Fluid Bearing Patents (Class 384/12)
  • Patent number: 10927886
    Abstract: The invention relates to a support of a bearing pad of a sliding bearing. Provided is a bearing pad support connection including a bearing pad and a bearing pad support, whereby the bearing pad is connected to the bearing pad support by a pivot joint. The pivot joint includes a pivot pocket, and a pivot. The pivot pocket includes a sealing that abuts on the pivot of the pivot joint.
    Type: Grant
    Filed: January 2, 2018
    Date of Patent: February 23, 2021
    Inventors: Kim Thomsen, Niels Karl Frydendal, Morten Thorhauge
  • Patent number: 10875329
    Abstract: The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: December 29, 2020
    Assignee: Kateeva, Inc.
    Inventors: Robert B. Lowrance, Alexander Sou-Kang Ko, Justin Mauck, Eliyahu Vronsky, Aleksey Khrustalev, Karl Mathia, Shandon Alderson
  • Patent number: 10570958
    Abstract: A hydrostatic bearing assembly including a bearing and two membrane throttles is provided. The bearing is adapted to be movably disposed on a slide rail and includes two sub-bearing portions that are disposed opposite to each other on two opposite sides of the slide rail. The two membrane throttles are adapted to be connected to a pump. The pump is adapted to supply a fluid through the two membrane throttles to flow between the two sub-bearing portions and the slide rail, and each of the membrane throttles includes a casing and a throttling membrane piece. At least one of the casing and the corresponding sub-bearing portion includes a chamber, an inlet and an outlet communicating with the chamber, and an outlet surface, wherein the pump is adapted to be connected to the inlet, and the slide rail is adapted to be disposed adjacent to the outlet. The throttling membrane piece is being positioned in the chamber covers on the outlet surface.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: February 25, 2020
    Assignee: Industrial Technology Research Institute
    Inventors: Ta-Hua Lai, Jung-Huang Liao, Shih-Chieh Lin
  • Patent number: 10500880
    Abstract: The present teachings disclose various embodiments of a gas enclosure system can have a gas enclosure that can include a printing system enclosure and an auxiliary enclosure. In various embodiments of a gas enclosure system of the present teachings, a printing system enclosure can be isolated from an auxiliary enclosure. Various systems and methods of the present teachings can provide for the ongoing management of a printing system by utilizing various embodiments of isolatable enclosures. For example, various measurement and maintenance process steps for the management of a printhead assembly can be performed in an auxiliary enclosure, which can be isolated from a printing system enclosure of a gas enclosure system, thereby preventing or minimizing interruption of a printing process.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: December 10, 2019
    Assignee: KATEEVA, INC.
    Inventors: Justin Mauck, Alexander Sou-Kang Ko, Eliyahu Vronsky, Shandon Alderson
  • Patent number: 10371279
    Abstract: An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: August 6, 2019
    Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
    Inventor: Tatsuya Yoshida
  • Patent number: 10280024
    Abstract: A film feeding apparatus and a control method thereof are provided. The film feeding apparatus comprises a delivery head. A surface of the delivery head has an air suction region and an air blowing region, and the air suction region and the air blowing region respectively include an air hole; and by cooperation of air suctioning through the air hole of the air suction region and air blowing through the air hole of the air blowing region, a film is kept nearby the delivery head in a non-contact manner in the case that the delivery head adsorbs the film.
    Type: Grant
    Filed: October 13, 2016
    Date of Patent: May 7, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Honglin Niu, Ronghua Fan, Jinbao Zhang, Xutong Chen, Duanduan Ding
  • Patent number: 10137490
    Abstract: A hydrostatic/hydrodynamic fluid bearing assembly for a can bodymaker is provided. The hydrostatic/hydrodynamic fluid bearing assembly is separate from the ram body. The outboard guide bearing assembly includes a carriage assembly and a number of elongated journals. The carriage assembly includes a ram coupling, a crank coupling, and body defining a number of journal passages. The ram body is coupled to a ram coupling. The crank coupling is structured to be coupled to a crank arm. Each journal extends through a carriage assembly body journal passage. In this configuration, the ram body may form a can body in a traditional manner, but fluid bearing assembly fluid is not applied to the ram body. Instead, the fluid bearing assembly fluid is applied to the journals.
