Abstract: The disclosure discloses a method for preparing a ??-Fe4N soft magnetic material by using liquid nitrogen through high-speed ball milling, and belongs to the field of the soft magnetic material. According to the method of the disclosure, high energy in the liquid nitrogen is used for obtaining a nanometer material FexN with a nitrogen atom supersaturation degree through cryogrinding. At a low temperature, the material is very brittle, and a surface volume ratio is very high, so that a content of nitrogen atoms adsorbed on a surface of a sample is as high as 22%. Through 300° C. post-annealing, ??-Fe4N is directly obtained from ?-Fe through phase change, so that a nanometer crystal ??-Fe4N soft magnetic material is prepared.

Abstract: A method for producing a measuring head housing for an integrated measuring system of a linear bearing of a profile rail guide includes providing a cover blank of a flat material with an adhesive layer and bending the cover blank to form a cover. A cover for a measuring head housing and a measuring head housing are also disclosed.

Abstract: A thermoinsulating tile for combustion chambers of gas turbines comprises: a thermoinsulating material body having a first face and a second face; a sealed chamber encapsulated in the thermoinsulating material body between the first face and the second face and containing a marker substance in the liquid state at least at a temperature of use of the thermoinsulating tile.

Abstract: A linear guideway is characterized in that it is capable of determining whether there is abnormal displacement of the return member based on the open or close of the circuit, and can output the abnormal signal immediately when the circuit is open. Compared with the conventional structure, since the present invention can be disposed only at one end of the slide block, both the number of components and assembly time can be reduced, and the diagnosis with precision and immediacy can be performed without high-deep algorithm, which can play a role of instant reminding before the linear guideway completely loses function. Therefore, the service life of the linear guideway can be known early to avoid the loss caused by the shutdown.

Abstract: A linear guideway includes a rail, a slider disposed on the rail, and a load passage formed between the rail and the slider. The slider has two non-load passages. Besides, a first end cap and a second end cap are disposed on two opposite end surfaces of the slider respectively. The first end cap has two first circulation grooves. The second end cap has a circulation member and a seal sheet. The circulation member has two second circulation grooves. The load passage, non-load passage, first circulation groove and second circulation groove collectively form a circulation channel for balls to move therein. A force sensor is disposed between the circulation member and the seal sheet. As a result, through the rigidity difference between the first and second end caps accompanied with the force sensor, it can be determined that if there is an abnormal circulation state.

Abstract: A sensor assembly includes: a base with an installation space; an electrical connection member disposed on the base; a sensing unit including at least two physical sensors and one integrated circuit board; and a contact member disposed at one end of the base. The sensor assembly is a combination of the temperature sensor and the vibration sensor, the main physical parameters (including back clearance, collision, thermal displacement and lubrication) regarding the operation of the linear motion transmission device can be calculated based on the temperature signal and vibration signals, without requiring the installation of separate different sensors. Therefore, installation space is reduced. The sensor assembly is directly abutted against the linear motion transmission device to detect the change of various physical values in a most direct manner.

Abstract: A slide guide device includes: a guide body having a reference guide surface and a sub guide surface that are parallel to each other; a slider having a reference slide pad adapted to slide on the reference guide surface and a sub slide pad adapted to slide on the sub guide surface, the slider being adapted to be driven by a drive unit to move along the guide body. The sub slide pad includes a slide surface (sub slide surface) slidable on the sub guide surface and an air pocket that receives a load in a manner non-contact with the sub guide surface.

Abstract: A rolling guide device is capable of preventing a scooping piece formed on a circulation path module from being deformed along with use over time, and enhancing the durability of the scooping piece, thereby achieving smooth motion of a moving member relative to a track member. A moving member includes: a main body member having load rolling surfaces and return paths for rolling elements; direction change pipes having formed therein inner direction change paths and having inner peripheral guide surfaces of outer direction change paths, respectively; and lid members each being mounted on the main body member and having outer peripheral guide surfaces of the outer direction change paths. Each of the direction change pipes includes: a first half circulation segment and a second half circulation segment; and a scooping portion for guiding the rolling elements into each of the inner direction change paths.

