Abstract: A physical vapor deposition (PVD) chamber and a method of operation thereof are disclosed. Chambers and methods are described that provide a chamber comprising one or more of contours that reduce particle defects, temperature control and or measurement and and/or voltage particle traps to reduce processing defects.

Abstract: A system detects Electro Static Discharge (ESD) of an electronic device by sensing a ground voltage of an electronic device, comparing the sensed ground voltage with a predetermined reference voltage and if the sensed ground voltage exceeds the reference voltage, performs at least one predetermined operation of the electronic device.

Abstract: The core of a high temperature furnace has an elongated central test cavity for testing/calibration of a temperature-sensitive component, such as the probe of a thermocouple. At least three electrical heating elements as positioned adjacent to the test cavity, including two elements adjacent to the opposite end portions of the test cavity, respectively, and a center element between the end elements. A uniform temperature profile is maintained in the cavity by control circuitry that manages the supply of electrical power to the heating elements, by periodically configuring interconnections of the elements during multiple phases of a duty cycle. The duty cycle includes a first phase in which current is passed through the center element, a second phase in which current is passed through the end elements in series, and a third phase in which current is passed through one of the end elements and also through the center element without passing current through the other end element.

Abstract: A heating system includes first and second heating devices, a temperature sensor, a first controller and a second controller. The first and second heating devices are respectively arranged above a crucible and around the crucible for heating semiconductor material in the crucible. The temperature sensor is configured to detect the temperature of the first heating device and to generate a temperature signal. The first controller is configured to control operation of the first heating device so as to adjust the temperature thereof based on the temperature signal. The second controller is coupled to the second heating device and is configured to control operation of the second heating device so as to adjust the temperature thereof, based on an external control signal.

Abstract: The invention relates to a dental furnace with a heating chamber, with at least two heating elements acting on the heating chamber and one control apparatus, which interacts with the heating elements, for the voltage supply to the heating elements. The control apparatus (22) supplies at least two heating elements (12) separately with voltage. In addition, the control apparatus (22) matches the power output of at least one heating element (12) to the requirements of the temperature distribution in the heating chamber (30).

Abstract: Furnace cart assembly for loading high temperature vacuum furnaces for treating target material, for example, metal parts, under extreme temperature and vacuum environments. The furnace cart includes electrical heating elements as an integral part of the cart, which elements are adapted for releasable connection to the furnace electrical supply. When so connected the furnace cart heating elements can form a part of the heating system of the furnace. The lower part of the furnace cart assembly, including a frame above and supported on wheels, the frame having heat reflection means on at least Its upper surfaces providing some protection from heat is preferably also protected from heat during furnace operation by insulating material above the frame (the material desirably supported by the frame but separated therefrom).

Abstract: A system and method for developing a heat treatment process using a model radiative-heating oven, which repeatably and accurately simulates an industrial heat treatment system. In order to simulate the industrial heat treatment system, the model radiative-heating oven uses a variety of scaling factors, such as heating density parameters. The model radiative-heating oven also may have a quickly openable and closable object carrier, which facilitates a timely start and end of a desired heat treatment process. An oven temperature stabilizer also may be provided for thermally stabilizing the model radiative-heating oven prior to the desired heat treatment process. The present technique also may utilize a variety of heat profile controls, such as time, temperature, and power levels, to provide the desired heat profile in the heat treatment process.

Abstract: Through a chemical vapor deposition process, a tubular graphite body is fabricated as a hydrogen storage element that comprises a tubular graphite body forming an elongated shell and at least one metal plug closing an open end of the elongated shell so as to form a closed inside space for storing hydrogen gas.

Abstract: An electric arc furnace includes a container for receiving metal, an electrode spaced apart from the container, and an electrical power source coupled to the electrode and the container for generating an electrical discharge between the electrode and the container for melting the metal in the container. The arc furnace includes a flicker controller for reducing flicker induced in the power source by the electric arc furnace. The flicker controller consists of a switch electrically connected between the power source and the electrode, and a control system coupled to the switch. The switch includes a gating input for controlling a conduction interval of the switch, and the control system applies gating signals to the gating input for maintaining a magnitude of reactive current flow through the arc furnace substantially constant.

Abstract: A carbon powder inlet and a graphite powder collecting are oppositely arrange on a furnace body. At least a pair of electrodes are oppositely arranged in the furnace body with respect to a graphitizing area at an intermediate position between the inlet and the collecting port and are engaged with different timing.