    Type: Grant
    Filed: January 12, 2016
    Date of Patent: November 27, 2018
    Assignee: Stolle Machinery Company, LLC
    Inventors: Gregory H. Butcher, Aaron E. Carstens, Kenneth E. Carper, Russell Bauer, Ian Kenneth Scholey
  • Patent number: 10125816
    Abstract: A self-adjusting static pressured plane guide rail consists of a base, slider provided on the base and an upper pressing plate corresponding to the shoulders on both sides of the slider; wherein: each upper pressing plate's outer edge contacts the base to form a fulcrum and the upper pressing plate's inner edge acts as the force portion and a upper pressing block is set between force portion and the slider's shoulder and a metal wire is set between the upper pressing block's top surface and the force portion's bottom surface of upper pressing plate along the slider's sliding direction; the upper pressing plate is provided with pre-tightening bolt to connect the base in a fixed way. When vibration frequency changes during operation, the oil film gap changes accordingly due to pre-tightening bolt's elasticity of the mutual function and the metal wire's elasticity to always maintain oil film layer's rigidity function.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: November 13, 2018
    Assignee: SUZHOU SUSHI TESTING INSTRUMENT CO., LTD.
    Inventors: Jianzhou Zheng, Qionghua Zhong
  • Patent number: 9902031
    Abstract: A spindle phase indexing device for a machine tool is equipped with a guide rail detachably or fixedly attached to a table, a phase indexing jig configured to travel on the guide rail and which includes a first fitting part, a cutting tool including a second fitting part configured to be fitted with the first fitting part, and a controller configured to store therein a phase of a spindle at a point in time when the first fitting part and the second fitting part are fitted together. The first fitting part and the second fitting part are formed such that rotation of the cutting tool is constrained when the first fitting part and the second fitting part are fitted together.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: February 27, 2018
    Assignee: FANUC CORPORATION
    Inventor: Yoshikazu Satou
  • Patent number: 9739309
    Abstract: The present disclosure discloses an active compensating hydrostatic bearing which includes a body, a mass block and a elastic member. The body includes a compensation hole and holds the mass block and the elastic member inside. The elastic member is put between the mass block and the compensation hole for generating a compensation gap near the compensation hole. By resisting the compression from the mass block, the elastic member can control the compression of the compensating gap so as to stabilize the rigidity of the bearing.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: August 22, 2017
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Cheng-Kuo Sung, Yi-Chen Wang
  • Patent number: 9540952
    Abstract: A turbocharger for an internal combustion engine, the turbocharger being supported by hydrostatic bearings in both a radial and an axial direction by a compressed air supplied from a compressor of the turbocharger and boosted in pressure by a separate boost pump to a high enough pressure to support the rotor of the turbocharger.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: January 10, 2017
    Assignee: S & J DESIGN, LLC
    Inventors: Timothy J Miller, Alex Pinera
  • Patent number: 9518573
    Abstract: A reciprocating compressor with a gas bearing is configured to support a portion between a cylinder and a piston by the gas bearing and induce a resonating motion of the piston by the use of compression coil springs. Therefore, a proper resonating motion of a vibrating body can be induced by the use of the gas bearing, without using plate springs, and accordingly manufacturing costs and the number of assembly processes can be reduced and the installation direction of the compressor can be freely designed.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: December 13, 2016
    Assignee: LG ELECTRONICS INC.
