Pulse Patents (Class 372/30)
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Patent number: 8311069Abstract: A direct ultrashort laser system is provided. In another aspect of the present invention, a method of measuring laser pulse phase distortions is performed without requiring an adaptive pulse shaper or interferometry. In yet another aspect of the present invention, a system, a method of operating, a control system, and a set of programmable computer software instructions perform Multiphoton Intrapulse Interference Phase Scan processes, calculations, characterization and/or correction without requiring an adaptive pulse shaper.Type: GrantFiled: December 19, 2008Date of Patent: November 13, 2012Assignee: Board of Trustees of Michigan State UniversityInventors: Marcos Dantus, Vadim V. Lozovoy, Bingwei Wu
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Patent number: 8311068Abstract: A method of controlling a wavelength-tunable laser selecting an oscillation wavelength with a combination of a plurality of wavelength selection portions of which wavelength peak is different from each other, comprising: a first step of confirming a control direction of the wavelength selection portion in a case where a setting value is changed from a first setting value for achieving the first wavelength to a second setting value for achieving the second wavelength; a second step of setting a setting value that is shifted from the second setting value in a direction that is opposite of a pre-determined changing direction on the wavelength selection portion as a prepared setting value, when the control direction confirmed in the first step is opposite to the pre-determined changing direction; and a third step of changing the prepared setting value set in the second step to the second setting value.Type: GrantFiled: February 17, 2011Date of Patent: November 13, 2012Assignee: Sumitomo Electric Device Innovations, Inc.Inventors: Masao Shibata, Hirokazu Tanaka, Tsutomu Ishikawa
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Patent number: 8306076Abstract: An LD driver is disclosed where the power dissipation is reduced without enlarging the circuit scale. The LD driver, which drives a tunable LD including a SG-DGB region, a CSG-DBR region, and an SOA region, includes a DC/DC converter connected to current sources or voltage sources each coupled with at least two regions of the SG-DFB, CSG-DBR and SOA regions, and a voltage controller to control the output of the DC/DC converter which is commonly provided to the current sources or the voltage sources. The voltage controller independently monitors the bias conditions of the at least two regions above, and sets the output of the DC/DC converter so as to exceed a largest voltage among voltages currently provided to respective regions by a preset margin to operate the current sources or the voltage sources normally.Type: GrantFiled: March 22, 2011Date of Patent: November 6, 2012Assignee: Sumitomo Electric Industries, Ltd.Inventor: Tomoko Ikagawa
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Patent number: 8300669Abstract: A control system and apparatus for use with an ultra-fast laser is provided. In another aspect of the present invention, the apparatus includes a laser, pulse shaper, detection device and control system. A multiphoton intrapulse interference method is used to characterize the spectral phase of laser pulses and to compensate any distortions in an additional aspect of the present invention. In another aspect of the present invention, a system employs multiphoton intrapulse interference phase scan. Furthermore, another aspect of the present invention locates a pulse shaper and/or MIIPS unit between a laser oscillator and an output of a laser amplifier.Type: GrantFiled: June 23, 2009Date of Patent: October 30, 2012Assignee: Board of Trustees of Michigan State UniversityInventors: Marcos Dantus, Igor Pastirk, Vadim Lozovoy, Matthew Comstock
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Patent number: 8288967Abstract: A LED control circuit and method determine the frequency and duty of a LED driving signal according to a swing control signal and a dimming control signal, respectively. Responsive to the swing control signal, a pulse edge generator generates a clock whose frequency is determined by the swing control signal. Responsive to the clock and the dimming control signal, a duty ratio controller generates the LED driving signal whose frequency is determined by the clock frequency and whose duty is determined by the dimming control signal.Type: GrantFiled: March 11, 2010Date of Patent: October 16, 2012Assignee: Richtek Technology Corp.Inventor: Jing-Meng Liu
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Patent number: 8279903Abstract: A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.Type: GrantFiled: February 11, 2011Date of Patent: October 2, 2012Assignee: Imra America, Inc.Inventors: Lawrence Shah, James M. Bovatsek, Alan Y. Arai, Tadashi Yamamoto, Rajesh S. Patel, Donald J. Harter