Abstract: A linear motion guide device includes a movable member attached onto an elongated member for forming an endless multiple-turn, helical raceway between the elongated member and the movable member and for receiving ball bearing members, and a detecting device includes a magnetic member and an integrated circuit disposed in the movable member and arranged close to the endless multiple-turn, helical raceway for detecting a moving frequency or a movement of the ball bearing members through the endless multiple-turn, helical raceway of the linear motion guide device and for detecting a wear or failure of the ball bearing members and for generating a warning signal.

Abstract: A sliding mechanism for an electronic device comprises a mounting plate, a slide plate, a first magnet, and a second magnet. The slide plate is installed on the mounting plate and is slidable relative to the mounting plate. The first magnet is mounted to the mounting plate. The second magnet is mounted to the slide plate. A magnetic pole of the first magnet faces toward the same magnetic pole of the second magnet.

Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.

Abstract: Systems, devices, uses and methods relating to magnetorhological materials including carbon nanotubes, such as single-walled and multi-walled carbon nanotubes, are disclosed. Uses of magnetorheological materials such as in motion damping/vibration isolation are also disclosed.

Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.

Abstract: Provided is a support apparatus for a sliding frame including a stationary portion having a long axis parallel to a plane defined by the frame and including one or more magnetic insert disposed along a long axis defining a path of translation and a movable portion attached to the frame, including at least one magnetic insert and movable along the path of translation and wherein the magnetic field vector orientation of the stationary portion magnetic inserts and of the movable portion magnetic inserts are the same, generate repelling forces and maintain a single state of contactless equilibrium between the stationary portion and the movable portion at any point throughout the path of translation regardless of the orientation of said plane.

Abstract: A burnishing tool and method for providing a surface treatment along the surface of a work piece, the burnishing tool having a tool head comprising a bearing for supporting a rolling element and an encasement for supporting the bearing. The bearing is formed from a self-lubricating polymer such as, but not limited to, polytetrafluoroethylene based resin, ultra-high-molecular-weight polyethylene based resin.

Abstract: Systems and methods are described for providing magnetic biasing of a carriage in context of linear guides. In one embodiment, a robotic mechanism is configured to travel on a platform assembly within a structural context. The platform assembly transports a carriage in a Z direction, and the carriage transports the robotic mechanism in an X direction. The carriage moves in the X direction along rails (e.g., and/or other types of linear guides) in a substantially floating or unbiased manner. For example, one or more alignment features on the carriage are in communication with the rails to allow the carriage to move relatively freely within an alignment region defined by the alignment features. When the carriage reaches its desired X location, magnetic features bias the carriage into a substantially accurate, secure, and repeatable position.

Abstract: A linear bearing assembly including a linear bearing plate, a base plate to support the linear bearing plate within a machine, a sealing structure to seal a volume defined between the linear bearing plate and the base plate, and a fluid adapted to be injected into the volume via at least one injection port. The fluid is injected at a sufficient pressure so as to alter an orientation of the linear bearing plate or the base plate toward an initial geometric orientation.

Abstract: A slide device includes a first body, a second body and a constraint mechanism. The constraint mechanism includes a linkage set disposed on the second body, and a first hook and a second hook respectively disposed on the first body. The linkage set includes a first rod disposed on a first side of the second body, a second rod disposed on a second side of the second body, a first bar disposed between the first rod and the second rod, and a second bar disposed between the first rod and a third side of the second body. The first hook is for hooking a hole on the first rod, and the second hook is for hooking holes on the first rod or the second rod.

Abstract: For achievement of a reduction in size, a slider unit comprises a mounting base 1, a rail 2 fixed to a mounting face 1a of the mounting base 1, a slide table 3 moving along the rail, position detection means for detecting the position of the slide table 3, and a driving system for moving the slide table 3. The mounting face 1a of the mounting base 1 has a mounting recess 14 formed therein. A sensor board 16 on which a Hall element 16a is mounted is installed in the mounting recess 14. The slide table 3 has a permanent magnet 19 attached to the face thereof facing the mounting face 1a. The permanent magnet 19 and the Hall elements 16a form the position detection means.

