Gripper Includes Pivoted Jaw Patents (Class 414/226.02)
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Patent number: 11407108Abstract: A robot may include a base; a base link connected to the base; an arm link coupled to the base link; an arm connected to the arm link; a hand connected to the arm; a storage; and a controller. The base link and arm link move so that a center of a coupling shaft of the arm link and the arm moves in a line. When the robot is within a predetermined range of a latest coordinate, the robot moves to the return-to-origin position in a direction from the transfer direction, otherwise the controller calculates the transfer path based on past teaching, and determines if there is a path close to the latest coordinate. If there is path, the controller determines whether the hand section is outside of a safe area, and if so, pulls the hand to a safe area and then moves the robot to the return-to-origin position.Type: GrantFiled: November 9, 2018Date of Patent: August 9, 2022Assignee: NIDEC SANKYO CORPORATIONInventor: Tetsuya Inomata
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Patent number: 8948904Abstract: A work picking system according to embodiments includes a three-dimensional measuring unit, a hand, a calculating unit, a determining unit, and an instructing unit. The three-dimensional measuring unit measures a three-dimensional shape of a work that is a gripping target. The hand is provided on a terminal movable unit of a multi-axis robot and includes a mechanism that changes a distance between gripping claws and a mechanism that changes a tip end direction of the gripping claws. The determining unit determines a tip end direction of the gripping claws based on the attitude of the work calculated by the calculating unit and a direction of a rotation axis of the terminal movable unit.Type: GrantFiled: December 7, 2011Date of Patent: February 3, 2015Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Takuya Murayama, Jun Goto, Shinji Ogasawara
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Publication number: 20140196366Abstract: 1.Type: ApplicationFiled: June 8, 2012Publication date: July 17, 2014Applicant: NUPLANT PTY LTDInventor: Robert Dixon Teasdale
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Publication number: 20140112744Abstract: Devices and methods for handling workpieces, in particular workpieces in the form of processing products of a metal sheet processing operation, are described. The devices include one or more retention members that are movably supported by a retention member bearing and a transverse guide device. If the transverse guide device is moved relative to the retention member along a lifting axis out of a non-operative lifting position into an operative lifting position or out of an operative lifting position into a non-operative lifting position on a fixed retention member bearing, the retention member is thereby moved from a non-operative position into an operative position or out of an operative position into a non-operative position. In the operative position, the retention member can engage behind an edge of a workpiece, but cannot do so in the non-operative position.Type: ApplicationFiled: October 18, 2013Publication date: April 24, 2014Applicant: TRUMPF Sachsen GmbHInventors: Heiko Bauch, Christoph Protze
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Patent number: 8701862Abstract: A disk transportation device includes a pair of rotation arms that are rotatable respectively about a fulcrum shaft extending in the same direction as the axial direction of a center shaft of a disk-shaped recording medium in both sides thereof that pinch the transportation passage of the disk-shaped recording medium transported between a disk changer and a disk drive device; and four transportation rollers of which two at a time are rotatably supported on the pair of rotation arms respectively, wherein the four transportation rollers contact the outer peripheral surface of the disk-shaped recording medium respectively and the pair of rotation arms are rotated in opposite directions to each other in a state where one of the transportation rollers at a time is supported at the pair of the rotation arms respectively contact the outer peripheral surface of the disk-shaped recording medium.Type: GrantFiled: May 1, 2012Date of Patent: April 22, 2014Assignee: Sony CorporationInventors: Takeharu Takasawa, Takeshi Kubo, Naofumi Goto, Akira Suzuki
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Publication number: 20140037402Abstract: The invention relates to a tray sealer comprising a gripper system configured to tilt trays by means of a tray gripper so as to lift the trays off a collecting belt for conveying them into a sealing station.Type: ApplicationFiled: August 1, 2013Publication date: February 6, 2014Applicant: Multivac Sepp Haggenmuller GmbH & Co. KGInventors: Lars Ickert, Christoph Wagner
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Publication number: 20120089251Abstract: A system for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor calculates the location of the center and the notch of the wafer based on measurements by the sensor(s) and generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.Type: ApplicationFiled: September 12, 2011Publication date: April 12, 2012Applicant: BROOKS AUTOMATION, INC.Inventor: Matthew W. Coady
