Abstract: Embodiments of the present disclosure relate to apparatus, systems and methods for substrate processing. A detachable substrate support is disposed within a processing volume of a processing chamber and the substrate support includes a substrate interfacing surface and a back surface. The pedestal hub has a supporting surface removably coupled to the substrate support. A hub volume of the pedestal hub includes temperature measuring assembly disposed therein positioned to receive electromagnetic energy emitted from the back surface of the substrate support. The temperature measuring assembly measures an intensity of the electromagnetic energy entering the assembly and generates intensity signals. An apparent temperature of the substrate is determined based on the intensity signals.

Abstract: Provided is a long-wave infrared detecting element including a magnetic field generator configured to generate a magnetic field, a substrate provided on the magnetic field generator, a magnetic-electric converter that is spaced apart from the substrate and configured to generate an electrical signal based on the magnetic field generated by the magnetic field generator, and an support unit that is provided on the substrate and supports the magnetic-electric converter in a state in which the magnetic-electric converter is spaced apart from the substrate, the support unit being configured to generate heat by absorbing incident infrared radiation, wherein the electrical signal changes corresponding to temperature changes of the magnetic-electric converter based on the incident infrared radiation directly absorbed in the magnetic-electric converter and temperature changes of the magnetic-electric converter based on the incident infrared radiation absorbed in the support unit.

Abstract: A method of determining the bow and twist of a nuclear fuel assembly that utilizes fiber optic shape sensing technology enclosed within a flexible sheath that transmits strain on the interior walls of a control rod guide thimble within the fuel assembly to a fiber cable of the shape sensing technology enclosed within the sheath. The sheath conforms to the interior dimensions of the interior walls of the guide thimble.

Abstract: Systems and methods for determining a temperature of a ferroelectric sensor are provided. The ferroelectric sensor has operational characteristics defined by a polarization versus voltage hysteresis loop. In one exemplary embodiment, the method includes applying a symmetrical periodic voltage waveform to the ferroelectric sensor so as to induce the ferroelectric sensor to traverse the polarization versus voltage hysteresis loop. The method further includes monitoring voltages across the ferroelectric sensor and polarization states of the ferroelectric sensor over a first time interval to determine a first zero field polarization state and a first coercive field voltage. The method further includes determining a first temperature value indicative of the temperature of the ferroelectric sensor based on the first coercive field voltage.