drive output based on a phase difference between the reference frequency and the beat frequency. The optical interferometer, coupled to the laser light, generates optical energy at the beat frequency.

Abstract: A light receiving and emitting module includes a sub-mount platform, a photoelectrical conversion component, a lens and a base. The sub-mount platform is made of silicon-based material and has first and second contact surfaces. The photoelectrical conversion component is disposed on the first contact surface. The lens is disposed on the second contact surface. The sub-mount platform is disposed on one side of the base. The first contact surface and second contact surface have therebetween a height difference, such that the photoelectrical conversion component matches the center of the lens. Further provided is a light receiving and emitting device including the light receiving and emitting module, a printed circuit board and a plurality of conducting wires. The conducting wires are electrically connected to the photoelectrical conversion component and printed circuit board. The conducting wires are disposed on at least two sides of the light receiving and emitting module.

Abstract: An on-chip laser includes a gain portion, a mirror in communication with the gain portion, a waveguide in communication with the gain portion, and a resonator optically coupled to the waveguide at an optical coupling. The resonator has a circular shape. The waveguide and the resonator are separate from the gain portion.

Abstract: A novel narrow linewidth laser device is disclosed that includes a gain element, such as a quantum well, quantum dot or bulk waveguide laser chip and a fiber Bragg grating formed in an optical fiber positioned to receive the output from a first end of the gain element and return a portion of said output back into the gain element. The fiber Bragg grating is constructed so that its power reflectivity profile has a ratio of reflectivity slope over reflectivity at the 3 dB point below the reflectivity peak on the red side (longer wavelength side) of the grating larger than a value of 2/nm. The operating wavelength of the device may be tuned thermally, electrically, or thermo-electrically to be on the red side of the fiber Bragg grating reflectivity profile, preferably, but not necessarily, at the 3 dB point below the reflectivity peak or lower.

Abstract: A method for measuring concentrations of multiple gases by using an infrared band laser light includes: pumping Ho crystal by using a 1.9 ?m single thulium-doped solid-state laser to obtain a 2 ?m band near-infrared laser output; controlling a light-emitting angle of 2 ?m band laser light; allowing the 2 ?m laser light to enter a first measurement cell at a first emergent angle, and measuring a concentration of methane gas in the first measurement cell; generating and introducing the 3-5 ?m mid-infrared laser light into a second measurement cell to measure concentrations of ammonia gas and carbon monoxide in the second measurement cell; generating and introducing the 6-12 ?m far-infrared laser light into a third measurement cell to measure concentrations of carbon dioxide, acetylene, ethylene and ethane gas in the third measurement cell.

Abstract: An optical frequency control device includes: a detection circuit to receive first light including a first frequency, receive second light including a second frequency, modulate the first light with a local oscillation signal, and detect a differential beat signal between the frequency of sideband light included in the modulated first light and the second frequency; a light source control circuit to change the second frequency by frequency-dividing the differential beat signal with a first frequency division number, by frequency-dividing a reference signal with a second frequency division number, and by outputting a phase error signal indicating a phase difference between the frequency-divided differential beat signal and the frequency-divided reference signal; and a signal processing unit to set each of the first frequency division number and the second frequency division number according to the set value of a frequency difference between the first frequency and the second frequency.

Abstract: A light filter and a spectrometer including the light filter are disclosed. The light filter includes a plurality of filter units having different resonance wavelengths, wherein each of the plurality of filter units includes a cavity layer configured to output light of constructive interference, a Bragg reflection layer provided on a first surface of the cavity layer, and a pattern reflection layer provided on a second surface of the cavity layer opposite to the first surface and configured to cause guided mode resonance of light incident on the pattern reflection layer, the pattern reflection layer including a plurality of reflection structures that are periodically arranged.

Abstract: An external cavity laser of a recording head includes a channel waveguide that delivers light towards a media-facing surface of the recording head. The laser includes an externally mounted part with an active region having a longitudinal axis corresponding to a light propagation direction of the channel waveguide. The externally mounted part has a reflective back facet and anti-reflective front facet. The laser includes a near-field transducer at an end of the channel waveguide proximate the media facing surface. The reflective back facet and the near-field transducer define a resonator of the external cavity laser.

