Pipe Or Tube Forms Flow Path Patents (Class 392/397)
  • Patent number: 7246796
    Abstract: A vaporizer which can be used for extended time without blockage, and possible to stably supply raw materials to a reaction part. A gas passage 2 is formed inside of main body of a dispersion part 1, a gas inlet opening 4 is utilized to introduce a pressurized carrier gas 3 into gas passage 2, a supply source 6 is utilized to supply raw material solution 5 to a carrier gas passing through gas passage 2. A vaporization pipe 20 is connected with a reaction part and gas outlet 7 of dispersion part 8 of the device, with a heater 21 to heat vaporization pipe 20, while a vaporization part 22 is utilized to heat and vaporize the carrier gas where a raw material solution is dispersed.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: July 24, 2007
    Assignees: Kabushiki Kaisha Watanabe Shoko
    Inventors: Masayuki Toda, Masaki Kusuhara, Masaru Umeda, Mitsuru Fukagawa
  • Patent number: 7116899
    Abstract: The invention relates to a steam generator in which the continuous heating panel of an evaporator is arranged in a heating gas channel which can be cross-flown in a more or less horizontal direction of a heating gas. Said continuous heating panel of the evaporator comprises a plurality of pipes of a steam generator which are connected in parallel to each other. Said pipes are constructed in such a way that they cross a flow medium and are provided with the part of a more or less vertical down pipe which can be cross-flown by the flow medium in a downward direction and with the part of a rising pipe connected downstream with respect to the down pipe on the side of the flow medium and which is more or less vertical and can be cross-flown by the flow medium in an upward direction.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: October 3, 2006
    Assignee: Siemens Aktiengesellschaft
    Inventors: Joachim Franke, Rudolf Kral, Eberhard Wittchow
  • Patent number: 7112770
    Abstract: A humidification system and method particularly well adapted for use in commercial aircraft to provide substantially micro-organism free humidified air within a passenger cabin of the aircraft. The system employs a vessel for holding a quantity of water therein. The vessel is disposed within a microwave oven which is used to heat the water within the vessel to the boiling point such that steam is generated therefrom. This steam is directed into an airflow duct and used to humidify an airflow being supplied into a cabin area of the aircraft. The steam is substantially micro-organism free. A controller is used to cycle the filling and draining of the vessel to achieve a desired humidity level for the airflow. Optimally, a vacuum accumulator is employed to assist in rapid draining of the water from the vessel.
    Type: Grant
    Filed: October 3, 2003
    Date of Patent: September 26, 2006
    Assignee: The Boeing Company
    Inventors: Justin H. Doh, George Bates, III
  • Patent number: 7045745
    Abstract: A heating cooker, capable of supplying steam into a cooking chamber thereof, includes a cabinet defined therein with a cooking chamber, and a steam generating unit for supplying steam into the cooking chamber. The steam generating unit includes a heating tank detachably mounted to the top of the cooking chamber inside the cooking chamber, and provided with steam outlet ports, a water tank detachably mounted to the cabinet over the cooking chamber, and connected to the heating tank via a guide passage to supply water into the heating tank, and a steam generating heater installed in the heating tank to heat water contained in the heating tank.
    Type: Grant
    Filed: May 26, 2004
    Date of Patent: May 16, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Sung Kwang Kim
  • Patent number: 7031600
    Abstract: A method and apparatus for depositing a dielectric material at a rate of at least 3000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxide. Also provided is a large area substrate having a layer of dielectric material deposited by a process yielding a deposition rate in excess of about 3000 Angstroms per minute and a processing chamber for fabricating the same.
    Type: Grant
    Filed: April 7, 2003
    Date of Patent: April 18, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Sanjay D. Yadav, Quanyuan Shang, Wendell T. Blonigan
  • Patent number: 7024104
    Abstract: A boilerless steamer apparatus is provided having a steamer cavity formed of a steam generating space and a cooking space, wherein the steam generating space is separated from the cooking space by a removable steam lid. The present boilerless steamer apparatus can provide between 7 to 10 lbs./hour (per pan) of steam. Various methods to easily clean the boilerless steamer apparatus are provided.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: April 4, 2006
    Assignee: Delaware Capital Formation, Inc.
    Inventors: Roger R. Moore, Jr., Michael Gibson Parsons
  • Patent number: 6961516
    Abstract: A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.
