Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.

Abstract: An image reading apparatus includes: an image reading unit which has a light source irradiating light to a sheet conveyed along reading glass, and an image reading element reading an image by reflected light from the sheet; a conveyance guide portion which guides the sheet and which is disposed in a position, that corresponds to the image reading unit, with the reading glass interposed between the conveyance guide portion and the image reading unit; a correction unit which corrects image information obtained by reading the sheet by the image reading unit based on reflected light that is emitted from the light source and reflected on the conveyance guide portion; and the conveyance guide portion which has a diffuse reflecting surface diffusing and reflecting the light from the light source.

Abstract: A photolithography system for printing a pattern of at least one contact or via on a wafer is provided. The system comprises a reticle having a layout, the layout comprises at least one polygon-shaped hole, wherein the at least one polygon-shaped hole comprises at least eight sides.

Abstract: A washing process to sufficiently remove contaminants attached on the surface of an optical film is proposed. Specifically, disclosed is a method of manufacturing an optical film, wherein the method possesses the steps of spraying onto at least one surface of a transparent film a solidified blast material via cooling that is a gas or a liquid at normal temperature and pressure, washing the at least one surface of the transparent film, and coating at least one optically functional layer on the washed surface of the transparent film.

Abstract: This invention has as its object to provide a highly reliable image reading apparatus in which both an image reading unit and photographing unit can obtain optimal images. To achieve this object, the apparatus has a light-emitting element array which illuminates a document to be read by a read sensor, and an illumination lamp which illuminates the document to be recorded by the photographing unit.

Abstract: This invention has as its object to provide a highly reliable image reading apparatus in which both an image reading unit and photographing unit can obtain optimal images. To achieve this object, the apparatus has a light-emitting element array which illuminates a document to be read by a read sensor, and an illumination lamp which illuminates the document to be recorded by the photographing unit.

Abstract: This invention has as its object to provide a highly reliable image reading apparatus in which both an image reading unit and photographing unit can obtain optimal images. To achieve this object, the apparatus has a light-emitting element array which illuminates a document to be read by a read sensor, and an illumination lamp which illuminates the document to be recorded by the photographing unit.

Abstract: This invention has as its object to provide a highly reliable image reading apparatus in which both an image reading unit and photographing unit can obtain optimal images. To achieve this object, the apparatus has a light-emitting element array which illuminates a document to be read by a read sensor, and an illumination lamp which illuminates the document to be recorded by the photographing unit.