Abstract: A shutter device includes a light blocking unit and a voice coil motor. The voice coil motor includes a permanent magnet module, a guide track assembly and a coil assembly. The coil assembly is arranged on the guide track assembly, and the permanent magnet module is adapted to produce a magnetic field in the guide track assembly. The light blocking unit includes two shutter blades both connecting to the coil assembly. When energized, the coil assembly will produce a magnetic field having a direction same as or opposite to the direction of the magnetic field in the guide track assembly so that the coil assembly moves forward or backward along the guide track assembly to drive the two shutter blades to open or close. A method controls the shutter device. An exposure dose control method is used with a photolithography machine including the shutter device.

Abstract: A vane driving device includes: two boards each having an opening and defining a blade chamber therebetween; a blade changing an area of the opening and housed in the blade chamber; a drive source for driving the blade, the drive source including: a coil winded around a stator and exciting a stator; a rotor rotatably supported by a rotary shaft, rotatable in conjunction with the rotary shaft, and magnetized to have different polarities in a circumferential direction; and a rotor pinion meshing a driven member, and integrally formed in the rotary shaft; and a printed substrate electrically connected to the coil. The two boards define a drive source chamber housing the drive source therebetween. At least one of the two boards has an opening for escaping the coil outwardly from the drive source chamber. The printed substrate is arranged on a outer wall surface opposite to the drive source chamber.

Abstract: At least one exemplary embodiment is directed to a light quantity adjusting apparatus that can include a first blade member configured to be driven by a drive source, such as a motor, and a second blade member whose movement is configured to be related to the movement of the first blade member.

Abstract: A shutter assembly has an actuator for applying a whip action on a shutter wing for blocking or exposing an aperture. The shutter wing has a first blade fixedly connected to the actuator and a second blade movably connected to the first blade. When the shutter wing is in the closed position, the blades form a folded shape with a waist section large enough to cover the entire aperture. When the shutter wing is in the open position, the blades form an extended shape having a narrower waist section. The blades can be connected to each other by a hinge or a wire. Two shutter wings located on opposite sides of the aperture can be used to create a gap therebetween to control the exposure in a camera. As the shutter wings move from one side to another, the gap acts like a moving slit across the aperture.

Abstract: At least one exemplary embodiment is directed to a light quantity adjusting apparatus that can include a first blade member configured to be driven by a drive source, such as a motor, and a second blade member whose movement is configured to be related to the movement of the first blade member.

Abstract: A camera is provided with means for effecting cyclic displacement of a mechanical system, such as a mirror mechanism (1) or shutter mechanism, between two end positions. The means include spring means (3) for biasing the system towards a neutral position or zone between the two end positions and drive means (5) for ensuring that the system sequentially reaches said end positions.