    Type: Grant
    Filed: March 30, 2004
    Date of Patent: November 1, 2005
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Eiichi Toya, Tomio Konn
  • Patent number: 6957013
    Abstract: A fluid heater having a first heat exchanger block with a fluid heating tube encased therein, and having a first surface, a second heat exchanger block with a fluid heating tube encased therein and having a second surface adjacent to the first surface. A cavity is formed in the surface of the first block, or, alternatively, formed in each of the surfaces of the first and second blocks. A heating element is positioned within the cavity and completely encapsulated by the first and second blocks. The heating element may include first and second bus plates and a plurality of PTC elements sandwiched between the bus plates in an electrically parallel configuration, each PTC element including first and second conductive plates, and a plurality of positive temperature coefficient heating stones sandwiched between the conductive plates in an electrically parallel configuration.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: October 18, 2005
    Assignee: Algas-SDI International LLC
    Inventor: George M. Zimmer
  • Patent number: 6931203
    Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.
    Type: Grant
    Filed: December 5, 2002
    Date of Patent: August 16, 2005
    Assignee: Kabushiki Kaisha Motoyama Seisakusho
    Inventors: Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno, Osamu Uchisawa, Kohei Yamamoto, Toshikatu Meguro
  • Patent number: 6909071
    Abstract: An overheated steam oven which cleans an interior of a cooking cavity of the overheated steam oven using hot water and overheated steam, and executes a cooking operation using the overheated steam. The overheated steam oven includes a cabinet to define the cooking cavity therein, an overheated steam generator to supply overheated steam into the cooking cavity, and a cleaning unit to spray water from an interior of the overheated steam generator into the cooking cavity to clean the interior of the cooking cavity. A control method of the overheated steam oven includes spraying the water into the cooking cavity by use of the cleaning unit in response to a cleaning start signal, thus cleaning the interior of the cooking cavity, and supplying the overheated steam from the overheated steam generator into the cooking cavity after the cooking cavity is cleaned, thus drying the interior of the cooking cavity.
    Type: Grant
    Filed: May 10, 2004
    Date of Patent: June 21, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kobayashi Shozo
  • Patent number: 6906291
    Abstract: An overheated steam oven including a cabinet to define a cooking cavity therein, and an overheated steam generator to supply overheated steam into the cooking cavity. The overheated steam generator includes a first vessel containing a predetermined amount of water therein, and a second vessel of which an upper portion is placed in the first vessel, so that an inlet provided at the upper portion of the second vessel communicates with an interior of the first vessel. The second vessel has an outlet provided at a lower portion of the second vessel and connected to the cooking cavity. The overheated steam generator further includes a first heater which is installed in the first vessel to be immersed in the water contained in the first vessel to generate steam, and a second heater which is installed in the second vessel to overheat the steam generated by the first heater.
    Type: Grant
    Filed: April 22, 2004
    Date of Patent: June 14, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kobayashi Shozo
  • Patent number: 6885812
    Abstract: A system for heating a flow path including at least a solid or vapor source vessel connected by a conduit to a valve. The system includes at least one tubular adapter of heat conductive material for receipt along at least a portion of the flow path. The adapter has inner dimensions substantially corresponding to outer dimensions of the portion of the flow path and an outer dimension which is substantially constant along a length of the adapter. The system also includes at least one tubular heater apparatus received over the adapter and having an inner dimension that is substantially constant along a length of the heater apparatus and substantial corresponds to the outer dimension of the adapter.
    Type: Grant
    Filed: March 6, 2003
    Date of Patent: April 26, 2005
    Assignee: MKS Instruments, Inc.
    Inventor: Richard C. Groom
  • Publication number: 20040247302
    Abstract: A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.
    Type: Application
    Filed: March 30, 2004
    Publication date: December 9, 2004
    Applicant: TOSHIBA CERAMICS CO., LTD.