Abstract: An active/self-sensing compensating hydrostatic bearing is disposed between first and second structures to allow relative movement between the first and second structures. The hydrostatic bearing includes a body and a compensator. The body, fixed to the first structure and separated from the second structure by a first gap, has a chamber and an input passage and an output passage both communicating with the chamber. The compensator is disposed in the chamber. A compensating passage, communicating with the input passage and the output passage, is formed between the body and the compensator. A pressurized fluid flows from the input passage to the output passage through the compensating passage, and the pressurized fluid in the output passage flows to the first gap to maintain the stability and the rigidity for the relative movement between the first and second structures. A hydrostatic bearing module using the hydrostatic bearing is also disclosed.

Abstract: A guide rail of a linear guide, on guide surfaces on which a guide carriage is longitudinally displaceable. A material measure is arranged at a distance, preferably in parallel, to the guide rail and is fastened to the guide rail by means of a mount. The guide rail has a groove or a hole arranged outside the guide surface. The mount can be detachably fastened by means of expanding elements that engage with the groove or into the hole.

Abstract: A door suspension system comprises a horizontally suspended ferromagnetic shaft; a nonmagnetic bracket comprising a bracket cylinder for enclosing a linear bearing and an attached bracket hanger plate for securing a door panel; a nonmagnetic cylindrical linear bearing sized to slide into the bracket cylinder and over the shaft; at least two spaced bores in the upper surface of the bracket cylinder; at least two spaced bores in the upper surface of the cylindrical linear bearing arranged so as to align with the spaced bores in the bracket cylinder; a cylindrical permanent magnet positioned in at least one of the spaced bores of the bracket cylinder; and a ferromagnetic armature to complete the magnetic circuit through the shaft and the magnet or magnets.

Abstract: A guide carriage for a linear roller bearing is supportable in a longitudinally displaceable manner via a large number of rolling elements on a guide rail which extends in a longitudinal direction, and has at least one rolling surface part including at least one carriage rolling surface for the rolling elements and is attached to a main body of the guide carriage via at least one adhesive layer, and a thin sheet-metal panel which has at least one opening is located between the rolling surface part and the main body, with the adhesive layer located inside the opening.

Abstract: A motion guide device that has a novel damping structure different from the conventional damping structure is provided. The present invention comprises a raceway member (1) having a rolling-element rolling part (1a); a moving member (2) having a loaded rolling-element rolling part (2a) facing the rolling-element rolling part (1a) and being allowed to make a linear or curved movement relatively to the raceway member (1); and a plurality of rolling elements (3) intervening between the rolling-element rolling part (1a) of the raceway member (1) and the loaded rolling-element rolling part (2a) of the moving part (2). A gap (16) between the raceway member (1) and the moving member (2) is filled with a layer of oil contacting the raceway member (1) and the moving member (2). Viscosity resistance of the oil is utilized to apply a braking force to the moving member (2) or the raceway member (1) in proportion to a speed.

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam, a support constructed to support a patterning device capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. At least one vibration isolation support device can be provided for supporting an object of the apparatus. The object can be rotatably supported at the vibration isolation support device by way of a rotational support having a center of rotation. The rotational support can have its center of rotation located substantially at the center of gravity of the vibration isolation support device.

Abstract: A method for monitoring a linear guide with a carriage that can be displaced along a rail on a lubricated rolling contact is provided having a sensor device for detecting a state of a lubricant for lubricating the rolling contact. In order to allow a quick determination of the state of the lubricant with simple measures, an oscillation time signal is detected by a sensor device from which a characteristic value that increases with increasing degradation of the lubricant is determined by an effective value determination after high-pass filtering. When the characteristic value exceeds a specified threshold value, measures are initiated for improving the lubricating properties.

Abstract: A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface there is a gap. A gas supply device supplies a gas to the gap. The first bearing part is at least partly ferromagnetic, and the second bearing part has at least one permanent magnet interacting with the first bearing part for pre-tensioning the gas bearing. The gas bearing may be part of a lithographic apparatus.