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Publication number: 20120034053Abstract: A handling machine for rails, arranged in line and immediately downstream of a rolling plant, which allows both to easily handle the rail for transferring it from the roller table to the thermal treatment zone, and to ensure an optimal gripping of the rail along its longitudinal extension, thus effectively contrasting its bending and variations while allowing a longitudinal movement of the rail caused by thermal shrinkage, thus avoiding damages both to the external surface of the rail and to the handlers. A rail handling process is also described, which optimizes moving, positioning along a roller table and maintaining the rail substantially rectilinear during the thermal treatment to which it is subjected.Type: ApplicationFiled: February 3, 2010Publication date: February 9, 2012Applicant: Danieli & C. Officne Meccanche S.P.A.Inventors: Alfredo Poloni, Marco Schreiber
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Publication number: 20110272867Abstract: A handling machine for handling rails, arranged in line immediately downstream of a rolling plant, which allows an optimal clamping of the rail along its longitudinal extension, thus effectively withstanding the deflection and its variations, while allowing a longitudinal movement of the rail caused by thermal shrinkage, thus avoiding damages both to the external surface of the rail and to the handlers. A process of handling the rail is also described, which optimizes moving, positioning along a roller table and maintaining the rail substantially rectilinear during the thermal treatment to which it is subjected.Type: ApplicationFiled: December 4, 2009Publication date: November 10, 2011Inventors: Alfredo Poloni, Marco Schreiber, Daniele Andreatta
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Patent number: 7972252Abstract: An ergonomic tool lifting machine and method particularly useful for manipulating a machine tool or another heavy object. In one embodiment of the invention, the machine tool is a large milling cutter. The ergonomic tool lifting machine generally includes an articulating arm attached at a fixed end to a vertical lift mechanism, and at a free end to a grasping device or tool holder adapted for gripping and retaining an object of interest. When the object is a milling cutter, the ergonomic tool lifting machine may be used to transfer the cutter between a stored position and an installed position in a milling machine. Consequently, the tool holder of this embodiment is preferably able to rotate between a pick-up/drop-off position and an installation/removal position associated with the cutter. In general, the ergonomic tool lift machine allows heavy loads to be accurately moved with very little effort required on the part of an operator.Type: GrantFiled: March 28, 2006Date of Patent: July 5, 2011Assignee: Honda Motor Co., Ltd.Inventor: Freedus McDermitt, Jr.
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Publication number: 20110150611Abstract: A machine for treatment and/or analysis of biological samples, including a hinged arm to which a clamp for gripping a first biological sample holder is fixed. The clamp including first and second arms able to move relative to each other along a gripping position between a first position of gripping the first biological sample holder, and a first position of releasing the biological sample holder. Each arm of the clamp includes a groove. When the first and second arms are in the first position of release, the first and second grooves are spaced away from each other along the gripping direction, and when the first and second arms are in the first gripping position, the first and second grooves are brought closer to each other along the gripping direction, so as to be able to receive lateral edges of the first biological sample holder, so as to grip it by squeezing the lateral edges along the gripping direction.Type: ApplicationFiled: January 5, 2009Publication date: June 23, 2011Inventors: Michel Philippon, Sébastien Bernay
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Publication number: 20110128371Abstract: Semiconductor wafer inspection device comprising a wager transport arm provided with at least one wafer support element, a wafer gripper, the gripper having two distant branches designed to take hold of the opposed edges of the wafer, the gripper being mounted so as to rotate on a shaft in order to be able to rotate the wafer between an approximately horizontal position and an approximately vertical position, and at least two inspection systems placed on one side of the wafer and on the other, in an approximately vertical position symmetrically with respect to the plane passing through the wafer.Type: ApplicationFiled: May 11, 2009Publication date: June 2, 2011Inventors: Philippe Gastaldo, François Berger, Cleonisse Serrecchia