    Inventors: Eiichi Toya, Tomio Konn
  • Patent number: 6816669
    Abstract: A vaporizer for liquefied gas, such as liquefied petroleum gas, which includes a heat exchanger and a capacity control valve for controlling the inflow of liquefied gas to the heat exchanger. The heat exchanger has an inlet to accept liquefied gas and an outlet to release superheated gas vapor. The capacity control valve has an inlet to accept the liquefied gas from a source of liquefied gas, an outlet coupled to the inlet of the heat exchanger. The capacity control valve includes a valve positioned between the inlet and outlet of the capacity control valve, and movable between fully closed and fully open positions. The capacity control valve includes a diaphragm positioned between a thermal expansion chamber with a pressure dependent on the temperature of the gas vapor in the outlet of the heat exchanger sensed by a sensing bulb, and a liquefied gas inlet chamber with the pressure dependent on the pressure of the liquefied gas being supplied to the vaporizer by the liquefied gas source.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: November 9, 2004
    Assignee: Algas-SDI International LLC
    Inventors: George M. Zimmer, Thomas H. Kingman
  • Patent number: 6804458
    Abstract: An aerosol generator includes a fluid supply which supplies fluid to a fluid passage and a heater which heats the fluid into a gaseous state, the fluid passage being located between opposed layers of a laminate. The fluid passage can be a capillary sized passage formed by locating a mandrel between opposed layers of the laminate, bonding the layers together and removing the mandrel such that the space previously occupied by the mandrel forms the fluid passage. The opposed layers of the laminate can be copper sheets and ceramic layers can be provided on the outside of the copper layers. The aerosol generator can be used to generate aerosols containing medicated materials.
    Type: Grant
    Filed: December 6, 2001
    Date of Patent: October 12, 2004
    Assignee: Chrysalis Technologies Incorporated
    Inventors: Timothy S. Sherwood, Scott A. Sowers, Sirisha P. Reddy, F. Murphy Sprinkel, Jr., Kenneth A. Cox, Walter A. Nichols
  • Publication number: 20040182855
    Abstract: A vaporizer heating apparatus is comprised of electromagnetically responsive material and electrically non-conductive material. A antimicrobial fluid to be vaporized, such as water or hydrogen peroxide solution, is supplied to the heating apparatus where it is converted to a vapor. In one embodiment of the present invention, electromagnetically responsive material particulate is embedded into the electrically non-conductive material. In another embodiment of the present invention, a microwave generator is used to produce heat.
    Type: Application
    Filed: April 1, 2004
    Publication date: September 23, 2004
    Applicant: STERIS Inc.
    Inventor: Michael A. Centanni
  • Publication number: 20040175160
    Abstract: A system for heating a flow path including at least a solid or vapor source vessel connected by a conduit to a valve. The system includes at least one tubular adapter of heat conductive material for receipt along at least a portion of the flow path. The adapter has inner dimensions substantially corresponding to outer dimensions of the portion of the flow path and an outer dimension which is substantially constant along a length of the adapter. The system also includes at least one tubular heater apparatus received over the adapter and having an inner dimension that is substantially constant along a length of the heater apparatus and substantial corresponds to the outer dimension of the adapter.
    Type: Application
    Filed: March 6, 2003
    Publication date: September 9, 2004
    Inventor: Richard C. Groom
  • Publication number: 20040170405
    Abstract: An aerosol generator includes a fluid supply which supplies fluid to a fluid passage and a heater, which heats the fluid into a gaseous state, the fluid passage being located between opposed layers of a laminate. The fluid passage can be a capillary sized passage formed by locating a mandrel between opposed layers of the laminate, bonding the layers together, and removing the mandrel such that the space previously occupied by the mandrel forms the fluid passage. The opposed layers of the laminate can be copper sheets, and ceramic layers can be provided on the outside of the copper layers. The aerosol generator can be used to generate aerosols containing medicated materials.
    Type: Application
    Filed: March 9, 2004
    Publication date: September 2, 2004
    Applicant: Chrysalis Technologies Incorporated
    Inventors: Timothy S. Sherwood, Scott A. Sowers, Sirisha P. Reddy, F. Murphy Sprinkel, Kenneth A. Cox, Walter A. Nichols
  • Patent number: 6772756
    Abstract: The present invention provides an apparatus for the vaporization of materials that releases active constituents for inhalation without the creation of harmful byproducts such as carcinogens associated with combustion and inhalation of substances.
    Type: Grant
    Filed: February 9, 2002
    Date of Patent: August 10, 2004
    Assignee: Advanced Inhalation Revolutions Inc.