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Publication number: 20120243568Abstract: A method of operating an all-fiber-based ultra short pulse laser system is provided. The steps includes providing an all-fiber-based ultra short pulse laser system having a pulse pump light source, a fiber saturable absorber, an assistant light source, at least a dispersion fiber, and a light coupling output; generating a broadband ASE via the pulse pump light source; making the all-fiber-based ultra short pulse laser system switch passive mode locking via the fiber saturable absorber; decreasing the restoring period of the fiber saturable absorber via the assistant light source; providing dispersion compensation via the dispersion fiber to output an ultra short pulse; and partially outputting a laser passing through the all-fiber-based ultra short pulse laser system via the light coupling output.Type: ApplicationFiled: June 5, 2012Publication date: September 27, 2012Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: YAO-WEN CHANG, CHIEN-MING HUANG
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Patent number: 8265105Abstract: The present invention is directed to methods and apparatuses for performing temporal scanning using ultra-short pulsewidth lasers in which only minimal (micro-scale) mechanical movement is required. The invention also relates to methods for obtaining high-accuracy timing calibration, on the order of femtoseconds. A dual laser system is disclosed in which the cavity of one or more of the lasers is dithered, by using a piezoelectric element. A Fabry-Perot etalon is used to generate a sequence of timing pulses used in conjunction with a laser beam produced by the laser having the dithered laser cavity. A correlator correlates a laser pulse from one of the lasers with the sequence of timing pulses to produce a calibrated time scale.Type: GrantFiled: July 29, 2009Date of Patent: September 11, 2012Assignee: IMRA America, Inc.Inventors: Gregg D. Sucha, Martin E. Fermann, Donald J. Harter
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Patent number: 8259764Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.Type: GrantFiled: June 21, 2006Date of Patent: September 4, 2012Assignee: Cymer, Inc.Inventors: Igor V. Fomenkov, William N. Partlo, Daniel J. Reiley, James K. Howey, Stanley C. Aguilar
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Patent number: 8260149Abstract: The device is structured to have a first electric modulation signal generator, a second electric modulation signal generator, a two-mode beat light source and an optical intensity modulator. The first electric modulation signal generator generates and outputs a first electric modulation signal. The second electric modulation signal generator generates and outputs a second electric modulation signal of a same frequency as the first electric modulation signal and to which a phase difference of ? radians is provided (? is a real number satisfying 0????). The two-mode beat light source is driven by the first electric modulation signal, and generates and outputs two-mode beat light. The two-mode beat light is inputted to the optical intensity modulator, and the optical intensity modulator generates and outputs a CS optical pulse train. Light transmittance of the optical intensity modulator is modulated by the second electric modulation signal.Type: GrantFiled: November 10, 2011Date of Patent: September 4, 2012Assignee: Oki Electric Industry Co., Ltd.Inventor: Shin Arahira
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Patent number: 8254419Abstract: Apparatus and method for generating controlled-linewidth laser-seed-signals for high-powered fiber-laser amplifier systems. In some embodiments, the natural chirp (frequency change of laser light over a short start-up time) of a DBR laser diode when driven by pulsed current is used to broaden the linewidth of the laser output, while adjusting the peak current and/or the pulse duration to obtain the desired linewidth.Type: GrantFiled: August 2, 2011Date of Patent: August 28, 2012Assignee: Lockheed Martin CorporationInventors: Matthias P. Savage-Leuchs, Lawrence A. Borschowa, Eric C. Honea, Jason D. Henrie
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Patent number: 8248001Abstract: A LED control circuit and method generate a high frequency clock signal with a fixed duty for a LED driver, to supply a switching current to drive a LED to emit light flashing at a modulated high frequency and with a fixed duty. By controlling the flashing LED light within certain flashing frequency range, the circuit and method allow a LED light source for expelling, confusing or trapping insects but serving only an illuminative or decorative purpose to human eyes, due to the difference between human beings and insects in visual perception of flashing frequencies.Type: GrantFiled: March 19, 2009Date of Patent: August 21, 2012Assignee: Richtek Technology Corp.Inventor: Jing-Meng Liu
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Patent number: 8238390Abstract: Methods stabilize the output of a pulsed laser system using pulse shaping capabilities. In some embodiments, transient effects following a transition between a QCW regime and a pulse shaping regime are mitigated by ensuring that the average QCW optical power substantially corresponds to the average pulsed optical power outputted in a steady-state operation of the pulsed laser system in the pulse shaping regime. The QCW signal or the pulse shaping signal may be adapted for this purpose. In other embodiments, transient effects associated with non-process pulses emitted between series of consecutive process pulses are mitigated through the proper use of sequential pulse shaping.Type: GrantFiled: May 18, 2010Date of Patent: August 7, 2012Assignee: Institut National d'OptiqueInventors: Pascal Deladurantaye, Louis Desbiens, Yves Taillon, Dany Lemieux, Brian W. Baird
