Abstract: An X-ray window for an X-ray component such as an X-ray detector. Windows of this kind must be as thin as possible so as to minimize X-ray absorption. The known material polypropylene is not available in the desired thickness of the order of 1 .mu.m, and stretching of this material so as to reduce the thickness causes an inadmissible spread in thickness. The material polyethylene naphthalate (PEN) in accordance with the invention is available in the desired thickness and with a much smaller spread in thickness. Furthermore, the window material should exhibit suitable mechanical properties (such as strength, rigidity and tightness) which are not allowed to degrade significantly under the influence of continuously varying circumstances in respect of pressure, temperature and X-rays. In comparison with the known polyethylene terephtalate (PET), PEN in this respect has better properties which satisfy the mechanical requirements.

Abstract: The invention relates to a reinforcing structure for a thin film, particularly for an ultrathin film permeable to X-ray and ultraviolet radiation, and a method for manufacturing a reinforcing structure for a thin film with a thickness less than 5 micrometers. According to the invention, on the surface of the thin film, there is formed, in a bakeing treatment of at least one step, a reinforcing structure made of some photosensitive material such as polymer.

Abstract: An exit window for an X-ray lithography beamline having a shape and thickness such that the exit window can withstand a pressure differential of at least 14.7 psi and allows an X-ray beam as passed through the window to have X-rays above and below a desired energy band substantially attenuated. The exit window includes a thin material having a window section disposed within an opening of a frame and a peripheral section which is integral with the window section and extends within the frame. The window section has a shape that is substantially concave along its width, substantially linear along its length and tapers to a flat surface near the periphery of the opening. A method of scanning the X-ray beam through a stationary exit window and onto an exposure field on a wafer is also disclosed.

Abstract: An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

Abstract: A dual entrance window ion chamber is provided for purposes of measuring x-ray exposure. The ion chamber includes a housing having a cavity formed therein and which defines an ion chamber. The housing has oppositely disposed first and second openings therein located on opposite sides of the chamber. First and second x-ray entrance windows respectively cover the first and second openings for permitting entrance of x-rays into the chamber. A collector is located in the chamber intermediate the first and second windows for collection of electrons for use in measuring x-ray exposure. The first and second windows are constructed differently from each other such that the first window is optimized so that the ion chamber provides a relatively flat energy response to x-rays over a first x-ray energy range. The second window is optimized so that the ion chamber provides a relatively flat energy response over a second x-ray energy range.

Abstract: A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.

Abstract: In one embodiment of the invention x-rays pass through an aluminum filter (18) to form filtered x-rays. At least a portion of the filtered x-rays then pass through a portion of a x-ray mask (22) to expose a portion of a photoresist layer overlying a semiconductor substrate. The aluminum filter removes high energy photons from the x-ray spectrum that adversely effect the lithographic patterning process.

Abstract: A method and apparatus for use in performing non-contact analytical evaluation of a semiconductor wafer, which needs to be kept clean, to be performed outside of clean room facilities. The apparatus maintains a clean environment surrounding the semiconductor wafer and a portion of the apparatus is substantially transparent to a probe beam of electromagnetic radiation such as X-rays and visible light. The invention substantially overcomes the expenses associated with locating analytical test equipment for testing semi-conductor wafers within clean room facilities.

Abstract: An X-ray apparatus includes an X-ray pickup window through which synchrotron radiation light is projected, the X-ray pickup window having an X-ray transmission film; and a correcting system for correcting an intensity distribution of the synchrotron radiation light; wherein the X-ray transmission film has at least one of a film thickness distribution and a transmissivity distribution changing substantially in a predetermined direction; and wherein the X-ray transmission film is so disposed that the predetermined direction is substantially aligned with the direction of change of the intensity distribution of the synchrotron radiation light.

Abstract: A composite window structure is described for transmitting x-ray radiation and for shielding radiation generated debris. In particular, separate layers of different x-ray transmissive materials are laminated together to form a high strength, x-ray transmissive debris shield which is particularly suited for use in high energy fluences. In one embodiment, the composite window comprises alternating layers of beryllium and a thermoset polymer.