Abstract: A fluid power composite cylinder that includes conductive and resistive material as part of the composite cylinder. The conductive and resistive material to provide a sensor feature that is used to assist position sensing electronic devices in sensing the position of a piston within the cylinder.

Abstract: The invention relates to a bearing arrangement (1), comprising at least one grease-lubricated bearing (2, 3) with a bearing region (4, 5) where rolling elements or a sliding element (6, 7) are arranged. To improve the assembly and the lubrication of the bearing arrangement, the invention is characterized in that at least one oil-collecting element (8, 9) is arranged near the bearing (2, 3), wherein a transport element (10, 11) connects the oil-collecting element (8, 9) with the bearing region (4, 5).

Abstract: A first and a second static-pressure gas bearings supporting a rod at two locations in the axial direction in the non-contact manner are provided, in which the first static-pressure gas bearing is fixedly supported by a bearing housing, while the second static-pressure gas bearing is supported capable of displacement through a movable support mechanism. And this movable support mechanism has an actuator and suppresses contact of the rod with the static-pressure gas bearings by displacing the shaft center of the second static-pressure gas bearing with respect to the first static-pressure gas bearing by this actuator according to a load acting on the rod.

Abstract: In a method of monitoring the operation of a plain bearing, a lubricant passage (15) of a bearing segment, this lubricating passage (15) being provided for jacking oil for example, is used during hydrodynamic operation of the plain bearing for extracting samples for a temperature measurement. For producing the measuring operation, a switch-over device (19) clears a flow path from the lubricant passage (15) into an outflow passage (23) in such a way that lubricant from the lubricating film (13) flows through the lubricant passage, the temperarature of this lubricant being determined by a temperature sensor (16, 18).

Abstract: A multi-stage sliding structure of a handheld device includes a first sliding block, a second sliding block, and an engagement structure. The first sliding block has at least one first groove for containing a first magnetic strip. The second sliding block has at least one second groove. The second groove is for containing at least two second magnetic strips which are continually spaced apart in the second groove, and the directions of magnetic poles of the second magnetic strips correspond with directions of respective magnetic poles of the first magnetic strip. The engagement structure comprises two structures disposed near outer sides of the first and the second grooves respectively, and is for enabling the first and the second sliding blocks to engage with each other and slide with respect to each other.

Abstract: A motion guide device that has a novel damping structure different from the conventional damping structure is provided. The present invention comprises a raceway member (1) having a rolling-element rolling part (1a); a moving member (2) having a loaded rolling-element rolling part (2a) facing the rolling-element rolling part (1a) and being allowed to make a linear or curved movement relatively to the raceway member (1); and a plurality of rolling elements (3) intervening between the rolling-element rolling part (1a) of the raceway member (1) and the loaded rolling-element rolling part (2a) of the moving part (2). A gap (16) between the raceway member (1) and the moving member (2) is filled with a layer of oil contacting the raceway member (1) and the moving member (2). Viscosity resistance of the oil is utilized to apply a braking force to the moving member (2) or the raceway member (1) in proportion to a speed.

Abstract: A linear motion guide device includes a magnetic member disposed on a guide rail, a slider slidably attached onto the guide rail for moving along the guide rail, and a detecting device includes a housing detachably secured to the slider and has a chamber for receiving a detecting member, and a casing detachably coupled to the housing for retaining the detecting member in the housing. The detecting device may be easily and readily attached to the linear motion guide device without changing the arrangement of the linear motion guide device. Other casings may be changeably coupled to the housing of different structure.

Abstract: A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainabi

Abstract: A linear rolling bearing, having an approximately U-shaped guide carriage (2) which is arranged on a guide rail (1) and has two limbs (3) and a spine (4) which connects the two limbs (3), the two limbs (3) of the guide carriage (2) engaging around the guide rail (1), and rolling bodies rolling on raceways (5, 6) of the guide carriage (2) and of the guide rail (1) under preload, the raceways (5, 6) being formed on sides, which face one another, of the guide rail (1) and of the two limbs (3), and at least one sensor (9) being attached to the guide carriage (2), the sensor (9), which is embodied as a strain gauge (8), being attached centrally between the two limbs (3) to that side of the spine (4) of the guide carriage (2) which faces the guide rail (1).