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Patent number: 8238387Abstract: There is provided a mode-locked laser device including: a resonator; a solid-state laser medium that is disposed in the resonator and outputs oscillation light in accordance with the incidence of excitation light; a saturable absorber that is disposed in the resonator and induces soliton mode-locking; a group velocity dispersion correction component that is disposed in the resonator and controls group velocity dispersion in the resonator; and an excitation portion that causes excitation light to be incident at the solid-state laser medium, wherein a resonator length of the resonator is at least a resonator length with which soliton mode-locking is inducible and is less than a resonator length with which non-soliton mode-locking is inducible.Type: GrantFiled: October 22, 2009Date of Patent: August 7, 2012Assignee: FUJIFILM CorporationInventor: Shogo Yamazoe
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Patent number: 8238386Abstract: It is an object of the present invention to provide a compact and low-cost system for generating ultra short high energy laser light pulses that does not use the known CPA scheme. The proposed approach is based on spectral filtering of laser light pulses of a mode locked laser source. The used mode locked laser source can be of any kind as long as its filtered residual pulse bandwidth supports pulse durations longer than 20 ps and up to 1 ns. After filtering the laser light pulses are directly amplified in an amplification element consisting of one or more amplification stages. At the same time or just after amplification the light pulses are spectrally broadened through a spectral broadening element, for example a fiber of suitably chosen core diameter and length to achieve a spectral bandwidth that is wide enough to support sub 10 ps pulses. Finally, the spectrally broadened laser light pulses are compressed by a compact dispersive element consisting of one or more Bragg gratings or a grating pair.Type: GrantFiled: May 21, 2010Date of Patent: August 7, 2012Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Jens Limpert, Andreas Tuennermann
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Patent number: 8233511Abstract: A high average power laser system with modulated gain suppression includes an input aperture associated with a first laser beam extraction path and an output aperture associated with the first laser beam extraction path. The system also includes a pinhole creation laser having an optical output directed along a pinhole creation path and an absorbing material positioned along both the first laser beam extraction path and the pinhole creation path. The system further includes a mechanism operable to translate the absorbing material in a direction crossing the first laser beam extraction laser path and a controller operable to modulate the second laser beam.Type: GrantFiled: May 18, 2010Date of Patent: July 31, 2012Assignee: Lawrence Livermore National Security, LLCInventor: Andrew James Bayramian
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Patent number: 8208505Abstract: A laser system provides harmonic generation in a laser beam pulse. In another aspect of the present invention, a laser operably remits a laser pulse, a gaseous optical medium operably creates third or greater harmonic generation in the pulse, and a controller characterizes and compensates for distortions in the pulse. A further aspect of the present invention employs multiple optical media arranged to cause cascading harmonic generations in a laser pulse.Type: GrantFiled: May 14, 2009Date of Patent: June 26, 2012Assignee: Board of Trustees of Michigan State UniversityInventors: Marcos Dantus, Don Ahmasi Harris, Vadim V. Lozovoy
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Patent number: 8207002Abstract: Devices for generating a laser beam are disclosed. The devices include a silicon micro ring having at least one silicon optical waveguide disposed at a distance from the micro ring. The radius and the cross-sectional dimension of the micro ring, the cross-sectional dimension of the waveguide, and the distance between the micro ring and the waveguide are determined such that one or more pairs of whispering gallery mode resonant frequencies of the micro ring are separated by an optical phonon frequency of silicon. Methods of manufacturing a lasing device including a silicon micro ring coupled with a silicon waveguide are also disclosed.Type: GrantFiled: August 2, 2011Date of Patent: June 26, 2012Assignee: The Trustees Of Columbia University In The City Of New YorkInventors: Xiaodong Yang, Chee Wei Wong