Abstract: A light transmission type vacuum separating window for separating a vacuum area into a plurality of vacuum areas through a film that transmits the light of a wavelength area such as an X-ray area and an infrared ray area. This vacuum separating window includes a thin film that transmits the light. The vacuum area is separated into the plurality of vacuum areas through this thin film. The light is any one of an X-ray, an infrared ray, a visible ray and an ultraviolet ray. A metal or an alloy that turns out a liquid in a range of temperature of a using environment may be provided between the thin film and the support member for supporting the thin film. This metal is preferably gallium. The alloy preferably contains gallium and, more preferably, consists of 75.5 weight % gallium and 24.5 weight % indium.

Abstract: Reduction projection type X-ray lithography with an exposing beam wavelength of 40-150A, longer than in conventional 1:1 proximity exposure, has a high-vacuum space. This would reduce wafer replacement work efficiency and contaminate optical mirrors with substances released by a resist decomposed during exposure except for separating an optical system chamber and a wafer exposing chamber by a differential pumping section and a thin-film window. Wafer exposure is under atmospheric pressure, improving productivity, accuracy of exposure and longevity of the optical devices.

Abstract: Several ten thousands or several millions of juxtaposed hollow thin tubes, each having a diameter of, for example, 12 .mu.m and a length of 1 mm, are joined to each other to form a window having a predetermined open surface area. The window having a diameter of, for example, 30 mm, can withstand a differential pressure of several atm. A high-vacuum X-ray source and the window consisting of thin tubes having the aforementioned dimensions are connected through a differential evacuating device having a plurality of stages connected with a partitioning wall having an orifice of predetermined dimensions provided between the adjacent stages. The pressures at the two sides of the window are maintained to the atmospheric pressure and a pressure which is 1/10th of the atmospheric pressure, respectively. X-rays having a long wavelength of 10 .ANG.

Abstract: An optical device for interacting with x-ray radiation, wherein the device includes an optical element configured for use as part of a spectroscopy tube, proportional counter, Geiger counter, optical detector or similar optical instrument. An exposed surface of the optical element is coated with at least one bonded layer of boron hydride composition to protect against abrasion, corrosion and other forms of degradation, as well as to provide enhanced sealing of the Z material against leakage. Methods of bonding the desired coating to the optical element are also disclosed.

Abstract: A simple, low cost x-ray scanner providing enhanced resolution is formed by providing a straight-line optical path from an illuminating source, through the x-ray image to be scanned and thence to an imaging lens which forms an image on a CCD array. The x-ray film is fed by means of gravity to a pair of rollers, immediately above which are formed first and second apertures on either side of the roller. The film is eliminated through the apertures which provide a field stop for the optical system. A shutter immediately adjacent one of the apertures is coupled to a width-adjustment mechanism actuated by a feed guide for the film to thereby adjust the width of the aperture to the width of the film. The output of the CCD is modified to expand the output at low levels and compress it at high levels via a logarithmic mapping to adapt the high resolution CCD output to a lower resolution video display processor.

Abstract: An X-ray microscope has an X-ray filter for transmitting a wavelength between 43.7 and 65 .ANG. and a light source for emitting ultraviolet light of a wavelength of at least 100 nm in an optical path so that a specimen is irradiated with X rays and an image of an object is formed by an X-ray detector, in which the ultraviolet light is reflected from the X-ray filter to irradiate the specimen. Thus, the X-ray microscope allows biological observation to be made with a transmitted microscopic image of high quality and has advantages in design and choice of materials in fabricating its system.

Abstract: An X-ray volume analysis method of crystalline defects of a part (11), comprises the steps of positioning the part in the plane situated at equal distance from the focus of an X-ray source and a focusing plane (14); illuminating the part from a punctual X-ray source (10) by a beam of a large spectral width .DELTA..lambda. and of determined angular opening .DELTA..theta., the opening .DELTA..theta. of the beam being fixed by .DELTA..theta..ltoreq..DELTA..lambda./2d.cos.theta., d being the interreticular distance for the considered reticular planes; orienting the part (11) to obtain the diffraction on a chosen family of reticular planes (30); and collecting and analyzing the X-ray beam near the focusing plane or beyond.

