Abstract: A neutron generator having a target which is hit by a beam of hydrogen ions. The target comprises a metal layer having a large coefficient of absorption for hydrogen, which is provided on a carrier layer of a metal having small coefficients of absorption and diffusion for hydrogen and a large coefficient of thermal conductivity, and a first intermediate layer of another metal having a large coefficient of thermal conductivity and a low sputtering ratio between the metal and the carrier layer. Between the carrier layer and the first intermediate layer a second intermediate layer of a metal, having a coefficient of linear expansion of a value which is between the coefficients of linear expansion of the carrier layer and the first intermediate layer, is present.Such a target is suitable for being used in a neutron generator which is to provide a high neutron yield.