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Patent number: 8199784Abstract: A laser light source comprises a semiconductor laser adapted for pulsed operation, a partially transmitting wavelength selective light reflector. The semiconductor laser comprises a front facet and a back facet. The front facet and the back facet define an internal laser cavity. The internal laser cavity comprises a laser active medium. The partially transmitting wavelength selective light reflector has a peak reflectivity within a gain bandwidth of said laser active medium. The wavelength selective light reflector and the back facet define an external laser cavity. A roundtrip time of light in the external laser cavity is about 20 nanoseconds or less. A full width half maximum bandwidth of the wavelength selective light reflector is adapted to accommodate at least 12 longitudinal modes of the internal laser cavity and at least 250 longitudinal modes of the external laser cavity.Type: GrantFiled: October 10, 2008Date of Patent: June 12, 2012Assignee: Oclaro Technology LimitedInventors: Stefan Mohrdiek, Joerg Troger, Nicolai Matuschek
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Patent number: 8197722Abstract: Compositions capable of simultaneous two-photon absorption and higher order absorptivities are provided. Compounds having a donor-pi-donor or acceptor-pi-acceptor structure are of particular interest, where the donor is an electron donating group, acceptor is an electron accepting group, and pi is a pi bridge linking the donor and/or acceptor groups. The pi bridge may additionally be substituted with electron donating or withdrawing groups to alter the absorptive wavelength of the structure. Also disclosed are methods of generating an excited state of such compounds through optical stimulation with light using simultaneous absorption of photons of energies individually insufficient to achieve an excited state of the compound, but capable of doing so upon simultaneous absorption of two or more such photons. Applications employing such methods are also provided, including controlled polymerization achieved through focusing of the light source(s) used.Type: GrantFiled: July 30, 2001Date of Patent: June 12, 2012Assignee: The California Institute of TechnologyInventors: Seth Marder, Joseph Perry
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Patent number: 8184670Abstract: In a pulsed laser diode driver an energy storage capacitor is continuously being charged to a supply voltage Vr. When a pulse is initiated, energy stored in the capacitor is delivered to the laser diode load. The capacitor voltage Vd at the end of a pulse is used to control Vr to ensure that Vd is maintained above a minimum voltage Vm required to ensure operation of a current control device (such as FET) just above saturation. Test pulses (such as with attenuated currents or reduced pulsewidth) may be fired to determine an initial optimum value for Vr. After a test pulse, a slightly high estimate for Vr may be used and may be iterated (incremented) down to an optimum value Vm during a firing burst. A digital processor may be used to calculate and store data to optimize the performance. Various embodiments are disclosed.Type: GrantFiled: October 7, 2010Date of Patent: May 22, 2012Assignee: Analog Modules, Inc.Inventors: Ian D. Crawford, John A. Harwick, Timothy M Ayres
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Patent number: 8155160Abstract: A device is provided for igniting a fuel-air mixture in a combustion chamber of an internal combustion engine with the aid of electromagnetic radiation, in particular light. The device includes at least two laser radiation sources, each having an optical resonator. The resonators are spatially oriented with respect to one another in such a way that modes of the laser radiation sources are coupled to one another and are able to generate time-shifted pulses of the electromagnetic radiation.Type: GrantFiled: October 24, 2008Date of Patent: April 10, 2012Assignee: Robert Bosch GmbHInventors: Werner Herden, Martin Weinrotter, Heiko Ridderbusch
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Patent number: 8139616Abstract: A pulsed light generator of the invention includes: an excitation light source; a fiber grating into which excitation light from the excitation light source enters; a rare-earth doped optical fiber optically coupled with the fiber grating, in which a rare-earth element is doped into a core, serving as an optical transmitting section; an optical switch including a deflection element for causing a Q-switching operation; a first optical fiber that causes light from the rare-earth doped optical fiber to enter into the optical switch; and a second optical fiber for waveguiding pulsed light output from the optical switch. One surface side of the optical switch, into which light enters, is subjected to anti-reflection treatment with a reflectance with respect to a wavelength of the pulsed light output from the optical switch being 0.1% or less.Type: GrantFiled: July 22, 2010Date of Patent: March 20, 2012Assignee: Fujikura Ltd.Inventor: Michihiro Nakai