    Inventor: Shaahin Sean Shayan
  • Publication number: 20040131344
    Abstract: A fluid heater having a first heat exchanger block with a fluid heating tube encased therein, and having a first surface, a second heat exchanger block with a fluid heating tube encased therein and having a second surface adjacent to the first surface. A cavity is formed in the surface of the first block, or, alternatively, formed in each of the surfaces of the first and second blocks. A heating element is positioned within the cavity and completely encapsulated by the first and second blocks. The heating element may include first and second bus plates and a plurality of PTC elements sandwiched between the bus plates in an electrically parallel configuration, each PTC element including first and second conductive plates, and a plurality of positive temperature coefficient heating stones sandwiched between the conductive plates in an electrically parallel configuration.
    Type: Application
    Filed: September 29, 2003
    Publication date: July 8, 2004
    Applicant: Algas-SDI International LLC
    Inventor: George M. Zimmer
  • Patent number: 6707987
    Abstract: A vaporizer having a pair of heat exchanger blocks each with a vaporization tube formed therein. The heat exchanger blocks are in face-to-face arrangement and the vaporizer tubes are coupled together in series. A plurality of positive temperature coefficient (PTC) heating elements are clamped in position between the heat exchanger blocks to provide the heat for vaporization of the liquefied gas. A capacity control valve controls the flow of liquefied gas into the vaporizer tubes.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: March 16, 2004
    Assignee: Algas-SDI International LLC
    Inventor: George M. Zimmer
  • Publication number: 20030221625
    Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.
    Type: Application
    Filed: December 5, 2002
    Publication date: December 4, 2003
    Inventors: Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno, Osamu Uchisawa, Kohei Yamamoto, Toshikatu Meguro
  • Publication number: 20030219241
    Abstract: A liquid heating device includes a pump for pumping liquid, and a helical heating tube receiving liquid sent by the pump. The two ends of the helical heating tube are connected with two terminals of electric power, and when a control system is started, the helical heating tube is heated up to produce high heat to heat up the liquid therein to a proper temperature, to boil it up or change it into vapor for practical use.
    Type: Application
    Filed: April 3, 2003
    Publication date: November 27, 2003
    Inventors: Huang Chuan Pan, Huang Chen-Lung
  • Publication number: 20030215226
    Abstract: A superheated steam generator of an electromagnetic induction type includes: a conduit, which provides a passageway of generated steam; a superheating tank, which is part of the conduit midway through the conduit; and a coil, which is disposed around the superheating tank and is connected to a high-frequency AC power supply, the superheated steam generator further including a magnetic body, disposed inside the superheating tank, which is in contact with the steam in the passage of the steam. According to this construction, superheated steam can be produced more efficiently. In addition, the temperature inside the tank can be increased and decreased more gradually.
    Type: Application
    Filed: April 2, 2003
    Publication date: November 20, 2003
    Inventors: Masami Nomura, Masaaki Nomura, Yazuru Marukuni
  • Patent number: 6640050
    Abstract: A fluid vaporizing device useful for vaporizing fluid into an aerosol includes a capillary tube made from an electrically conductive material, an upstream electrode connected to the tube, and a downstream electrode connected to the tube and provided with an electrical resistivity sufficient to cause heating of the downstream electrode during operation to approximately the same temperature as the tube at the point of connection. The upstream and downstream electrodes connected to the capillary tube divide the tube into an initial feed section, a heated section, and a tip. A source of material to be volatilized is provided to the tube at the feed section, passes downstream into the heated section, is vaporized, and then exits from the tube through the tip. The temperature profile of the tube along the heated section is controlled by varying parameters to substantially eliminate any effect of the downstream electrode as a heat sink.
    Type: Grant
    Filed: September 21, 2001
    Date of Patent: October 28, 2003
    Assignee: Chrysalis Technologies Incorporated
    Inventors: Walter A. Nichols, Kenneth A. Cox, Douglas D. McRae, Tung Tien Nguyen
  • Patent number: 6604492
    Abstract: A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: August 12, 2003
    Assignee: Porter Instrument Company, Inc.
    Inventors: George K. Porter, Seth B. Wolf, Charles W. Albrecht
  • Publication number: 20030142965
    Abstract: A steam-cleaning appliance of the invention comprises a housing in which a water storage chamber, a pump, and a steam device are mounted. The pump pumps cold water from the water storage chamber and delivers cold water to the steam device. The steam device includes a water-flowing path and a heating unit that heats water flowing through the water-flowing path. Cold water pumped by the pump penetrates into the water-flowing path via a water inlet to be heated. The increasingly heated water is sputtered into steam through a steam pipe to a nozzle of the steam-cleaning appliance.