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Publication number: 20110036688Abstract: A conveyor includes a track and a grip unit. The grip unit includes a main body having a slide groove that receives slidably the track, a push piece provided on the track at a predetermined position and having a pushing surface to face the slide groove, a push rod inserted movably into the slide groove to abut against the pushing surface, a resilient restoring element for biasing the push rod upwardly, two grip arms connected pivotally to the main body and disposed respectively on two opposite sides of the push rod, and two spring members each disposed between the main body and a respective grip arm to bias one grip arm toward the other grip arm so that the grip arms cooperate with each other to grip an object therebetween. The push rod is movable downwardly to push the object when the push rod abuts against the pushing surface.Type: ApplicationFiled: August 13, 2009Publication date: February 17, 2011Inventor: Yen-Yu Chen
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Publication number: 20100150688Abstract: A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading workpieces to/from the cassettes. The multi-joint industrial robot may include a hand part for holding a workpiece, an arm part supporting the hand part so as to make the hand part rotatable, and a link mechanism that supports an arm joint part, positioned at a base side of the arm part, so as to make the arm joint part rotatable.Type: ApplicationFiled: November 26, 2007Publication date: June 17, 2010Applicant: NIDEC SANKYO CORPORATIONInventors: Yasuyuki Kitahara, Shigeyuki Kaino
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Patent number: 7727454Abstract: The invention proposes a device (10) for transferring items (3) from an items (3) loading station (13) to an items (3) unloading station (14), which comprises: a group (18) of modules (19a-d) mounted such that they can move in a longitudinally direction, able to adopt a contracted configuration in which the modules (19a-d) are separated by a first spacing (pl), and a deployed configuration in which the modules (19a-d) are separated by a second spacing (F), means (34) of linking one module (19a) to another (19b), comprising a lever (38) mounted such that it is articulated on a first module (19b) and connected to a second module (19a), this lever (3) furthermore cooperating with a groove (46) having an intermediate section (46c) forming an angle with the direction of movement of the group (18) of modules (19a-d), and means (35, 36) of controlling the movement of the group (18). Application to the transfer of blanks from a heating station to a station for molding receptacles from blanks.Type: GrantFiled: June 15, 2007Date of Patent: June 1, 2010Assignee: Sidel ParticipationsInventors: Philippe Freire-Diaz, Sylvain Auvray
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Patent number: 7654786Abstract: A shuttle is disclosed in which a large-sized substrate is prevented from sagging under its weight or from slipping. The shuttle includes a body, support pins supporting sides of the substrate, and shuttle arms provided to sides of the body to rotate in an axial direction and move in a right-to-left direction. The support pins are coupled with the shuttle arms, respectively. A pair of center supports support center parts of sides of the substrate not supported by the support pins. The center supports are movably coupled to a main frame in a front-to-rear direction. A driving unit moves and rotates the shuttle arms in the right-to-left direction. The driving unit moves the center supports in the front-to-rear direction using the main frame. A vacuum instrument assembly is provided to each of the support pins to securely hold the substrate by a vacuum force.Type: GrantFiled: May 29, 2005Date of Patent: February 2, 2010Assignee: LG. Display Co., Ltd.Inventor: O Jun Kwon
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Patent number: 7651308Abstract: A carrier for a semiconductor device includes a body having an opening formed therein to receive the semiconductor device and a pair of rollers to hold the semiconductor device between the rollers in the opening.Type: GrantFiled: June 5, 2008Date of Patent: January 26, 2010Assignee: Intel CorporationInventor: John D. Ruth
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Patent number: 7551978Abstract: The item-carrying system comprises: a robot comprising: a gripping portion for gripping an item; external force detecting means for detecting an external force applied to the gripping portion; opening-degree detecting means for detecting an opening-degree of the gripping portion; autonomous movement means; and receiving/passing motion deciding means for deciding a motion of the robot in an item receiving/passing operation, wherein the receiving/passing motion deciding means comprises: means for determining to start receiving an item that causes the gripping portion to start a receiving motion if the external force detecting means has detected an external force not less than a first predetermined value, when the gripping portion is not gripping an item; and means for determining the completion of a receiving motion on the basis of at least one of an external force and an opening-degree during the receiving motion.Type: GrantFiled: December 13, 2005Date of Patent: June 23, 2009Assignee: Honda Motor Co., Ltd.Inventors: Taro Yokoyama, Kenichiro Sugiyama