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Patent number: 8135049Abstract: In an optical pulse generating apparatus including a metal layer having an incident/reflective surface adapted to receive incident light and output its reflective light as an optical pulse signal, a dielectric layer formed on an opposite surface of the metal layer opposing the incident/reflective surface, and a dielectric layer exciting unit for exciting the dielectric layer on a time basis, the incident light exciting surface plasmon resonance light in the metal layer while the dielectric layer is excited on a time basis, so that an extinction coefficient of the dielectric layer is made negative.Type: GrantFiled: July 14, 2009Date of Patent: March 13, 2012Assignee: Stanley Electric Co., Ltd.Inventor: Takahiro Matsumoto
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Publication number: 20120044963Abstract: The present invention relates to an apparatus for stabilizing second harmonic wave pulse output in a laser system operating by pulses. The apparatus of the present invention comprises: a pulse laser oscillating unit (110) which outputs a laser pulse; a nonlinear crystal (120) which converts the laser pulse of a first wavelength output by the pulse laser oscillation unit (110) into a second harmonic wave with a value that is half of the first wavelength, and outputs the converted second harmonic wave; and an optical absorption filter (130) which absorbs a portion of the energy of the converted second harmonic laser pulse from the nonlinear crystal (120) to output the second harmonic wave with a lower energy. The thus-configured apparatus of the present invention supplies a fundamental wave in a stable state and having a small PTP value and high level energy to the nonlinear crystal, in order to obtain the second harmonic wave which is in a more stable state and has a small PTP value and a variety of energies.Type: ApplicationFiled: April 28, 2010Publication date: February 23, 2012Applicant: LUTRONIC CORPORATIONInventors: Haelyung Hwang, Seunghwan Kong, Huicheol Lee
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Patent number: 8120778Abstract: The invention relates to scanning pulsed laser systems for optical imaging. Coherent dual scanning laser systems (CDSL) are disclosed and some applications thereof. Various alternatives for implementation are illustrated, including highly integrated configurations. In at least one embodiment a coherent dual scanning laser system (CDSL) includes two passively modelocked fiber oscillators. The oscillators are configured to operate at slightly different repetition rates, such that a difference ?fr in repetition rates is small compared to the values fr1 and fr2 of the repetition rates of the oscillators. The CDSL system also includes a non-linear frequency conversion section optically connected to each oscillator. The section includes a non-linear optical element generating a frequency converted spectral output having a spectral bandwidth and a frequency comb comprising harmonics of the oscillator repetition rates.Type: GrantFiled: March 6, 2009Date of Patent: February 21, 2012Assignee: IMRA America, Inc.Inventors: Martin E. Fermann, Ingmar Hartl
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Patent number: 8094691Abstract: The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.Type: GrantFiled: June 15, 2010Date of Patent: January 10, 2012Assignee: Imra America, Inc.Inventors: Donald Harter, Gyu Cho, Zhenlin Liu, Martin Fermann, Xinhua Gu, Salvatore Nati, Lawrence Shah, Ingmar Hartl, Mark Bendett
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Publication number: 20120002690Abstract: An ultrashort pulse/ultra-high power laser diode with a simple structure and configuration is provided. In a method of driving a laser diode, the laser diode is driven by a pulse current which is 10 or more times higher than a threshold current value. The width of the pulse current is preferably 10 nanoseconds or less, and the value of the pulse current is specifically 0.4 amperes or over.Type: ApplicationFiled: August 18, 2011Publication date: January 5, 2012Applicant: SONY CORPORATIONInventors: Hiroyuki Yokoyama, Shunsuke Kono, Tomoyuki Oki, Masao Ikeda, Takao Miyajima, Hideki Watanabe
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Patent number: 8081668Abstract: A laser processes a workpiece with laser pulses delivered at random time intervals and at substantially constant energy levels by characterizing the laser cavity discharge behavior and utilizing that information for adjusting dummy pulse time periods to compensate for the energy errors. Dummy pulses are laser pulses that are blocked from reaching a workpiece. A second way for providing constant pulse energies employs an AOM for varying amounts of laser energy passed to the workpiece. A third way of providing constant pulse energies entails extending the pulse period of selected pulses to allow additional laser cavity charging time whenever a dummy pulse is initiated.Type: GrantFiled: October 26, 2009Date of Patent: December 20, 2011Assignee: Electro Scientific Industries, Inc.Inventors: Keith Grant, Steve Stone, Brady Nilsen