    Type: Application
    Filed: January 29, 2002
    Publication date: July 31, 2003
    Applicant: Kable Enterprises Co., Ltd.
    Inventor: Samson Tsen
  • Publication number: 20030132219
    Abstract: A temperature and flow rate controlled capillary aerosol generator includes two heating zones optionally separated by a region in which a pressure drop is induced. Power is metered or applied to the downstream, second zone to achieve a target resistance, and therefore a target temperature, while power is metered or applied to the upstream, first zone to achieve a target mass flow rate exiting the second zone. A target temperature is achieved in the second zone to generate an aerosol from the liquid flowing through the generator at the desired mass flow rate.
    Type: Application
    Filed: October 24, 2002
    Publication date: July 17, 2003
    Inventors: Kenneth A. Cox, Walter A. Nichols, F. Murphy Sprinkel, Douglas D. McRae, William R. Sweeney
  • Publication number: 20030108342
    Abstract: An aerosol generator includes a fluid supply which supplies fluid to a fluid passage and a heater which heats the fluid into a gaseous state, the fluid passage being located between opposed layers of a laminate. The fluid passage can be a capillary sized passage formed by locating a mandrel between opposed layers of the laminate, bonding the layers together and removing the mandrel such that the space previously occupied by the mandrel forms the fluid passage. The opposed layers of the laminate can be copper sheets and ceramic layers can be provided on the outside of the copper layers. The aerosol generator can be used to generate aerosols containing medicated materials.
    Type: Application
    Filed: December 6, 2001
    Publication date: June 12, 2003
    Inventors: Timothy S. Sherwood, Scott A. Sowers, Sirisha P. Reddy, F. Murphy Sprinkel, Kenneth A. Cox, Walter A. Nichols
  • Patent number: 6540840
    Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.
    Type: Grant
    Filed: January 21, 2000
    Date of Patent: April 1, 2003
    Assignees: Kabushiki Kaisha Watanabe Shoko
    Inventors: Masayuki Toda, Masaki Kusuhara, Mikio Doi, Masaru Umeda, Mitsuru Fukagawa, Yoichi Kanno, Osamu Uchisawa, Kohei Yamamoto, Toshikatu Meguro
  • Publication number: 20020186965
    Abstract: Vaporizer having a pair of heat exchanger blocks each with a vaporization tube formed therein. The heat exchanger blocks are in face-to-face arrangement and the vaporizer tubes are coupled together in series. A plurality of positive temperature coefficient (PTC) heating elements are clamped in position between the heat exchanger blocks to provide the heat for vaporization of the liquefied gas. A capacity control valve controls the flow of liquefied gas into the vaporizer tubes.
    Type: Application
    Filed: June 8, 2001
    Publication date: December 12, 2002
    Inventor: George M. Zimmer
  • Publication number: 20020186966
    Abstract: A vaporizer for liquefied gas, such as liquefied petroleum gas, which includes a heat exchanger and a capacity control valve for controlling the inflow of liquefied gas to the heat exchanger. The heat exchanger has an inlet to accept liquefied gas and an outlet to release superheated gas vapor. The capacity control valve has an inlet to accept the liquefied gas from a source of liquefied gas, an outlet coupled to the inlet of the heat exchanger. The capacity control valve includes a valve positioned between the inlet and outlet of the capacity control valve, and movable between fully closed and fully open positions. The capacity control valve includes a diaphragm positioned between a thermal expansion chamber with a pressure dependent on the temperature of the gas vapor in the outlet of the heat exchanger sensed by a sensing bulb, and a liquefied gas inlet chamber with the pressure dependent on the pressure of the liquefied gas being supplied to the vaporizer by the liquefied gas source.
    Type: Application
    Filed: June 8, 2001
    Publication date: December 12, 2002
    Inventors: George M. Zimmer, Thomas H. Kingman
  • Patent number: 6481437
    Abstract: The present invention is a vaporizer apparatus (1) and method for uniformly extracting active ingredients of specimen of crude natural product, or inert particulate matrix impregnated with volatile substances without pyrolysis which uses hot air (2), or a heated inert gas stream to volatilize the specimen. The heated air or gas in introduced from below (from either a hot air gun or a high-pressure tank connected to a heat exchanger), and ascends through in most embodiments through a permeable support structure (4) (e.g., fritted glass disk, etc.) subsequently causing specimen particules disposed on the permeable support structure to be suspended within the confines of an isolation chamber (5).