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Patent number: 7478720Abstract: A workpiece changer for transfer of workpiece palettes between a storage arrangement arranged in front of a machining machine for such workpiece palettes and a workpiece table, possesses a gripper device for receiving and putting down workpiece palettes and a rotary drive for swiveling the gripper device about a vertical axis. A linear drive serves to shift the gripper means between a first position on the storage arrangement and a second position on the workpiece table. The storage arrangement possesses at least one change station for the transfer and acceptance of workpiece palettes by the gripper device, a conveyor apparatus being provided for the supply and removal of workpiece receiving station to and from the change station. Accordingly, satisfactory access is provided to the workpiece table during machining and workpiece changing operations may be performed at a high speed on any desired machining machines.Type: GrantFiled: July 7, 2005Date of Patent: January 20, 2009Assignee: Maschinenfabrik Berthold Hermle AGInventors: Franz-Xaver Bernhard, Tobias Schworer
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Publication number: 20080310942Abstract: A material handling system for engaging and transporting material. The material handling system includes a mouth and a hydraulic actuator for pivoting a tooth within the mouth. Once a material has been positioned within the mouth, the hydraulic piston actuates the tooth to secure the material within the mouth. The tooth is preferably configured and oriented to move into tighter engagement with the material as gravity or other forces attempt to remove the material from the mouth. The hydraulic piston allows an operator to release the tooth whenever desired. The material handling system includes a vehicle mounted boom coupled to the mouth so that material engaged by the mouth may be transported to another desired location.Type: ApplicationFiled: June 13, 2007Publication date: December 18, 2008Inventor: Brad Stroh
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Publication number: 20080247847Abstract: A unit and method are provided for conveying workpieces along a processing run, having at least one transport car (10), moving along the processing run in a conveying direction (FR) and a rotating shaft (20), mounted on the transport car (10), close to a first of the ends thereof, to rotate about the axis thereof at right angles to the conveying direction (FR) and on which a mounting (40) for the workpiece to be processed is provided. The rotating shaft (20) is only mounted close to the first end thereof on the transport car (10) and may thus be driven in the conveying direction (FR), the second free end thereof being passively transported along in the conveying direction (FR). It is thus possible to pivot the rotating shaft (20) in a plane running at right angles to the conveying direction, in particular, to permit a space saving return.Type: ApplicationFiled: April 18, 2005Publication date: October 9, 2008Inventors: Herbert Muller, Jurgen Winkler, Klaus Krombholz
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Publication number: 20080101895Abstract: A gripper assembly includes at least one movable gripper jaw and a sensor member coupled for movement with the at least one gripper jaw. The sensor member includes a slot. A sensor is located at least partially within the slot and includes at least one inductor for inductively detecting a proximity of the sensor member.Type: ApplicationFiled: November 1, 2007Publication date: May 1, 2008Inventors: Mark Holcomb, Conrad Waldorf, John Charlton
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Patent number: 7364028Abstract: Glass substrates are transported to a plurality of processing devices to be processed. Certain of the processing devices have associated storage shelf for storing glass substrates and a transfer device. The transfer device is adapted to move the glass substrate between the processing device and the storage shelf and between the storage shelf and the transporting device.Type: GrantFiled: November 15, 2004Date of Patent: April 29, 2008Assignee: Daifuku Co., Ltd.Inventors: Susumu Moriya, Katsuhiko Ueda
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Patent number: 7244093Abstract: An object handling apparatus capable of securely holding an object and precisely transferring the held object from a first place to a second place without need of a specific jig for positioning the object on a pallet. A position of an object supplied to the first place is detected by a first visual sensor to obtain a compensation amount for compensating a position displacement of the supplied object. The object is held by a robot hand having position/orientation compensated using the compensation amount and position/orientation of the object held by the robot hand relative to the robot hand is detected by a second visual sensor. A displacement of the position/orientation of the object held by the robot hand from a reference position/orientation is compensated based on the detected position/orientation of the object on the robot hand, so that the object held by the robot hand is precisely moved to have a predetermined position/orientation to be transferred to the second place.Type: GrantFiled: July 28, 2003Date of Patent: July 17, 2007Assignee: Fanuc Ltd.Inventors: Atsushi Watanabe, Kazuhisa Otsuka, Masaru Oda, Tadanori Suzuki
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Patent number: 7179043Abstract: A manipulating arrangement having a horizontal portal on which a slide is horizontally traversable, an arm being pivotably mounted on the slide about a pivot axis which runs parallel to the portal, and a gripper for at least one of workpieces and tools being arranged on the end of the arm. The slide has an elongated support, on which a further slide is mounted in a vertically traversable manner, and the arm is pivotably mounted on the further slide.Type: GrantFiled: May 26, 2004Date of Patent: February 20, 2007Assignee: Felsomat GmbH & Co., KGInventor: Helmut F. Jäger