    Inventor: Donghan Kim
  • Patent number: 9435331
    Abstract: An air compressor device includes a cylinder housing and a supporting plate, a piston engaged in the cylinder housing and moved by a motor, the cylinder housing includes a partition for separating the cylinder housing into an upper compartment and a lower chamber, and a passage formed in the partition for allowing the pressurized air to flow from the chamber into the compartment of the cylinder housing, the compartment of the cylinder housing includes an inner diameter (D) greater than an inner diameter (d) of the chamber of the cylinder housing for allowing the pressurized air in the chamber to easily flow into the compartment of the cylinder housing with a relatively decreased pressure.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: September 6, 2016
    Inventor: Wen San Chou
  • Patent number: 9079279
    Abstract: Disclosed are an actively compensated stage including: a guide support having first and second guide surfaces perpendicular to each other; a table having first and second sides opposite the first and second guide surfaces and having air bearings on the first and second sides; a driving linear motor moving the table straight in an x-axial direction; and a plurality of magnetic actuators applying a magnetic preload between the guide support and the table and changing a magnetic force between the guide support and the table to compensate for 5-DOF motion errors generated in the table.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: July 14, 2015
    Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
    Inventors: Seung Kook Ro, Jong-Kweon Park, Byung-Sub Kim, Sung Cheul Lee
  • Patent number: 9046131
    Abstract: Including a synthetic resin-made bearing base 2 having a base portion 4, an annular protruding portion 6 provided integrally on and protruding from one surface 5 of the base portion 4, and an air supply passage 11 which is provided in the annular protruding portion 6 and the base portion 4 and which has one end 7 open at a protruding end face 8 of the annular protruding portion 6 and another end 9 open at a outer peripheral surface 10 of the base portion 4; and a synthetic resin-made bearing body 3 having an annular recessed portion 42 which is formed in one surface 41 opposing the one surface 5 of the base portion 4 and which receives the annular protruding portion 6 of the bearing base 2, an annular recessed groove 44 which is open at another surface 43, and a plurality of air outlet holes 47 serving as inherent restrictors each of which communicates with the annular recessed groove 44 at one end 45 and opens to the annular recessed portion 42 at another end 46.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: June 2, 2015
    Assignee: OILES CORPORATION
    Inventor: Hikaru Sato
  • Patent number: 8992086
    Abstract: Provided are X-Y constraining units having excellent yawing attitude precision as well as a stage apparatus and a vacuum stage apparatus, each including the X-Y constraining units. The X-Y constraining units 8 and 9 includes: Y-axis bases 81 and 91 respectively connected to Y-axis sliders 4 and 5 and having a through hole extending along Z direction; X-axis bases 82 and 92 respectively connected to an X-axis guide rail 6; shafts 83 and 93 respectively inserted into the through hole and fixed to the X-axis bases 82 and 92; and a plurality of bearing balls which are located between an inner peripheral surface of each of the through hole and an outer peripheral surface of the shafts 83 and 93, and are arranged so as to circumferentially surround the shafts 83 and 93. Each of the stage apparatus 1 and the vacuum stage apparatus includes the X-Y constraining units.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: March 31, 2015
    Assignee: Kyocera Corporation
    Inventors: Kouji Akashi, Youichi Shimizu, Yoshihisa Oae
  • Publication number: 20150023617
    Abstract: A hydrostatic bearing adapted to be mated with a base includes a floating seat and a holder. The floating seat is made from a porous material and formed with a bearing surface that has a contour conforming to that of the base. The holder is coupled to the floating seat and cooperates with the floating seat to define an accommodating space for accommodating pressurized air. A pressurized air film is formed between the base and the bearing surface of the floating seat when the pressurized air discharges from the accommodating space through the floating seat so as to separate the floating seat from the base and so as to support the base.
    Type: Application
    Filed: July 16, 2014
    Publication date: January 22, 2015
    Inventors: Kuo-Yu CHIEN, Ming-Yuan CHEN
  • Patent number: 8931956
    Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: January 13, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Yi-Ming Chen, Tzuo-Liang Luo, Shao-Ying Hung, Chien-Chih Liao, Wei-Juh Lin, Shao-Ku Huang
  • Patent number: 8920031
    Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: December 30, 2014
    Assignee: Shanghai Micro Electronics Equipment Co., Ltd.