Abstract: A linear roller bearing is provided having a guide carriage (1) which can be mounted on a guide rail (2) in a rolling manner via roller bodies (4). The guide carriage is provided with at least one continuous roller body channel (3) for the roller bodies (4). The roller body channel (3) includes a support channel (5) for supporting the roller bodies (4), a return channel (11) for returning the roller bodies (4), and deflecting channels (10) which connect the support channel (5) to the return channel (11). The deflecting channels (10) are provided in end elements (9) of the guide carriage (1), and the roller bodies (4) in the roller body channel (3) are subject to displacement resistance in the direction of rotation. The end elements (9) are respectively provided with a sensor (12), whereby a preferably electric sensor signal therefrom is dependent on the displacement resistance.

Abstract: The linear guide apparatus includes a guide rail 3 including a rolling body rolling groove 8 and a friction apply unit 6 assembled to the guide rail 3. The friction apply unit 6 includes a unit main body 15, a brake member 16, an oil pressure cylinder 17 and a plate spring 32. The brake member 16 is disposed so as to face the side surface 3a of the guide rail 3 and can be contacted with the other portions of the side surface 3a than the rolling body rolling groove 8 thereof. The oil pressure cylinder 17 includes a piston member 20 which is structured to be driven in a positive direction to thereby press the brake member 16 against the side surface 3a of the guide rail 3 and also the piston member 20 can be driven in the opposite direction to thereby remove the pressure of the brake member 16 from the side surface 3a.

Abstract: A linear guide device has a guide rail, a guide car reciprocatingly movable on the guide rail in a longitudinal direction, a roll body revolving unit in which an endless row of roll bodies revolve, the roll body revolving unit having a load supporting portion which the roll bodies come in the load supporting engagement with a guide path of the guide rail and also with a running path of the guide car, the running path of the guide car being formed on a running path element which is connected with the guide car and which at least on a roll body entry-side end has a free supporting portion which is not supported on the guide car, the free supporting portion having a length which is at least equal to a diameter of the roll bodies.

Abstract: A precision moving table system for transverse translation and comprising: first and second relatively movable table members, the first member supporting the second member at respective opposing surfaces of the members, at least one of said members comprising a magnet; and a first set of rolling elements held firmly, by magnetic force developed by the magnet, between the opposing surfaces of the members for fully rolling motion along both members to support the second member in transverse translation; wherein at least some of the rolling elements roll along the magnet.

Abstract: The linear guide apparatus includes a guide rail 3 including a rolling body rolling groove 8 and a friction apply unit 6 assembled to the guide rail 3. The friction apply unit 6 includes a unit main body 15, a brake member 16, an oil pressure cylinder 17 and a plate spring 32. The brake member 16 is disposed so as to face the side surface 3a of the guide rail 3 and can be contacted with the other portions of the side surface 3a than the rolling body rolling groove 8 thereof. The oil pressure cylinder 17 includes a piston member 20 which is structured to be driven in a positive direction to thereby press the brake member 16 against the side surface 3a of the guide rail 3 and also the piston member 20 can be driven in the opposite direction to thereby remove the pressure of the brake member 16 from the side surface 3a.

Abstract: A wobble-absorbing magnetic bearing for a drive system that applies force from a driving mover to move a driven object; said bearing comprising: a driving bearing element having a first surface; a driven bearing element having a second surface that faces the first surface along a drive direction; rolling elements disposed between the first and second surfaces to: enable the driving and driven bearing elements to move substantially freely, relative to each other, along at least one direction transverse to the drive direction.