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Patent number: 8078062Abstract: The device is structured to have a first electric modulation signal generator, a second electric modulation signal generator, a two-mode beat light source and an optical intensity modulator. The first electric modulation signal generator generates and outputs a first electric modulation signal. The second electric modulation signal generator generates and outputs a second electric modulation signal of a same frequency as the first electric modulation signal and to which a phase difference of ? radians is provided (? is a real number satisfying 0????). The two-mode beat light source is driven by the first electric modulation signal, and generates and outputs two-mode beat light. The two-mode beat light is inputted to the optical intensity modulator, and the optical intensity modulator generates and outputs a CS optical pulse train. Light transmittance of the optical intensity modulator is modulated by the second electric modulation signal.Type: GrantFiled: November 6, 2008Date of Patent: December 13, 2011Assignee: Oki Electric Industry Co., Ltd.Inventor: Shin Arahira
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Publication number: 20110268142Abstract: When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.Type: ApplicationFiled: June 7, 2011Publication date: November 3, 2011Applicant: NIKON CORPORATIONInventors: Akira Tokuhisa, Yasutoshi Takada
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Patent number: 8040929Abstract: Embodiments described herein include a system for producing ultrashort tunable pulses based on ultra broadband OPA or OPG in nonlinear materials. The system parameters such as the nonlinear material, pump wavelengths, quasi-phase matching periods, and temperatures can be selected to utilize the intrinsic dispersion relations for such material to produce bandwidth limited or nearly bandwidth limited pulse compression. Compact high average power sources of short optical pulses tunable in the wavelength range of 1800-2100 nm and after frequency doubling in the wavelength range of 900-1050 nm can be used as a pump for the ultra broadband OPA or OPG. In certain embodiments, these short pump pulses are obtained from an Er fiber oscillator at about 1550 nm, amplified in Er fiber, Raman-shifted to 1800-2100 nm, stretched in a fiber stretcher, and amplified in Tm-doped fiber.Type: GrantFiled: March 25, 2005Date of Patent: October 18, 2011Assignee: IMRA America, Inc.Inventors: Gennady Imeshev, Martin Fermann
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Patent number: 8030628Abstract: A pulse modifier, and associated lithographic apparatus and a method for manufacturing a device, is disclosed. The pulse modifier is configured to receive an input pulse of radiation and further configured to emit a plurality of corresponding output pulse portions of radiation, wherein the respective pulse portions are respectively mirrored about an axis transverse to the optical axis and mirrored about a point of the optical axis of the pulse portions.Type: GrantFiled: November 26, 2008Date of Patent: October 4, 2011Assignee: ASML Netherlands B.V.Inventor: Hako Botma
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Patent number: 8023537Abstract: An optical pulse train generator 10 includes beat light generation means 11 for generating a beat light 21 having a predetermined repeated frequency, a highly nonlinear fiber 12 for generating a pulse train 22 formed by adding a side mode to the beat light 21 by a four-wave mixing (FWM), and a band pass filter (BPF) 13 for adjusting a power balance of the side mode of the pulse train 22 so as to shape the frequency spectrum.Type: GrantFiled: September 29, 2008Date of Patent: September 20, 2011Assignee: The Furukawa Electric Co., Ltd.Inventor: Takashi Inoue
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Patent number: 8009707Abstract: An rf pulse compressor has a single high Q cavity resonator fed by a four port hybrid coupler which is connected to the resonator at coupling ports located at the intersection of two of the resonator's orthogonal axes with the resonator cavity walls. The hybrid coupler divides pulse power from an rf pulse power source and excites two space and phase orthogonal modes in the single cavity, the stored energy of which aids in producing compressed pulses at the output of the hybrid. On-axis perturbations in the cavity walls can be used to lock the orthogonal orientation of the modes excited in the cavity.Type: GrantFiled: February 26, 2010Date of Patent: August 30, 2011Inventor: Ray M. Johnson
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Patent number: 8005124Abstract: A method for producing wide bandwidth laser emission responsive to high frequency electrical input signals, including the following steps: providing a heterojunction bipolar transistor device having collector, base, and emitter regions; providing at least one quantum size region in the base region, and enclosing at least a portion of the base region in an optical resonant cavity; coupling electrical signals, including the high frequency electrical input signals, with respect to the collector, base and emitter region, to cause laser emission from the transistor device; and reducing the operating beta of the transistor laser device to enhance the optical bandwidth of the laser emission in response to the high frequency electrical signals.Type: GrantFiled: October 14, 2009Date of Patent: August 23, 2011Assignee: The Board of Trustees of the University of IllinoisInventors: Han Wui Then, Gabriel Walter, Milton Feng, Nick Holonyak, Jr.