    Inventors: Jinchun Li, Jie Fang, Yeqin Zheng, Hai Xia, Liwei Wu
  • Patent number: 8888366
    Abstract: A hydrostatic guide device includes: a fixed member having vertical guide faces; a movable member having vertical slide faces; a fluid supply device; a hydrostatic pocket to which a first fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a first urging force; and a hydraulic pocket to which a second fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a second urging force. A variation of the second fluid pressure is smaller than a variation of the first fluid pressure. When the first urging force and the second urging force are balanced with each other in a horizontal direction, the gap between the vertical guide face and the vertical slide face becomes a set value.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: November 18, 2014
    Assignee: JTEKT Corporation
    Inventor: Hiroki Yamato
  • Publication number: 20140314345
    Abstract: A gas pressure bearing element including a housing element with recesses, wherein the housing element is closed by a cover, wherein the recesses are defined by rib shaped intermediary walls and/or other island shaped protrusions and define first intermediary spaces between the intermediary walls and/or the island shaped protrusions, wherein the cover is formed in sections by a cured encasement compound provided with an open pore reinforcement mat, wherein the encasement compound has a flat surface that is processed after curing and forms a bearing surface for the gas pressure bearing element, wherein the bearing surface includes a plurality of gas outlet nozzles which are formed by micro holes penetrating the cover, and wherein the micro holes are provided at locations under which the first intermediary spaces are arranged below the cover, which first intermediary spaces form channels for a pressurized gas supply for the gas outlet nozzles.
    Type: Application
    Filed: March 17, 2014
    Publication date: October 23, 2014
    Inventors: Harald Ebl, Michael Muth
  • Patent number: 8821019
    Abstract: A seal (1) for a hydrostatic linear guide with a given adjustment direction (5), with a longitudinal seal section (7, 7?) extending essentially parallel to the adjustment direction (5), and with a transverse seal section (8, 8?) extending essentially transverse to the adjustment direction (5), wherein a first lip seal with a projecting lip portion (12) extends along the longitudinal seal section and a second lip seal with a projecting lip portion (14) extends along the transverse seal section. A height of the projecting lip portion (12) of the first lip seal oscillates in a wave shape in the adjustment direction. With such a seal (1), both a high degree of static oil tightness and also a high degree of dynamic oil tightness are achieved for a hydrostatic linear guide.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: September 2, 2014
    Assignee: Schaeffler Technologies GmbH & Co. KG
    Inventors: Harald Peschke, Wolfgang Bauer, Thomas Gietl
  • Patent number: 8770841
    Abstract: The present disclosure relates to a hydrostatic plate bearing, which comprises: a body, and a plurality of restrictors. Wherein, the body is formed with a mounting surface and an oil chamber that are disposed opposite to each other; the plural restrictors includes an orifice restrictor and a membrane restrictor while allowing the orifice restrictor and the membrane restrictor to be serially connected to each other. Operationally, a working fluid that is flowing into the body via the mounting surface is split to flow through the orifice restrictor and the membrane restrictor, in that the split flow of the working fluid that is flowing through the orifice restrictor is guided to flow into the oil chamber.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: July 8, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Shang-Te Chen, Hsi-Hung Hsiao, Bo-Tsun Chen
  • Publication number: 20140153847
    Abstract: A hydrostatic guide device includes: a fixed member having vertical guide faces; a movable member having vertical slide faces; a fluid supply device; a hydrostatic pocket to which a first fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a first urging force; and a hydraulic pocket to which a second fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a second urging force. A variation of the second fluid pressure is smaller than a variation of the first fluid pressure. When the first urging force and the second urging force are balanced with each other in a horizontal direction, the gap between the vertical guide face and the vertical slide face becomes a set value.
    Type: Application
    Filed: November 25, 2013
    Publication date: June 5, 2014
    Applicant: JTEKT Corporation
    Inventor: Hiroki YAMATO
  • Publication number: 20140016886
    Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
    Type: Application
    Filed: February 13, 2012
    Publication date: January 16, 2014
    Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
    Inventors: Jinchun Li, Jie Fang, Yeqin Zheng, Hai Xia, Liwei Wu
  • Patent number: 8608382
    Abstract: A static-pressure bearing apparatus that prevents vibrations, the apparatus including an orifice and a vent groove, such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice 14, vent groove 11, and the exhaust groove 12, of the static-pressure bearing apparatus 1, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groove 11 comprises the circular groove 11b and a plurality of distributing grooves 11a. The vent groove 11 is formed to be symmetrical about the centerline of the direction that the moving body 10 moves. The circular groove 11b is formed as a circle to surround the orifice 14.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: December 17, 2013
    Assignee: Sintokogio Ltd.
