With Alarm, Indicator, Or Signal Patents (Class 414/148)
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Publication number: 20140064884Abstract: An oven and an adjustable baking system are proposed. The oven includes a signal receiving module, a baking module, a detecting module, and a feedback module. The signal receiving module is used for receiving a ready-to-send signal sent by a developing apparatus in a previous process from the oven. The ready-to-send signal conveys information of preparing for transferring a glass substrate to the oven. The detecting module is used for detecting the robot to see if the robot takes the glass substrate out of the baking module. The feedback module is used for determining if a confirmation signal is sent back to the developing apparatus according to the detecting result from the detecting module. The confirmation signal conveys information that the developing apparatus should transfer the glass substrate to the feedback module.Type: ApplicationFiled: September 12, 2012Publication date: March 6, 2014Applicant: SHENZHEN CHINA STAR OPTOELECTRONIC TECHNOLOGY CO., LTD.Inventors: Guangqian Yang, Kisun Kang, Tsungwen Chen, Chunming Wu, Wei Li
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Publication number: 20130004266Abstract: A device for managing solder paste includes a storage room, a warm up room, a preparing room and a central control device, wherein the storage room, the warm up room and the preparing room respectively have a transportation unit for delivering a solder paste can. There are reading devices disposed respectively at an inlet/outlet of the above rooms for reading information of the solder paste can when the solder paste can passes thereby, and the central control device updates storage information for the solder paste cans. The central control device may access production information of a production line from a production managing system, and thus analyze the mold number and amount of solder paste cans, receive the solder paste cans based on a first-in, first-out manner, and deliver the solder paste cans to the warm up room for the warm up treatment.Type: ApplicationFiled: September 23, 2011Publication date: January 3, 2013Applicants: Askey Computer Corporation, Askey Technology (Jiangsu) Ltd.Inventors: Shao-Chun Chang, Ching-Feng Hsieh
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Patent number: 7905700Abstract: The present invention is a vertical-type heat processing apparatus comprising: a heat processing furnace; a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner; a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and a controller for controlling the transfer mechanism; wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder; the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported; the controller is adapted to monitor at least one information of pType: GrantFiled: March 19, 2007Date of Patent: March 15, 2011Assignee: Tokyo Electron LimitedInventors: Satoshi Asari, Kiichi Takahashi, Katsuhiko Oyama
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Publication number: 20090116936Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a reaction tube, a substrate holder, a gas nozzle, a heating unit, a temperature detector, and an exhaust unit. The reaction tube accommodates and processes substrates. The substrate holder holds substrates stacked at predetermined intervals in the reaction tube. The gas nozzle is installed along a stacked direction of the substrates. The heating unit heats the substrates. The temperature detector is installed along the stacked direction of the substrates. The exhaust unit exhausts an inside atmosphere of the reaction tube. Each of the gas nozzle and the temperature detector includes first and second parts and is supported by a narrow tube supporting member including first and second supporting parts. The first supporting part makes contact with the first part. The second supporting part is parallel with the second part and supports the second part.Type: ApplicationFiled: October 21, 2008Publication date: May 7, 2009Inventors: Tetsuya MARUBAYASHI, Yasuhiro Inokuchi
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Publication number: 20070286709Abstract: In a heat treatment method in which a semiconductor wafer is carried into a heat treatment chamber constituted of a heat plate and a cover body covering the heat plate and processed, until the wafer is carried into the heat treatment chamber, an opening and closing operation of the cover body is performed to maintain the accumulated heat temperature of the heat treatment chamber at a prescribed processing temperature.Type: ApplicationFiled: April 26, 2007Publication date: December 13, 2007Applicant: TOKYO ELECTRON LIMITEDInventors: Katsuhisa FUJII, Tetsuya Oda, Akihiro Kubo
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Patent number: 6895831Abstract: A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then sent to a transmitter, also mounted to the support platform, for wireless transmission of the signal to a receiver mounted on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.Type: GrantFiled: May 27, 2003Date of Patent: May 24, 2005Assignee: Applied Materials, Inc.Inventor: Reginald Hunter