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: November 19, 2002
    Assignee: Hortapharm B.V.
    Inventor: David W. Pate
  • Patent number: 6477890
    Abstract: An apparatus for generating smoke includes a closed chamber having a top cover, and a metal air inlet tube, a metal air outlet tube and a metal suction tube extending through the cover. An electric coiled-wire heating element is positioned transversely in the chamber and connected electrically at each end to the metal air inlet tube and the metal suction tube. A spray dispenser is attached to the top cover and positioned over the heating element and is operably connected to a supply of smoke-producing fluid, the dispenser being configured to spread and drop controlled quantities of the smoke-producing fluid onto the heating element. Separate controls are provided for controlling flow of the fluid onto the heating element for controlling smoke production, and for controlling flow of air for carrying smoke through a delivery line for use.
    Type: Grant
    Filed: September 15, 2000
    Date of Patent: November 12, 2002
    Assignee: K-Line Industries, Inc.
    Inventor: Jon L. Hulsebus
  • Patent number: 6409839
    Abstract: A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).
    Type: Grant
    Filed: November 8, 1999
    Date of Patent: June 25, 2002
    Assignee: MSP Corporation
    Inventors: James J. Sun, Benjamin Y. H. Liu
  • Patent number: 6402126
    Abstract: A vaporizing apparatus and method for providing a vaporized liquid precursor to a process chamber in a vapor deposition process includes a microdroplet forming device for generating microdroplets from a liquid precursor and a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber. The vaporization zone receives the microdroplets and a heated carrier gas. The heated carrier gas has a temperature so as to provide the primary source of heat for vaporizing the microdroplets. The vaporized liquid precursor is then directed to the process chamber from the heated vaporization zone.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: June 11, 2002
    Assignee: Micron Technology, Inc.
    Inventors: Brian A. Vaartstra, David Atwell
  • Patent number: 6347188
    Abstract: A smoke generator in which a supply of smoke making fluid is caused to pass cyclically down tubing (20). In a heat exchanger, an electrical current is passed along the tubing to heat the tubing and a sensor (54) is arranged to sense the tube temperature. Electrical power is controlled to heat the tubing cyclically so that fluid in the tubing is burnt off, every cycle of the power being switched on or off, thus reducing clogging.
    Type: Grant
    Filed: February 9, 2000
    Date of Patent: February 12, 2002
    Assignee: Le Maitre Ltd.
    Inventor: Ian David Roffey
  • Publication number: 20010043807
    Abstract: A smoke generator in which a supply of smoke making fluid is caused to pass cyclically down tubing (20). In a heat exchanger, an electrical current is passed along the tubing to heat the tubing and a sensor (54) is arranged to sense the tube temperature. Electrical power is controlled to heat the tubing cyclically so that fluid in the tubing is burnt off, every cycle of the power being switched on or off, thus reducing clogging.
    Type: Application
    Filed: February 9, 2000
    Publication date: November 22, 2001
    Inventor: IAN DAVID ROFFEY
  • Patent number: 6299692
    Abstract: A vaporizer head for evenly flowing at low pressure into a processing chamber vaporized precursor compounds for deposition of metal and other layers onto a semiconductor, has a bulb-like body with a center axis, a lengthwise cavity, an input end and an output end. The cavity has an opening for receiving a stream of vaporized precursor compound. There are a plurality of passages for flow of vapor through the head, each passage having a length and a diameter. They extend radially from along and around the cavity like the spokes of a wheel at inclined angles relative to the center axis from the cavity to a tapered output surface of the head. The cavity has a well-like bottom for capturing any droplets or particles of precursor compound and preventing them from leaving the head except as vapor. The plurality of passages have sufficiently large diameters such that there is only a low pressure drop in the vapor flowing through the head.
