For Wash Station Patents (Class 396/631)
  • Patent number: 11443960
    Abstract: A substrate processing apparatus includes a substrate holding unit that holds a substrate horizontally while rotating the substrate around a vertical rotational axis running through its center portion, an opposed member having an opposed surface that is opposed to an upper surface of the substrate, and a processing liquid discharge unit that includes a center portion discharge port on the opposed surface, that opens being opposed to the upper surface center portion of the substrate, and a peripheral portion discharge port on the opposed surface, that opens being opposed to the upper surface peripheral portion of the substrate, that discharges a processing liquid from the center portion discharge port to supply the processing liquid between the substrate and the opposed surface, and discharges the processing liquid from the peripheral portion discharge port to replenish the processing liquid between the substrate and the opposed surface.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: September 13, 2022
    Inventor: Masayuki Otsuji
  • Patent number: 10854477
    Abstract: A substrate processing apparatus includes a substrate holding unit that holds a substrate horizontally while rotating the substrate around a vertical rotational axis running through its center portion, an opposed member having an opposed surface that is opposed to an upper surface of the substrate, and a processing liquid discharge unit that includes a center portion discharge port on the opposed surface, that opens being opposed to the upper surface center portion of the substrate, and a peripheral portion discharge port on the opposed surface, that opens being opposed to the upper surface peripheral portion of the substrate, that discharges a processing liquid from the center portion discharge port to supply the processing liquid between the substrate and the opposed surface, and discharges the processing liquid from the peripheral portion discharge port to replenish the processing liquid between the substrate and the opposed surface.
    Type: Grant
    Filed: May 25, 2017
    Date of Patent: December 1, 2020
    Inventor: Masayuki Otsuji
  • Patent number: 10784124
    Abstract: A substrate processing apparatus includes a substrate holding unit that holds a substrate horizontally while rotating the substrate around a vertical rotational axis running through its center portion, an opposed member having an opposed surface that is opposed to an upper surface of the substrate, and a processing liquid discharge unit that includes a center portion discharge port on the opposed surface, that opens being opposed to the upper surface center portion of the substrate, and a peripheral portion discharge port on the opposed surface, that opens being opposed to the upper surface peripheral portion of the substrate, that discharges a processing liquid from the center portion discharge port to supply the processing liquid between the substrate and the opposed surface, and discharges the processing liquid from the peripheral portion discharge port to replenish the processing liquid between the substrate and the opposed surface.
    Type: Grant
    Filed: May 25, 2017
    Date of Patent: September 22, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventor: Masayuki Otsuji
  • Patent number: 8303197
    Abstract: In an apparatus for performing a substrate developing process, a first washing tank and a second washing tank are disposed on both sides of a substrate support section for supporting the substrate opposite to each other to wash a developing nozzle. The developing nozzle moves in a horizontal direction from the first washing tank toward the second washing tank and supplies a developing solution onto the substrate in the meantime. After supplying the developing solution, the developing nozzle is received in the second washing tank, and the developing solution adhered to the developing nozzle is removed by a washing solution in the second washing tank.
    Type: Grant
    Filed: August 26, 2008
    Date of Patent: November 6, 2012
    Assignee: Semes Co., Ltd.
    Inventors: Doo-Young Oh, In-Cheol Ryu
  • Patent number: 7387455
    Abstract: Rinsing nozzles 310a to 310e are moved on a wafer W while they are discharging rinsing solution 326. At that point, discharging openings 317a to 317e are contacted to developing solution 350 coated on the wafer W or rinsing solution 326 on the wafer W. Thus, the impact against the wafer W can be suppressed. As a result, pattern collapse can be prevented. In addition, a front portion of the developing solution 350 can push away the developing solution 350.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: June 17, 2008
    Assignee: Tokyo Electron Limited
    Inventors: Tetsutoshi Awamura, Yukio Kiba, Keiichi Tanaka, Takahiro Okubo, Shuuichi Nishikido
  • Patent number: 6857795
    Abstract: A developing apparatus for organic electroluminescent display panels comprises a developing unit for supplying a developing solution to be uniformly dispensed to the surface of an organic electroluminescent display panel by immersing the organic electroluminescent display panel into the developing solution or spreading the developing solution over the organic electroluminescent display panel, a cleaning unit having at least a bath connected to the end of the developing unit for spraying a recycled cleaning liquid or cleaning liquid over the organic electroluminescent display panel, a drying unit having at least an airflow driers, and a transporting unit for transporting the electroluminescent display panel; wherein the organic electroluminescent display panel is transported at a constant speed by the transporting unit of the developing apparatus.