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Patent number: 6773158Abstract: In a method apparatus for measuring the temperature of a semiconductor substrate during processing thereof in a processing chamber, a resonant circuit formed on the substrate surface is energized by an electromagnetic field radiation device, and disturbances in the electromagnetic field are detected to determine the resonant frequency of the resonant circuit. The temperature of the substrate is determined as a function of the resonant frequency. The substrate is moved into and out of processing chamber by a transfer arm, and the radiation device is disposed on the transfer arm or mounted on the processing chamber. Multiple resonant circuits may be provided, which are energized by movement of the transfer arm, without transferring the substrate.Type: GrantFiled: August 14, 2002Date of Patent: August 10, 2004Assignee: Tokyo Electron LimitedInventor: Chishio Koshimizu
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Patent number: 6473668Abstract: An intelligent minienvironment control system designed to optimize the minienvironment performance, improve the protection for the multi-million dollar equipment within a fab, and to improve the safety conditions for fab personnel. The intelligent minienvironment control system is comprised of a plurality of minienvironment control and monitoring systems (MCMSs), one such system being associated with each minienvironment in the fab. The MCMSs continuously monitor the environmental conditions within the minienvironments. Each of the MCMSs are linked together in a local area network to form an integrated fab-wide minienvironment management system. The management system also includes workstations linked to the network for storing historical data for, and allowing remote access to, each of the MCMSs in the system.Type: GrantFiled: June 4, 2001Date of Patent: October 29, 2002Assignee: Asyst Technologies, Inc.Inventors: Salem Abuzeid, Xiaohua George He, George Tannous
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Patent number: 6413481Abstract: A sterilization tunnel for pharmaceutical containers such as vials has an inlet zone, a sterilization zone, and a cooling zone. A conveyor belt for the vials is disposed inside the sterilization tunnel. An emptying device that can be raised and lowered is disposed in the vicinity of the cooling zone. In order to empty the sterilization tunnel, the frame-shaped emptying device is lowered onto the conveyor belt and then pushes an emptying slider, which is being moved through the sterilization tunnel together with the last vials disposed on the conveyor belt, out from the sterilization tunnel. The emptying device permits a particularly simple operation of the sterilization tunnel.Type: GrantFiled: October 8, 1999Date of Patent: July 2, 2002Assignee: Robert Bosch GmbHInventors: Ingbert Pennekamp, Manfred Windsheimer
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Patent number: 5915308Abstract: A discharge apparatus includes a housing into which a discharge pipe of a carbonization drum opens. A residue discharge chute which starts from the housing opens into a conveying device ending at an outlet. A filling-level meter is disposed at the residue discharge chute. The conveying device has a profiled separating shelf with an end remote from the mouth of the residue discharge chute, at which a bar screen is formed. The bar screen covers a delivery opening for fine residue and ends at the outlet for coarse residue. A vibrator is associated with the conveying device.Type: GrantFiled: July 20, 1998Date of Patent: June 29, 1999Assignee: Siemens AktiengesellschaftInventors: Karl May, Werner Axt, Eugen Schlag, Heinz Sattler, Klaus Busch
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Patent number: 5784974Abstract: A feeder system for measuring and controlling the massed feed rate of particulate fuel material, such as coal particles, made up of a group of volumetric feeders and a gravimetric feeder coupled to the group of volumetric feeders. The system controls the fuel feed rate of the volumetric feeders based upon data communicated from the gravimetric feeder.Type: GrantFiled: April 22, 1997Date of Patent: July 28, 1998Assignee: General Signal CorporationInventor: Kenneth J. Krauss
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Patent number: 5756964Abstract: A thermal processing apparatus for processing a wafer is disclosed. The thermal processing apparatus includes a thermal processing plate, a plurality of spacers, a plurality of locators, and a plurality of sensors. The temperature of the thermal processing plate is controlled within a predetermined range. The spacers are arranged over the thermal processing plate for supporting the wafer, thereby forming a gap between the wafer and the thermal processing plate. The locators, each of which is disposed over one of the spacers, are provided for locating the wafer. The sensors, each of which is disposed over one of the locators, are provided for detecting the position of the wafer.Type: GrantFiled: March 24, 1997Date of Patent: May 26, 1998Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsien Hsu, Wen Jye Chung
