Abstract: A carriage for a machine tool includes ways (16) and (18), a base (14) supporting the ways and a saddle (20) supported by bearings (22) and (24) for movement along the ways to carry a column (26) along the X-axis of the machine tool. The load bearing surface (16a) of way (16) is located at a higher level above machine tool support surface (16a) than the load bearing surface (18a) of way (18). Thrust directed against column (26) in the course of a machining operation is transmitted to saddle (20) through Z-axis ways 40 and way bearings (42), and is transmitted from saddle (20) to thrust bearing surface (16c) of way (16).

Abstract: A machine for grinding the cavity in a mold for optical lenses has a spherical grinding tool which is precisely positioned with respect to a predetermined reference by air slides which move the tool in orthogonal directions. The carriages of the air slides move relative to center rails. A film of air between the top plate of each air slide and the center rail is supplied from a first source at a pressure which supports the weight of the carriage. When precise alignment is obtained, the first air supply is cut off to lock the air slides in the position of alignment. A recess in end portions of the top plate has air holes communicating therewith which are supplied from air from a second source. The flow of air from this second source is continuous and is sufficient to prevent foreign material from entering the air slide.

Abstract: A static pressure air surface stage which is adapted to control to the utmost the deflection of the movable guide caused by the reaction forces of the bearing to ensure the stable provision of the better stage run precision. The bearing pads of the movable guides are oppositely disposed by a pair on both side faces of the stationary guides.

Abstract: A device for guiding movement of a stage, carrying thereon a semiconductor wafer, for printing in a reduced scale an integrated circuit pattern of a mask onto different portions of the semiconductor wafer through a reduction production lens, includes linear roller bearings for supporting the stage for movement in a predetermined direction, a slider and a roller for pressing a portion of the stage against the slider to thereby constrain the displacement of the stage in a direction perpendicular to the predetermined direction of movement, whereby higher accuracies of the stop position of the stage as well as higher speed of the stage movement are assured.

Abstract: A static pressure air surface stage for precision locating use, which is built in precision working machines, precision measuring instruments, semiconductor manufacturing apparatuses. All the bearing pads which are used in arrangement by two are integrally constructed so as to simplify the assembly adjustment and stabilize, improve the assembling precision.