Abstract: A monochromator apparatus for an optical spectrum analyzer may include a diffraction grating, a rotatable oblique prism reflector element with a non-right-angle apex angle, and a mirror. An input optical beam received from an input component may be diffracted by the grating element and reflected by a reflector element, where the reflector element may include a rotatable oblique prism with an apex angle that is different from a right angle. A mirror may reflect the reflected diffracted optical beam back to the reflector element and the grating element. An output optical beam from the grating element may be provided via an output element to a detection element for high resolution optical measurement. The oblique prism reflector element may reduce or eliminate a Littrow ghost effect or secondary ghost effects caused by the grating element.

Abstract: A difference frequency generation optical transmitter and sum frequency generation optical receiver operating in the mid-infrared wavelength range for use in free space optical satellite communications are described. By using mid-infrared light, the transmitter/receiver can mitigate atmospheric scintillation, scattering, and other non-ideal optical effects in the communication channel. This is achieved through the use of nonlinear optical crystals designed for difference frequency generation in the case of the transmitter and sum frequency generation for the receiver. High-speed modulated communication signals can thus be frequency converted to the mid-infrared wavelength range by a relatively low cost, compact and high-power optical communication system.

Abstract: A recording head includes a channel waveguide that delivers light to a media-facing surface. A near-field transducer (NFT) is at an end of the channel waveguide and proximate to the media-facing surface. A laser including an active region has a longitudinal axis corresponding to a propagation direction of the channel waveguide. The active region includes a back facet and a front facet proximate the NFT. The front facet has a surface shape configured to suppress back reflection of the light.

Abstract: Brillouin fiber sensors can provide distributed measurements of parameters of interest over long distances in a fiber by measuring the Brillouin frequency shift as a function of position along the fiber. The Brillouin frequency shift may be determined, to within a small fraction of the Brillouin linewidth, by establishing a series of lasing modes that experience Brillouin amplification at discrete spatial locations in a test fiber. A linewidth narrowing and high intensity associated with the lasing transition enable precise measurements of the lasing frequency associated with each of the lasing modes. The Brillouin frequency may be determined based on the lasing frequency.

Abstract: A frequency modulated continuous wave (FMCW) light detection and ranging (LIDAR) system that includes an optical source to transmit an optical beam and a drive circuit configured to drive a current through the optical source to transmit the optical beam at a frequency. The system also includes an operational amplifier comprising a plurality of inputs to produce an output voltage for receipt by the drive circuit as input to determine an amplitude of the current driven by the drive circuit through the light source. The system also includes electro optical circuitry coupled to a first input of the plurality of inputs to produce a phase locked loop to maintain the light at the frequency. The system also includes ramp control circuitry coupled to a second input the plurality of inputs to cause the output voltage of the operational amplifier to modulate the optical beam at the frequency.

Abstract: The present description relates, according to one aspect, to a high-peak-power laser pulse generation system (10), comprising at least one first light source (101) for emitting first laser pulses (IL), a fiber device (110) for transporting said first laser pulses, comprising at least one first multimode fiber with a single core designed to receive said first laser pulses, and a module (102) for temporally shaping said first laser pulses, arranged upstream of the fiber device, configured so as to reduce the power spectral density of said pulses by reducing the temporal coherence.

Abstract: A vertical-cavity surface-emitting laser (VCSEL) is provided that includes a mesa structure disposed on a substrate. The mesa structure defines an emission axis of the VCSEL. The mesa structure includes a first reflector, a second reflector, and a cascaded active region structure disposed between the first reflector and the second reflector. The cascaded active region structure includes a plurality of cascaded active region layers disposed along the emission axis, where each of the cascade active region layers includes an active region having multi-quantum well and/or dots layers (MQLs), a tunnel junction aligned with the emission axis, and an oxide confinement layer. The oxide confinement layer is disposed between the tunnel junction and MQLs, and has an electrical current aperture defined therein. The mesa structure defines an optical window through which the VCSEL is configured to emit light.

Abstract: An optical device includes: lasers output first light from a front-end side and output second light from a rear-end side; an optical multiplexer circuit multiplex respective rays of the first light, to thereby send out output light; waveguides guide respective rays of the second light toward one end face of the optical device; and light detectors receive respective rays of reflected light that are due to reflection of the respective rays of the second light after being guided by the waveguides, on the one end face or on respective inclined end faces in concave portions formed on that one end face. The light detector is located between the rear-end side of the laser and the one end face or the inclined end face, and the second light is outputted diagonally relative to a perpendicular line with respect to the one end face or the inclined end face.