Abstract: A direct resistance heating electrical furnace of the type in which a bed of electrically conductive elements are located between two spaced electrodes in the furnace, and a method of controlling the operation of same, are provided. The furnace is of the type having a generally tubular heating chamber with a pair of spaced electrodes associated therewith and conveniently located one at each end of the tubular heating chamber. The furnace has feed or discharge control means and the rate of feed or discharge is controlled according to the electrical resistance or current flow between the electrodes. No temperature measurement is required to control the furnace operation.

Abstract: A thermal analysis device with a sample transporting machine which automatically carries out pretreatment of a sample to quickly heat or cool it. The configuration includes an electric furnace, a temperature controller, a temperature program setter, a sample placing/removing program setter, and a sample transporter, wherein the said sample placing/removing program setter commands the said sample transporter to place the said sample in or remove it from the said electric furnace in synchronization with a synchronization signal from the said temperature program setter and in accordance with a preset sample placing/removing program and, hence, the said sample placing and removing operations (i.e. to place a sample in the electric furnace or, conversely to remove a sample from the electric furnace) are carried out in the electric furnace which is performing a heating operation or a cooling operation in accordance with a temperature program output by the said temperature program setter.

Abstract: A method and apparatus for automatically and dynamically tuning individual heater segments of a multi-zone furnace which allows simultaneous minimization of temperature gradients within the furnace and prevention of premature aging and failure of the segments by controlling the relative temperatures thereof and equalization of the contributions of the segments to the heating of the furnace. Furnace and heater temperatures are monitored and furnace temperatures are used to develop set point biases for automatic control of heater segment temperatures. Some segments are also controlled as a function of power applied to other segments. Temperatures sensed within the furnace are combined such as by averaging to effectively provide virtual sensors in locations where sensors cannot otherwise be practically provided.

Abstract: A high temperature vacuum furnace has a circulating path external to the heating chamber for facilitating inert gas circulation during initial convection heating of a high temperature vacuum furnace. The heating chamber of the furnace and a surrounding cooling gas introduction chamber are within a metallic convection shroud in such a way that the space in between defines a heating gas circulation chamber for circulating heated inert gas during low temperature heating for accelerating the heating-up of the hot zone to its normal operating temperatures. Once the hot zone has reached a selected temperature, the inert gas is pumped out and the furnace then operates in a vacuum. Quenching is achieved by introducing cooling gas into the heating chamber via nozzles through the heating chamber walls.

Abstract: A method and an apparatus for producing an active carbon using a carbon-containing material inclusive of an used active carbon as a raw material wherein the carbon-containing raw material is carbonized in a carbonizing unit to produce a carbonized material having electric conductivity and the carbonized material is then activated in an activating treatment unit installed downstream of the carbonizing unit in an atmosphere of steam with a power of electricity induced by electric discharge as well as a function of self-heating of the carbonized material with its own electric resistance are disclosed. The carbonizing unit is constructed in the form of a thermal radiation type batch furnace including an outer wall and a vessel mounted on a firing lattice in the outer wall while a heating chamber is formed therebetween.

Abstract: A reflow furnace control system is contemplated to give an optimum time-temperature profile of an object intended to be heated. The object is carried on a conveyor to move along a conveyor path in the reflow furnace during which it is heated by heaters disposed along the conveyor path. A data table is provided to store sets of control data relating to the conveyor speed and the operating temperatures of the individual heaters. Each set of the control data is closely associated with various conditional parameters indicative of configuration and material characteristics of the object and the required temperature to which the object is heated. Control data assigning section is interfaced with the data table so that it responds to the entry of the conditional parameters for retrieving from the data table a relevant control data. Based upon the retrieved control data, the furnace is controlled by the system to give an optimum time-temperature profile of the object.

Abstract: A vertical carbonizing furnace for use in the production of carbon fibers is provided with a vertically extending conduit of hollow rectangular parallelepiped. The lower end of the conduit is immersed in water thereby making a water seal from environmental air. The conduit is also provided with a gas withdrawal outlet which communicates with the upper portion of the conduit through a gas feeding duct for reuse. The mixture of a vapor evaporated from the water seal and an inert gas is withdrawn from the gas withdrawal outlet and fed to the upper portion of the conduit as gas for sealing thereby preventing fibers and the conduit made of carbon or graphite from being deteriorated by said vapor evaporated from the water seal and providing a gas for sealing the upper end of the conduit.

Abstract: In the fusion of vanadium pentoxide powder heat is generated in a melt of the powder by passing an electrical current along a current path in the melt and additional vanadium pentoxide powder is fed onto the surface of the melt. A furnace is used which has an overflow weir.