    Inventors: Shoji Uchimura, Mamoru Ito
  • Publication number: 20130301961
    Abstract: Non-contact, gas-ejecting bearings (3) are provided for conveying flexible glass sheets (13), such as LCD substrates, at high conveyance speeds, e.g., speeds of 40 meters/minute and above, e.g., 60 meters/minute. Gas is provided to the bearing's orifices (22) from a plenum which operates at a pressure Pplenum and the bearings have a calculated static pressure Pmidpoint at the midpoints (27) between the bearing's centermost orifice (26) and each of its nearest neighbors (28) in a horizontal direction which satisfies the relationship Pmidpoint/Pplenum?0.05. The bearings (3) can reduce the time-averaged, peak-to-peak variation in the spacing between a LCD substrate (13) traveling at, for example, 60 meters/minute and the face (20) of the bearing (3) to less than 500 microns, thus reducing the chances that the substrate (13) will hit and be damaged by the bearing (3).
    Type: Application
    Filed: July 16, 2013
    Publication date: November 14, 2013
    Inventors: Gautam Narendra Kudva, Weiwei Luo
  • Patent number: 8568032
    Abstract: A linear guide including a rail and a carriage joined to an application platform by a plurality of screws, wherein at least one of the plurality of screws is a vacuum screw with an axial channel through which particles can be vacuumed out of an air gap between the rail and the carriage.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: October 29, 2013
    Assignee: Etel S.A.
    Inventors: Patrick Volluz, Gentien Piaget, Jean-Yves Bordas
  • Patent number: 8556509
    Abstract: An active/self-sensing compensating hydrostatic bearing is disposed between first and second structures to allow relative movement between the first and second structures. The hydrostatic bearing includes a body and a compensator. The body, fixed to the first structure and separated from the second structure by a first gap, has a chamber and an input passage and an output passage both communicating with the chamber. The compensator is disposed in the chamber. A compensating passage, communicating with the input passage and the output passage, is formed between the body and the compensator. A pressurized fluid flows from the input passage to the output passage through the compensating passage, and the pressurized fluid in the output passage flows to the first gap to maintain the stability and the rigidity for the relative movement between the first and second structures. A hydrostatic bearing module using the hydrostatic bearing is also disclosed.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: October 15, 2013
    Assignee: National Tsing Hua University
    Inventors: Cheng-Kuo Sung, Zhang-Hua Fong, Jia-Wei Lu, Yu-Min Hung, Wei-Chih Lee
  • Patent number: 8550718
    Abstract: A linear slide table includes a slide rail, a loading table, at least one adjustment base, a plurality of wedges, and a plurality of adjustment elements. The loading table is disposed on the slide rail. The adjustment base is assembled below the loading table and disposed at one side of the slide rail. The wedges are disposed between the adjustment base and the loading table. The adjustment elements interconnect the wedges and the loading table for adjusting the relative positions of the wedges and the loading table, so as to adjust the distance between the adjustment base and the slide rail through the wedges pushing the adjustment base.
    Type: Grant
    Filed: September 6, 2010
    Date of Patent: October 8, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Hua-Chih Huang, Po-Chun Yaung
  • Patent number: 8529130
    Abstract: A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: September 10, 2013
    Assignee: Vistec Electron Beam GmbH
    Inventors: Gerhard Schubert, Christian Jackel, Ulf-Carsten Kirschstein, Michael Boehm, René Bauer, Gerd Harnisch, Thomas Peschel, Stefan Risse, Christoph Schenk
  • Patent number: 8468690
    Abstract: A holding member for use in a test includes a base made of silicon or glass and chips in which devices are formed is mountable thereon. Positioning members made of resist sheets are formed on the top surface of the base. A resist film is formed on the bottom surface of the base, and suction grooves (intersection portions, connection portions) and support members are formed in the resist film. Suction holes are formed in regions of the top surface of the base where the chips are mounted, wherein the suction holes are formed through the base and communicate with the suction groove.