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Patent number: 7155813Abstract: A micro device using assembly system for feeding, programming, and placing micro devices on circuit boards includes a robotic handling system capable of picking up and placing the micro devices on the circuit boards on a conveyor system. A control system controls the conveyor system and the robotic handling system. An input feeder provides the micro devices and a programming system is capable of programming a plurality of micro devices in sockets which are in line parallel with the input feeder. The input feeder responds to communication with the control system to feed the unprogrammed micro devices while the programming system programs the micro devices and communicates to the control system. The robotic handling system responds to communication of the programming system with the control system to pickup and places the programmed micro devices on the circuit boards at high speed.Type: GrantFiled: March 10, 2004Date of Patent: January 2, 2007Assignee: Data I/O CorporationInventor: Lev M. Bolotin
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Patent number: 6988879Abstract: The invention provides an apparatus and method for reducing warpage of a substrate undergoing a molding process, comprising a conveying device for transporting the substrate during molding and pressure means adapted to act on the substrate whereby to maintain the flatness of the substrate. Using the invention, it is possible to provide an apparatus and method which are usable with conventional substrates and which reduce reliance on material formulation to maintain flatness of the substrate.Type: GrantFiled: October 18, 2002Date of Patent: January 24, 2006Assignee: ASM Technology Singapore PTE LTDInventors: Shu Chuen Ho, Teng Hock Kuah, Kock Hien Eugene Wee, Jian Wu
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Patent number: 6919001Abstract: There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.Type: GrantFiled: February 10, 2003Date of Patent: July 19, 2005Assignee: Intevac, Inc.Inventors: Kevin P. Fairbairn, Terry Bluck, Craig Marion, Robert E. Weiss
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Patent number: 6843357Abstract: A two-axis robot includes a vertical tubular post mounted for rotation about its vertical axis, with a vertically slidable shaft extending through the post. An arm on the upper end of the post projects radially outward and has a gripper assembly thereon with operable jaws for gripping a specimen tube. The robot is positioned between two reference locations, for retrieving a specimen tube from one reference location and transferring it to the other. The reference locations are located along a circle circumscribed by a central vertical axis of the gripper jaws as they swing about the rotational axis of the post.Type: GrantFiled: July 25, 2003Date of Patent: January 18, 2005Assignee: Cardinal Health 301, Inc.Inventors: Thomas L. Bybee, Chris Harvey, Sheri Kime, Dave Murphy, Greg Rothman, Steve Wright
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Patent number: 6818108Abstract: A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.Type: GrantFiled: July 17, 2001Date of Patent: November 16, 2004Assignee: Unaxis Balzers AktiengesellschaftInventor: Roman Schertler
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Patent number: 6772493Abstract: A workpiece changing system capable of automatically changing a heavy workpiece using a robot. A jig for attaching a workpiece thereto is mounted on a jig mounting device. The jig mounting device comprises a jig mounting unit having a rotary member and a swing member. The rotary member rotates the jig and the workpiece on the jig and hold them at a desired rotary position. The tilting member swings around an axis to tilt the jig and the workpiece on the jig and hold them at a desired tilting position. As the jig and the workpiece on the jig can take a suitable orientation or posture for being handled by the handling robot, the handling robot can hold a heavy workpiece without exerting excessive load on the robot wrist.Type: GrantFiled: June 22, 2001Date of Patent: August 10, 2004Assignee: Fanuc LtdInventors: Koji Yamanashi, Takashi Fujii
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Patent number: 6711457Abstract: Working machinery for working an elongated work comprises a work stocker configured to store a plurality of works, a work carrying-in machine configured to carry in the works from the work stocker to a working area, a positioning device configured to position the work in the working area, a work clamper provided in the working area and configured to clamp the work in a vertical direction, a plurality of working machines arranged on both sides of the working clamper to work the elongated work from both sides of the work, a plurality of driving devices configured to move the working machines respectively in a longitudinal direction, a controller configured to control the working machines and the driving device, and a work carrying-out machine configured to carry out the work which is completed in working from the working area.Type: GrantFiled: April 26, 2001Date of Patent: March 23, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Satoru Yanaka, Katsuhiro Sato, Yasuo Nagase, Hiroshi Noguchi, Kazuto Sasaki, Hiromichi Nakabayashi, Syouji Inagawa, Masahiro Kasiwa, Hitoshi Furugori, Kouji Oonishi, Nobuhiro Abe