    Type: Grant
    Filed: December 31, 2002
    Date of Patent: February 22, 2005
    Assignee: RiTdisplay Corporation
    Inventors: Tien-Rong Lu, Yih Chang
  • Patent number: 6652167
    Abstract: In a shutter facing an aperture portion in a partition plate in a photosensitive material processing device, a blocking member, formed substantially in a semicircular cylindrical shape, is placed by the rotation of a shaft between blades thereby closing the aperture portion. The opening between the blades is opened by rotating the blocking member integrally with the shaft so that a photosensitive material can pass through. Multi-leveled surfaces are formed on the top surface of a guide plate. Aperture portions for mounting rollers with adaptors are formed in an alternating pattern on the surfaces. A plurality of protruding guide ribs are provided extending across the surfaces. A plurality of brush roller parameters are adjusted so that a winding mark index defined by the parameters falls within a predetermined range. Rollers are washed when a finisher control system is restarted after an unforeseen long stoppage.
    Type: Grant
    Filed: June 24, 2002
    Date of Patent: November 25, 2003
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Ryoei Nozawa, Toshihiro Suya, Takayuki Iwamoto
  • Patent number: 6601989
    Abstract: An X-ray film development device performs development, fixing, rinsing, and drying processes while transporting an exposed X-ray film. A rinsing unit is provided with a light source, which illuminates the X-ray film during transportation, and a reading unit, which receives the passing light and reads an image recorded on the X-ray film. The image signal from the reading unit is processed by a display device (CRT, LCD, etc.), and the film image can be provided to the doctor or patient without waiting until the film dries.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: August 5, 2003
    Assignee: Nix Company Ltd.
    Inventor: Hiroyuki Tanaka
  • Patent number: 6595705
    Abstract: A photographic processor and a method of operation is disclosed. The processor is in the form of a circular drum processor into which photographic film is inserted and processed. The processor includes a washing assembly which is adapted to wash the non-emulsion surface of the film and other components of the processor as the processed film is removed from the processor.
    Type: Grant
    Filed: September 12, 2002
    Date of Patent: July 22, 2003
    Assignee: Eastman Kodak Company
    Inventors: Ralph L. Piccinino, Jr., Ronald W. Grant, Jr., Kevin H. Blakely
  • Patent number: 6422769
    Abstract: The present invention relates to a method and system for reusing a washing solution within a processor for processing photographic material. In the method and system of the present invention, sequential washing stages are applied to the processor. During one of the wash stages, and preferably a wash stage subsequent to an initial a first wash stage (a second wash stage), a volume of washing solution which is greater than the washing solution applied in the first wash stage is applied. The washing solution applied in the second or subsequent wash stage is subject to a chemical treatment such as an ion exchange, and is thereafter, recycled back to the processor for reuse in processing photographic material and/or cleaning the components of the processor.
    Type: Grant
    Filed: November 3, 2000
    Date of Patent: July 23, 2002
    Assignee: Eastman Kodak Company
    Inventors: Peter J. Twist, Nigel R. Wildman
  • Patent number: 6224273
    Abstract: The invention relates to a process for the manufacture of photopolymer printing blocks, which are utilizable for producing printed matter by flexography, typography or dry offset, of the type including a stage for polymerizing areas by exposure to ultraviolet rays; a stage for engraving non-polymerized areas by immersion and brushing in an engraving bath contained in an engraving tank, the bath becoming loaded with dissolved particles or particles in suspension during the engraving stage; and a separation of the constituents of the engraving bath, with the liquid obtained at the time of separation being injected back into the engraving tank, characterized in that the separation consists of filtration, during which the particles are progressively eliminated. The invention also relates to an engraving device for carrying out the process.
    Type: Grant
    Filed: February 26, 1999
    Date of Patent: May 1, 2001
    Inventor: Mario Ferrante
  • Patent number: 6126336
    Abstract: An etching device for preparing flexible blocks which can be used for printing in flexography, typography or dry offset generally includes an etching tank containing a bath (22) and brushes (3), a stirring and heating device, and an overfill system (20) for discharging the solution from the etching tank through an outlet duct (21) to a separation device. The separation device includes a reception vat (14) having an upper part which is equipped with a device (10) for separating the water and the polymer, and at least one filtering membrane (7).
    Type: Grant
    Filed: June 4, 1997
    Date of Patent: October 3, 2000
    Assignee: Photomeca/Egg
    Inventor: Mario Ferrante
  • Patent number: 5993084
    Abstract: The apparatus comprises a developing station (10), a second treatment station (12), a third treatment station (14). A liquid connection (52) is provided between the third treatment station (14) and the second treatment station (12). In a cleaning mode, liquid is fed from the developing station (10) to the third treatment station (14) to assist in cleaning of the third and second treatment stations (12, 14). The apparatus can be cleaned in a particularly convenient and efficient method, enabling optimum use of cleaning liquids and enabling automation of the cleaning process.