    Type: Grant
    Filed: July 21, 2000
    Date of Patent: October 9, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Vincent Ku, Ming Xi, Xiaoxiong Yuan, Anzhong Chang, Anh N. Nguyen
  • Patent number: 6273957
    Abstract: A vaporizing device for chemical vapor deposition (CVD) source materials includes a vaporizer for vaporizing introduced CVD source materials by heating, a spray nozzle of which an end portion is fixedly attached to the vaporizer for spraying the CVD source materials into the vaporizer, a cooling mechanism for cooling the spray nozzle, and a heat conduction restrictor attached to the end portion, proximate of the end portion, or to the vaporizer. Generation of non-vaporized residues and particles is decreased, improving productivity owing to prolongation of continuous operation time of the apparatus and a decrease in film defects.
    Type: Grant
    Filed: March 23, 2000
    Date of Patent: August 14, 2001
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Mikio Yamamuka, Tsuyoshi Horikawa, Takaaki Kawahara, Fusaoki Uchikawa, Shigeru Matsuno, Takehiko Sato, Akira Yamada, Masayoshi Tarutani
  • Patent number: 6250301
    Abstract: A vaporizer apparatus and method for uniformly extracting active ingredients of a specimen of crude natural product or inert particulate matrix impregnated with volatile substances, without pyrolysis, which uses hot air or a heated inert gas stream to volatilize the specimen. The heated air or gas is introduced from below (from either a hot air gun or a high pressure tank connected to a heat exchanger) and ascends through a permeable support structure (e.g., fritted glass disk, etc.), subsequently causing specimen particles disposed on the permeable support structure to be suspended within the confines of an isolation chamber. This allows a maximized gas extraction exposure for each suspended particle, and promotes a uniform extraction of the aggregate charge through its periodic mixing. A filter prevents the particles from being inhaled by the user. During device disuse, the heated airstream flows through an optional side-arm of the vaporizer apparatus, preventing wasteful loss of active ingredients.
    Type: Grant
    Filed: August 28, 1997
    Date of Patent: June 26, 2001
    Assignee: Hortal Harm B.V.
    Inventor: David W. Pate
  • Patent number: 6244575
    Abstract: A vaporizing apparatus for providing a vaporized liquid precursor to a process chamber in a vapor deposition process includes a microdroplet forming device for generating microdroplets from a liquid precursor and a heated housing defining a vaporization zone having a vapor flow path from the microdroplet forming device to the process chamber. The vaporization zone receives the microdroplets and a heated carrier gas. The heated carrier gas has a temperature so as to provide the primary source of heat for vaporizing the microdroplets. A method of vaporizing liquids for vapor deposition processes includes generating microdroplets and utilizing a heated carrier gas as the primary source of heat for vaporizing the microdroplets. A vapor deposition system carrying out the method includes a heated carrier gas and a heated housing defining a heated vaporization zone. The heated housing receives the heated carrier gas.
    Type: Grant
    Filed: October 2, 1996
    Date of Patent: June 12, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Brian A. Vaartstra, David Atwell
  • Patent number: 6201223
    Abstract: A humidity regulating unit including a heating element housed inside a covering that has a porous retaining wall through which water does not pass but steam or gas passes. In one embodiment, the covering has several bulges along the circumference of the heating element that protrudes outward from the outer surface of heating element to form several water routes along the outer surface of heating element. The covering and the outer surface of heating element are bonded between adjacent water routes so that the outer surface of heating element is used as part of the wall of the water routes. As a result, the size of heating element does not restrict making the cross section of each water route as small as possible, and even if the covering breaks, the amount of water leaking from the humidity regulating unit is minimized.
    Type: Grant
    Filed: August 23, 1999
    Date of Patent: March 13, 2001
    Assignee: Respironics, Inc.
    Inventor: Kazufuku Nitta
  • Patent number: 6189453
    Abstract: An improved structure of a smoke generator including a housing and a pump accommodated in the housing. The pump pumps a chemical solution in a container via a solution duct to a heating vaporization device. The heating vaporization device includes two opposed disposed heat insulation rings, a heating tube, and a power source. The heat insulation rings are metal rings of good electrical conductivity and have a periphery provided with a plurality of ring holes. A plurality of metal conductive wires each have two ends respectively connected to the opposedly arranged ring holes, with a coil formed in a center of each heat insulation ring. The heating tube is a metal tube of a high resistance coefficient and is mounted intermediate of the heat insulation rings. A solution inlet and a smoke ejecting end at both ends of the heating tube pass through and are secured in the coils on the same side.
