Glow Discharge Furnace Device Patents (Class 373/26)
  • Patent number: 6574264
    Abstract: An apparatus for growing a silicon ingot including a graphite crucible in which a quartz crucible is placed, a driving axis connected to a lower part of the graphite crucible to revolve and move the graphite crucible up and down so as to support the graphite crucible, a heating element to heat the graphite crucible, and an insulating wall to protect and thermally isolate the graphite crucible, heating means, and driving axis in part from the external environment. The driving axis includes a hollow axis part having a hollow inside, an insulating axis part attached to the bottom of the hollow axis part to inhibit heat transfer, and a cylindrical axis part attached to the bottom of the insulating axis part. The construction of the driving axis reduces a temperature gradient in the molten silicon, improving uniform heat distribution for increased silicon ingot quality.
    Type: Grant
    Filed: December 31, 2001
    Date of Patent: June 3, 2003
    Assignee: Siltron Inc.
    Inventors: Hong-Woo Lee, Joon-Young Choi, Hyon-Jong Cho
  • Patent number: 4716338
    Abstract: An electrode structure used in a glow discharge system for nitride hardening of metals. The structure includes an anode plate, a cathode plate, a conductor connected to the cathode plate and an insulating dielectric shroud which surrounds the conductor. The two plates are firmly attached to the dielectric shroud so as to prevent any air gaps across which an arc may form. The shroud includes a plurality of annular grooves at one end to prevent the surface of the shroud from being covered by extraneous matter which would allow an arc to form between the plates.
    Type: Grant
    Filed: September 3, 1985
    Date of Patent: December 29, 1987
    Inventor: Yung Rungz
  • Patent number: 4663763
    Abstract: A charge-load support for use in a glow discharge furnace comprises first and second coaxial tubular members joined at one end and capped at the other end to provide a re-entrant entry to the space between the members, the outer member serving to protect the inner member against conductive deposit build-up thereon and the members together defining a relatively long convoluted path from the capping member to the other end thereby serving to reduce the risk of tracking in use of the support.
    Type: Grant
    Filed: August 21, 1985
    Date of Patent: May 5, 1987
    Assignee: The Electricity Council
    Inventors: Ray Winstanley, Trevor Farrell, Malcolm Booth
  • Patent number: 4342918
    Abstract: This invention relates to a retort type apparatus for ion-nitriding treatment which is so designed as to effect heating and nitriding of a workpiece at high thermal efficiency, with excellent uniformity and in a short time, by using both glow discharge and heat produced by a heating element.
    Type: Grant
    Filed: August 27, 1980
    Date of Patent: August 3, 1982
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Akio Tanaka, Mizuo Edamura, Satoshi Furuitsu, Satoru Kunise