    Type: Grant
    Filed: November 19, 1998
    Date of Patent: November 30, 1999
    Assignee: Agfa-Gevaert N.V.
    Inventors: Dirk de Ruyter, Bart Verhoest
  • Patent number: 5802416
    Abstract: Described herein is a countercurrent multi-tank washing stage (10) for photographic processing apparatus which comprises a first washing tank (500), a last washing tank (100) and at least one intermediate washing tank (200, 300, 400), each washing tank having a recirculation system (102, 202, 302, 402, 502) associated therewith. The first washing tank (500) is positioned upstream from the last washing tank (100). Each of the last washing tank (100) and the intermediate washing tanks (200, 300, 400) is fluidly connected to the recirculation system of an adjacent upstream washing tank (200, 300, 400, 500). Level sensors (112, 114, 212, 214, 312, 314, 412, 414, 512) are provided in each of the washing tanks (100, 200, 300, 400, 500) to control an operating level (116, 216, 316, 416, 516) of washing solution in each of the tanks (100, 200, 300, 400, 500) and a fill level (118, 218, 318, 418) in the last and intermediate tanks (100, 200, 300, 400).
    Type: Grant
    Filed: June 25, 1997
    Date of Patent: September 1, 1998
    Assignee: Eastman Kodak Company
    Inventors: Anthony Earle, Leslie Wells
  • Patent number: 5797057
    Abstract: A water replenishing device is disclosed which makes it possible to supply the necessary volume of water in response to a decrease in the processing solution in the processing tank due to evaporation. A water supply guide member is attached to an upper part of a processing solution tank. A discharge opening is formed at one end of the water supply guide member. Water supplied from a water replenishing pipe is fed to the water supply guide member and then it is supplied into the processing solution tank. When the processing solution level in the processing solution tank reaches an overflow opening, the excess water supplied to the water supply guide member is discharged outside the processing solution tank through the discharge opening.
    Type: Grant
    Filed: March 24, 1997
    Date of Patent: August 18, 1998
    Assignee: Noritsu Koki Co., Ltd.
    Inventors: Togo Kinoshita, Ryosuke Matsumoto
  • Patent number: 5721999
    Abstract: An apparatus for washing a web or sheet of photosensitive material during the development process by passing the material through a series of stations where the washing is accomplished by spraying and the material is not immersed into a wash bath and the washed material consistently meets archival quality and a process for washing the material using the apparatus.
    Type: Grant
    Filed: August 22, 1996
    Date of Patent: February 24, 1998
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Edward Andrew Calisto, Daniel Frederick Juers, John George Van Remoortel
  • Patent number: 5678117
    Abstract: There is disclosed an automatic X-ray film processor assembly comprised of a gear drive assembly for the film transport unit including continuously operated lower and upper film lifters operating at different rotational speeds for passing film more rapidly through processing units. Additionally, there is provided an improved drying assembly including gear train in driving interrelationship with the gear drive assembly for the film transport as well as a fan unit providing improved aero-thermodynamics for drying film chips and additionally reducing film transit times. Additionally, there is provided a valved water drain system and a closeable door access means to more easily facilitate wash water draining and refilling for improved film processing.
    Type: Grant
    Filed: August 30, 1996
    Date of Patent: October 14, 1997
    Assignee: Air Techniques, Inc.
    Inventors: Edgar Alzner, Dennis Allmer, Frank Bader
  • Patent number: 5619745
    Abstract: In an apparatus for processing a light-sensitive material, a plurality of processing tanks are serially arranged along a conveyance passage on which the light-sensitive material is conveyed in a conveying direction. The apparatus comprises a device for replenishing compensation water into a most-downstream tank arranged most downstream among the plurality of processing tanks in terms of the conveying direction under the following inequality:0.ltoreq.(E-C)/(P-R)<0.3E (ml/day): amount of evaporated water from the plurality of processing tanks per day,C (ml/day): amount of the compensation water to compensate the evaporated water,P (m.sup.1 /day): amount of the light-sensitive material processed per day,R (ml/m.sup.2): amount of replenishing processing solution per m.sup.2 of light-sensitive material.
    Type: Grant
    Filed: April 10, 1996
    Date of Patent: April 8, 1997
    Assignee: Konica Corporation
    Inventor: Hiroaki Kobayashi