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Patent number: 5475969Abstract: An improved system for applying labels to pharmaceutical vials or the like includes a heating tunnel assembly having an insulated heating chamber defined by a first stationary portion and a second removable portion, with a heater positioned within the insulated heating chamber. The assembly includes movable mounting structure for mounting the second removable portion of the insulated heating chamber for movement between a first position engaged with the first stationary portion, and a second retracted position remote from said first portion. An actuator is provided for moving the second portion of the insulated heating chamber into its engaged position, while a biasing spring resiliently biases the second removable portion of the chamber toward the retracted position. As a result, the heating tunnel assembly will automatically be opened to prevent products from overheating or burning in the event of an emergency that disables the actuator.Type: GrantFiled: July 23, 1993Date of Patent: December 19, 1995Assignee: McNeil-PPC, Inc.Inventor: Harry Sowden
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Patent number: 5002262Abstract: An apparatus for charging material to be sintered into a sintering machine comprises a shuttle conveyor transporting pelletized material to be sintered, a wide conveyor receiving said pelletized material from the shuttle conveyor and feeding the pelletized material to a pallet moving in a predetermined direction, a deflector plate receiving the pelletized material from the wide conveyor and feeding the pelletized material to the pallet and a support plate supporting the material fed to the pallet from behind, the support plate being arranged facing the deflector plate below the wide conveyor and over the upper side of the pallet.Type: GrantFiled: September 12, 1989Date of Patent: March 26, 1991Assignee: NKK CorporationInventors: Makoto Gocho, Masayasu Shimizu, Hidetoshi Noda, Osamu Komatsu, Hideaki Inoue
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Patent number: 4632623Abstract: A manipulator for a workpiece, useful in conjuction with a robot, is especially designed for handling forging preforms in a hot furnace. A fluidic type sensor is used to position the structure above a furnace surface on which the preform rests. Air continuously flows through the sensor to cool the sensor and parts of the manipulator, discharging toward the furnace floor near the workpiece. Thus, even though the absolute position and texture of the furnace surface may vary, the manipulator will always grip the workpiece at the same location relative to the surface.Type: GrantFiled: October 15, 1984Date of Patent: December 30, 1986Assignee: United Technologies CorporationInventors: John R. Naumec, Peter H. Kaverud
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Patent number: 4615720Abstract: This invention proposes a method of controlling the melting rate of a glass furnace to obtain substantially constant molten glass throughput. The furnace contains a pool of molten glass and a relatively thin layer of unmelted glass batch on the surface of the pool. The furnace contents are weighed, and the batch feed is controlled by the measured weight. In essence, the melting rate is determined by the thickness of the lighter, thermally insulated batch layer, since a thinner batch layer results in more heat loss through the batch and less batch melted by the cooler molten glass. Thus, a decrease in weight indicates more molten glass withdrawal and a lower melting rate, and batch is added to increase the molten glass temperature and to melt more glass batch. In the preferred embodiment, the furnace is electrically heated at a constant rate, and only the rate of batch feed is controlled to maintain substantially constant glass throughput.Type: GrantFiled: June 10, 1985Date of Patent: October 7, 1986Assignee: Owens-Corning Fiberglas CorporationInventors: Charles S. Dunn, Eugene C. Varrasso
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Patent number: 4372819Abstract: A projectable device for aligning rail mounted equipment with track side structures, and, in particular, for aligning a coke oven door extractor, pusher ram, or jamb cleaner with a coke oven door. In one embodiment, a rod having an attached terminal fork is extended horizontally toward the door so as to indicate alignment when an attached aligning plate is engaged by the fork. The rod projects from a piston and cylinder combination, and it is automatically withdrawn if alignment is correct. In a second embodiment, an arm having an attached terminal fork is swung downwardly in a vertical arc to engage the aligning plate and thereafter automatically returned to its initial, vertical position, if alignment is correct.Type: GrantFiled: March 22, 1982Date of Patent: February 8, 1983Assignee: Koppers Company, Inc.Inventor: Rodney C. Irwin
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Patent number: 4356031Abstract: A method and means for maintaining optimum operation of the process for directly reducing iron oxides in a rotary kiln, using a solid carbonaceous reducing agent, such as coal fed at both the charge feed end and discharge end as the source of fuel and reductant, and oxygen-containing gases is disclosed wherein the DRI product, charred coal or char, and fine waste found in the kiln discharge materials from the discharge end are separated and measured for fixed carbon content and the process parameters may be adjusted to optimum by establishing an appropriate percentage by weight, in the range from 5% to 15%, of fixed carbon in the total of these discharge materials.Type: GrantFiled: March 16, 1981Date of Patent: October 26, 1982Assignee: The Direct Reduction CorporationInventors: Harry W. Hockin, deceased, Brian F. Bracanin, Ronald J. Clements, Vitie P. Keran, Alan C. Baker