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Patent number: 6652262Abstract: An injection mold apparatus for the injection molding of plastic articles. The mold apparatus has a plurality of take-off plates. Each of the take-off plates comprises a plurality of article acceptors. The take-off plates are movable between positions wherein the article acceptors can accept molded articles from the mold and positions wherein the molded articles are moved away from the mold. In a preferred embodiment, each of the article acceptors consists of opposed half-cylinders which can be separated to accept and discharge the molded articles. Also in preferred embodiments, each of the article acceptors is internally cooled so as to be able to cool each article acceptor after it has been moved away from the mold.Type: GrantFiled: July 24, 2001Date of Patent: November 25, 2003Assignee: Caco Pacific CorporationInventor: Charles R. Kroeger
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Publication number: 20020085901Abstract: Component placement machine with a frame (1) and a transport device (2) for transporting printed circuit boards (3) in an X-direction, which transport device (2) comprises at least one transport beam (7, 8) which is movable in the X-direction in a reciprocating manner, and which transport device (2) is provided with first clamping means (9) which are fixedly connected to the transport beam (7, 8) in the X-direction for clamping-in of at least one side of the printed circuit boards lying in the X-direction, while the machine is further provided with second clamping means (13) which are connected to the frame (1) and which may clamp at least one side of the printed circuit boards, such that the first and second clamping means (9, 13) are brought alternately into their active clamping positions, the first clamping means being active during the movement of the circuit boards in the positive X-direction and the second clamping means being active during the return movement of the transport device in the negative X-Type: ApplicationFiled: November 30, 2001Publication date: July 4, 2002Inventor: Johannes Albertus Maria Van Deursen
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Patent number: 6379221Abstract: A method and an apparatus for automatically replacing a used polishing pad in a chemical mechanical polishing system are described. A controller places a mechanical device against the used polishing pad while the pad is on the polishing platen and activates a pad chucking mechanism that affixes the used pad to the mechanical device. The controller then moves the mechanical device and the pad toward a used pad receptacle, where the pad chucking mechanism is deactivated to release the used pad into the receptacle. The controller then places the mechanical device against a clean polishing pad in a clean pad dispenser and reactivates the pad chucking mechanism to affix the clean pad to the mechanical device. The mechanical device and the clean pad are moved toward the platen, where the pad chucking mechanism is deactivated to release the clean polishing pad onto the platen.Type: GrantFiled: December 31, 1996Date of Patent: April 30, 2002Assignee: Applied Materials, Inc.Inventors: Daniel F. Kennedy, Victor Belitsky, Arul Shanmugasundram
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Patent number: 6190103Abstract: A substrate handling apparatus includes a transfer elevator and a process station disposed inside a load lock chamber. The process station includes a top module, a bottom module, and a seal ring which is disposed between the top module and the bottom module and is movable to open and close the process station. The transfer elevator has an upper station spaced above a lower station. A transfer device having a pair of transfer arms is used to transfer substrates between the transfer elevator and the process station. The transfer arms are movable toward one another to support a substrate and apart from one another to release the substrate. The transfer arms are mounted to rotate between the transfer elevator and the process station. When a substrate is being processed inside the process station, the transfer arms are disposed on opposite sides of the process station.Type: GrantFiled: March 31, 1999Date of Patent: February 20, 2001Assignee: GaSonics International CorporationInventors: Shmuel Erez, Syed S. Basha, Art Hajjarian
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Patent number: 6170641Abstract: In an apparatus for transporting thin boards, in particular coated printed circuit boards, comprising rows of spaced-apart grippers (2) which lie opposite one another and are arranged on a rod (3), in order to prevent the thin boards from sagging when transported, tension is applied to a rod (3), at least on one side of the printed circuit board (1), by an elastic device (15, 20), in order to tension the printed circuit board which has been gripped.Type: GrantFiled: May 3, 1999Date of Patent: January 9, 2001Assignee: Vantico, Inc.Inventor: Kaspar Kuster