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: June 25, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Yasunori Kumagai, Shigekazu Komatsu
  • Publication number: 20130108192
    Abstract: A variable flow-rate hydrostatic bearing includes a variable flow-rate adjusting portion that reduces the flow rate of fluid and then introduces the fluid into a pocket. The variable flow-rate adjusting portion is configured such that a fluid supply chamber is separated from a fluid storage chamber having a projection by a leaf spring that faces the projection with a predetermined clearance left therebetween, and the projection has an opening and a flow passage that is in communication with the pocket. In the variable flow-rate hydrostatic bearing, a fixed orifice that provides communication between the fluid supply chamber and the fluid storage chamber is formed in the leaf spring at a portion that does not face the projection.
    Type: Application
    Filed: October 17, 2012
    Publication date: May 2, 2013
    Applicant: JTEKT Corporation
    Inventor: JTEKT Corporation
  • Publication number: 20120318078
    Abstract: In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
    Type: Application
    Filed: March 10, 2010
    Publication date: December 20, 2012
    Applicant: KURODA PRECISION INDUSTRIES LTD
    Inventors: Kaoru Naoi, Yoichi Ishizaki, Tatsuhito Inouchi, Koichi Sekiguchi
  • Patent number: 8333512
    Abstract: A self-compensating hydrostatic planar bearing device comprises: a flow restrictor, disposed on a slide-table, having a flexible supporting unit extendedly formed on an end thereof; a first chamber, formed on another end of the flow restrictor opposite to that of the flexible supporting unit for communicating with a pipe disposed penetrating through the flow restrictor; and a second chamber, formed between the supporting unit and the slide-table for communicating with the first chamber through a communication hole. Operationally, when the load is changing, the pressure to the first chamber will be changing accordingly while the pressure change will be transferred to the second chamber through the communication hole for causing the flexible supporting unit to deform and thereby further causing the volume of the first chamber to change so that the pressure of the first chamber is consequently changed therewith and thus accomplishes a self-compensating process of the bearing's stiffness.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: December 18, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Hua-Chih Huang, Po-Chun Yaung
  • Publication number: 20120301060
    Abstract: A highly accurate static-pressure bearing apparatus that prevents vibrations may be achieved by configuring the apparatus comprising an orifice and a vent groove, etc., such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice 14, vent groove 11, and the exhaust groove 12, etc., of the static-pressure bearing apparatus 1, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groove 11 comprises the circular groove 11b and a plurality of distributing grooves 11a. The vent groove 11 is formed to be symmetrical about the centerline of the direction that the moving body 10 moves. The circular groove 11b is formed as a circle to surround the orifice 14.
    Type: Application
    Filed: September 13, 2010
    Publication date: November 29, 2012
    Inventors: Shoji Uchimura, Mamoru Ito
  • Patent number: 8297842
    Abstract: An air guide includes a slide member and a guide track. The guide track defines a guide hole slidably receiving the slide member. The guide track defines an air intake in an outer surface, a plurality of air outlets in an inner surface opposite to the sliding member, and a plurality of guide holes therein. The guide holes communicates the air intake with the air outlets. The guide track further defines a plurality of guide grooves in the inner surface, communicating with the air outlets.
    Type: Grant
    Filed: December 28, 2009
    Date of Patent: October 30, 2012
    Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventor: Fa-Ping Xia
  • Patent number: 8282281
    Abstract: A vertically and horizontally effective air bearing comprising a base, an interface part that is movably arranged on the base, a piston that is movably arranged inside the interface part and supports a load, and a coupling element that couples the piston with the load. The load is supported in a manner to be isolated from vibration in the horizontal and vertical directions with respect to the base, and the coupling element preferably comprises a pin that is coupled to the piston. The coupling element is spaced from the load by at least one quarter of the length of the piston.