Abstract: A VCSEL includes an active region between a top distributed Bragg reflector (DBR) and a bottom DBR each having alternating GaAs and AlGaAs layers. The active region includes quantum wells (QW) confined between top and bottom GaAs-containing current-spreading layers (CSL), an aperture layer having an optical aperture and a tunnel junction layer above the QW. A GaAs intermediate layer configured to have an open top air gap is disposed over a boundary layer of the active region and the top DBR. The air gap is made wider than the optical aperture and has a height equal to one quarter of VCSEL's emission wavelength in air. The top DBR is attached to the intermediate layer by applying wafer bonding techniques. VCSEL output, the air gap, and the optical aperture are aligned on the same optical axis. The bottom DBR is epitaxially grown on a silicon or a GaAs substrate.

Abstract: Disclosed are a wavelength-selectable laser diode and an optical communication apparatus including the same. The wavelength-selectable laser diode includes a substrate, which includes a gain region, a tuning region spaced apart from the gain region, and a phase adjusting region between the tuning region and the gain region, a waveguide layer on the substrate, a clad layer on the waveguide layer, and gratings disposed on the substrate or the clad layer in the gain region and the tuning region.

Abstract: Provided is an optical device capable of suppressing variations in the range for scanning light. This optical device comprises: a light source that emits a laser beam; a MEMS mirror that scans the laser beam toward a predetermined range; and a diffraction grating that guides the laser beam to the MEMS mirror by guiding the laser beam in a direction corresponding to the wavelength thereof. The optical device also comprises an MEMS control unit that performs control such that, by employing a change in the optical path of the laser beam caused through the diffraction grating by a change in the wavelength of the laser beam, variations in the scanning range of the laser beam by the MEMS mirror are suppressed.

Abstract: A laser device includes a laser configured to generate laser light and a laser control module configured to receive at least a portion of the laser light generated by the laser, to generate a control signal and to feed the control signal back to the laser for stabilizing the frequency, wherein the laser control module includes a tunable frequency discriminating element which is preferably continuously frequency tunable, and where the laser control module is placed outside the laser cavity.

Abstract: A photonic reflector device includes a first layer, a second layer, and a third layer. The first layer, which functions as a retro-reflector, is formed of a first material contacting a second material and having a non-planar interface therebetween. The second layer, which functions as a photonic crystal, includes third and fourth materials that have different refractive indices from one another and are configured such that the second layer has a periodic optical potential along at least one dimension. The third layer, which functions as a Lambertian scatterer, includes a plurality of inclusions in a first matrix material. In combination, the layers may be optimized to synergistically reflect targeted wavelengths and/or polarizations of light.

Abstract: An optical system for receiving light scanned from different light origination locations in space can include a Liquid Crystal (LC) waveguide (LCW), including first and second LCW light ports. A beamsteering LC electrode can be included in or coupled to the LCW and can be configured to vary a receiving direction of light received at the second LCW light port in response to a varying electrical input signal applied to the LC electrode to scan receiving of light at the second LCW light port from different light origination locations in space. A photodetector can be optically coupled to the first LCW light port, such as to detect waveguided light from different light origination locations in space received in response to the varying electrical input signal applied to the first LC electrode. Ranger, bright-spot locking, laser detection, direct detect and coherent lidar, wavelength detection, and other techniques and use cases are possible.

Abstract: A photonic circuit with a hybrid III-V on silicon or silicon-germanium active section, that comprises an amplifying medium with a III-V heterostructure (1, QW, 2) and an optical wave guide. The wave guide comprises a coupling section (31) facing a central portion of the amplifying medium, a propagation section (34, 35) and a modal transition section (32, 33) arranged between the coupling section and the propagation section. In the modal transition section, the optical wave guide widens progressively from the propagation section towards the coupling section.

Abstract: The LiDAR system includes a coherent receiver disposed in a reference path. The coherent receiver includes a 90° optical hybrid to receive a portion of an optical beam along the reference path and a local oscillator (LO) signal to generate multiple output signals. The coherent receiver includes a first photodetector to receive a first and a second output signal to generate a first mixed signal, and a second photodetector to receive a third and a fourth output signal to generate a second mixed signal. The LiDAR system further includes a processor to combine the first mixed signal and the second mixed signal to generate a combined reference signal to suppress a negative image of a reference beat frequency signal to estimate a phase noise of the optical source to determine range and velocity information of the target.

Abstract: An optical device including a waveguide grating is disclosed. The optical device may be used as an optical cavity for a laser device, for instance, of an integrated laser device for light detection and ranging (Lidar) applications. In one aspect, the optical device includes a waveguide grating for guiding light, a heating layer provided beneath or above the waveguide grating, and two or more contacts for passing a current through the heating layer, to generate heat in the heating layer. The heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating.

