Abstract: A cassette for ultra-thin glass includes a pair of plates spaced apart from and facing each other, and a plurality of supports mounted between the pair of plates and including a plurality of mounting grooves that support sides of sheets of ultra-thin glass. Each of the plurality of mounting grooves includes an inclined portion inclined toward a middle of each of the plurality of mounting grooves, and a straight portion extending from the inclined portion and having a constant width in an axial direction of the plurality of supports. A height of the straight portion in a radial direction of the plurality of supports is equal to or greater than a height of the inclined portion in the radial direction.

Abstract: A liquid pour tray provides a plurality of liquid retaining receptacles each having a proximal portion and a distal portion defining an open end, the distal portion having a width narrowing in a direction opposite the proximal portion toward the open end. A plurality of partitions are interposed between the plurality of liquid retaining receptacles and an overflow reservoir is in fluid communication with the plurality of liquid retaining receptacles.

Abstract: A substrate processing apparatus includes a plurality of easily removable processing units including at least a heating unit for heating a substrate and a cooling unit for cooling the substrate, and an outer frame having a plurality of compartments. Each compartment has an opening through which a processing unit may be inserted or removed. The plurality of compartments are arranged vertically. Each compartment has a plurality of first joint members connected to utility lines including those of an electrical system, a control system, and a fluid system. The electrical, control, and fluid systems are necessary for operating the processing units. Each processing unit has a plurality of second joint members connected to the first joint members.

Abstract: A scanner housing encloses a rotatable cylindrical drum, the outer surface having opposing rims or hubs which support respective outer edges of a film strip or slide to be scanned. The edges of the film are releasably held flat against respective rims by means of bands contacting respective radially outer edges of the film to maintain them against the respective outer rim surfaces of the drum whereby the film rotates with the drum's rotation past a scanner assembly. The scanner assembly is disposed internally of the housing adjacent one outer side of the drum and includes a linear array scanning transducer. A light source is located adjacent an opposing outer side of the drum at a location substantially diametrically opposed from the scanner assembly. A focusing lens assembly is disposed internally of the drum between the light source and the scanner assembly. The film being carried on the outer circumference of the rotating drum as the drum rotates, passes adjacent the light source.