    Type: Grant
    Filed: February 13, 2008
    Date of Patent: October 9, 2012
    Assignee: Integrated Dynamics Engineering GmbH
    Inventor: Peter Heiland
  • Patent number: 8279408
    Abstract: An object support positioning device configured to position an object support includes first and second side-beams having respective first and second sliders mounted thereon, first and second motors configured to move the first and second sliders along each respective side beam, a cross beam mounted proximate first and second ends thereof to the first and second sliders respectively and having a third slider mounted thereto, the cross-beam and the first and second slider being mounted together, and a third motor configured to move the third slider longitudinally along the cross-beam, the third slider being adapted to support the one object support. A fluid bearing is provided in at least one of the first, second and third sliders, the fluid bearing including multiple bearing surfaces to exert reaction forces in a first direction, the first direction being perpendicular to the sliding direction of the at least one slider.
    Type: Grant
    Filed: June 15, 2009
    Date of Patent: October 2, 2012
    Assignee: ASML Netherlands B.V.
    Inventor: Edwin Johan Buis
  • Patent number: 8277123
    Abstract: A fluid bearing structure with uniform depths of bearing concaves and a method of forming the bearing concaves in the fluid bearing structure. Pipe parts are inserted into through holes formed in the bearing base to form fluid spout holes for spouting fluid between confronting bearing surfaces. Bearing concaves are formed around the fluid spout holes. The bearing base and the pipe parts are made of different materials. A coating layer is formed on the bearing base and the pipe parts by an anodic oxidation process. Thickness of the coating layer on the bearing base is different from thickness of the coating layer on the pipe parts since the base member and the pipe members are made of different materials. The material on which a coating layer grows quickly is selected for the bearing base and the material on which a coating layer grows slowly is selected for the pipe parts.
    Type: Grant
    Filed: September 17, 2009
    Date of Patent: October 2, 2012
    Assignee: Fanuc Ltd
    Inventors: Masayuki Hamura, Kenzo Ebihara, Takeshi Ooki
  • Patent number: 8267582
    Abstract: A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.
    Type: Grant
    Filed: April 10, 2009
    Date of Patent: September 18, 2012
    Assignee: Vistec Electron Beam GmbH
    Inventors: Gerhard Schubert, Christian Jackel, Ulf-Carsten Kirschstein, Michael Boehm, René Bauer, Gerd Harnisch, Thomas Peschel, Stefan Risse, Christoph Schenk
  • Publication number: 20120230616
    Abstract: A seal (1) for a hydrostatic linear guide with a given adjustment direction (5), with a longitudinal seal section (7, 7?) extending essentially parallel to the adjustment direction (5), and with a transverse seal section (8, 8?) extending essentially transverse to the adjustment direction (5), wherein a first lip seal with a projecting lip portion (12) extends along the longitudinal seal section and a second lip seal with a projecting lip portion (14) extends along the transverse seal section. A height of the projecting lip portion (12) of the first lip seal oscillates in a wave shape in the adjustment direction. With such a seal (1), both a high degree of static oil tightness and also a high degree of dynamic oil tightness are achieved for a hydrostatic linear guide.
    Type: Application
    Filed: May 22, 2012
    Publication date: September 13, 2012
    Applicant: SCHAEFFLER TECHNOLOGIES AG & CO. KG
    Inventors: Harald Peschke, Wolfgang Bauer, Thomas Gietl
  • Patent number: 8191227
    Abstract: A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
    Type: Grant
    Filed: April 9, 2010
    Date of Patent: June 5, 2012
    Assignee: Corning Incorporated
    Inventors: Douglas E. Brackley, David Lee Drum, Paul J McCarthy
  • Patent number: 8167491
    Abstract: A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps connected to the pressure pockets and delimited by gap faces of the two machine parts, a drainage for the reception of hydraulic fluid flowing out from the gaps, and a seal, arranged effectively between the machine parts and surrounding the gaps, sealing against the escape of hydraulic fluid. An environment-side portion of the seal is at the same time a portion of the drainage creating a double-acting portion. The double-acting portion of the seal is formed from a material permeable to the hydraulic fluid.