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Patent number: 4352618Abstract: A method and an apparatus are described for preventing the unintentional introduction of coal from a supply into a coke oven which already contains a charge of coal or coke. An obstruction sensor is lowered through a charging hole in the ceiling of the oven; if it encounters an obstruction, such as a charge of coal or coke in the oven, it triggers a signal which blocks any discharge of coal through the charging hole into the oven.Type: GrantFiled: April 30, 1980Date of Patent: October 5, 1982Assignees: Bergwerksverband GmbH, Didier Engineering GmbHInventors: Claus Flockenhaus, Horst Joseph, Joachim Meckel
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Patent number: 4336107Abstract: A projectable device for aligning rail mounted equipment with track side structures, and, in particular, for aligning a coke oven door extractor, pusher ram, or jamb cleaner with a coke oven door. In one embodiment, a rod having an attached terminal fork is extended horizontally toward the door so as to indicate alignment when an attached aligning plae is engaged by the fork. The rod projects from a piston and cylinder combination, and it is automatically withdrawn if alignment is correct. In a second embodiment, an arm having an attached terminal fork is swung downwardly in a vertical arc to engage the aligning plate and thereafter automatically returned to its initial, vertical position, if alignment is correct.Type: GrantFiled: September 2, 1981Date of Patent: June 22, 1982Assignee: Koppers Company, Inc.Inventor: Rodney C. Irwin
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Patent number: 4290067Abstract: A non-contacting surface contour measurement device includes movable member which can selectively be actuated to form a hermetic enclosure about a transmit and/or receive antenna. The measurement device, when employed in a blast furnace, need be exposed to the furnace environment only during measuring modes which constitute a small portion of the furnace operating cycle.Type: GrantFiled: December 10, 1979Date of Patent: September 15, 1981Assignee: Paul Wurth, S.A.Inventors: Edouard Legille, Victor Kremer
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Patent number: 4242027Abstract: A coke oven charging device for supplying coal to the charging chutes on the roof of a coke oven battery of a plurality of horizontally arranged coke ovens, comprises a horizontally disposed circulator conveyor supported on the roof at a spaced location thereabove and having a plurality of longitudinal and transversely spaced closable discharge openings. The conveyor is advantageously mounted for some displaceable movement on the roof. In addition, a charging car is movable on the roof over the coke ovens and it includes a closed transfer conveyor mounted on the car which is disposed along the length of the car. The car is advantageously provided with a plurality of coal transfer connections which makes it possible to connect the car and its conveyor to a selected opening of the circulating conveyor and to a selected chute for the transfer of the coal from the circulating conveyor through the car conveyor and into the coke oven battery.Type: GrantFiled: February 1, 1979Date of Patent: December 30, 1980Assignee: Firma Carl StillInventors: Josef Stratmann, Willi Brinkmann
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Patent number: 4181459Abstract: In the handling and charging of pre-heated coal, the coal is transported from a coal storage container to the oven chambers by an enclosed continuous conveyor system. The coke oven chambers are charged individually in a continual manner by transporting a measured amount of coal from the container, sufficient to fill a respective chamber. If coal, due to a malfunction, passes beyond the intended charging hole, it can jam the drive area causing extensive damage. To prevent this, a safety device is provided which includes a sensing device, e.g. a pivotally mounted switch for determining the presence of coal on the conveyor and associated therewith, a time delay system for determining if a particular amount of coal, to which the sensor is responding, is of sufficient volume to cause jamming of the conveyor drive system.Type: GrantFiled: March 1, 1978Date of Patent: January 1, 1980Assignee: United States Steel CorporationInventor: Charles A. Price
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Patent number: RE30022Abstract: An electrical pulsing unit in the pusher ram drive emits a pulse for every preselected incremental distance traveled by the ram from the face of the oven at the start of the push to the completion of the push. The pulses are received in the quench car locomotive and are converted to signals that show the position of the ram during its travel. The quench car has a similar pulsing unit, and pulses from this unit are converted to signals that show the position of the quench car. The quench car locomotive operator can then coordinate the signals to achieve proper coke distribution in the quenching car.Type: GrantFiled: June 16, 1977Date of Patent: June 5, 1979Assignee: Koppers Company, Inc.Inventor: Vincent G. Krenke