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Patent number: 7991027Abstract: Apparatus and method for generating controlled-linewidth laser-seed-signals for high-powered fiber-laser amplifier systems. In some embodiments, the natural chirp (frequency change of laser light over a short start-up time) of a DBR laser diode when driven by pulsed current is used to broaden the linewidth of the laser output, while adjusting the peak current and/or the pulse duration to obtain the desired linewidth.Type: GrantFiled: March 1, 2010Date of Patent: August 2, 2011Assignee: Lockheed Martin CorporationInventors: Matthias P. Savage-Leuchs, Lawrence A. Borschowa
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Patent number: 7983316Abstract: A pulsed multiple color laser system is disclosed having particular application for incorporation into a digital holographic printer for producing RGB color reflection holograms. A Nd:YLF crystal 1 in a laser cavity is excited to produce an emission at 1313 nm which is frequency converted by doubling to 656.5 nm and by tripling to 437.7 nm. In a separate cavity a similar Nd:YLF crystal 1a is synchronously or asynchronously excited to produce an emission at 1047.1 nm (or at the related line of 1053 nm) which is frequency converted by doubling to 523.6 nm (or 526.5 nm). The emissions at 437.7 nm and 656.5 nm are combined co-linearly with the emission at 523.6 nm (or 526.5 nm) to produce a single RGB pulsed laser beam.Type: GrantFiled: February 23, 2010Date of Patent: July 19, 2011Assignee: Geola Technologies Ltd.Inventors: Alexey Rodin, Florian Vergnes, David Brotherton-Ratcliffe
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Patent number: 7974319Abstract: High power optical pulses generating methods and laser oscillators are provided. A light generating module generates seed optical pulses having predetermined optical characteristics. A spectrum tailoring module is then used to tailor the spectral profile of the optical pulses. The spectral tailoring module includes a phase modulator which imposes a time-dependent phase variation on the optical pulses. The activation of the phase modulator is synchronized with the passage of the optical pulse therethough, thereby efficiently reducing the RF power necessary to operate the device.Type: GrantFiled: March 20, 2009Date of Patent: July 5, 2011Assignee: Institut National D'OptiqueInventors: Pascal Deladurantaye, Louis Desbiens, Marco Michele Sisto, Mathieu Drolet, Vincent Roy, Yves Taillon
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Patent number: 7970030Abstract: A medical laser device is described that generates a laser beam controllable with presets as to pulse duration, pulse repetition rate, power and energy per pulse. The device also provides presets with respect to water and air outputs. Parametric values for power, pulse duration, pulse repetition rate, and energy per pulse as well as for water and air settings may be programmed by an end user and stored as presets.Type: GrantFiled: February 9, 2009Date of Patent: June 28, 2011Assignee: Biolase Technology, Inc.Inventors: Ioana M. Rizoiu, Dmitri Boutoussov
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Patent number: 7970027Abstract: Output optical energy pulses including relatively high energy magnitudes at the beginning of each pulse are disclosed. As a result of the relatively high energy magnitudes which lead each pulse, the leading edge of each pulse includes a relatively large slope. This slope is preferably greater than or equal to 5. Additionally, the full-width half-max value of the output optical energy distributions are between 0.025 and 250 microseconds and, more preferably, are about 70 microseconds. A flashlamp is used to drive the laser system, and a current is used to drive the flashlamp. A flashlamp current generating circuit includes a solid core inductor which has an inductance of 50 microhenries and a capacitor which has a capacitance of 50 microfarads.Type: GrantFiled: October 19, 2010Date of Patent: June 28, 2011Assignee: Biolase Technology, Inc.Inventors: Ioana M. Rizoiu, Andrew I. Kimmel
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Patent number: 7970026Abstract: A continuously pumped, mode-locked laser is disclosed, which includes a cavity dumper that can remove a constant fraction of the light from the cavity at every 1/f period of time, independent of the time at which the first pulse in a train is initiated. The cavity dumper includes a modulator and two output arms, denoted as a primary output arm and a secondary output arm. When a user desires a train of pulses, the pulses are directed to the primary output arm. Between trains of pulses, when no pulse is desired by the user, the pulses are directed to the secondary output arm, which terminates in an absorber or at a secondary optical system. In this manner, the energy contained in each output pulse is essentially constant, from pulse-to-pulse and from train-to-train. This may overcome the disadvantage of many lasers that have a single output arm, in which the first pulse in a train may have an energy that depends on the length of the inactive period that immediately precedes the train.Type: GrantFiled: December 30, 2009Date of Patent: June 28, 2011Assignee: Ekspla Ltd.Inventors: Mikhail Grishin, Andrejus Michailovas
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Patent number: 7961763Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described.Type: GrantFiled: June 28, 2006Date of Patent: June 14, 2011Assignee: Applied Materials South East Asia Pte. Ltd.Inventors: Dov Furman, Gad Neumann, Mark Wagner, Noam Dotan, Ram Segal, Shai Silberstein