Abstract: Disclosed embodiments include laser systems. An illustrative laser system includes a tunable laser. A beam splitter is operatively couplable to an output of the laser and is configured to split light output from the laser into a first path and a second path. A first modulator is disposed in the first path and is configured to generate first set of sidebands. A bandpass filter circuit includes a fiber Bragg grating filter and is operatively couplable to receive output from the first modulator and to pass a selected sideband of the first set of sidebands. A lock circuit is disposed in the second path, is configured to determine and stabilize wavelength of the laser, and is further configured to cooperate with the fiber Bragg grating filter to maintain a static lock point for the laser while allowing output of the first path to be tunable with respect to the lock point.

Abstract: A wavelength tunable laser device includes a substrate including silicon, the substrate having a waveguide, a first semiconductor element bonded to the substrate, the first semiconductor element including an active layer of a group III-V compound semiconductor, and a second semiconductor element bonded to the substrate, the second semiconductor element facing to the first semiconductor element in a direction along which light emitted from the first semiconductor element propagates, the second semiconductor element including a grating formed of a group III-V compound semiconductor. The grating selects a wavelength of light.

Abstract: The present invention provides devices, systems, and methods for producing bi-photons without the need for complex alignment or source design by the user. The invention provides a tunable source of high-brightness, high-visibility, bi-photons that can be configured for a number of applications.

Abstract: A method for enhancement of spontaneous Raman scattering (SRS) from gases comprising a multimode blue laser diode which receives feedback from a near concentric bidirectional multipass cavity in such a way as to generate a circulating power of order 100 W for a sample volume of 10 mm3. The feedback, provided via a volume Bragg grating, reduces the laser bandwidth to 4 cm?1. Spectra of spontaneous Raman scattering from ambient atmospheric air, detected collinearly with the pump, were recorded with a limit of detection below 1 part-per-million.

Abstract: An optical apparatus comprising at least two optoelectronic devices fabricated on the same substrate and in thermal communication with each other. A first optoelectronic device is configured to generate optical signals and provide them to an optical system via an optical output port. A second optoelectronic device is configured to provide heat compensation for the first optoelectronic device. An electrical circuitry provides first electrical signals to the first optoelectronic device and second electrical signals to the second optoelectronic device. The electrical circuitry is configured to adjust at least the second electrical signals to controllably adjust a temperature of the first optoelectronic device.

Abstract: A ridge type semiconductor optical device includes a first conductivity type semiconductor layer including at least a first stripe section; an active layer including at least an active stripe section on the first stripe section; a second conductivity type semiconductor layer including at least a second stripe section on the active stripe section; a ridge electrode on the second stripe section; an insulation film on an end face of each of the first stripe section, the active stripe section, and the second stripe section; and a film heater on the insulation film, the film heater overlapping with the end face of at least the first stripe section.

Abstract: One illustrative device disclosed herein includes a lower waveguide structure and an upper body structure positioned above at least a portion of the lower waveguide structure. In this example, the device also includes a grating structure positioned in the upper body structure, wherein the grating structure comprises a plurality of grating elements that comprise a tunable material whose index of refraction may be changed by application of energy to the tunable material.

Abstract: Apparatus for deflection of a beam of light includes a case, which is configured to be positioned in a path of the beam, and a liquid, which is contained within the case. An array of plates is disposed across a surface of the liquid. The plates are configured to rotate on the surface about respective axes, which are mutually parallel and are spaced apart by a predefined pitch. An actuator is configured to drive a rotation of the plates about the respective axes so as deflect the beam that is incident on the plates.

Abstract: A laser apparatus includes: a light source configured to generate laser light; and an optical negative feedback unit configured to narrow a spectral line of the laser light using optical negative feedback. A modulation signal is input to the light source to modulate a frequency of the laser light. A modulation amount in the frequency of the laser light is detected. A modulation sensitivity is calculated from (i) the modulation amount and (ii) an intensity of the modulation signal.

Abstract: A new multi-beam apparatus with a total FOV variable in size, orientation and incident angle, is proposed. The new apparatus provides more flexibility to speed the sample observation and enable more samples observable. More specifically, as a yield management tool to inspect and/or review defects on wafers/masks in semiconductor manufacturing industry, the new apparatus provide more possibilities to achieve a high throughput and detect more kinds of defects.