Abstract: An X-ray window having a diamond X-ray transparent film, diamond reinforcing crosspieces and a substrate on which the diamond X-ray transparent film has been grown. As reinforcing crosspieces are made of diamond, no thermal stress is generated between the X-ray transparent film and the crosspieces. This mask excels in flatness, transmittance of X-rays, and strength.

Abstract: A beryllium window comprises a disk-shaped beryllium plate containing beryllium as an essential element, a welding film partially merged into the outer peripheral portion of the beryllium plate and formed of a substance having at least one element selected from the group consisting of silver, gold, nickel and copper, and a reinforcing unit of a stainless steel, and the welding film is partially merged into the reinforcing unit, wherein the welding film fixes the beryllium plate to the reinforcing unit through diffusion welding so that the beryllium window is less deformative against heat stress.

Abstract: An X-ray transmitting window for use in X-ray lithography, for allowing transmission therethrough of X-rays from a vacuum ambience to a different ambience, includes an X-ray transmitting film, and a gasket material gas-tightly provided on at least one of opposite surfaces in a peripheral portion of the X-ray transmitting film. The gasket material has a Brinell hardness smaller than that of the X-ray transmitting film. The formed X-ray transmitting window is able to be sandwiched and fastened between a pair of flanges in a gas-tight manner.

Abstract: An X-ray radiation apparatus comprises a synchrotron 11 that generates X rays, an X-ray reflecting mirror 13 that reflects X rays emitted from the synchrotron 11, a mirror driving mechanism that enlarges the X-ray illumination area by oscillating the mirror 13, a beryllium window 14 that is connected to the synchrotron-side housing base containing the mirror 13 by means of a bellows 17 and that allows the X rays reflected by the mirror 13 to be taken out of the vacuum environment, and a window driving mechanism 18 that moves the window 14 along with the movement of the X-ray illumination position by oscillating the window 14 in synchronization with the oscillation of the mirror 13. With this arrangement, the X rays coming from the window 14 pass through the X-ray mask 15 and fall upon the specimen 16 to replicate the mask pattern into the specimen.

Abstract: A low energy radiation dosimetry system includes an ionization chamber with a beryllium window that is optimized for flat response in the range of 6.5 keV to 40 keV. A conductive carbon coating including lithium and fluorine provides secondary electron emissions to flatten response of the beryllium window in the desired radiation energy range without the use of external mathmetical correction factors.

Abstract: The invention relates to a detector window for an analyzer, particularly an X-ray analyzer, and to a method for manufacturing the same. The detector window is permeable to soft X-rays when the window is at least on one surface in contact with a pressure essentially equal to that of a vacuum. The detector window of the invention is a thin film, with the thickness of 0.5 .mu.m, and is manufactured by means of photolitography.

Abstract: An apparatus provided with a measuring head for determining with the aid of X-ray fluorescence or X-ray absorption measuring techniques the surface weight of a measuring subject comprising coatings or surface-deposits or the concentration of basic substances in the subject to be measured, comprising liquid, slurries, powder or solid samples. The apparatus includes means for moving the measuring head (1) over the subject (5) to be measured and also over a reference sample (4), such as a sample or an empty sample-container, or vice versa. The measuring aperture provided in the measuring head (1) is covered with a protective film (7) for the purpose of preventing the ingress of particles from the subject (5) into the aperture. Means (3) are also provided for checking the dirt-coating on the protective film (7) regularly and for sending an order to a film-carrying device (8, 10, 11) to advance film when the dirt-coating is found unacceptable.

Abstract: X-ray attenuating polycrystalline ceramic materials having at least 20 wt. percent cerium oxide are disclosed. In addition, the materials can include one or more X-ray attenuating substances selected from the group including compounds of strontium, zirconium, yttrium, niobium, molybdenum, neodymium and tungsten. The materials can be formed in strong, non-porous bodies such as cathode ray tube funnels.