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Patent number: 7957440Abstract: A laser device that includes a dual pulse-width laser-pumping circuit generates long and short laser pulses. The laser-pumping circuit employs a single power supply with dual high voltage outputs that are selectable under control of a user. The laser device conveniently generates long and short laser pulses or a mix of the two for performing specialized surgical procedures.Type: GrantFiled: February 10, 2008Date of Patent: June 7, 2011Assignee: Biolase Technology, Inc.Inventor: Dmitri Boutoussov
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Patent number: 7957435Abstract: A device for generating light pulses that are separated in terms of time has a light source that emits a sequence of light pulses. A regulation signal is formed within a regulation circuit from a cycle signal and the light pulse sequence of the light sources via a phase detector. The regulation circuit includes a regulator that generates a setting signal that influences the repeat frequency of the light pulse sequence of the light source.Type: GrantFiled: October 2, 2008Date of Patent: June 7, 2011Assignee: TOPTICA Photonics AGInventors: Christian Rausch, Florian Tauser
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Patent number: 7957619Abstract: An all-fiber optical pulse compression arrangement comprises a concatenated arrangement of a section of input fiber (e.g., a single mode fiber), a graded-index (GRIN) fiber lens and a section of pulse-compressing fiber (e.g., LMA fiber). The GRIN fiber lens is used to provide mode matching between the input fiber (supporting the propagation of chirped optical pulses) and the pulse-compressing fiber, with efficient pulse compression occurring along the length of the LMA fiber. The dispersion and length of the LMA fiber section are selected to provide the desired degree of pulse compression; for example, capable of reconstituting a femtosecond pulse as is used in supercontinuum generation systems.Type: GrantFiled: October 26, 2010Date of Patent: June 7, 2011Assignee: OFS Fitel, LLCInventors: Jeffrey W. Nicholson, Andrew D. Yablon
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Patent number: 7953127Abstract: In a mode-locked laser-diode-excited laser apparatus: a solid-state laser medium is arranged at a distance of at most twice the Rayleigh range from a saturable absorbing mirror with a depth of absorbing modulation of at least 0.4%; the total intracavity dispersion is smaller than zero and makes oscillating light have such a pulse bandwidth that the saturable absorbing mirror can suppress a background pulses other than soliton pulses repeated with a fundamental repetition period, and the magnitude of the total intracavity dispersion has a predetermined relationship with a pulse width of the oscillating light; and an output mirror is a negative-dispersion mirror being constituted by two multilayer mirrors and a cavity layer sandwiched between the two multilayer mirrors, and causing a mirror dispersion of ?3000 fsec2 to ?600 fsec2 and realizes a reflectance of 97% to 99.5%.Type: GrantFiled: June 19, 2009Date of Patent: May 31, 2011Assignee: FUJIFILM CorporationInventors: Tadashi Kasamatsu, Shogo Yamazoe, Makio Usui
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Patent number: 7949018Abstract: In a mode-locked laser-diode-excited laser apparatus: a solid-state laser medium is arranged at a distance of at most twice the Rayleigh range from a saturable absorbing mirror with a depth of absorbing modulation of at least 0.4%; the total intracavity dispersion is smaller than zero and makes oscillating light have such a pulse bandwidth that the saturable absorbing mirror can suppress a background pulses other than soliton pulses repeated with a fundamental repetition period, and the magnitude of the total intracavity dispersion has a predetermined relationship with a pulse width of the oscillating light; and an output mirror is a negative-dispersion mirror being constituted by three or more multilayer mirrors and cavity layers arranged at predetermined intervals between the three or more multilayer mirrors, and causing a mirror dispersion of ?3000 fsec2 to ?600 fsec2 and realizes a reflectance of 97% to 99.5%.Type: GrantFiled: June 19, 2009Date of Patent: May 24, 2011Assignee: FUJIFILM CorporationInventors: Tadashi Kasamatsu, Shogo Yamazoe, Makio Usui
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Patent number: 7940817Abstract: A method to stabilize the repetition rate in a passive harmonic mode-locked fiber laser employing semiconductor saturable absorbers. The pulse organization is accomplished by electrically modulating the amplifier pump source that in turn optically modulates the saturable loss of semiconductor absorber. Due to an efficient modulation mechanism of the cavity loss, the method can be used to generate an actively mode-lock pulse train.Type: GrantFiled: March 7, 2003Date of Patent: May 10, 2011Assignee: Reflekron OyInventors: Oleg Okhotnikov, Mircea Guina
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Patent number: 7920610Abstract: Methods of operating a frequency-converted laser source are disclosed. According to particular disclosed embodiments, a laser diode is driven in a pulsed mode to define pixel intensity values corresponding to desired gray scale values of image pixels in an image plane of the laser source. The pixel intensity values are a function of a laser control signal comprising a discontinuous pulse component, a relatively constant intensity component I, and a continuously variable intensity component I*. The pulse width w of the discontinuous pulse component is selected from a set of discrete available pulse widths according to a desired pixel gray scale value. A low-end pulse width w of the set of available pulse widths is established for a range of low-end pixel gray scale values and progressively larger pulse widths w are established for ranges of progressively higher pixel gray scale values.Type: GrantFiled: August 27, 2009Date of Patent: April 5, 2011Assignee: Corning IncorporatedInventors: David August Sniezek Loeber, Nobutoshi Sekiguchi, Daniel Ohen Ricketts