    Type: Grant
    Filed: June 11, 1999
    Date of Patent: February 20, 2001
    Inventor: Yu-Chuan Lin
  • Patent number: 6175687
    Abstract: A humidifier (5) includes upper and lower water tanks (7) and (8) supported by a support frame (6). In a space between the upper and lower water tank, a plurality of hollow yarn bodies (1) are arranged in communication with upper and lower water tanks. The hollow yarn body is constructed of a parens yarn (2) of the hollow and a thin metal wire (3) connected to the power source thereof and wound around the hollow yarn body.
    Type: Grant
    Filed: October 13, 1994
    Date of Patent: January 16, 2001
    Assignee: Kabushiki Kaisha Komatsu Seisakusho
    Inventors: Toshihide Imamura, Kanichi Kadotani
  • Patent number: 6142009
    Abstract: A smoke generating apparatus includes a housing having an interior cavity. A heated substrate is disposed within the interior cavity of the housing. A reservoir is provided to hold smoke generating liquid. An atomizing nozzle is disposed within the interior cavity of the housing. The nozzle has an inlet end and an outlet end. The outlet end points toward the heated substrate, such that fluid medium discharged through the outlet of the nozzle strikes the heated substrate. The inlet end of the nozzle is coupled to a source of gas under pressure. A liquid flow passage is provided which connects the nozzle with the reservoir. A flow of gaseous medium through the nozzle atomizes smoke generating liquid drawn from the reservoir.
    Type: Grant
    Filed: July 28, 1998
    Date of Patent: November 7, 2000
    Assignee: Graminia Development Ltd.
    Inventor: Norton Marcus Loblick
  • Patent number: 6053435
    Abstract: A fog generating guide tube mounting arrangement includes a barrel having a longitudinal center through hole and two screw holes respectively provided at front and rear sides thereof in axial alignment with the longitudinal center through hole, a connector fastened to one screw hole at the rear side of the barrel to hold a pump tube, a fog generating guide tube detachably mounted in the longitudinal center through hole, the fog generating guide tube having a rear end fastened to the connector, and a front end terminating in an inner threaded portion threaded into the screw hole at the front side of the barrel, an outer threaded portion, a polygonal collar disposed between the inner threaded portion and the outer threaded portion and stopped outside the front side of the barrel, and a nozzle cap threaded onto the outer threaded portion of the fog generating guide tube outside the barrel.
    Type: Grant
    Filed: August 21, 1998
    Date of Patent: April 25, 2000
    Inventor: Ping Fa Hung
  • Patent number: 6025577
    Abstract: An electrical sleeve heater has a tubular outer wall and a heating coil inside the outer wall. An outer sleeve inside the heating coil formed with an axially throughgoing slot having angularly confronting edges is made of a material having a high coefficient of thermal expansion. An inner sleeve inside the outer sleeve is formed with an axially throughgoing slot and with outwardly projecting lips engaged through the outer-sleeve slot bearing angularly on the outer-sleeve slot edges. It is made of a material having a low coefficient of thermal expansion so that when the sleeves are heated the outer-sleeve edges press the inner-sleeve lips together and thereby decrease the radial inner diameter of the inner sleeve.
    Type: Grant
    Filed: June 5, 1998
    Date of Patent: February 15, 2000
    Assignee: Hotset Heizpatronen U. Zubehor GmbH
    Inventor: Eugen Schwarzkopf
  • Patent number: 6018615
    Abstract: A smoke generating apparatus includes a combustion chamber having an air flow inlet and an air flow outlet. A helical heating element is disposed in the combustion chamber. The helical heating element has a central flow axis. A smoke generating fluid injection tube is positioned along the central flow axis of the helical heating element.
    Type: Grant
    Filed: October 6, 1997
    Date of Patent: January 25, 2000
    Assignee: Graminia Developments Ltd.
    Inventor: Norton Marcus Loblick
  • Patent number: RE38686
    Abstract: A smoke generating apparatus includes a combustion chamber having an air flow inlet and an air flow outlet. A helical heating element is disposed in the combustion chamber. The helical heating element has a central flow axis. A smoke generating fluid injection tube is positioned along the central flow axis of the helical heating element.
    Type: Grant
    Filed: January 24, 2002
    Date of Patent: January 11, 2005
    Assignee: STAR EnviroTech, Inc.
    Inventor: Norton M. Loblick