Abstract: A method is provided for producing thin diamond films which are useful as X-ray transmissive elements.

Abstract: A radiation detector window structure for use with a radiation detection system includes a frame, a plurality of upstanding spaced-apart ribs held in place by the frame, where the tops of the ribs terminate generally in common plane, and a thin film of material disposed on the tops of the ribs to span over the gaps therebetween for passing the radiation to be detected and for filtering at least some of the unwanted radiation. The tops of the ribs are smoothed and rounded to minimize a chance of piercing the film placed thereover. The ribs are spaced to provide sufficient support for the film so that the thickness of the film may be reduced to better transmit desired radiation.

Abstract: A lens and collimator apparatus for focusing and increasing the intensity of an x-ray beam at a specimen point. A screen with an aperture of pupil diameter comparable and no larger than the x-ray transverse coherence length and no smaller that the specimen diameter focuses the x-ray beam by diffraction. The screen is positioned from the specimen plane proportional to the ratio of the square of the pupil diameter to the mean wavelength of the x-ray beam. A plurality of parallel screens can also be used.

Abstract: The invention relates to a fluorescence radiation source in which an anode which encloses a member is struck by electrons on its side which faces the member and in which the primary X-ray radiation generated in the anode generates fluorescence radiation in the member. The member is preferably arranged within an enclosing shield which keeps scattered electrons remote from the member.

Abstract: An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.

Abstract: A vacuum window including a support substrate provided with a window aperture, and a membrane attached to a front surface of the substrate. The membrane has a relatively thick perimeter portion attached to the support substrate, and has a window portion aligned with the window aperture. The window portion of the membrane includes a number of relatively thin pane sections separated by relatively thick, structural rib sections. The membrane material is preferably boron nitride, boron carbide, or silicon carbide.

Abstract: X-ray attenuating ceramic materials having at least one substance selected from the group including compounds of strontium, zirconium, yttrium, niobium, molybdenum, neodymium and tungsten are disclosed. A zinc compound can be used for fluxing and X-ray attenuation in certain ceramic materials. The materials can be formed into strong, non-porous bodies such as cathode ray tube funnels. Such materials include forsteritic porcelains manufactured from batches containing strontium zirconate. Other X-ray attenuating ceramics contain a mixture of X-ray attenuating substances, including a compound of barium.

Abstract: The present invention is directed to an improved spectographic X-ray tube in which heat dissipation through the beryllium window of the X-ray tube is improved by way of a thin layer disposed on the inside of the beryllium window. The coating layer is of copper and disposed on the inside of the beryllium window for the best effects for improving heat dissipation by the window.

Abstract: A mechanism is disclosed for selectively aligning one of two different radiation passing windows with the channel of a measuring device. The measuring device includes an elongated tubular probe having a channel formed therein. A spherical cap, having a diameter less than the diameter of the probe, is mounted to the end of the probe, and is rotatable between a first and second position. A pair of windows are mounted in the cap in a manner such that when the cap is oriented in the first position, the first window is aligned with the channel, and when the cap is oriented in the second position, the second window is oriented with the channel. In the preferred embodiment, an outer tubular member is mounted around the probe and includes axially projecting teeth which engage with a spur gear connected to the rotatable cap. The rotation of the outer tubular member relative to the probe drives the spur gear for rotating the cap.

Abstract: An x-ray image intensifier tube for medical x-ray diagnostic use having a tube envelope, an inwardly concave, iron nickel, chromium alloy input window, an output display screen, a scintillator photocathode screen suspended within the envelope and in between the input window and the output screen, and a glass output window.

Abstract: A structure for shaping or masking energetic radiation is described. The structure comprises a shallow silicon body having at least one through opening, and a metal silicide layer covering the surface of the structure. The structure characterized by having a high mechanical, and thermal stability may be used particularly in electron and X-ray lithography. More specifically, the structure may be used as an aperture for electron beams, or as a mask for X-rays. The production of the structure includes the steps of making through openings in the silicon body, and the forming of the silicide layer by vapor depositing a metal on the surface of the silicon body and by subsequent annealing.