Abstract: A linear motion bearing assembly is provided including a carriage, a rail, and a bearing assembly. The linear motion bearing assembly includes deflectable structure formed in at least one of the carriage, rail and bearing assembly. The deflectable structure is configured to deflect under a predetermined force to affect load bearing characteristics of the linear motion bearing assembly. Pressure transducer structure is disposed adjacent to and configured for engaging the deflectable structure to apply the predetermined force to affect load bearing characteristics. The deflectable structure may include portions of the rail defining a cavity. The pressure transducer structure is disposed within the cavity. In another embodiment, the carriage includes a sidewall depending therefrom whereby the deflectable structure includes the sidewall. In yet another embodiment, the bearing assembly includes a ball retainer having a load bearing plate aperture.

Abstract: A rotary-arm drive includes a wobble-absorbing magnetic bearing (WAMB). One end of the arm engages a load-carrying surface. The other end rotates with a power-carrying rotary shaft. The arm transmits power at least one way between surface and shaft. The WAMB is between the first end of the arm and the surface.As to one aspect of the invention, the WAMB directly transmits force mechanically, but absorbs mismatched motion, between end and surface. Preferably the bearing has at least two elements (more preferably rolling elements, ideally balls) fastened to neither the end nor the surface.As to a second aspect, the drive is a traveling antirotation module. The first end rides on a fixed guideway that defines the surface; the other is fixed to a mechanical element forming the shaft and travels, carrying the arm, along a drive direction and is subject to undesired rotation about the axis. Thus the arm and its engagement with the guideway help restrain the element against rotation.

Abstract: A machine tool comprising a base, with a guide surface, a workpiece holder on the base, a movable tool carriage, and a motor for advancing the carriage along the guide surface toward the workpiece. Hydrostatic bearings are situated in the carriage for discharging fluid, such as oil, into the narrow gap defined between the carriage and the guide surface. A pre-load rail is secured to the movable carriage, and a plurality of pockets are defined in the pre-load rail. A hydrostatic pre-load piston, with an enlarged head and a depending base, is located in each pocket. A shallow depression is formed in the face of each piston, and an annular wall surrounds the depression, so that the piston restores itself to an equilibrium condition. The pre-load pistons are located in opposition to the hydrostatic bearings. An O-ring encircles the base of the piston, and allows floating, and tilting, movement of the piston within the pocket, while serving as a seal for the pocket.

Abstract: A ball spline bearing having a detection device which detects the relative positions and so forth of a spline shaft and outer cylinder by forming a plurality of narrow grooves 21c in spline shaft 21 and arranging extremely narrow and linear scales 31 and 32 in these grooves.

Abstract: The present invention relates to an assembly, especially an assembly which provides precision guidance of a lighting member.

Abstract: A spline bearing is described which contributes to reducing the size and cost of the apparatus, such as an industrial robot, in which it is incorporated, and moreover, has a high degree of reliability of relative positioning of a spline shaft and outer cylinder.The above-mentioned advantages are obtained by forming a detected portion along a track groove of the spline shaft, and providing a detection device which detects that detected portion on the outer cylinder.

Abstract: A hydrostatic bearing apparatus comprises a base member having a static pressure guide surface to which a static pressure pocket is formed, a temperature detector for detecting a temperature of an operation oil in the static pressure pocket at an outlet portion thereof and generating a signal representing the detected outlet temperature of the operation oil, a temperature controller for controlling a temperature of the operation oil to be supplied in the static pressure pocket in response to the signal from the temperature detector, and a pressure controller for controlling a pressure in the static pressure pocket by controlling a flow rate of the operation oil supplied to the static pressure pocket. An operation oil source storing the operation oil to be supplied to the static pressure pocket is further disposed.

Abstract: A slide mechanism for accurate linear, nonlinear and rotational motion. A first slide located in slidable relation to a second slide wherein the slides are separated by a distance except for small bearing surface. A portion of each of the slides is made of a magnetic material such that the slides are attracted to each other thereby maintaining the first and second slides in slidable relation. Apparatus for adjusting the separation distance between the magnetic materials of said surfaces such as a bearing set screw is disposed in one of the slides thereby providing the adjustment of the distance between the magnetic surfaces of the first and second slides. The bearing of the bearing set screw rest upon the opposite slide and provides a smooth movement of the sliding of the slide mechanism. The slide mechanism provides smooth and accurate movement for several mechanical devices.