    Type: Grant
    Filed: September 15, 2009
    Date of Patent: May 1, 2012
    Assignee: Schaeffler Technologies AG & Co. KG
    Inventors: Wolfgang Bauer, Thomas Gietl
  • Patent number: 8136992
    Abstract: A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps for the hydraulic fluid which are adjacent to the pressure pockets and are delimited by gap faces of the two machine parts, drainage for the reception of hydraulic fluid, and at least one seal arranged between the machine parts and surrounding the drainage sealing against leakage of hydraulic fluid out of the hydrostatic mounting. At least one circumferential portion of the seal has an outer sealing lip and an inner sealing lip. The inner sealing lip is adjacent to the gaps, and a vacuum-loadable drainage portion of the drainage is arranged between the two sealing lips.
    Type: Grant
    Filed: September 15, 2009
    Date of Patent: March 20, 2012
    Assignee: Schaeffler KG
    Inventors: Dietmar Rudy, Wolfgang Bauer
  • Publication number: 20120060643
    Abstract: Energy storage devices for storing energy are provided. An energy storage device includes a flywheel disposed in a chamber of a journal. A gas bearing is formed between an outer face of the flywheel and an inner face of the journal. The gas bearing exerts a compressive force on the flywheel, which allows for higher rotational velocities and higher energy storage.
    Type: Application
    Filed: September 14, 2010
    Publication date: March 15, 2012
    Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC
    Inventor: Christopher A. Wiklof
  • Publication number: 20110262058
    Abstract: An air-bearing slide platform having a positioning module includes: at least one slide guide, a carrier mounted on the slide guide, at least one first air bearing provided between an upper surface of the slide guide and the carrier, and the positioning module provided on the slide platform. The air-bearing slide platform is characterized in that the positioning module includes a pair of ramps formed at two lower sides of the slide guide, and at least one second air bearing provided between two extended lower sides of the carrier and the ramps.
    Type: Application
    Filed: April 26, 2010
    Publication date: October 27, 2011
    Inventors: Gao-Heng Lin, Cheng-Feng Lin, Kou-I Szu
  • Patent number: 8043007
    Abstract: Hydrostatic profile rail guide with a guide carriage that is hydrostatically mountable on a guide rail, whereby the guide carriage features a back and two sides that are attached to the back, between which the guide rail is located, whereby the back features a mounting surface on the side facing away from the guide rail for the mounting of, for example, a machine part, with the mounting surface concave when seen in the longitudinal direction of the guide rail.
    Type: Grant
    Filed: April 19, 2007
    Date of Patent: October 25, 2011
    Assignee: Schaeffler KG
    Inventor: Dietmar Rudy
  • Patent number: 8001691
    Abstract: A method for manufacturing a hydrodynamic bearing (30) comprises steps of: step (201): providing a substrate (10) with a plurality of protrusions (14) formed on a periphery thereof; step (202): placing the substrate in a middle of a hollow mold, then injecting a feedstock of powder and molten binder into the mold to surround the substrate under pressure, thus forming a desired bearing preform (20); step (203): separating the substrate from the bearing preform by means of catalytic debinding; step (204): separating the binder from the bearing preform; step (205): sintering the bearing preform; step (206): precision machining the bearing preform to form the desired hydrodynamic bearing.
    Type: Grant
    Filed: March 16, 2007
    Date of Patent: August 23, 2011
    Assignee: Foxconn Technology Co., Ltd.
    Inventor: Chuen-Shu Hou
  • Patent number: 7978307
    Abstract: A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface there is a gap. A gas supply device supplies a gas to the gap. The first bearing part is at least partly ferromagnetic, and the second bearing part has at least one permanent magnet interacting with the first bearing part for pre-tensioning the gas bearing. The gas bearing may be part of a lithographic apparatus.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: July 12, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Adrianus Antonius Theodorus Dams, Jacob Willem Vink