Abstract: An automated yarn creeling method and apparatus for the textile industry. Preferably, the present yarn creeling system is used in the carpet tufting industry to automate, ultimately, the intelligent transfer of packages of yarn from the shipping pallets to the bullhorns of a creeler. The apparatus preferably comprises a service arm assembly, a vertical support, a base support, and automated weighing and control systems.

Abstract: A substrate handling apparatus includes a transfer elevator and a process station disposed inside a load lock chamber. The process station includes a top module, a bottom module, and a seal ring which is disposed between the top module and the bottom module and is movable to open and close the process station. The transfer elevator has an upper station spaced above a lower station. A transfer device having a pair of transfer arms is used to transfer substrates between the transfer elevator and the process station. The transfer arms are movable toward one another to support a substrate and apart from one another to release the substrate. The transfer arms are mounted to rotate between the transfer elevator and the process station. When a substrate is being processed inside the process station, the transfer arms are disposed on opposite sides of the process station.